JP2006265057A - フッ素循環方式による七フッ化ヨウ素の製造方法 - Google Patents
フッ素循環方式による七フッ化ヨウ素の製造方法 Download PDFInfo
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- JP2006265057A JP2006265057A JP2005087731A JP2005087731A JP2006265057A JP 2006265057 A JP2006265057 A JP 2006265057A JP 2005087731 A JP2005087731 A JP 2005087731A JP 2005087731 A JP2005087731 A JP 2005087731A JP 2006265057 A JP2006265057 A JP 2006265057A
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- Prior art keywords
- iodine
- fluorine gas
- fluorine
- gas
- reactor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 229910052731 fluorine Inorganic materials 0.000 title claims abstract description 61
- 239000011737 fluorine Substances 0.000 title claims abstract description 61
- XRURPHMPXJDCOO-UHFFFAOYSA-N iodine heptafluoride Chemical compound FI(F)(F)(F)(F)(F)F XRURPHMPXJDCOO-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 14
- CEBDXRXVGUQZJK-UHFFFAOYSA-N 2-methyl-1-benzofuran-7-carboxylic acid Chemical compound C1=CC(C(O)=O)=C2OC(C)=CC2=C1 CEBDXRXVGUQZJK-UHFFFAOYSA-N 0.000 claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 239000002994 raw material Substances 0.000 claims description 15
- 239000007789 gas Substances 0.000 abstract description 65
- 238000001816 cooling Methods 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 4
- 230000007797 corrosion Effects 0.000 abstract description 4
- 239000007795 chemical reaction product Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract 5
- 230000003247 decreasing effect Effects 0.000 abstract 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 abstract 1
- 229910052740 iodine Inorganic materials 0.000 abstract 1
- 239000011630 iodine Substances 0.000 abstract 1
- 238000011084 recovery Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 150000003671 uranium compounds Chemical class 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000003570 air Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- PDJAZCSYYQODQF-UHFFFAOYSA-N iodine monofluoride Chemical compound IF PDJAZCSYYQODQF-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002901 radioactive waste Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- SANRKQGLYCLAFE-UHFFFAOYSA-H uranium hexafluoride Chemical compound F[U](F)(F)(F)(F)F SANRKQGLYCLAFE-UHFFFAOYSA-H 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
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- Treating Waste Gases (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
【解決手段】 フッ素ガスと予めガス化した五フッ化ヨウ素ガスを混合し、両者の反応温度以上の温度に加熱した反応器20に導入して反応させ、反応生成物である七フッ化ヨウ素を冷却捕集し、未反応の五フッ化ヨウ素を冷却捕集して原料として再使用すると共に、未反応のフッ素ガスを原料としてコンプレッサ50で循環供給することにより七フッ化ヨウ素を製造する。
【選択図】 図1
Description
20 反応器
30 F2ボンベ
40 IF5コールドトラップ
44 IF7コールドトラップ
50 循環用コンプレッサ
62 IF5回収ボンベ
66 IF7回収ボンベ
Claims (3)
- フッ素ガスと予めガス化した五フッ化ヨウ素ガスを合流し、両者の反応温度以上の温度に加熱した反応器に導入して反応させ、反応生成物である七フッ化ヨウ素を冷却捕集し、未反応の五フッ化ヨウ素を冷却捕集して原料として再使用すると共に、未反応のフッ素ガスを原料としてコンプレッサで循環供給することを特徴とするフッ素循環方式による七フッ化ヨウ素の製造方法。
- 五フッ化ヨウ素のボンベを加温してガス化させ、加温した配管ラインを通して五フッ化ヨウ素をガス化したままの状態で反応器入口部に導き、フッ素ガスと合流させて混合し、大気圧以下の反応器内に導入する請求項1記載のフッ素循環方式による七フッ化ヨウ素の製造方法。
- 反応器入口部における五フッ化ヨウ素とフッ素ガスの混合については、フッ素ガスを反応器入口部に供給し、その後フッ素ガスの供給を一旦停止した上で、反応器入口部のフッ素ガスの圧力よりも高い圧力で五フッ化ヨウ素を供給するように行う請求項2記載のフッ素循環方式による七フッ化ヨウ素の製造方法。
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JP2005087731A JP4369891B2 (ja) | 2005-03-25 | 2005-03-25 | フッ素循環方式による七フッ化ヨウ素の製造方法 |
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JP2005087731A JP4369891B2 (ja) | 2005-03-25 | 2005-03-25 | フッ素循環方式による七フッ化ヨウ素の製造方法 |
Publications (2)
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JP2006265057A true JP2006265057A (ja) | 2006-10-05 |
JP4369891B2 JP4369891B2 (ja) | 2009-11-25 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008155965A1 (ja) | 2007-06-18 | 2008-12-24 | Central Glass Company, Limited | 七フッ化ヨウ素の製造法 |
WO2010055768A1 (ja) * | 2008-11-12 | 2010-05-20 | セントラル硝子株式会社 | 四フッ化ゲルマニウムの製造方法 |
EP2832686A1 (en) * | 2013-08-02 | 2015-02-04 | Central Glass Company, Limited | IF7-Derived iodine fluoride compound recovery method and recovery device |
JP2015147704A (ja) * | 2014-02-06 | 2015-08-20 | セントラル硝子株式会社 | 七フッ化ヨウ素の製造方法 |
JP2016113337A (ja) * | 2014-12-17 | 2016-06-23 | セントラル硝子株式会社 | 七フッ化ヨウ素の製造方法 |
JP2016141586A (ja) * | 2015-01-30 | 2016-08-08 | セントラル硝子株式会社 | 五フッ化ヨウ素の製造方法 |
KR20200136944A (ko) | 2018-03-29 | 2020-12-08 | 샌트랄 글래스 컴퍼니 리미티드 | 기판 처리용 가스, 보관 용기 및 기판 처리 방법 |
WO2024048486A1 (ja) * | 2022-08-29 | 2024-03-07 | 株式会社レゾナック | 七フッ化ヨウ素の製造方法 |
-
2005
- 2005-03-25 JP JP2005087731A patent/JP4369891B2/ja active Active
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008155965A1 (ja) | 2007-06-18 | 2008-12-24 | Central Glass Company, Limited | 七フッ化ヨウ素の製造法 |
JP2009023896A (ja) * | 2007-06-18 | 2009-02-05 | Central Glass Co Ltd | 七フッ化ヨウ素の製造法 |
JP4693823B2 (ja) * | 2007-06-18 | 2011-06-01 | セントラル硝子株式会社 | 七フッ化ヨウ素の製造法 |
US7976817B2 (en) | 2007-06-18 | 2011-07-12 | Central Glass Company, Limited | Method for production of iodine heptafluoride |
WO2010055768A1 (ja) * | 2008-11-12 | 2010-05-20 | セントラル硝子株式会社 | 四フッ化ゲルマニウムの製造方法 |
JP2010116282A (ja) * | 2008-11-12 | 2010-05-27 | Central Glass Co Ltd | 四フッ化ゲルマニウムの製造方法 |
US9676626B2 (en) | 2013-08-02 | 2017-06-13 | Central Glass Company, Limited | IF7-derived iodine fluoride compound recovery method and recovery device |
JP2015030638A (ja) * | 2013-08-02 | 2015-02-16 | セントラル硝子株式会社 | If7由来フッ化ヨウ素化合物の回収方法及び回収装置 |
KR101605255B1 (ko) * | 2013-08-02 | 2016-03-21 | 샌트랄 글래스 컴퍼니 리미티드 | 7불화 요오드 유래 불화 요오드 화합물의 회수 방법 및 회수 장치 |
EP2832686A1 (en) * | 2013-08-02 | 2015-02-04 | Central Glass Company, Limited | IF7-Derived iodine fluoride compound recovery method and recovery device |
JP2015147704A (ja) * | 2014-02-06 | 2015-08-20 | セントラル硝子株式会社 | 七フッ化ヨウ素の製造方法 |
JP2016113337A (ja) * | 2014-12-17 | 2016-06-23 | セントラル硝子株式会社 | 七フッ化ヨウ素の製造方法 |
JP2016141586A (ja) * | 2015-01-30 | 2016-08-08 | セントラル硝子株式会社 | 五フッ化ヨウ素の製造方法 |
KR20200136944A (ko) | 2018-03-29 | 2020-12-08 | 샌트랄 글래스 컴퍼니 리미티드 | 기판 처리용 가스, 보관 용기 및 기판 처리 방법 |
US11447697B2 (en) | 2018-03-29 | 2022-09-20 | Central Glass Company, Limited | Substrate processing gas, storage container, and substrate processing method |
WO2024048486A1 (ja) * | 2022-08-29 | 2024-03-07 | 株式会社レゾナック | 七フッ化ヨウ素の製造方法 |
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