JP2006337770A - 表面鏡 - Google Patents
表面鏡 Download PDFInfo
- Publication number
- JP2006337770A JP2006337770A JP2005163260A JP2005163260A JP2006337770A JP 2006337770 A JP2006337770 A JP 2006337770A JP 2005163260 A JP2005163260 A JP 2005163260A JP 2005163260 A JP2005163260 A JP 2005163260A JP 2006337770 A JP2006337770 A JP 2006337770A
- Authority
- JP
- Japan
- Prior art keywords
- film
- surface mirror
- glass substrate
- mirror
- reflectance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/28—Reflectors in projection beam
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/361—Coatings of the type glass/metal/inorganic compound/metal/inorganic compound/other
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/3663—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as mirrors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
Abstract
また、また反射角度が大きい場合の可視光線全域(400〜700nm)における反射率が低いという欠点があり、表面鏡の反射角を大きくして、リアプロジェクションテレビの奥行きを小さくすることが困難であった。
【解決手段】ガラス基板の表面がイオンエッチング処理され、金属膜がAl膜を該イオンエッチング処理したガラス基板表面に成膜されてなる表面鏡である。
金属酸化物膜は、Al膜の上にSiO2膜、Nb2O5膜を順次積層してなる。
【選択図】 図1
Description
リアプロジェクションテレビに用いられる鏡として、ガラス基板に銀鏡反応でAg膜を成膜し、Ag膜上に保護膜を形成してなる、いわゆる裏面鏡といわれるものと、ガラスの表面に金属膜を形成してその上に酸化物膜を形成して、酸化物膜の面から光を入射して、金属膜で反射させる表面鏡とが用いられている。
また高平坦度ガラスと呼ばれる表面のうねりの少ないガラスや、研磨した平坦度が優れたガラスも用いても良い。
実施例1、実施例2および比較例1のX線回折のピーク高さを測定した結果を表2示すが、実施例1、2のX線回折のピーク高さは、比較例1のX線回折のピーク高さよりも高い結果を示す。
るが、本発明はこれに限定されるものではない。
洗浄、乾燥した厚み3mm、サイズ600mm×600mmのフロート法板ガラスを用いて図2に示す膜構成の表面鏡3を作製した。成膜は全てスパッタリング法で行った。
最初に、高周波電源装置はシャナイダー製(出力3k、2A)を用い、Ar100(sccm)、酸素70(sccm)で真空圧0.10paの雰囲気において、電圧は1000vを印加して反応性プラズマを発生させ、その下をイオンエッチング装置とガラスとの角度を45度に保って、約1(mm/min)の速度でガラスを通過させ、ガラス表面の改質を行った。
次いでSiO2膜の上に、同様の電源を用いて、Alターゲットを取り付けたデュアルカソード用いて、Ar300(sccm)の雰囲気で厚み80nmのAl膜13を成膜した。
実施例1の反射鏡の耐久性
密着性:接着テープ (スコッチメンディングテープ 3M#800)を膜上に貼着後、これを引き剥がし、45mmφ当たりの成膜した膜の剥離、膜に発生したピンホール数(個数)を顕微鏡で観察、測定した。
図1に示す膜構成の反射鏡を作製した。実施例1とはガラス基板とAl膜との間にSiO2を成膜しないこと以外は全く同じ条件で、実施例2の表面鏡を作製した。
ガラス基板のイオンエッチング処理を実施しない他は、全て実施例1と同様の成膜を行い、表面鏡を作製した。実施例1と同様の反射率の測定と耐久性試験を行った。
2 映像投射装置
3 表面鏡
4 スクリーン
5 ケーシング
10 反射膜
11 ガラス基板
12 SiO2膜
13 Al膜
14 SiO2膜
15 Nb2O5膜
Claims (4)
- ガラス基板に金属膜と金属酸化物膜とがこの順に成膜されてなるリアプロジェクションテレビに用いる表面鏡において、ガラス基板の表面がイオンエッチングにより改質され、金属膜がAl膜であることを特徴とする表面鏡。
- 金属酸化物膜が、Al膜の上にSiO2膜、Nb2O5膜を順次積層してなることを特徴とする請求項1に記載の表面鏡。
- ガラス基板とAl膜との間にSiO2膜が成膜されてなることを特徴とする請求項1または2に記載の表面鏡。
- Al膜が、Alに対して、5重量%以下のMn、Mg、Si、Ndから選ばれる1種以上の金属を含んでなることを特徴とする請求項1乃至3のいずれかに記載の表面鏡。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005163260A JP2006337770A (ja) | 2005-06-02 | 2005-06-02 | 表面鏡 |
PCT/JP2006/310293 WO2006129528A1 (ja) | 2005-06-02 | 2006-05-24 | 表面鏡 |
CN2006800174613A CN101180574B (zh) | 2005-06-02 | 2006-05-24 | 前表面镜 |
EP06746776A EP1873584A1 (en) | 2005-06-02 | 2006-05-24 | Front surface mirror |
US11/910,005 US20080253009A1 (en) | 2005-06-02 | 2006-05-24 | Front Surface Mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005163260A JP2006337770A (ja) | 2005-06-02 | 2005-06-02 | 表面鏡 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006337770A true JP2006337770A (ja) | 2006-12-14 |
Family
ID=37481457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005163260A Pending JP2006337770A (ja) | 2005-06-02 | 2005-06-02 | 表面鏡 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20080253009A1 (ja) |
EP (1) | EP1873584A1 (ja) |
JP (1) | JP2006337770A (ja) |
CN (1) | CN101180574B (ja) |
WO (1) | WO2006129528A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009003063A (ja) * | 2007-06-20 | 2009-01-08 | Central Glass Co Ltd | 表面鏡 |
JP2013225051A (ja) * | 2012-04-23 | 2013-10-31 | Kobe Steel Ltd | 反射膜積層体およびその製造方法 |
JP2016530580A (ja) * | 2013-09-18 | 2016-09-29 | サントル・ルクセンブルジョワ・ドゥ・ルシェルシュ・プール・ル・ベール・エ・ラ・セラミック(シーアールブイシー)エスエイアールエルCentre Luxembourgeois de Recherches pour le Verre et la Ceramique (C.R.V.C.) SARL | 誘電体ミラー |
US10145992B2 (en) | 2013-02-13 | 2018-12-04 | Guardian Europe S.A.R.L. | Dielectric mirror |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9145510B2 (en) | 2007-05-30 | 2015-09-29 | Baker Hughes Incorporated | Use of nano-sized phyllosilicate minerals in viscoelastic surfactant fluids |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5843402A (ja) * | 1981-09-09 | 1983-03-14 | Ricoh Co Ltd | 高反射鏡の製造方法 |
JPH07301705A (ja) * | 1994-05-10 | 1995-11-14 | Kobe Steel Ltd | Al合金薄膜およびAl合金薄膜形成用スパッタリングターゲット |
JP2001235798A (ja) * | 1999-12-17 | 2001-08-31 | Nippon Sheet Glass Co Ltd | 反射ミラー及びこれを用いた背面投写型ディスプレイ |
JP2003029010A (ja) * | 2001-07-16 | 2003-01-29 | Nippon Sheet Glass Co Ltd | 半透過ミラー付き基板及び半透過型液晶表示装置 |
JP2003195022A (ja) * | 2001-12-28 | 2003-07-09 | Asahi Glass Co Ltd | 増反射積層体 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713406A (en) * | 1980-06-26 | 1982-01-23 | Nhk Spring Co Ltd | Reflecting mirror and its manufacture |
JPS60178402A (ja) * | 1984-02-27 | 1985-09-12 | Nippon Denso Co Ltd | ハ−フミラ− |
US6059416A (en) * | 1993-08-31 | 2000-05-09 | Daewoo Electronics Co., Ltd. | Actuated mirror array and method for the fabricating thereof |
US5506642A (en) * | 1993-12-20 | 1996-04-09 | Fujitsu Limited | Projector with plastic mirror |
US6065843A (en) * | 1996-02-23 | 2000-05-23 | Martinez, Sr.; Eugene Eustaquio | Thin film mirror frame |
JPH09311207A (ja) * | 1996-05-17 | 1997-12-02 | Matsushita Electric Ind Co Ltd | ミラーとフィルムとテレビジョン受像機 |
JP4615701B2 (ja) * | 1999-12-07 | 2011-01-19 | 株式会社フルヤ金属 | 高耐熱性反射膜を用いた積層体 |
EP1213599A3 (en) * | 2000-12-07 | 2004-08-18 | Furuya Metal Co., Ltd. | Heat resistant reflecting layer |
US20050083460A1 (en) * | 2001-07-16 | 2005-04-21 | Nippon Sheet Glass Co., Ltd. | Semi-transmitting mirror-possessing substrate, and semi-transmitting type liquid crystal display apparatus |
US6986586B2 (en) * | 2003-09-23 | 2006-01-17 | Martinez Sr Eugene | Thin film mirror |
US7276289B2 (en) * | 2004-09-21 | 2007-10-02 | Guardian Industries Corp. | First surface mirror with metal oxide nucleation layer |
US7678459B2 (en) * | 2004-09-21 | 2010-03-16 | Guardian Industries Corp. | First surface mirror with silicon-metal oxide nucleation layer |
-
2005
- 2005-06-02 JP JP2005163260A patent/JP2006337770A/ja active Pending
-
2006
- 2006-05-24 WO PCT/JP2006/310293 patent/WO2006129528A1/ja active Application Filing
- 2006-05-24 EP EP06746776A patent/EP1873584A1/en not_active Withdrawn
- 2006-05-24 US US11/910,005 patent/US20080253009A1/en not_active Abandoned
- 2006-05-24 CN CN2006800174613A patent/CN101180574B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5843402A (ja) * | 1981-09-09 | 1983-03-14 | Ricoh Co Ltd | 高反射鏡の製造方法 |
JPH07301705A (ja) * | 1994-05-10 | 1995-11-14 | Kobe Steel Ltd | Al合金薄膜およびAl合金薄膜形成用スパッタリングターゲット |
JP2001235798A (ja) * | 1999-12-17 | 2001-08-31 | Nippon Sheet Glass Co Ltd | 反射ミラー及びこれを用いた背面投写型ディスプレイ |
JP2003029010A (ja) * | 2001-07-16 | 2003-01-29 | Nippon Sheet Glass Co Ltd | 半透過ミラー付き基板及び半透過型液晶表示装置 |
JP2003195022A (ja) * | 2001-12-28 | 2003-07-09 | Asahi Glass Co Ltd | 増反射積層体 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009003063A (ja) * | 2007-06-20 | 2009-01-08 | Central Glass Co Ltd | 表面鏡 |
JP2013225051A (ja) * | 2012-04-23 | 2013-10-31 | Kobe Steel Ltd | 反射膜積層体およびその製造方法 |
US10145992B2 (en) | 2013-02-13 | 2018-12-04 | Guardian Europe S.A.R.L. | Dielectric mirror |
US10620349B2 (en) | 2013-02-13 | 2020-04-14 | Guardian Europe S.A.R.L. | Dielectric mirror |
JP2016530580A (ja) * | 2013-09-18 | 2016-09-29 | サントル・ルクセンブルジョワ・ドゥ・ルシェルシュ・プール・ル・ベール・エ・ラ・セラミック(シーアールブイシー)エスエイアールエルCentre Luxembourgeois de Recherches pour le Verre et la Ceramique (C.R.V.C.) SARL | 誘電体ミラー |
Also Published As
Publication number | Publication date |
---|---|
CN101180574B (zh) | 2010-05-19 |
US20080253009A1 (en) | 2008-10-16 |
WO2006129528A1 (ja) | 2006-12-07 |
EP1873584A1 (en) | 2008-01-02 |
CN101180574A (zh) | 2008-05-14 |
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