JP2006509215A - 集積回路上で試験を実施するためのソケット及びその製造方法 - Google Patents
集積回路上で試験を実施するためのソケット及びその製造方法 Download PDFInfo
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Abstract
Description
図1A及び1Bは、本発明の実施形態の、試験される半導体チップ100(例えば集積回路(IC))の側面図及び底面図をそれぞれ示す。半導体チップ100は、パッケージされていても又はされていなくとも良い。制限するのではないが、半導体チップ100は、ハンダボール接点102(例えば「コントロールドコラップスチップコネクション」(「C4」としても知られている))を有するフリップチップ半導体とすることができる。概して、半導体チップ及び接続の如何なる形式のものも利用することができる。
図2〜6は、本発明の実施形態によるソケット600(図6)に対する相互接続構造体(例えばタイル)514(図5)を製造する工程を図解する。
図6は、相互接続構造体514が回路板602(例えば試験回路板又はソケット回路板)に結合され、電気的に配線されている本発明の実施形態によるソケット600を示す。ある実施形態では、回路板600が、試験中、集積回路(IC)100を保持するための蝶番により開閉する装置606を有する支持構造体604を含むことがある。種々の実施形態では、回路板602を試験回路板又はバーンイン回路板とすることができる。相互接続構造体514を、ハンダ付け608、ピン(図示せず)又は何らかの他の形式の接続のような何らかの適切な手法により、回路板602に電気的に接続することができる。例えばピンは、対応する孔部(図示せず)と摩擦嵌めを形成し得る。代替的な実施形態では、回路板602を、それ自体より大きな試験システム(図示せず)に差し込まれる又は他のやり方で取り付けられるソケット回路板とすることができる。
図8は、本発明の実施形態によるソケットを製造する方法800を示す。ステップ802において、犠牲基板を、要望されるように、何らかの形式又は数の基板に形成された要素を備えて形成する。例えば、凹所を図2に記載したように形成することができる。ステップ804において、メッキされたワイヤを犠牲基板に基づき形成する。これは、図3〜4に関連して記述したように、種々の方法を介して実施され得る。ステップ806において、相互接続構造体を、メッキされたワイヤに基づき形成する。これは、図5に関連して記載した種々の方法を介して実施される。ステップ808において、ソケットを相互接続構造体に基づき形成する。これは、図6及び7に関連して記述した種々の方法を介して実施される。
本発明の種々の実施態様を上記説明したが、それらは一例として示されたに過ぎず、制限するものでないことが理解されなければならない。本発明の精神及び範囲から逸脱することなく、本発明の形態及び細部に種々の変更を行えることは当業者には明らかである。したがって本発明の広さ及び範囲は、上述した例示的な実施形態により制限されるのではなく、添付の特許請求の範囲の記載及びその等価物によってのみ画定されなければならない。
Claims (46)
- 犠牲基板に要素を形成するステップ、
前記犠牲基板の前記要素を利用して接触構造体を形成するステップ、
前記接触構造体を利用して相互接続構造体を形成するステップ、
前記相互接続構造体を利用して試験回路板を形成するステップ、
からなる方法。 - 前記要素を形成するステップが、前記犠牲基板内に凹所を形成するステップを含む請求項1に記載の方法。
- 前記犠牲基板をエンボス加工して、前記凹所を形成するステップを実施するステップをさらに含む請求項2に記載の方法。
- 前記犠牲基板をエッチングして、前記凹所を形成するステップを実施するステップをさらに含む請求項2に記載の方法。
- 前記犠牲基板を銅から形成するステップをさらに含む請求項1に記載の方法。
- 前記犠牲基板をアルミニウムから形成するステップをさらに含む請求項1に記載の方法。
- 前記犠牲基板をシリコンから形成するステップをさらに含む請求項1に記載の方法。
- 前記犠牲基板をセラミックから形成するステップをさらに含む請求項1に記載の方法。
- 前記犠牲基板をチタン-タングステンから形成するステップをさらに含む請求項1に記載の方法。
- 前記接触構造体を形成するステップが、
前記犠牲基板上にマスク材料を付着するステップ、
前記要素に対応して前記マスク材料に開口部を形成するステップ、
前記開口部に第1の導電性材料を付着するステップ、
前記開口部のそれぞれの前記第1の導電性材料にワイヤを接合するステップ、
前記ワイヤ上に第2の導電性材料を付着するステップ、
前記マスク材料を取り除くステップからなる請求項1に記載の方法。 - 前記マスク材料としてホトレジスト材料を利用するステップをさらに含む請求項10に記載の方法。
- 前記第1の導電性材料として、硬質の金属質の材料を使用するステップをさらに含む請求項10に記載の方法。
- 前記第1の導電性材料として、ロジウム材料を使用するステップをさらに含む請求項10に記載の方法。
- 前記第1の導電性材料を付着するステップが、
軟質金層を付着するステップ、
ニッケル層を付着するステップ、
硬質金層を付着するステップを含む請求項10に記載の方法。 - 前記第1の導電性材料を付着するステップが、電気メッキを利用して前記付着を実施するステップを含む請求項10に記載の方法。
- 前記第1の導電性材料を付着するステップが、蒸着を利用して前記付着を実施するステップを含む請求項10に記載の方法。
- 前記第1の導電性材料を付着するステップが、スパッタリングを利用して前記付着を実施するステップを含む請求項10に記載の方法。
- 前記第1の導電性材料を付着するステップを実施する前に、前記開口部に解放材料を付着するステップをさらに含む請求項10に記載の方法。
- 前記解放材料を付着するステップが、前記解放材料としてアルミニウムを利用するステップを含む請求項18に記載の方法。
- 前記第1の導電性材料を付着するステップを実施する前に、前記開口部にシード層を付着するステップをさらに含む請求項10に記載の方法。
- 前記マスク材料を付着するステップを実施する前に、前記犠牲基板上にシード層を付着するステップをさらに含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとして柔らかく、成形可能な材料を利用するステップを含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとして金を利用するステップを含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとしてアルミニウムを利用するステップを含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとして銅を利用するステップを含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとして白金を利用するステップを含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとして鉛を利用するステップを含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとして錫を利用するステップを含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとしてインジウムを利用するステップを含む請求項10に記載の方法。
- 前記ワイヤを接合するステップが、前記ワイヤとして合金を利用するステップを含む請求項10に記載の方法。
- 前記ワイヤに対して利用される材料よりも硬い材料を前記第2の導電性材料に対して利用して、接触構造体を強化するステップをさらに含む請求項10に記載の方法。
- 前記相互接続構造体を形成するステップが、
前記ワイヤの自由端を配線基板に結合するステップ、
前記犠牲基板を取り除くステップを含む請求項1に記載の方法。 - 前記結合するステップが、配線を利用して前記ワイヤの自由端を前記配線基板に結合するステップを含む請求項32に記載の方法。
- 前記結合するステップが、鑞付けを利用して前記ワイヤの自由端を前記配線基板に結合するステップを含む請求項32に記載の方法。
- 前記結合するステップが、加熱技術を利用して前記ワイヤの自由端を前記配線基板に結合するステップを含む請求項32に記載の方法。
- 基板の両面に第1パッド及び第2パッドを結合するステップ、
前記基板を介して延伸するバイアにより、前記第1パッド及び第2パッドを相互接続するステップによる前記配線基板を形成するステップをさらに含む請求項32に記載の方法。 - 前記形成するステップが、セラミック材料を利用して前記基板を形成するステップを含む請求項36に記載の方法。
- 前記試験回路板を形成するステップが、前記相互接続構造体を回路板に結合するステップをさらに含む請求項1に記載の方法。
- 支持構造体を前記回路板に結合し、被試験システムを保持するステップをさらに含む請求項38に記載の方法。
- 前記相互接続構造体を形成するステップが、複数の相互接続構造体を形成することを含み、前記試験回路板を形成するステップが、該複数の相互接続構造体を利用することをさらに含む請求項1に記載の方法。
- 請求項1に記載の方法により製造された集積回路板を試験するためのバーンインソケット。
- 集積回路板を試験するシステムであって、ソケットを含むものにおいて、該ソケットが、
回路板と、
前記ソケットに挿入可能に製造されているとともに、前記回路板と結合されている相互接続構造体であって、該相互接続構造体が、基板と、該基板に結合されているとともに、該基板を介して延伸しているバイアにより互いに結合されている第1パッド及び第2パッドであって、当該第2パッドが前記相互接続構造体を前記回路板に結合する第1パッド及び第2パッドと、前記第1パッドに結合されている弾性接触子であって、試験中、前記集積回路と相互作用する弾性接触子を含む相互接続構造体と、
試験中、前記集積回路板と前記弾性接触子の間の接触を確実にする前記回路板に結合されている支持構造体とを含むシステム。 - 前記相互接続構造体が、前記ソケット内に挿入されているモジュール式相互接続構造体である請求項42に記載のシステム。
- 前記相互接続構造体が、前記ソケット内に落とし込まれている落とし込み式相互接続構造体である請求項42に記載のシステム。
- 前記相互接続構造体が、前記ソケット内に差し込まれている差し込み式相互接続構造体である請求項42に記載のシステム。
- 前記ソケットが複数の前記相互接続構造体を含む請求項42に記載のシステム。
Applications Claiming Priority (2)
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US10/310,791 US6920689B2 (en) | 2002-12-06 | 2002-12-06 | Method for making a socket to perform testing on integrated circuits |
PCT/US2003/038463 WO2004053976A2 (en) | 2002-12-06 | 2003-12-02 | Method of making a socket to perform testing on integrated circuits and such a socket |
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JP2006509215A true JP2006509215A (ja) | 2006-03-16 |
JP2006509215A5 JP2006509215A5 (ja) | 2007-02-22 |
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JP2004559258A Pending JP2006509215A (ja) | 2002-12-06 | 2003-12-02 | 集積回路上で試験を実施するためのソケット及びその製造方法 |
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US (3) | US6920689B2 (ja) |
EP (1) | EP1570277B1 (ja) |
JP (1) | JP2006509215A (ja) |
KR (1) | KR20050085387A (ja) |
CN (1) | CN100538369C (ja) |
AU (1) | AU2003298856A1 (ja) |
DE (1) | DE60331243D1 (ja) |
TW (1) | TWI362711B (ja) |
WO (1) | WO2004053976A2 (ja) |
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-
2002
- 2002-12-06 US US10/310,791 patent/US6920689B2/en not_active Expired - Fee Related
-
2003
- 2003-12-02 DE DE60331243T patent/DE60331243D1/de not_active Expired - Lifetime
- 2003-12-02 EP EP03796616A patent/EP1570277B1/en not_active Expired - Fee Related
- 2003-12-02 AU AU2003298856A patent/AU2003298856A1/en not_active Abandoned
- 2003-12-02 WO PCT/US2003/038463 patent/WO2004053976A2/en active Application Filing
- 2003-12-02 JP JP2004559258A patent/JP2006509215A/ja active Pending
- 2003-12-02 KR KR1020057010209A patent/KR20050085387A/ko not_active Application Discontinuation
- 2003-12-02 CN CNB2003801092994A patent/CN100538369C/zh not_active Expired - Fee Related
- 2003-12-04 TW TW092134227A patent/TWI362711B/zh not_active IP Right Cessation
-
2005
- 2005-03-25 US US11/090,614 patent/US7330039B2/en not_active Expired - Fee Related
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2008
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JP2010515010A (ja) * | 2006-08-21 | 2010-05-06 | フォームファクター, インコーポレイテッド | カーボンナノチューブ・コンタクト構造 |
JP2010042500A (ja) * | 2008-08-12 | 2010-02-25 | Samsung Electro-Mechanics Co Ltd | マイクロ電子機械的部品の製造方法 |
JP2011040254A (ja) * | 2009-08-10 | 2011-02-24 | Jsr Corp | 電気接続部材および電気接続部材の製造方法 |
JP2013073882A (ja) * | 2011-09-29 | 2013-04-22 | Shinko Electric Ind Co Ltd | スプリング端子付配線基板及びその実装構造とソケット |
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Also Published As
Publication number | Publication date |
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US6920689B2 (en) | 2005-07-26 |
TW200423277A (en) | 2004-11-01 |
KR20050085387A (ko) | 2005-08-29 |
DE60331243D1 (de) | 2010-03-25 |
US20050167816A1 (en) | 2005-08-04 |
EP1570277B1 (en) | 2010-02-10 |
CN100538369C (zh) | 2009-09-09 |
CN1745307A (zh) | 2006-03-08 |
WO2004053976A3 (en) | 2004-08-05 |
TWI362711B (en) | 2012-04-21 |
US20080132095A1 (en) | 2008-06-05 |
US7330039B2 (en) | 2008-02-12 |
EP1570277A2 (en) | 2005-09-07 |
WO2004053976A2 (en) | 2004-06-24 |
AU2003298856A1 (en) | 2004-06-30 |
AU2003298856A8 (en) | 2004-06-30 |
US20040107568A1 (en) | 2004-06-10 |
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