JP2006346848A - 超音波ワイヤソー装置 - Google Patents
超音波ワイヤソー装置 Download PDFInfo
- Publication number
- JP2006346848A JP2006346848A JP2005206186A JP2005206186A JP2006346848A JP 2006346848 A JP2006346848 A JP 2006346848A JP 2005206186 A JP2005206186 A JP 2005206186A JP 2005206186 A JP2005206186 A JP 2005206186A JP 2006346848 A JP2006346848 A JP 2006346848A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- roller
- ultrasonic
- rotary transformer
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 abstract description 9
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 3
- 238000003754 machining Methods 0.000 abstract description 3
- 239000004698 Polyethylene Substances 0.000 abstract description 2
- 239000003822 epoxy resin Substances 0.000 abstract description 2
- 229920000647 polyepoxide Polymers 0.000 abstract description 2
- -1 polyethylene Polymers 0.000 abstract description 2
- 229920000573 polyethylene Polymers 0.000 abstract description 2
- 239000002002 slurry Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005206186A JP2006346848A (ja) | 2005-06-17 | 2005-06-17 | 超音波ワイヤソー装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005206186A JP2006346848A (ja) | 2005-06-17 | 2005-06-17 | 超音波ワイヤソー装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006346848A true JP2006346848A (ja) | 2006-12-28 |
| JP2006346848A5 JP2006346848A5 (enExample) | 2008-10-30 |
Family
ID=37643211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005206186A Pending JP2006346848A (ja) | 2005-06-17 | 2005-06-17 | 超音波ワイヤソー装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006346848A (enExample) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008272930A (ja) * | 2007-04-25 | 2008-11-13 | Siltronic Ag | ワイヤー鋸用ワイヤー案内ロール |
| JP2009072905A (ja) * | 2007-08-27 | 2009-04-09 | Kazumasa Onishi | 環状の切削ブレードを備えた回転切削装置 |
| CN102284970A (zh) * | 2011-08-02 | 2011-12-21 | 浙江大学 | 非金属材料多丝线切割用的旋转超声换能器 |
| JP2012045682A (ja) * | 2010-08-27 | 2012-03-08 | Tokuriki Honten Co Ltd | 固定砥粒ワイヤーソー装置 |
| CN102744794A (zh) * | 2011-04-01 | 2012-10-24 | 江苏省惠山中等专业学校 | 一种双片独立式的导线轮 |
| CN103042613A (zh) * | 2011-10-13 | 2013-04-17 | 太阳世界创新有限公司 | 锯线引导辊 |
| CN105171926A (zh) * | 2015-07-23 | 2015-12-23 | 厦门大学 | 一种单点金刚石切削刀具的振动辅助装置 |
| JP2020059091A (ja) * | 2018-10-10 | 2020-04-16 | 株式会社デンソー | 切断装置 |
| CN115447001A (zh) * | 2022-10-10 | 2022-12-09 | 烟台力凯数控科技有限公司 | 一种应用于多线切割装备的超声导轮装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367062U (enExample) * | 1986-10-22 | 1988-05-06 | ||
| JPH07153724A (ja) * | 1993-11-29 | 1995-06-16 | Sharp Corp | シリコンインゴットのスライス加工方法 |
| JPH08306647A (ja) * | 1995-03-31 | 1996-11-22 | Siemens Ag | 半導体ウェーハをダイシングする方法と装置 |
| JPH1177510A (ja) * | 1997-09-05 | 1999-03-23 | Tokyo Seimitsu Co Ltd | 固定砥粒ワイヤソー及びその被加工物切断方法 |
-
2005
- 2005-06-17 JP JP2005206186A patent/JP2006346848A/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367062U (enExample) * | 1986-10-22 | 1988-05-06 | ||
| JPH07153724A (ja) * | 1993-11-29 | 1995-06-16 | Sharp Corp | シリコンインゴットのスライス加工方法 |
| JPH08306647A (ja) * | 1995-03-31 | 1996-11-22 | Siemens Ag | 半導体ウェーハをダイシングする方法と装置 |
| JPH1177510A (ja) * | 1997-09-05 | 1999-03-23 | Tokyo Seimitsu Co Ltd | 固定砥粒ワイヤソー及びその被加工物切断方法 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008272930A (ja) * | 2007-04-25 | 2008-11-13 | Siltronic Ag | ワイヤー鋸用ワイヤー案内ロール |
| JP2009072905A (ja) * | 2007-08-27 | 2009-04-09 | Kazumasa Onishi | 環状の切削ブレードを備えた回転切削装置 |
| JP2012045682A (ja) * | 2010-08-27 | 2012-03-08 | Tokuriki Honten Co Ltd | 固定砥粒ワイヤーソー装置 |
| CN102744794A (zh) * | 2011-04-01 | 2012-10-24 | 江苏省惠山中等专业学校 | 一种双片独立式的导线轮 |
| CN102284970A (zh) * | 2011-08-02 | 2011-12-21 | 浙江大学 | 非金属材料多丝线切割用的旋转超声换能器 |
| CN103042613A (zh) * | 2011-10-13 | 2013-04-17 | 太阳世界创新有限公司 | 锯线引导辊 |
| CN105171926A (zh) * | 2015-07-23 | 2015-12-23 | 厦门大学 | 一种单点金刚石切削刀具的振动辅助装置 |
| JP2020059091A (ja) * | 2018-10-10 | 2020-04-16 | 株式会社デンソー | 切断装置 |
| JP7070311B2 (ja) | 2018-10-10 | 2022-05-18 | 株式会社デンソー | 切断装置 |
| US11389984B2 (en) | 2018-10-10 | 2022-07-19 | Denso Corporation | Cutting device |
| CN115447001A (zh) * | 2022-10-10 | 2022-12-09 | 烟台力凯数控科技有限公司 | 一种应用于多线切割装备的超声导轮装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2010207972A (ja) | スピンドル装置 | |
| JP2011088216A (ja) | 超音波工具ホルダ | |
| JPWO2006137453A1 (ja) | 超音波振動を利用する研磨装置 | |
| JPWO2008108463A1 (ja) | 研磨具及び研磨装置 | |
| JP2009226573A (ja) | 超音波ローラーを用いた超音波ワイヤソー装置 | |
| JP5443960B2 (ja) | 研磨具 | |
| KR20120117156A (ko) | 초음파 스핀들 장치 | |
| JP2006346848A (ja) | 超音波ワイヤソー装置 | |
| JP2010240745A (ja) | 超音波回転加工装置 | |
| US20090114204A1 (en) | Cutting tool and cutting device that have disk-like cutting blade | |
| JP2008068327A (ja) | ウェーハエッジの研磨装置、及びウェーハエッジの研磨方法 | |
| JP2009291930A (ja) | ワイヤソー装置およびこれを用いた切断方法 | |
| JP2010042498A (ja) | 超音波振動を付与した研削砥石による加工方法 | |
| JP2011224761A (ja) | ワイヤソー装置およびこれを用いた切断方法 | |
| JP2012146879A (ja) | スクライバー装置 | |
| JP6733022B2 (ja) | ワイヤソーによる溝加工装置とその方法 | |
| JP2012006136A (ja) | ワイヤソー装置に用いる超音波洗浄装置 | |
| JP2015174180A (ja) | 超音波面取り機 | |
| JP2006156481A (ja) | 超音波振動切削装置 | |
| Nomura et al. | Effects of ultrasonic vibration in truing and dressing of CBN grinding wheel used for internal grinding of small holes | |
| JP2007111803A (ja) | 超音波振動切削装置 | |
| JP2012045682A (ja) | 固定砥粒ワイヤーソー装置 | |
| JP2010076085A (ja) | ワイヤソー装置およびこれを用いた切断方法 | |
| JP2001062700A (ja) | ワイヤソー | |
| JP2008023696A (ja) | 超音波加工装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080612 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080911 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100409 |
|
| A977 | Report on retrieval |
Effective date: 20100415 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100730 |