JP2007043054A5 - - Google Patents
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- Publication number
- JP2007043054A5 JP2007043054A5 JP2005378321A JP2005378321A JP2007043054A5 JP 2007043054 A5 JP2007043054 A5 JP 2007043054A5 JP 2005378321 A JP2005378321 A JP 2005378321A JP 2005378321 A JP2005378321 A JP 2005378321A JP 2007043054 A5 JP2007043054 A5 JP 2007043054A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- film
- piezoelectric element
- manufacturing
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000010408 film Substances 0.000 claims 38
- 238000004519 manufacturing process Methods 0.000 claims 20
- 238000000034 method Methods 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 7
- 239000010409 thin film Substances 0.000 claims 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 5
- 238000000059 patterning Methods 0.000 claims 5
- 230000010287 polarization Effects 0.000 claims 5
- 229910052719 titanium Inorganic materials 0.000 claims 5
- 239000010936 titanium Substances 0.000 claims 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- 238000002425 crystallisation Methods 0.000 claims 2
- 230000008025 crystallization Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 229910001882 dioxygen Inorganic materials 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical group [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005378321A JP2007043054A (ja) | 2005-03-04 | 2005-12-28 | 圧電素子及びその製造方法 |
| US11/367,996 US7583012B2 (en) | 2005-03-04 | 2006-03-03 | Piezoelectric element and method for manufacturing piezoelectric element |
| KR20060020584A KR20060096373A (ko) | 2005-03-04 | 2006-03-03 | 압전 소자 및 그 제조 방법 |
| EP20060004396 EP1699092A3 (en) | 2005-03-04 | 2006-03-03 | Piezoelectric element and method for manufacturing piezoelectric element |
| US12/123,109 US20080222865A1 (en) | 2005-03-04 | 2008-05-19 | Piezoelectric element and method for manuacturing piezoelectric element |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005061694 | 2005-03-04 | ||
| JP2005061695 | 2005-03-04 | ||
| JP2005061696 | 2005-03-04 | ||
| JP2005190234 | 2005-06-29 | ||
| JP2005378321A JP2007043054A (ja) | 2005-03-04 | 2005-12-28 | 圧電素子及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007043054A JP2007043054A (ja) | 2007-02-15 |
| JP2007043054A5 true JP2007043054A5 (https=) | 2009-02-19 |
Family
ID=36599295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005378321A Abandoned JP2007043054A (ja) | 2005-03-04 | 2005-12-28 | 圧電素子及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US7583012B2 (https=) |
| EP (1) | EP1699092A3 (https=) |
| JP (1) | JP2007043054A (https=) |
| KR (1) | KR20060096373A (https=) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5037819B2 (ja) * | 2005-03-04 | 2012-10-03 | ソニー株式会社 | 電子機器 |
| JP2006341956A (ja) * | 2005-06-09 | 2006-12-21 | Otis Elevator Co | エレベータシステム |
| JPWO2007055133A1 (ja) * | 2005-11-08 | 2009-04-30 | パナソニック株式会社 | 角速度センサおよびその製造方法 |
| US7696676B2 (en) * | 2006-12-18 | 2010-04-13 | Lockheed Martin Corporation | Piezoelectric composite apparatus and related methods |
| JP5288530B2 (ja) * | 2007-03-30 | 2013-09-11 | 富士フイルム株式会社 | 圧電素子製造方法及び液体吐出ヘッド製造方法 |
| US7915794B2 (en) * | 2007-11-15 | 2011-03-29 | Sony Corporation | Piezoelectric device having a tension stress, and angular velocity sensor |
| KR100975010B1 (ko) * | 2008-02-29 | 2010-08-09 | 성균관대학교산학협력단 | 다중 크기 압전 마이크로 칸티레버 공진자 어레이를 이용한 물리센서 및 그 제작방법 |
| JP5410686B2 (ja) * | 2008-03-21 | 2014-02-05 | 富士フイルム株式会社 | 圧電体膜の製造方法、成膜装置および圧電体膜 |
| FR2932192B1 (fr) * | 2008-06-09 | 2011-01-21 | Sagem Defense Securite | Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu |
| US9035253B2 (en) | 2008-06-27 | 2015-05-19 | Panasonic Intellectual Property Managment Co., Ltd. | Infrared sensor element |
| CN102077376B (zh) * | 2008-06-27 | 2015-04-22 | 松下电器产业株式会社 | 压电体元件和其制造方法 |
| JP4640459B2 (ja) * | 2008-07-04 | 2011-03-02 | ソニー株式会社 | 角速度センサ |
| JP4582235B2 (ja) * | 2008-10-31 | 2010-11-17 | 株式会社村田製作所 | 圧電デバイスの製造方法 |
| JP2010135748A (ja) * | 2008-11-04 | 2010-06-17 | Seiko Epson Corp | 圧電素子及びその製造方法、液体噴射ヘッド及びその製造方法、並びに液体噴射装置 |
| JP5581781B2 (ja) * | 2010-04-06 | 2014-09-03 | セイコーエプソン株式会社 | 圧電アクチュエーターの製造方法 |
| KR101677297B1 (ko) | 2010-12-21 | 2016-11-29 | 한국전자통신연구원 | 압전 마이크로 에너지 수확기 및 이의 제조 방법 |
| JP6044101B2 (ja) | 2012-04-10 | 2016-12-14 | セイコーエプソン株式会社 | センサーデバイス、センサーデバイスの製造方法および電子機器 |
| JP6341446B2 (ja) * | 2014-03-13 | 2018-06-13 | 株式会社リコー | 電気機械変換素子の製造方法、電気機械変換素子、液滴吐出ヘッド、液滴吐出装置及び画像形成装置 |
| JP7421178B2 (ja) * | 2020-02-20 | 2024-01-24 | 国立大学法人大阪大学 | 振動検出素子およびその製造方法 |
| WO2022174440A1 (zh) * | 2021-02-22 | 2022-08-25 | 京东方科技集团股份有限公司 | 压电元件、压电振动器及其制作和驱动方法、电子设备 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5500988A (en) * | 1990-11-20 | 1996-03-26 | Spectra, Inc. | Method of making a perovskite thin-film ink jet transducer |
| US5802684A (en) * | 1993-09-14 | 1998-09-08 | Nikon Corporation | Process for producing a vibration angular-velocity sensor |
| JP4122564B2 (ja) * | 1998-04-24 | 2008-07-23 | セイコーエプソン株式会社 | 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法 |
| JP2000357826A (ja) * | 1999-04-13 | 2000-12-26 | Seiko Epson Corp | 圧電体素子の製造方法、圧電体素子、インクジェット式記録ヘッドおよびプリンタ |
| US6362558B1 (en) * | 1999-12-24 | 2002-03-26 | Kansai Research Institute | Piezoelectric element, process for producing the same and ink jet recording head |
| US20070046153A1 (en) * | 2005-08-23 | 2007-03-01 | Canon Kabushiki Kaisha | Piezoelectric substrate, piezoelectric element, liquid discharge head and liquid discharge apparatus |
| US7456548B2 (en) * | 2006-05-09 | 2008-11-25 | Canon Kabushiki Kaisha | Piezoelectric element, piezoelectric actuator, and ink jet recording head |
-
2005
- 2005-12-28 JP JP2005378321A patent/JP2007043054A/ja not_active Abandoned
-
2006
- 2006-03-03 KR KR20060020584A patent/KR20060096373A/ko not_active Withdrawn
- 2006-03-03 US US11/367,996 patent/US7583012B2/en not_active Expired - Fee Related
- 2006-03-03 EP EP20060004396 patent/EP1699092A3/en not_active Withdrawn
-
2008
- 2008-05-19 US US12/123,109 patent/US20080222865A1/en not_active Abandoned
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