NL1031618C2 - Interferometer voor kleine niet-lineaire foutverplaatsingsmeting. - Google Patents

Interferometer voor kleine niet-lineaire foutverplaatsingsmeting. Download PDF

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Publication number
NL1031618C2
NL1031618C2 NL1031618A NL1031618A NL1031618C2 NL 1031618 C2 NL1031618 C2 NL 1031618C2 NL 1031618 A NL1031618 A NL 1031618A NL 1031618 A NL1031618 A NL 1031618A NL 1031618 C2 NL1031618 C2 NL 1031618C2
Authority
NL
Netherlands
Prior art keywords
assembly
interferometer
input
sub
polarizing
Prior art date
Application number
NL1031618A
Other languages
English (en)
Dutch (nl)
Other versions
NL1031618A1 (nl
Inventor
William Clay Schluchter
Robert Todd Belt
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of NL1031618A1 publication Critical patent/NL1031618A1/nl
Application granted granted Critical
Publication of NL1031618C2 publication Critical patent/NL1031618C2/nl

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
NL1031618A 2005-04-29 2006-04-19 Interferometer voor kleine niet-lineaire foutverplaatsingsmeting. NL1031618C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11894905 2005-04-29
US11/118,949 US7251039B1 (en) 2005-04-29 2005-04-29 Low non-linear error displacement measuring interferometer

Publications (2)

Publication Number Publication Date
NL1031618A1 NL1031618A1 (nl) 2006-11-01
NL1031618C2 true NL1031618C2 (nl) 2007-09-25

Family

ID=37111644

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1031618A NL1031618C2 (nl) 2005-04-29 2006-04-19 Interferometer voor kleine niet-lineaire foutverplaatsingsmeting.

Country Status (5)

Country Link
US (1) US7251039B1 (enExample)
JP (1) JP2006308594A (enExample)
CN (1) CN1854678A (enExample)
DE (1) DE102006017253A1 (enExample)
NL (1) NL1031618C2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090135430A1 (en) * 2007-11-26 2009-05-28 Miao Zhu Systems and Methods for Reducing Nonlinearity in an Interferometer
KR100898327B1 (ko) 2008-03-26 2009-05-20 한국과학기술원 파장판의 각도 정렬을 통한 간섭계의 비선형 오차 보상방법
NL2003134C (en) * 2008-09-11 2010-03-16 Univ Delft Tech LASER INTERFEROMETER.
CN102147505B (zh) 2010-02-08 2015-06-03 菲尼萨公司 增强型多体式光学设备
CN101782368A (zh) * 2010-03-03 2010-07-21 福州高意通讯有限公司 一种干涉仪装置
JP5588769B2 (ja) * 2010-07-01 2014-09-10 株式会社 光コム 光学式計測装置
TW201219746A (en) * 2010-11-01 2012-05-16 Prec Machinery Res & Amp Dev Ct used in gantry type processing machine for measuring errors in linear displacement of lead screws
JP6271493B2 (ja) 2015-05-25 2018-01-31 Ckd株式会社 三次元計測装置
TWI619927B (zh) * 2015-05-25 2018-04-01 Ckd Corp Three-dimensional measuring device
US11156449B2 (en) 2016-01-31 2021-10-26 Keysight Technologies, Inc. Separated beams displacement measurement with a grating
US20190113329A1 (en) 2017-10-12 2019-04-18 Keysight Technologies, Inc. Systems and methods for cyclic error correction in a heterodyne interferometer
JP7123333B2 (ja) * 2018-03-06 2022-08-23 中央精機株式会社 変位計測装置
CN115729059B (zh) * 2021-08-31 2025-10-10 上海微电子装备（集团）股份有限公司 对准装置及对准方法
WO2025176431A1 (en) * 2024-02-23 2025-08-28 Asml Netherlands B.V. Interferometer system and lithographic apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1286133A2 (en) * 2001-08-20 2003-02-26 Agilent Technologies Inc. (a Delaware Corporation) Direct combination of fiber optic light beams
US20030043384A1 (en) * 2001-08-23 2003-03-06 Hill Henry A. Dynamic interferometer controlling direction of input beam
US6542247B2 (en) * 2001-06-06 2003-04-01 Agilent Technologies, Inc. Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806608A1 (de) * 1987-03-18 1988-09-29 Deutsches Textilforschzentrum Verfahren zur geschwindigkeits- und/oder laengenmessung von endlosen textilen warenbahnen sowie vorrichtung zur durchfuehrung des verfahrens
US5064289A (en) * 1989-02-23 1991-11-12 Hewlett-Packard Company Linear-and-angular measuring plane mirror interferometer
US5677768A (en) * 1996-07-03 1997-10-14 Hewlett-Packard Company Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame
US6313918B1 (en) * 1998-09-18 2001-11-06 Zygo Corporation Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6542247B2 (en) * 2001-06-06 2003-04-01 Agilent Technologies, Inc. Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies
EP1286133A2 (en) * 2001-08-20 2003-02-26 Agilent Technologies Inc. (a Delaware Corporation) Direct combination of fiber optic light beams
US20030043384A1 (en) * 2001-08-23 2003-03-06 Hill Henry A. Dynamic interferometer controlling direction of input beam

Also Published As

Publication number Publication date
NL1031618A1 (nl) 2006-11-01
CN1854678A (zh) 2006-11-01
JP2006308594A (ja) 2006-11-09
US20070171426A1 (en) 2007-07-26
DE102006017253A1 (de) 2006-11-09
US7251039B1 (en) 2007-07-31

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Effective date: 20070523

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Effective date: 20170501