CN1854678A - 低非线性误差的位移测量干涉仪 - Google Patents

低非线性误差的位移测量干涉仪 Download PDF

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Publication number
CN1854678A
CN1854678A CN200610066827.8A CN200610066827A CN1854678A CN 1854678 A CN1854678 A CN 1854678A CN 200610066827 A CN200610066827 A CN 200610066827A CN 1854678 A CN1854678 A CN 1854678A
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CN
China
Prior art keywords
component
interferometer
sub
input
rhombohedreon
Prior art date
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Pending
Application number
CN200610066827.8A
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English (en)
Chinese (zh)
Inventor
威廉·克莱·施卢赫特尔
罗伯特·托德·贝特
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Agilent Technologies Inc
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Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of CN1854678A publication Critical patent/CN1854678A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CN200610066827.8A 2005-04-29 2006-03-29 低非线性误差的位移测量干涉仪 Pending CN1854678A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/118,949 2005-04-29
US11/118,949 US7251039B1 (en) 2005-04-29 2005-04-29 Low non-linear error displacement measuring interferometer

Publications (1)

Publication Number Publication Date
CN1854678A true CN1854678A (zh) 2006-11-01

Family

ID=37111644

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200610066827.8A Pending CN1854678A (zh) 2005-04-29 2006-03-29 低非线性误差的位移测量干涉仪

Country Status (5)

Country Link
US (1) US7251039B1 (enExample)
JP (1) JP2006308594A (enExample)
CN (1) CN1854678A (enExample)
DE (1) DE102006017253A1 (enExample)
NL (1) NL1031618C2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101782368A (zh) * 2010-03-03 2010-07-21 福州高意通讯有限公司 一种干涉仪装置
CN102147505A (zh) * 2010-02-08 2011-08-10 菲尼萨公司 增强型多体式光学设备
TWI425189B (enExample) * 2010-11-01 2014-02-01
CN115729059A (zh) * 2021-08-31 2023-03-03 上海微电子装备（集团）股份有限公司 对准装置及对准方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090135430A1 (en) * 2007-11-26 2009-05-28 Miao Zhu Systems and Methods for Reducing Nonlinearity in an Interferometer
KR100898327B1 (ko) 2008-03-26 2009-05-20 한국과학기술원 파장판의 각도 정렬을 통한 간섭계의 비선형 오차 보상방법
NL2003134C (en) * 2008-09-11 2010-03-16 Univ Delft Tech LASER INTERFEROMETER.
JP5588769B2 (ja) * 2010-07-01 2014-09-10 株式会社 光コム 光学式計測装置
JP6271493B2 (ja) 2015-05-25 2018-01-31 Ckd株式会社 三次元計測装置
TWI619927B (zh) * 2015-05-25 2018-04-01 Ckd Corp Three-dimensional measuring device
US11156449B2 (en) 2016-01-31 2021-10-26 Keysight Technologies, Inc. Separated beams displacement measurement with a grating
US20190113329A1 (en) 2017-10-12 2019-04-18 Keysight Technologies, Inc. Systems and methods for cyclic error correction in a heterodyne interferometer
JP7123333B2 (ja) * 2018-03-06 2022-08-23 中央精機株式会社 変位計測装置
WO2025176431A1 (en) * 2024-02-23 2025-08-28 Asml Netherlands B.V. Interferometer system and lithographic apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806608A1 (de) * 1987-03-18 1988-09-29 Deutsches Textilforschzentrum Verfahren zur geschwindigkeits- und/oder laengenmessung von endlosen textilen warenbahnen sowie vorrichtung zur durchfuehrung des verfahrens
US5064289A (en) * 1989-02-23 1991-11-12 Hewlett-Packard Company Linear-and-angular measuring plane mirror interferometer
US5677768A (en) * 1996-07-03 1997-10-14 Hewlett-Packard Company Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame
US6313918B1 (en) * 1998-09-18 2001-11-06 Zygo Corporation Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
US6542247B2 (en) * 2001-06-06 2003-04-01 Agilent Technologies, Inc. Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies
US7009710B2 (en) * 2001-08-20 2006-03-07 Agilent Technologies, Inc. Direct combination of fiber optic light beams
JP4030960B2 (ja) * 2001-08-23 2008-01-09 ザイゴ コーポレーション 入力ビームの方向の動的干渉分光制御

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102147505A (zh) * 2010-02-08 2011-08-10 菲尼萨公司 增强型多体式光学设备
US8903206B2 (en) 2010-02-08 2014-12-02 Finisar Corporation Reinforced multi-body optical devices
CN101782368A (zh) * 2010-03-03 2010-07-21 福州高意通讯有限公司 一种干涉仪装置
TWI425189B (enExample) * 2010-11-01 2014-02-01
CN115729059A (zh) * 2021-08-31 2023-03-03 上海微电子装备（集团）股份有限公司 对准装置及对准方法

Also Published As

Publication number Publication date
NL1031618A1 (nl) 2006-11-01
NL1031618C2 (nl) 2007-09-25
JP2006308594A (ja) 2006-11-09
US20070171426A1 (en) 2007-07-26
DE102006017253A1 (de) 2006-11-09
US7251039B1 (en) 2007-07-31

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