JP2006526757A5 - - Google Patents
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- Publication number
- JP2006526757A5 JP2006526757A5 JP2006514959A JP2006514959A JP2006526757A5 JP 2006526757 A5 JP2006526757 A5 JP 2006526757A5 JP 2006514959 A JP2006514959 A JP 2006514959A JP 2006514959 A JP2006514959 A JP 2006514959A JP 2006526757 A5 JP2006526757 A5 JP 2006526757A5
- Authority
- JP
- Japan
- Prior art keywords
- heat pipe
- temperature
- heat
- pressure
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009835 boiling Methods 0.000 claims 14
- 239000006163 transport media Substances 0.000 claims 13
- 238000001704 evaporation Methods 0.000 claims 12
- 239000012530 fluid Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 10
- 238000000034 method Methods 0.000 claims 10
- 238000000206 photolithography Methods 0.000 claims 10
- 230000000875 corresponding Effects 0.000 claims 4
- 238000001816 cooling Methods 0.000 claims 3
- 230000001276 controlling effect Effects 0.000 claims 2
- 238000009833 condensation Methods 0.000 claims 1
- 230000005494 condensation Effects 0.000 claims 1
- 238000011017 operating method Methods 0.000 claims 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/455,004 US20040244963A1 (en) | 2003-06-05 | 2003-06-05 | Heat pipe with temperature control |
PCT/US2004/016495 WO2004109757A2 (fr) | 2003-06-05 | 2004-05-26 | Tuyau chauffant a commande de temperature |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006526757A JP2006526757A (ja) | 2006-11-24 |
JP2006526757A5 true JP2006526757A5 (fr) | 2007-08-02 |
Family
ID=33489837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006514959A Pending JP2006526757A (ja) | 2003-06-05 | 2004-05-26 | 温度制御付きヒートパイプ |
Country Status (7)
Country | Link |
---|---|
US (1) | US20040244963A1 (fr) |
EP (1) | EP1629246A2 (fr) |
JP (1) | JP2006526757A (fr) |
KR (1) | KR20060018879A (fr) |
CN (1) | CN1798953A (fr) |
TW (1) | TW200504893A (fr) |
WO (1) | WO2004109757A2 (fr) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7174806B2 (en) * | 2001-09-13 | 2007-02-13 | Beacon Power Corporation | Flexible bearing damping system, energy storage system using such a system, and a method related thereto |
US6675887B2 (en) * | 2002-03-26 | 2004-01-13 | Thermal Corp. | Multiple temperature sensitive devices using two heat pipes |
US7288864B2 (en) * | 2004-03-31 | 2007-10-30 | Nikon Corporation | System and method for cooling motors of a lithographic tool |
CN1892206A (zh) * | 2005-07-08 | 2007-01-10 | 鸿富锦精密工业(深圳)有限公司 | 热管量测装置 |
US20070235161A1 (en) * | 2006-03-27 | 2007-10-11 | Eric Barger | Refrigerant based heat exchange system with compensating heat pipe technology |
KR101239962B1 (ko) | 2006-05-04 | 2013-03-06 | 삼성전자주식회사 | 하부 전극 상에 형성된 버퍼층을 포함하는 가변 저항메모리 소자 |
US20080073563A1 (en) * | 2006-07-01 | 2008-03-27 | Nikon Corporation | Exposure apparatus that includes a phase change circulation system for movers |
KR101206036B1 (ko) | 2006-11-16 | 2012-11-28 | 삼성전자주식회사 | 전이 금속 고용체를 포함하는 저항성 메모리 소자 및 그제조 방법 |
JP2008147026A (ja) * | 2006-12-11 | 2008-06-26 | Hitachi Ltd | 固体酸化物形燃料電池 |
US8173989B2 (en) | 2007-05-30 | 2012-05-08 | Samsung Electronics Co., Ltd. | Resistive random access memory device and methods of manufacturing and operating the same |
TWM348267U (en) * | 2008-07-25 | 2009-01-01 | Micro Star Int Co Ltd | Heat conducting pipe and heat dissipation system using the same |
JP5355043B2 (ja) * | 2008-11-10 | 2013-11-27 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
WO2010084717A1 (fr) * | 2009-01-23 | 2010-07-29 | 日本電気株式会社 | Dispositif de refroidissement |
US20100218496A1 (en) * | 2009-03-02 | 2010-09-02 | Miles Mark W | Passive heat engine systems and components |
NL2006809A (en) | 2010-06-23 | 2011-12-27 | Asml Netherlands Bv | Lithographic apparatus and lithographic apparatus cooling method. |
US8877080B2 (en) | 2010-10-18 | 2014-11-04 | Tokyo Electron Limited | Using vacuum ultra-violet (VUV) data in microwave sources |
EP2515170B1 (fr) * | 2011-04-20 | 2020-02-19 | ASML Netherlands BV | Système de conditionnement thermique pour le conditionnement thermique d'une pièce d'un appareil lithographique et procédé de conditionnement thermique |
US8723205B2 (en) | 2011-08-30 | 2014-05-13 | Abl Ip Holding Llc | Phosphor incorporated in a thermal conductivity and phase transition heat transfer mechanism |
US8710526B2 (en) | 2011-08-30 | 2014-04-29 | Abl Ip Holding Llc | Thermal conductivity and phase transition heat transfer mechanism including optical element to be cooled by heat transfer of the mechanism |
US8759843B2 (en) | 2011-08-30 | 2014-06-24 | Abl Ip Holding Llc | Optical/electrical transducer using semiconductor nanowire wicking structure in a thermal conductivity and phase transition heat transfer mechanism |
DE102011084324A1 (de) * | 2011-10-12 | 2013-04-18 | Siemens Aktiengesellschaft | Kühleinrichtung für einen Supraleiter einer supraleitenden dynamoelektrischen Synchronmaschine |
WO2013113633A1 (fr) | 2012-01-30 | 2013-08-08 | Asml Netherlands B.V. | Appareil lithographique équipé d'un système de métrologie pour mesurer une position d'une table de support de substrat |
US9618859B2 (en) | 2012-01-30 | 2017-04-11 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR101427924B1 (ko) * | 2012-11-21 | 2014-08-11 | 현대자동차 주식회사 | 연료 전지 시스템의 압축 공기 냉각 장치 |
US20150068703A1 (en) * | 2013-09-06 | 2015-03-12 | Ge Aviation Systems Llc | Thermal management system and method of assembling the same |
CA2923127A1 (fr) * | 2013-09-12 | 2015-03-19 | Renew Group Private Limited | Systeme et procede d'utilisation de produits enrichis en graphene pour distribuer une energie thermique |
TWI506261B (zh) * | 2014-01-27 | 2015-11-01 | Vacuum desorption device after sample gas concentration | |
CN105004232B (zh) * | 2015-08-20 | 2017-06-06 | 安徽华茂纺织股份有限公司 | 一种千分尺读数放大装置 |
JP2017156465A (ja) * | 2016-02-29 | 2017-09-07 | キヤノン株式会社 | 駆動装置、リソグラフィ装置、冷却方法、および物品の製造方法 |
CN107300334B (zh) * | 2017-07-31 | 2018-10-02 | 大连碧蓝节能环保科技有限公司 | 调节蒸发压力式热管 |
CN111566926A (zh) * | 2017-11-06 | 2020-08-21 | 碧绿威自动化股份有限公司 | 具有散热能力及降热考虑的线性马达 |
US10936031B2 (en) * | 2018-04-13 | 2021-03-02 | Dell Products L.P. | Information handling system dynamic thermal transfer control |
US10969841B2 (en) * | 2018-04-13 | 2021-04-06 | Dell Products L.P. | Information handling system housing integrated vapor chamber |
CN110379729B (zh) * | 2018-04-13 | 2022-10-21 | 北京北方华创微电子装备有限公司 | 加热基座及半导体加工设备 |
KR102098867B1 (ko) * | 2018-09-12 | 2020-04-09 | (주)아이테드 | 임프린팅 장치 및 임프린팅 방법 |
JP7182574B2 (ja) * | 2020-02-28 | 2022-12-02 | 株式会社日立製作所 | エレベーター制御装置およびエレベーター制御方法 |
CN112161501B (zh) * | 2020-09-28 | 2022-02-25 | 北京空间飞行器总体设计部 | 可控热管 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3517730A (en) * | 1967-03-15 | 1970-06-30 | Us Navy | Controllable heat pipe |
US3637007A (en) * | 1967-08-14 | 1972-01-25 | Trw Inc | Method of and means for regulating thermal energy transfer through a heat pipe |
US3605878A (en) * | 1969-10-08 | 1971-09-20 | Sanders Associates Inc | Heat pipe with variable evaporator |
US3741289A (en) * | 1970-07-06 | 1973-06-26 | R Moore | Heat transfer apparatus with immiscible fluids |
JPS59180283A (ja) * | 1983-03-29 | 1984-10-13 | Toshiba Corp | 可変コンダクタンスヒ−トパイプ |
US4573525A (en) * | 1985-03-28 | 1986-03-04 | Boyd Hermon A | Thermally actuated heat exchange method and system |
US4898231A (en) * | 1985-09-30 | 1990-02-06 | Kabushiki Kaisha Toshiba | Heat-pipe system and method of and apparatus for controlling a flow rate of a working fluid in a liquid pipe of the heat pipe system |
JPH0631702B2 (ja) * | 1985-09-30 | 1994-04-27 | 株式会社東芝 | 二相流体ル−プ |
JPS62107271U (fr) * | 1985-12-16 | 1987-07-09 | ||
US4787843A (en) * | 1987-06-22 | 1988-11-29 | Thermo Electron Corporation | Pressure balanced heat pipe |
JP2657809B2 (ja) * | 1987-12-22 | 1997-09-30 | 謙治 岡安 | 熱伝達装置 |
JPH0285268U (fr) * | 1988-12-07 | 1990-07-04 | ||
JP2622603B2 (ja) * | 1989-01-13 | 1997-06-18 | 株式会社フジクラ | ヒートパイプ式熱交換器 |
JP2801998B2 (ja) * | 1992-10-12 | 1998-09-21 | 富士通株式会社 | 電子機器の冷却装置 |
JP3475973B2 (ja) * | 1994-12-14 | 2003-12-10 | 株式会社ニコン | リニアモータ、ステージ装置、及び露光装置 |
US5911272A (en) * | 1996-09-11 | 1999-06-15 | Hughes Electronics Corporation | Mechanically pumped heat pipe |
JP3246891B2 (ja) * | 1998-02-03 | 2002-01-15 | 東京エレクトロン株式会社 | 熱処理装置 |
JP4131038B2 (ja) * | 1998-06-26 | 2008-08-13 | 株式会社エクォス・リサーチ | 燃料電池システム |
US6047766A (en) * | 1998-08-03 | 2000-04-11 | Hewlett-Packard Company | Multi-mode heat transfer using a thermal heat pipe valve |
KR100597287B1 (ko) * | 1999-07-28 | 2006-07-04 | 동경 엘렉트론 주식회사 | 기판처리장치 및 그 방법 |
KR100629746B1 (ko) * | 1999-07-28 | 2006-09-28 | 동경 엘렉트론 주식회사 | 현상장치 및 그 방법 |
US6312171B1 (en) * | 1999-08-12 | 2001-11-06 | Tokyo Electron Limited | Developing apparatus and method thereof |
SG89379A1 (en) * | 2000-02-22 | 2002-06-18 | Tokyo Electron Ltd | Treatment apparatus |
US6684941B1 (en) * | 2002-06-04 | 2004-02-03 | Yiding Cao | Reciprocating-mechanism driven heat loop |
-
2003
- 2003-06-05 US US10/455,004 patent/US20040244963A1/en not_active Abandoned
-
2004
- 2004-05-26 EP EP04753338A patent/EP1629246A2/fr not_active Withdrawn
- 2004-05-26 WO PCT/US2004/016495 patent/WO2004109757A2/fr not_active Application Discontinuation
- 2004-05-26 KR KR1020057023381A patent/KR20060018879A/ko not_active Application Discontinuation
- 2004-05-26 CN CNA2004800152920A patent/CN1798953A/zh active Pending
- 2004-05-26 JP JP2006514959A patent/JP2006526757A/ja active Pending
- 2004-06-04 TW TW093116100A patent/TW200504893A/zh unknown
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