JP2006308594A5 - - Google Patents

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Publication number
JP2006308594A5
JP2006308594A5 JP2006123291A JP2006123291A JP2006308594A5 JP 2006308594 A5 JP2006308594 A5 JP 2006308594A5 JP 2006123291 A JP2006123291 A JP 2006123291A JP 2006123291 A JP2006123291 A JP 2006123291A JP 2006308594 A5 JP2006308594 A5 JP 2006308594A5
Authority
JP
Japan
Prior art keywords
input
subassembly
beam splitter
interferometer
interferometer assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006123291A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006308594A (ja
Filing date
Publication date
Priority claimed from US11/118,949 external-priority patent/US7251039B1/en
Application filed filed Critical
Publication of JP2006308594A publication Critical patent/JP2006308594A/ja
Publication of JP2006308594A5 publication Critical patent/JP2006308594A5/ja
Pending legal-status Critical Current

Links

JP2006123291A 2005-04-29 2006-04-27 低い非線形誤差の変位測定干渉計 Pending JP2006308594A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/118,949 US7251039B1 (en) 2005-04-29 2005-04-29 Low non-linear error displacement measuring interferometer

Publications (2)

Publication Number Publication Date
JP2006308594A JP2006308594A (ja) 2006-11-09
JP2006308594A5 true JP2006308594A5 (enExample) 2009-05-28

Family

ID=37111644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006123291A Pending JP2006308594A (ja) 2005-04-29 2006-04-27 低い非線形誤差の変位測定干渉計

Country Status (5)

Country Link
US (1) US7251039B1 (enExample)
JP (1) JP2006308594A (enExample)
CN (1) CN1854678A (enExample)
DE (1) DE102006017253A1 (enExample)
NL (1) NL1031618C2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090135430A1 (en) * 2007-11-26 2009-05-28 Miao Zhu Systems and Methods for Reducing Nonlinearity in an Interferometer
KR100898327B1 (ko) 2008-03-26 2009-05-20 한국과학기술원 파장판의 각도 정렬을 통한 간섭계의 비선형 오차 보상방법
NL2003134C (en) * 2008-09-11 2010-03-16 Univ Delft Tech LASER INTERFEROMETER.
CN102147505B (zh) 2010-02-08 2015-06-03 菲尼萨公司 增强型多体式光学设备
CN101782368A (zh) * 2010-03-03 2010-07-21 福州高意通讯有限公司 一种干涉仪装置
JP5588769B2 (ja) * 2010-07-01 2014-09-10 株式会社 光コム 光学式計測装置
TW201219746A (en) * 2010-11-01 2012-05-16 Prec Machinery Res & Amp Dev Ct used in gantry type processing machine for measuring errors in linear displacement of lead screws
JP6271493B2 (ja) 2015-05-25 2018-01-31 Ckd株式会社 三次元計測装置
TWI619927B (zh) * 2015-05-25 2018-04-01 Ckd Corp Three-dimensional measuring device
US11156449B2 (en) 2016-01-31 2021-10-26 Keysight Technologies, Inc. Separated beams displacement measurement with a grating
US20190113329A1 (en) 2017-10-12 2019-04-18 Keysight Technologies, Inc. Systems and methods for cyclic error correction in a heterodyne interferometer
JP7123333B2 (ja) * 2018-03-06 2022-08-23 中央精機株式会社 変位計測装置
CN115729059B (zh) * 2021-08-31 2025-10-10 上海微电子装备（集团）股份有限公司 对准装置及对准方法
WO2025176431A1 (en) * 2024-02-23 2025-08-28 Asml Netherlands B.V. Interferometer system and lithographic apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806608A1 (de) * 1987-03-18 1988-09-29 Deutsches Textilforschzentrum Verfahren zur geschwindigkeits- und/oder laengenmessung von endlosen textilen warenbahnen sowie vorrichtung zur durchfuehrung des verfahrens
US5064289A (en) * 1989-02-23 1991-11-12 Hewlett-Packard Company Linear-and-angular measuring plane mirror interferometer
US5677768A (en) * 1996-07-03 1997-10-14 Hewlett-Packard Company Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame
US6313918B1 (en) * 1998-09-18 2001-11-06 Zygo Corporation Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
US6542247B2 (en) * 2001-06-06 2003-04-01 Agilent Technologies, Inc. Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies
US7009710B2 (en) * 2001-08-20 2006-03-07 Agilent Technologies, Inc. Direct combination of fiber optic light beams
JP4030960B2 (ja) * 2001-08-23 2008-01-09 ザイゴ コーポレーション 入力ビームの方向の動的干渉分光制御

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