JP2007047167A5 - - Google Patents
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- Publication number
- JP2007047167A5 JP2007047167A5 JP2006216269A JP2006216269A JP2007047167A5 JP 2007047167 A5 JP2007047167 A5 JP 2007047167A5 JP 2006216269 A JP2006216269 A JP 2006216269A JP 2006216269 A JP2006216269 A JP 2006216269A JP 2007047167 A5 JP2007047167 A5 JP 2007047167A5
- Authority
- JP
- Japan
- Prior art keywords
- mass
- sides
- central region
- vibrating
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 7
- 238000005452 bending Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US70660605P | 2005-08-08 | 2005-08-08 | |
| US60/706,606 | 2005-08-08 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007047167A JP2007047167A (ja) | 2007-02-22 |
| JP2007047167A5 true JP2007047167A5 (enExample) | 2009-07-16 |
| JP5599128B2 JP5599128B2 (ja) | 2014-10-01 |
Family
ID=37340857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006216269A Expired - Fee Related JP5599128B2 (ja) | 2005-08-08 | 2006-08-08 | 振動梁の節点位置修正方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7392702B2 (enExample) |
| EP (1) | EP1752732A3 (enExample) |
| JP (1) | JP5599128B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7739896B2 (en) * | 2007-03-15 | 2010-06-22 | Northrop Grumman Guidance And Electronics Company, Inc. | Self-calibration of scale factor for dual resonator class II coriolis vibratory gyros |
| US8011246B2 (en) * | 2008-09-22 | 2011-09-06 | Northrop Grumman Guidance And Electronics Company, Inc. | Apparatus and method for self-calibration of coriolis vibratory gyroscope |
| US20160349053A1 (en) | 2015-06-01 | 2016-12-01 | Analog Devices, Inc. | Micromachined Resonating Beam Gyroscopes |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2558263B1 (fr) * | 1984-01-12 | 1986-04-25 | Commissariat Energie Atomique | Accelerometre directif et son procede de fabrication par microlithographie |
| JPS62185117A (ja) * | 1986-02-10 | 1987-08-13 | Yazaki Corp | 振動ジヤイロ |
| JPH082567Y2 (ja) * | 1987-07-17 | 1996-01-29 | 日本電気ホームエレクトロニクス株式会社 | 振動ジャイロ |
| US5113698A (en) * | 1990-02-26 | 1992-05-19 | Sundstrand Data Control, Inc. | Vibrating beam transducer drive system |
| JPH05288552A (ja) * | 1992-04-08 | 1993-11-02 | Showa Electric Wire & Cable Co Ltd | 振動ジャイロ |
| JP2003014465A (ja) * | 1993-07-22 | 2003-01-15 | Alps Electric Co Ltd | 振動型ジャイロスコープ |
| GB2292609B (en) * | 1994-08-24 | 1998-04-15 | British Aerospace | Method for matching vibration mode frequencies on a vibrating structure |
| JP3326989B2 (ja) * | 1994-08-25 | 2002-09-24 | 株式会社豊田中央研究所 | 振動子とその調整方法および角速度センサ |
| JPH08122078A (ja) * | 1994-10-20 | 1996-05-17 | Japan Aviation Electron Ind Ltd | ジャイロの固定構造 |
| JPH08159775A (ja) * | 1994-12-06 | 1996-06-21 | Murata Mfg Co Ltd | 振動ジャイロ |
| JPH08261765A (ja) * | 1995-03-20 | 1996-10-11 | Taiyo Yuden Co Ltd | 圧電振動ジャイロ用振動子及びそのトリミング方法 |
| JPH09250931A (ja) * | 1996-03-14 | 1997-09-22 | Tdk Corp | 音片形振動ジャイロ |
| JPH1019577A (ja) * | 1996-07-02 | 1998-01-23 | Tokin Corp | 角速度センサ |
| JPH1054726A (ja) * | 1996-08-08 | 1998-02-24 | Murata Mfg Co Ltd | 振動ジャイロおよびその製造方法 |
| JPH10206273A (ja) * | 1997-01-21 | 1998-08-07 | Toyota Motor Corp | 角速度センサの気密性確認方法及び装置 |
| JP3285140B2 (ja) * | 1997-09-04 | 2002-05-27 | 株式会社村田製作所 | 振動ジャイロの調整方法 |
| JPH1194557A (ja) * | 1997-09-12 | 1999-04-09 | Murata Mfg Co Ltd | 振動ジャイロ |
| JP3456445B2 (ja) * | 1999-05-17 | 2003-10-14 | 株式会社村田製作所 | センサ装置 |
| JP2001004380A (ja) * | 1999-06-22 | 2001-01-12 | Sony Corp | 角速度センサー |
| US6262520B1 (en) * | 1999-09-15 | 2001-07-17 | Bei Technologies, Inc. | Inertial rate sensor tuning fork |
| JP4668441B2 (ja) * | 2001-03-22 | 2011-04-13 | シチズンホールディングス株式会社 | 振動ジャイロ |
| JP2002350138A (ja) * | 2001-05-28 | 2002-12-04 | Wacoh Corp | 加速度と角速度との双方を検出する装置 |
| US6707351B2 (en) * | 2002-03-27 | 2004-03-16 | Motorola, Inc. | Tunable MEMS resonator and method for tuning |
| JP2004354061A (ja) * | 2003-05-27 | 2004-12-16 | Matsushita Electric Works Ltd | 角速度センサおよび角速度検出方法 |
| JP2005106481A (ja) * | 2003-09-26 | 2005-04-21 | Seiko Epson Corp | 圧電振動ジャイロ素子及び圧電振動ジャイロセンサ |
-
2006
- 2006-08-07 US US11/499,956 patent/US7392702B2/en active Active
- 2006-08-08 JP JP2006216269A patent/JP5599128B2/ja not_active Expired - Fee Related
- 2006-08-08 EP EP06254148A patent/EP1752732A3/en not_active Withdrawn
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