JP2007033327A - 欠陥検出方法及び装置 - Google Patents

欠陥検出方法及び装置 Download PDF

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Publication number
JP2007033327A
JP2007033327A JP2005219185A JP2005219185A JP2007033327A JP 2007033327 A JP2007033327 A JP 2007033327A JP 2005219185 A JP2005219185 A JP 2005219185A JP 2005219185 A JP2005219185 A JP 2005219185A JP 2007033327 A JP2007033327 A JP 2007033327A
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Japan
Prior art keywords
plate
light
defect detection
defect
flaw
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JP2005219185A
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Japanese (ja)
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JP2007033327A5 (https=
Inventor
Takayuki Hatanaka
孝行 畑中
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Canon Chemicals Inc
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Canon Chemicals Inc
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Priority to JP2005219185A priority Critical patent/JP2007033327A/ja
Publication of JP2007033327A publication Critical patent/JP2007033327A/ja
Publication of JP2007033327A5 publication Critical patent/JP2007033327A5/ja
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JP2005219185A 2005-07-28 2005-07-28 欠陥検出方法及び装置 Pending JP2007033327A (ja)

Priority Applications (1)

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JP2005219185A JP2007033327A (ja) 2005-07-28 2005-07-28 欠陥検出方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005219185A JP2007033327A (ja) 2005-07-28 2005-07-28 欠陥検出方法及び装置

Publications (2)

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JP2007033327A true JP2007033327A (ja) 2007-02-08
JP2007033327A5 JP2007033327A5 (https=) 2008-06-26

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JP2005219185A Pending JP2007033327A (ja) 2005-07-28 2005-07-28 欠陥検出方法及び装置

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010043895A (ja) * 2008-08-11 2010-02-25 Canon Chemicals Inc 欠陥検出装置及び欠陥検出方法
CN118392877A (zh) * 2024-06-26 2024-07-26 深圳市诚誉兴光电有限公司 一种扩散板缺陷检测装置及方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06235624A (ja) * 1992-12-15 1994-08-23 Hitachi Ltd 透明シートの検査方法とその装置
JPH08327561A (ja) * 1995-06-05 1996-12-13 Nippon Sheet Glass Co Ltd 連続シート状物体の欠点検査装置
JP2001041719A (ja) * 1999-07-27 2001-02-16 Canon Inc 透明材の検査装置及び検査方法並びに記憶媒体
JP2001119689A (ja) * 1999-10-14 2001-04-27 Olympus Optical Co Ltd 電子内視鏡装置
JP2003247952A (ja) * 1993-10-25 2003-09-05 Ricoh Co Ltd 外観欠陥検査装置
JP2004094031A (ja) * 2002-09-02 2004-03-25 Sumitomo Rubber Ind Ltd フィルム観察装置
JP2004321610A (ja) * 2003-04-25 2004-11-18 Olympus Corp 電子内視鏡の光量制御装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06235624A (ja) * 1992-12-15 1994-08-23 Hitachi Ltd 透明シートの検査方法とその装置
JP2003247952A (ja) * 1993-10-25 2003-09-05 Ricoh Co Ltd 外観欠陥検査装置
JPH08327561A (ja) * 1995-06-05 1996-12-13 Nippon Sheet Glass Co Ltd 連続シート状物体の欠点検査装置
JP2001041719A (ja) * 1999-07-27 2001-02-16 Canon Inc 透明材の検査装置及び検査方法並びに記憶媒体
JP2001119689A (ja) * 1999-10-14 2001-04-27 Olympus Optical Co Ltd 電子内視鏡装置
JP2004094031A (ja) * 2002-09-02 2004-03-25 Sumitomo Rubber Ind Ltd フィルム観察装置
JP2004321610A (ja) * 2003-04-25 2004-11-18 Olympus Corp 電子内視鏡の光量制御装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010043895A (ja) * 2008-08-11 2010-02-25 Canon Chemicals Inc 欠陥検出装置及び欠陥検出方法
CN118392877A (zh) * 2024-06-26 2024-07-26 深圳市诚誉兴光电有限公司 一种扩散板缺陷检测装置及方法

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