JP2006317302A5 - - Google Patents
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- Publication number
- JP2006317302A5 JP2006317302A5 JP2005140662A JP2005140662A JP2006317302A5 JP 2006317302 A5 JP2006317302 A5 JP 2006317302A5 JP 2005140662 A JP2005140662 A JP 2005140662A JP 2005140662 A JP2005140662 A JP 2005140662A JP 2006317302 A5 JP2006317302 A5 JP 2006317302A5
- Authority
- JP
- Japan
- Prior art keywords
- insert ring
- probe card
- support
- wedge member
- head plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005140662A JP4102884B2 (ja) | 2005-05-13 | 2005-05-13 | プローブカードの調整機構及びプローブ装置 |
TW095116594A TWI389229B (zh) | 2005-05-13 | 2006-05-10 | Probe card adjustment mechanism and probe device |
KR1020060042589A KR100787400B1 (ko) | 2005-05-13 | 2006-05-11 | 프로브 카드의 조정 기구 및 프로브 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005140662A JP4102884B2 (ja) | 2005-05-13 | 2005-05-13 | プローブカードの調整機構及びプローブ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006317302A JP2006317302A (ja) | 2006-11-24 |
JP2006317302A5 true JP2006317302A5 (de) | 2007-10-11 |
JP4102884B2 JP4102884B2 (ja) | 2008-06-18 |
Family
ID=37538106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005140662A Expired - Fee Related JP4102884B2 (ja) | 2005-05-13 | 2005-05-13 | プローブカードの調整機構及びプローブ装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4102884B2 (de) |
KR (1) | KR100787400B1 (de) |
TW (1) | TWI389229B (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7471078B2 (en) * | 2006-12-29 | 2008-12-30 | Formfactor, Inc. | Stiffener assembly for use with testing devices |
KR100851392B1 (ko) * | 2007-03-16 | 2008-08-11 | (주)엠투엔 | 평탄화 수단을 구비한 프로브 카드 |
JP4209457B1 (ja) | 2008-02-29 | 2009-01-14 | 三菱重工業株式会社 | 常温接合装置 |
JP5074974B2 (ja) * | 2008-03-25 | 2012-11-14 | 東京エレクトロン株式会社 | プローブ方法及びプローブ方法を記録したプログラム記録媒体 |
JP4875678B2 (ja) * | 2008-09-01 | 2012-02-15 | 三菱重工業株式会社 | 常温接合装置 |
JP4875676B2 (ja) * | 2008-09-01 | 2012-02-15 | 三菱重工業株式会社 | 常温接合装置 |
JP2011064467A (ja) * | 2009-09-15 | 2011-03-31 | Tokyo Electron Ltd | ヘッドプレートのレベリング機構及びプローブ装置 |
JP5826466B2 (ja) * | 2010-06-25 | 2015-12-02 | 東京エレクトロン株式会社 | プローブカードの平行調整機構及び検査装置 |
JP5196334B2 (ja) * | 2010-11-29 | 2013-05-15 | ワイアイケー株式会社 | プローブカード固着ユニット |
CN103869270B (zh) * | 2012-12-12 | 2016-09-28 | 颀中科技(苏州)有限公司 | 探针卡自动维修设备及方法 |
KR20180075021A (ko) * | 2016-12-26 | 2018-07-04 | 에스케이실트론 주식회사 | 회전 샤프트를 포함하는 웨이퍼 지지대 |
KR102115179B1 (ko) * | 2018-11-20 | 2020-06-08 | 주식회사 탑 엔지니어링 | 프로브장치 및 프로브 자세 보정 방법 |
CN114019334B (zh) * | 2020-07-16 | 2024-09-20 | 京元电子股份有限公司 | 具有水平调整模块的测试设备 |
KR102272994B1 (ko) * | 2021-02-23 | 2021-07-05 | 주식회사 프로이천 | 미끄럼 체결식 범용 핀보드 조립체 |
CN114352945B (zh) * | 2021-12-31 | 2023-11-21 | 核动力运行研究所 | 一种candu堆燃料通道压力管检查端部件对接抱卡结构 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3163221B2 (ja) * | 1993-08-25 | 2001-05-08 | 東京エレクトロン株式会社 | プローブ装置 |
-
2005
- 2005-05-13 JP JP2005140662A patent/JP4102884B2/ja not_active Expired - Fee Related
-
2006
- 2006-05-10 TW TW095116594A patent/TWI389229B/zh not_active IP Right Cessation
- 2006-05-11 KR KR1020060042589A patent/KR100787400B1/ko not_active IP Right Cessation
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