JP2006521704A5 - - Google Patents

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Publication number
JP2006521704A5
JP2006521704A5 JP2006507513A JP2006507513A JP2006521704A5 JP 2006521704 A5 JP2006521704 A5 JP 2006521704A5 JP 2006507513 A JP2006507513 A JP 2006507513A JP 2006507513 A JP2006507513 A JP 2006507513A JP 2006521704 A5 JP2006521704 A5 JP 2006521704A5
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JP
Japan
Prior art keywords
wafer
robot
holder
cassette
positioning system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006507513A
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English (en)
Japanese (ja)
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JP4727572B2 (ja
JP2006521704A (ja
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Publication date
Priority claimed from US10/395,940 external-priority patent/US6748293B1/en
Application filed filed Critical
Publication of JP2006521704A publication Critical patent/JP2006521704A/ja
Publication of JP2006521704A5 publication Critical patent/JP2006521704A5/ja
Application granted granted Critical
Publication of JP4727572B2 publication Critical patent/JP4727572B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006507513A 2003-03-24 2004-03-24 高速で対象物を取り扱う方法および装置 Expired - Fee Related JP4727572B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/395,940 US6748293B1 (en) 2003-03-24 2003-03-24 Methods and apparatus for high speed object handling
US10/395,940 2003-03-24
PCT/US2004/008942 WO2004086465A2 (en) 2003-03-24 2004-03-24 Method and apparatus for high speed wafer handling

Publications (3)

Publication Number Publication Date
JP2006521704A JP2006521704A (ja) 2006-09-21
JP2006521704A5 true JP2006521704A5 (https=) 2011-05-12
JP4727572B2 JP4727572B2 (ja) 2011-07-20

Family

ID=32326203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006507513A Expired - Fee Related JP4727572B2 (ja) 2003-03-24 2004-03-24 高速で対象物を取り扱う方法および装置

Country Status (5)

Country Link
US (1) US6748293B1 (https=)
JP (1) JP4727572B2 (https=)
KR (1) KR100969058B1 (https=)
CN (1) CN100385614C (https=)
WO (1) WO2004086465A2 (https=)

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US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
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US9783372B2 (en) 2015-01-28 2017-10-10 Kla-Tencor Corporation Flipping apparatus, system and method for processing articles
CN107207167B (zh) * 2015-01-28 2020-04-03 科磊股份有限公司 用于处理物品的翻转设备、系统及方法
US11691268B2 (en) 2015-03-12 2023-07-04 Persimmon Technologies Corporation Robot having a variable transmission ratio
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