JP2006509215A5 - - Google Patents
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- Publication number
- JP2006509215A5 JP2006509215A5 JP2004559258A JP2004559258A JP2006509215A5 JP 2006509215 A5 JP2006509215 A5 JP 2006509215A5 JP 2004559258 A JP2004559258 A JP 2004559258A JP 2004559258 A JP2004559258 A JP 2004559258A JP 2006509215 A5 JP2006509215 A5 JP 2006509215A5
- Authority
- JP
- Japan
- Prior art keywords
- forming
- socket
- wire
- contact element
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 58
- 239000000758 substrate Substances 0.000 claims 40
- 238000000151 deposition Methods 0.000 claims 22
- 238000012360 testing method Methods 0.000 claims 22
- 239000000463 material Substances 0.000 claims 18
- 239000004020 conductor Substances 0.000 claims 17
- 239000004065 semiconductor Substances 0.000 claims 13
- 230000008878 coupling Effects 0.000 claims 9
- 238000010168 coupling process Methods 0.000 claims 9
- 238000005859 coupling reaction Methods 0.000 claims 9
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 3
- 229910052802 copper Inorganic materials 0.000 claims 3
- 239000010949 copper Substances 0.000 claims 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 3
- 229910052737 gold Inorganic materials 0.000 claims 3
- 239000010931 gold Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 229910052703 rhodium Inorganic materials 0.000 claims 2
- 239000010948 rhodium Substances 0.000 claims 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 238000005219 brazing Methods 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 238000009713 electroplating Methods 0.000 claims 1
- 238000004049 embossing Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000005728 strengthening Methods 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/310,791 US6920689B2 (en) | 2002-12-06 | 2002-12-06 | Method for making a socket to perform testing on integrated circuits |
| PCT/US2003/038463 WO2004053976A2 (en) | 2002-12-06 | 2003-12-02 | Method of making a socket to perform testing on integrated circuits and such a socket |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006509215A JP2006509215A (ja) | 2006-03-16 |
| JP2006509215A5 true JP2006509215A5 (enExample) | 2007-02-22 |
Family
ID=32468118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004559258A Pending JP2006509215A (ja) | 2002-12-06 | 2003-12-02 | 集積回路上で試験を実施するためのソケット及びその製造方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (3) | US6920689B2 (enExample) |
| EP (1) | EP1570277B1 (enExample) |
| JP (1) | JP2006509215A (enExample) |
| KR (1) | KR20050085387A (enExample) |
| CN (1) | CN100538369C (enExample) |
| AU (1) | AU2003298856A1 (enExample) |
| DE (1) | DE60331243D1 (enExample) |
| TW (1) | TWI362711B (enExample) |
| WO (1) | WO2004053976A2 (enExample) |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020004320A1 (en) * | 1995-05-26 | 2002-01-10 | David V. Pedersen | Attaratus for socketably receiving interconnection elements of an electronic component |
| US8033838B2 (en) | 1996-02-21 | 2011-10-11 | Formfactor, Inc. | Microelectronic contact structure |
| US6887723B1 (en) * | 1998-12-04 | 2005-05-03 | Formfactor, Inc. | Method for processing an integrated circuit including placing dice into a carrier and testing |
| US7247035B2 (en) | 2000-06-20 | 2007-07-24 | Nanonexus, Inc. | Enhanced stress metal spring contactor |
| US7349223B2 (en) | 2000-05-23 | 2008-03-25 | Nanonexus, Inc. | Enhanced compliant probe card systems having improved planarity |
| US7382142B2 (en) | 2000-05-23 | 2008-06-03 | Nanonexus, Inc. | High density interconnect system having rapid fabrication cycle |
| US6812718B1 (en) | 1999-05-27 | 2004-11-02 | Nanonexus, Inc. | Massively parallel interface for electronic circuits |
| JP2001174482A (ja) * | 1999-12-21 | 2001-06-29 | Toshiba Corp | 電気的特性評価用接触針、プローブ構造体、プローブカード、および電気的特性評価用接触針の製造方法 |
| US7579848B2 (en) | 2000-05-23 | 2009-08-25 | Nanonexus, Inc. | High density interconnect system for IC packages and interconnect assemblies |
| US7952373B2 (en) | 2000-05-23 | 2011-05-31 | Verigy (Singapore) Pte. Ltd. | Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies |
| US7694246B2 (en) * | 2002-06-19 | 2010-04-06 | Formfactor, Inc. | Test method for yielding a known good die |
| US6920689B2 (en) * | 2002-12-06 | 2005-07-26 | Formfactor, Inc. | Method for making a socket to perform testing on integrated circuits |
| KR100443999B1 (ko) * | 2003-02-28 | 2004-08-21 | 주식회사 파이컴 | 인쇄회로기판용 상호 접속체, 이의 제조방법 및 이를구비한 상호 접속 조립체 |
| US7597561B2 (en) | 2003-04-11 | 2009-10-06 | Neoconix, Inc. | Method and system for batch forming spring elements in three dimensions |
| US7628617B2 (en) | 2003-06-11 | 2009-12-08 | Neoconix, Inc. | Structure and process for a contact grid array formed in a circuitized substrate |
| US8584353B2 (en) | 2003-04-11 | 2013-11-19 | Neoconix, Inc. | Method for fabricating a contact grid array |
| US7758351B2 (en) | 2003-04-11 | 2010-07-20 | Neoconix, Inc. | Method and system for batch manufacturing of spring elements |
| US20070020960A1 (en) | 2003-04-11 | 2007-01-25 | Williams John D | Contact grid array system |
| US7114961B2 (en) | 2003-04-11 | 2006-10-03 | Neoconix, Inc. | Electrical connector on a flexible carrier |
| US7244125B2 (en) * | 2003-12-08 | 2007-07-17 | Neoconix, Inc. | Connector for making electrical contact at semiconductor scales |
| US20050227510A1 (en) * | 2004-04-09 | 2005-10-13 | Brown Dirk D | Small array contact with precision working range |
| TWI309094B (en) | 2004-03-19 | 2009-04-21 | Neoconix Inc | Electrical connector in a flexible host and method for fabricating the same |
| US7347698B2 (en) * | 2004-03-19 | 2008-03-25 | Neoconix, Inc. | Deep drawn electrical contacts and method for making |
| US7354276B2 (en) | 2004-07-20 | 2008-04-08 | Neoconix, Inc. | Interposer with compliant pins |
| US20060038576A1 (en) * | 2004-08-19 | 2006-02-23 | Pooya Tadayon | Sort interface unit having probe capacitors |
| US7172431B2 (en) * | 2004-08-27 | 2007-02-06 | International Business Machines Corporation | Electrical connector design and contact geometry and method of use thereof and methods of fabrication thereof |
| WO2007017955A1 (ja) * | 2005-08-09 | 2007-02-15 | Kabushiki Kaisha Nihon Micronics | 通電試験用プローブ |
| US7357644B2 (en) | 2005-12-12 | 2008-04-15 | Neoconix, Inc. | Connector having staggered contact architecture for enhanced working range |
| US7172450B1 (en) * | 2006-01-11 | 2007-02-06 | Qualitau, Inc. | High temperature open ended zero insertion force (ZIF) test socket |
| US7982290B2 (en) | 2006-01-12 | 2011-07-19 | Palo Alto Research Center, Inc. | Contact spring application to semiconductor devices |
| US7528618B2 (en) * | 2006-05-02 | 2009-05-05 | Formfactor, Inc. | Extended probe tips |
| KR100817054B1 (ko) | 2006-07-13 | 2008-03-26 | 삼성전자주식회사 | 패키지 테스트용 소켓, 테스트 소켓용 러버 및 테스트소켓용 가이드 |
| US7731503B2 (en) * | 2006-08-21 | 2010-06-08 | Formfactor, Inc. | Carbon nanotube contact structures |
| KR100703043B1 (ko) * | 2006-09-21 | 2007-04-09 | (주)에이펙스 | 검사용 프로브 기판 및 그 제조 방법 |
| KR100816843B1 (ko) * | 2006-10-31 | 2008-03-26 | 삼성전기주식회사 | 인쇄회로기판 |
| US8149007B2 (en) * | 2007-10-13 | 2012-04-03 | Formfactor, Inc. | Carbon nanotube spring contact structures with mechanical and electrical components |
| CN101316014B (zh) * | 2007-10-17 | 2012-02-01 | 番禺得意精密电子工业有限公司 | 电连接装置及其组装方法 |
| KR101004911B1 (ko) * | 2008-08-12 | 2010-12-28 | 삼성전기주식회사 | 마이크로 전자기계적 부품 제조방법 |
| CN101750525B (zh) * | 2008-12-22 | 2012-07-04 | 京元电子股份有限公司 | 测试插座的制作方法及其所使用的弹性测试探针 |
| US20100252317A1 (en) * | 2009-04-03 | 2010-10-07 | Formfactor, Inc. | Carbon nanotube contact structures for use with semiconductor dies and other electronic devices |
| US8272124B2 (en) * | 2009-04-03 | 2012-09-25 | Formfactor, Inc. | Anchoring carbon nanotube columns |
| JP5333029B2 (ja) * | 2009-08-10 | 2013-11-06 | Jsr株式会社 | 電気接続部材および電気接続部材の製造方法 |
| US8476538B2 (en) * | 2010-03-08 | 2013-07-02 | Formfactor, Inc. | Wiring substrate with customization layers |
| US8215966B2 (en) * | 2010-04-20 | 2012-07-10 | Tyco Electronics Corporation | Interposer connector assembly |
| US8274798B2 (en) * | 2010-07-28 | 2012-09-25 | Unimicron Technology Corp. | Carrier substrate and method for making the same |
| DE102010054782B4 (de) * | 2010-12-16 | 2025-02-06 | Snaptrack, Inc. | Gehäustes elektrisches Bauelement |
| CN102175946A (zh) * | 2011-03-07 | 2011-09-07 | 世盟科信(北京)国际科技发展有限公司 | 用于生产测试的治具 |
| JP5809509B2 (ja) * | 2011-09-29 | 2015-11-11 | 新光電気工業株式会社 | スプリング端子付配線基板及びその実装構造とソケット |
| US8491315B1 (en) * | 2011-11-29 | 2013-07-23 | Plastronics Socket Partners, Ltd. | Micro via adapter socket |
| US8641428B2 (en) | 2011-12-02 | 2014-02-04 | Neoconix, Inc. | Electrical connector and method of making it |
| US9680273B2 (en) | 2013-03-15 | 2017-06-13 | Neoconix, Inc | Electrical connector with electrical contacts protected by a layer of compressible material and method of making it |
| US10788531B2 (en) * | 2014-10-29 | 2020-09-29 | Modus Test, Llc | Reduced cost package device simulator, manufacturing method and method of use |
| DE102017107142A1 (de) * | 2017-04-03 | 2018-10-04 | Tkr Spezialwerkzeuge Gmbh | Kontaktbuchse |
| US11821918B1 (en) | 2020-04-24 | 2023-11-21 | Microfabrica Inc. | Buckling beam probe arrays and methods for making such arrays including forming probes with lateral positions matching guide plate hole positions |
| US11828775B1 (en) | 2020-05-13 | 2023-11-28 | Microfabrica Inc. | Vertical probe arrays and improved methods for making using temporary or permanent alignment structures for setting or maintaining probe-to-probe relationships |
| US11768227B1 (en) | 2019-02-22 | 2023-09-26 | Microfabrica Inc. | Multi-layer probes having longitudinal axes and preferential probe bending axes that lie in planes that are nominally parallel to planes of probe layers |
| KR102855232B1 (ko) * | 2021-05-20 | 2025-09-08 | 삼성디스플레이 주식회사 | 표시 패널 및 이를 포함하는 표시 장치 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5917707A (en) | 1993-11-16 | 1999-06-29 | Formfactor, Inc. | Flexible contact structure with an electrically conductive shell |
| US5806181A (en) * | 1993-11-16 | 1998-09-15 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
| US5772451A (en) * | 1993-11-16 | 1998-06-30 | Form Factor, Inc. | Sockets for electronic components and methods of connecting to electronic components |
| US5974662A (en) * | 1993-11-16 | 1999-11-02 | Formfactor, Inc. | Method of planarizing tips of probe elements of a probe card assembly |
| WO1996016440A1 (en) | 1994-11-15 | 1996-05-30 | Formfactor, Inc. | Interconnection elements for microelectronic components |
| US6085978A (en) * | 1994-08-17 | 2000-07-11 | Metrologic Instruments, Inc. | Holographic laser scanners of modular construction and method and apparatus for designing and manufacturing the same |
| US5949246A (en) * | 1997-01-28 | 1999-09-07 | International Business Machines | Test head for applying signals in a burn-in test of an integrated circuit |
| US6292003B1 (en) | 1998-07-01 | 2001-09-18 | Xilinx, Inc. | Apparatus and method for testing chip scale package integrated circuits |
| US6256882B1 (en) * | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| JP4513145B2 (ja) * | 1999-09-07 | 2010-07-28 | ソニー株式会社 | 半導体装置の製造方法および研磨方法 |
| US6489788B2 (en) | 2000-01-20 | 2002-12-03 | Earl Sausen | Contactor assembly for common grid array devices |
| JP4590032B2 (ja) | 2000-01-24 | 2010-12-01 | 東京エレクトロン株式会社 | プローブの製造方法 |
| DE10102649B4 (de) * | 2000-03-30 | 2006-05-24 | International Business Machines Corp. | System und Verfahren für die Realisierung von Transaktionen mit Unterstützung durch ein Verzeichniszugriffs-LDAP-Protokoll |
| US6462575B1 (en) * | 2000-08-28 | 2002-10-08 | Micron Technology, Inc. | Method and system for wafer level testing and burning-in semiconductor components |
| US6920689B2 (en) * | 2002-12-06 | 2005-07-26 | Formfactor, Inc. | Method for making a socket to perform testing on integrated circuits |
-
2002
- 2002-12-06 US US10/310,791 patent/US6920689B2/en not_active Expired - Fee Related
-
2003
- 2003-12-02 AU AU2003298856A patent/AU2003298856A1/en not_active Abandoned
- 2003-12-02 EP EP03796616A patent/EP1570277B1/en not_active Expired - Lifetime
- 2003-12-02 JP JP2004559258A patent/JP2006509215A/ja active Pending
- 2003-12-02 KR KR1020057010209A patent/KR20050085387A/ko not_active Ceased
- 2003-12-02 DE DE60331243T patent/DE60331243D1/de not_active Expired - Lifetime
- 2003-12-02 CN CNB2003801092994A patent/CN100538369C/zh not_active Expired - Fee Related
- 2003-12-02 WO PCT/US2003/038463 patent/WO2004053976A2/en not_active Ceased
- 2003-12-04 TW TW092134227A patent/TWI362711B/zh not_active IP Right Cessation
-
2005
- 2005-03-25 US US11/090,614 patent/US7330039B2/en not_active Expired - Fee Related
-
2008
- 2008-02-12 US US12/030,037 patent/US20080132095A1/en not_active Abandoned
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