JP2007078687A - 位置測定装置 - Google Patents
位置測定装置 Download PDFInfo
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- JP2007078687A JP2007078687A JP2006243505A JP2006243505A JP2007078687A JP 2007078687 A JP2007078687 A JP 2007078687A JP 2006243505 A JP2006243505 A JP 2006243505A JP 2006243505 A JP2006243505 A JP 2006243505A JP 2007078687 A JP2007078687 A JP 2007078687A
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- 230000003287 optical effect Effects 0.000 claims description 43
- 238000005259 measurement Methods 0.000 claims description 30
- 230000002452 interceptive effect Effects 0.000 claims description 9
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- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000013598 vector Substances 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 12
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- 238000010586 diagram Methods 0.000 description 6
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- 238000004458 analytical method Methods 0.000 description 3
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- 230000008901 benefit Effects 0.000 description 2
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- 239000000523 sample Substances 0.000 description 2
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- 238000006073 displacement reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/30—Grating as beam-splitter
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
【解決手段】この装置は、両物体の一方と接続された測定尺と、両物体の他方と接続された、測定尺を走査するための少なくとも一つの走査システムとを有する。この走査システムは、この走査システムによって、物体の少なくとも一つの横の移動方向と垂直の移動方向に沿っての位置数値を同時に求めることが可能であるように構成されている。
【選択図】 図3
Description
SP:位置測定装置の信号周期
ここで、感度ベクトル
dA1:第一の走査格子の格子定数
dA2:第二の走査格子の格子定数
dM :測定尺の格子定数
この実施構成に関する第一の一次的な位置数値ζ1 の感度ベクトルは、図6に図示されている。それに対応する第二の一次的な位置数値の感度ベクトルは、構造的な制限にもとづき、又もやそれに対して鏡面対称の方向を向いている。
2 回折格子
3 測定尺
4 +1次の回折次数の光束
4’ −1次の回折次数の光束
5,6 部分光束
7 走査板
8,9 第一の偏向構造
8’,9’ 偏向格子
10 測定尺
10,11 部分光束
12,13 ミラー
14,15 第二の偏向構造
16,17 λ/4位相板
18,19 部分光束
20 光束
21 回折格子
20.1,20.2,20.3 走査システム
22a,22b,22c,22d,22e,22f 光線
23a,23b,23c 偏光子
24a,24b,24c 検出器
30 測定尺
31,32,33,34,32’,33’,34’ 部分光束
35,35’ 第二の走査格子(混合格子)
36a,36b,36c 光束
37a,37b,37c 光検出器
70 走査板
110 光束
130 第一の回折格子
X,Y,Z 物体の移動方向
Z0 公称間隔
Claims (9)
- 二つの互いに相対的に動く物体の位置を検出するための位置測定装置であって、
両物体の一方と接続された測定尺(10,3,30)と、
両物体の他方と接続された、測定尺(10,3,30)を走査するための少なくとも一つの走査システム(20.1,20.2,20.3)であって、この走査システム(20.1,20.2,20.3)は、この走査システムによって、物体の少なくとも一つの横の移動方向(X,Y)と垂直の移動方向(Z)に沿った位置数値を同時に求めることが可能であるように構成されている走査システムと、
を備えた位置測定装置。 - 各走査光路の両部分光束が、横の移動方向(X)に対して垂直な面(YZ)に関して非対称に延びており、
第二の光路が、横の移動方向(X)に対して垂直な面(YZ)面に関して、第一の光路に対して鏡面対称に延びており、
各走査光路の両部分光束が、測定尺(3,10,30)において、異なる回折次数の回折を受ける、
請求項2に記載の位置測定装置。 - 両グループの位相のずれた信号の補間から、横方向(X)と垂直方向(Z)の位置数値を検出することを可能とする一次的な位置数値を求めるための評価手段が更に配備されている請求項3に記載の位置測定装置。
- 横方向(X)と垂直方向(Z)の位置数値を検出することを可能とする一次的な位置数値の場合によっては起こる補間誤差を補償するための補償手段が更に配備されている請求項4に記載の位置測定装置。
- 当該の各走査光路には、干渉し合う部分光束の各々に対して、同じ光路長を保証するための光学的な手段が配置されている請求項2に記載の位置測定装置。
- 各走査光路の両部分光束が、測定尺(3,10,30)において、+1次又は−1次の回折次数の回折を受ける請求項3に記載の位置測定装置。
- 測定尺(3,10,30)が二次元の交差格子を有し、
互いに同一線上に無い位置に置かれた三つの走査システム(20.1,20.2,20.3)が配備されており、これら三つの走査システム(20.1,20.2,20.3)の位置数値の組み合わせから、六つの空間的な自由度のすべてにおける両物体の動きを検出する請求項1から7までのいずれか一つに記載の位置測定装置。 - 両物体が、半導体製造装置の構成部品である請求項8に記載の位置測定装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005043569A DE102005043569A1 (de) | 2005-09-12 | 2005-09-12 | Positionsmesseinrichtung |
DE102005043569.6 | 2005-09-12 |
Publications (2)
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JP2007078687A true JP2007078687A (ja) | 2007-03-29 |
JP5142502B2 JP5142502B2 (ja) | 2013-02-13 |
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JP2006243505A Active JP5142502B2 (ja) | 2005-09-12 | 2006-09-08 | 位置測定装置 |
Country Status (6)
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US (1) | US7573581B2 (ja) |
EP (2) | EP1762828B1 (ja) |
JP (1) | JP5142502B2 (ja) |
CN (1) | CN1932435B (ja) |
DE (1) | DE102005043569A1 (ja) |
ES (2) | ES2525203T3 (ja) |
Cited By (9)
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JP2009515177A (ja) * | 2005-11-09 | 2009-04-09 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 位置測定システム |
JP2009271062A (ja) * | 2008-04-18 | 2009-11-19 | Asml Netherlands Bv | ステージシステムキャリブレーション方法、ステージシステム、およびそのようなステージシステムを備えるリソグラフィ装置 |
JP2012103245A (ja) * | 2010-11-05 | 2012-05-31 | Dr Johannes Heidenhain Gmbh | 光学式位置測定装置 |
JP2012242389A (ja) * | 2011-05-20 | 2012-12-10 | Dr Johannes Heidenhain Gmbh | 位置測定装置 |
JP2014122901A (ja) * | 2012-12-20 | 2014-07-03 | Dr Johannes Heidenhain Gmbh | 光学的位置測定装置 |
KR20150040753A (ko) * | 2013-10-07 | 2015-04-15 | 덕터 요한네스 하이덴하인 게엠베하 | 워크피스에 대하여 도구의 위치를 결정하는 장치 |
JP2015075486A (ja) * | 2013-10-07 | 2015-04-20 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mitbeschrankter Haftung | 光学式位置測定装置 |
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JP2009515177A (ja) * | 2005-11-09 | 2009-04-09 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 位置測定システム |
JP2009271062A (ja) * | 2008-04-18 | 2009-11-19 | Asml Netherlands Bv | ステージシステムキャリブレーション方法、ステージシステム、およびそのようなステージシステムを備えるリソグラフィ装置 |
US8446567B2 (en) | 2008-04-18 | 2013-05-21 | Asml Netherlands B.V. | Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage system |
JP2012103245A (ja) * | 2010-11-05 | 2012-05-31 | Dr Johannes Heidenhain Gmbh | 光学式位置測定装置 |
JP2012242389A (ja) * | 2011-05-20 | 2012-12-10 | Dr Johannes Heidenhain Gmbh | 位置測定装置 |
JP2014122901A (ja) * | 2012-12-20 | 2014-07-03 | Dr Johannes Heidenhain Gmbh | 光学的位置測定装置 |
JP2016518595A (ja) * | 2013-04-15 | 2016-06-23 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung | 干渉式間隔測定装置 |
KR20150040753A (ko) * | 2013-10-07 | 2015-04-15 | 덕터 요한네스 하이덴하인 게엠베하 | 워크피스에 대하여 도구의 위치를 결정하는 장치 |
JP2015075487A (ja) * | 2013-10-07 | 2015-04-20 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mitbeschrankter Haftung | 加工部品に対して工具を位置決めするための装置 |
JP2015075486A (ja) * | 2013-10-07 | 2015-04-20 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mitbeschrankter Haftung | 光学式位置測定装置 |
KR102221482B1 (ko) | 2013-10-07 | 2021-03-03 | 덕터 요한네스 하이덴하인 게엠베하 | 워크피스에 대하여 도구의 위치를 결정하는 장치 |
JP2016138879A (ja) * | 2015-01-26 | 2016-08-04 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung | 位置測定装置 |
Also Published As
Publication number | Publication date |
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EP1762828A3 (de) | 2013-02-27 |
EP2660566B1 (de) | 2016-11-09 |
EP1762828B1 (de) | 2014-11-19 |
US7573581B2 (en) | 2009-08-11 |
ES2525203T3 (es) | 2014-12-18 |
US20070058173A1 (en) | 2007-03-15 |
CN1932435A (zh) | 2007-03-21 |
CN1932435B (zh) | 2010-09-01 |
EP1762828A2 (de) | 2007-03-14 |
ES2606318T3 (es) | 2017-03-23 |
EP2660566A3 (de) | 2014-02-19 |
EP2660566A2 (de) | 2013-11-06 |
JP5142502B2 (ja) | 2013-02-13 |
DE102005043569A1 (de) | 2007-03-22 |
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