JP2006308594A - 低い非線形誤差の変位測定干渉計 - Google Patents

低い非線形誤差の変位測定干渉計 Download PDF

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Publication number
JP2006308594A
JP2006308594A JP2006123291A JP2006123291A JP2006308594A JP 2006308594 A JP2006308594 A JP 2006308594A JP 2006123291 A JP2006123291 A JP 2006123291A JP 2006123291 A JP2006123291 A JP 2006123291A JP 2006308594 A JP2006308594 A JP 2006308594A
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Japan
Prior art keywords
subassembly
interferometer
laser beam
input
polarizing
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JP2006123291A
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English (en)
Japanese (ja)
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JP2006308594A5 (enExample
Inventor
William C Schluchter
クレイ シュルフター ウィリアム
Robert T Belt
トッド ベルト ロバート
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Agilent Technologies Inc
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Agilent Technologies Inc
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Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2006308594A publication Critical patent/JP2006308594A/ja
Publication of JP2006308594A5 publication Critical patent/JP2006308594A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2006123291A 2005-04-29 2006-04-27 低い非線形誤差の変位測定干渉計 Pending JP2006308594A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/118,949 US7251039B1 (en) 2005-04-29 2005-04-29 Low non-linear error displacement measuring interferometer

Publications (2)

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JP2006308594A true JP2006308594A (ja) 2006-11-09
JP2006308594A5 JP2006308594A5 (enExample) 2009-05-28

Family

ID=37111644

Family Applications (1)

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JP2006123291A Pending JP2006308594A (ja) 2005-04-29 2006-04-27 低い非線形誤差の変位測定干渉計

Country Status (5)

Country Link
US (1) US7251039B1 (enExample)
JP (1) JP2006308594A (enExample)
CN (1) CN1854678A (enExample)
DE (1) DE102006017253A1 (enExample)
NL (1) NL1031618C2 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100898327B1 (ko) 2008-03-26 2009-05-20 한국과학기술원 파장판의 각도 정렬을 통한 간섭계의 비선형 오차 보상방법
JP2012013574A (ja) * 2010-07-01 2012-01-19 Optical Comb Inc 光学式計測装置及びその干渉計用プリズム。
WO2016190151A1 (ja) * 2015-05-25 2016-12-01 Ckd株式会社 三次元計測装置
CN107110640A (zh) * 2015-05-25 2017-08-29 Ckd株式会社 三维测量装置
JP2019152615A (ja) * 2018-03-06 2019-09-12 中央精機株式会社 変位計測装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090135430A1 (en) * 2007-11-26 2009-05-28 Miao Zhu Systems and Methods for Reducing Nonlinearity in an Interferometer
NL2003134C (en) * 2008-09-11 2010-03-16 Univ Delft Tech LASER INTERFEROMETER.
CN102147505B (zh) 2010-02-08 2015-06-03 菲尼萨公司 增强型多体式光学设备
CN101782368A (zh) * 2010-03-03 2010-07-21 福州高意通讯有限公司 一种干涉仪装置
TW201219746A (en) * 2010-11-01 2012-05-16 Prec Machinery Res & Amp Dev Ct used in gantry type processing machine for measuring errors in linear displacement of lead screws
US11156449B2 (en) 2016-01-31 2021-10-26 Keysight Technologies, Inc. Separated beams displacement measurement with a grating
US20190113329A1 (en) 2017-10-12 2019-04-18 Keysight Technologies, Inc. Systems and methods for cyclic error correction in a heterodyne interferometer
CN115729059B (zh) * 2021-08-31 2025-10-10 上海微电子装备（集团）股份有限公司 对准装置及对准方法
WO2025176431A1 (en) * 2024-02-23 2025-08-28 Asml Netherlands B.V. Interferometer system and lithographic apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290502A (ja) * 1989-02-23 1990-11-30 Hewlett Packard Co <Hp> 干渉計
JPH1082609A (ja) * 1996-07-03 1998-03-31 Hewlett Packard Co <Hp> 干渉計による変位測定装置及び方法
JP2003075615A (ja) * 2001-06-06 2003-03-12 Agilent Technol Inc 一体型光学構造を有する多軸干渉計と偏菱形組立体の製造方法
JP2003161602A (ja) * 2001-08-20 2003-06-06 Agilent Technol Inc 光ファイバ光学系による干渉計、及びそのためのビーム結合ユニット及び操作器システム。

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806608A1 (de) * 1987-03-18 1988-09-29 Deutsches Textilforschzentrum Verfahren zur geschwindigkeits- und/oder laengenmessung von endlosen textilen warenbahnen sowie vorrichtung zur durchfuehrung des verfahrens
US6313918B1 (en) * 1998-09-18 2001-11-06 Zygo Corporation Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
JP4030960B2 (ja) * 2001-08-23 2008-01-09 ザイゴ コーポレーション 入力ビームの方向の動的干渉分光制御

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290502A (ja) * 1989-02-23 1990-11-30 Hewlett Packard Co <Hp> 干渉計
JPH1082609A (ja) * 1996-07-03 1998-03-31 Hewlett Packard Co <Hp> 干渉計による変位測定装置及び方法
JP2003075615A (ja) * 2001-06-06 2003-03-12 Agilent Technol Inc 一体型光学構造を有する多軸干渉計と偏菱形組立体の製造方法
JP2003161602A (ja) * 2001-08-20 2003-06-06 Agilent Technol Inc 光ファイバ光学系による干渉計、及びそのためのビーム結合ユニット及び操作器システム。

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100898327B1 (ko) 2008-03-26 2009-05-20 한국과학기술원 파장판의 각도 정렬을 통한 간섭계의 비선형 오차 보상방법
JP2012013574A (ja) * 2010-07-01 2012-01-19 Optical Comb Inc 光学式計測装置及びその干渉計用プリズム。
WO2016190151A1 (ja) * 2015-05-25 2016-12-01 Ckd株式会社 三次元計測装置
CN107110640A (zh) * 2015-05-25 2017-08-29 Ckd株式会社 三维测量装置
CN107110640B (zh) * 2015-05-25 2019-08-13 Ckd株式会社 三维测量装置
US10704888B2 (en) 2015-05-25 2020-07-07 Ckd Corporation Three-dimensional measurement device
JP2019152615A (ja) * 2018-03-06 2019-09-12 中央精機株式会社 変位計測装置
JP7123333B2 (ja) 2018-03-06 2022-08-23 中央精機株式会社 変位計測装置

Also Published As

Publication number Publication date
NL1031618A1 (nl) 2006-11-01
NL1031618C2 (nl) 2007-09-25
CN1854678A (zh) 2006-11-01
US20070171426A1 (en) 2007-07-26
DE102006017253A1 (de) 2006-11-09
US7251039B1 (en) 2007-07-31

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