JP4369891B2 - フッ素循環方式による七フッ化ヨウ素の製造方法 - Google Patents
フッ素循環方式による七フッ化ヨウ素の製造方法 Download PDFInfo
- Publication number
- JP4369891B2 JP4369891B2 JP2005087731A JP2005087731A JP4369891B2 JP 4369891 B2 JP4369891 B2 JP 4369891B2 JP 2005087731 A JP2005087731 A JP 2005087731A JP 2005087731 A JP2005087731 A JP 2005087731A JP 4369891 B2 JP4369891 B2 JP 4369891B2
- Authority
- JP
- Japan
- Prior art keywords
- fluorine
- gas
- iodine
- reactor
- fluorine gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims description 56
- 229910052731 fluorine Inorganic materials 0.000 title claims description 56
- 239000011737 fluorine Substances 0.000 title claims description 56
- XRURPHMPXJDCOO-UHFFFAOYSA-N iodine heptafluoride Chemical compound FI(F)(F)(F)(F)(F)F XRURPHMPXJDCOO-UHFFFAOYSA-N 0.000 title claims description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000000034 method Methods 0.000 title claims description 13
- CEBDXRXVGUQZJK-UHFFFAOYSA-N 2-methyl-1-benzofuran-7-carboxylic acid Chemical compound C1=CC(C(O)=O)=C2OC(C)=CC2=C1 CEBDXRXVGUQZJK-UHFFFAOYSA-N 0.000 claims description 41
- 239000002994 raw material Substances 0.000 claims description 15
- 239000007789 gas Substances 0.000 description 59
- 238000011084 recovery Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 150000003671 uranium compounds Chemical class 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000003570 air Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- PDJAZCSYYQODQF-UHFFFAOYSA-N iodine monofluoride Chemical compound IF PDJAZCSYYQODQF-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002901 radioactive waste Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- SANRKQGLYCLAFE-UHFFFAOYSA-H uranium hexafluoride Chemical compound F[U](F)(F)(F)(F)F SANRKQGLYCLAFE-UHFFFAOYSA-H 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
Images
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Treating Waste Gases (AREA)
Description
20 反応器
30 F2ボンベ
40 IF5コールドトラップ
44 IF7コールドトラップ
50 循環用コンプレッサ
62 IF5回収ボンベ
66 IF7回収ボンベ
Claims (3)
- フッ素ガスと予めガス化した五フッ化ヨウ素ガスを合流し、両者の反応温度以上の温度に加熱した反応器に導入して反応させ、反応生成物である七フッ化ヨウ素を冷却捕集し、未反応の五フッ化ヨウ素を冷却捕集して原料として再使用すると共に、未反応のフッ素ガスを原料としてコンプレッサで循環供給することを特徴とするフッ素循環方式による七フッ化ヨウ素の製造方法。
- 五フッ化ヨウ素のボンベを加温してガス化させ、加温した配管ラインを通して五フッ化ヨウ素をガス化したままの状態で反応器入口部に導き、フッ素ガスと合流させて混合し、大気圧以下の反応器内に導入する請求項1記載のフッ素循環方式による七フッ化ヨウ素の製造方法。
- 反応器入口部における五フッ化ヨウ素とフッ素ガスの混合については、フッ素ガスを反応器入口部に供給し、その後フッ素ガスの供給を一旦停止した上で、反応器入口部のフッ素ガスの圧力よりも高い圧力で五フッ化ヨウ素を供給するように行う請求項2記載のフッ素循環方式による七フッ化ヨウ素の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005087731A JP4369891B2 (ja) | 2005-03-25 | 2005-03-25 | フッ素循環方式による七フッ化ヨウ素の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005087731A JP4369891B2 (ja) | 2005-03-25 | 2005-03-25 | フッ素循環方式による七フッ化ヨウ素の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006265057A JP2006265057A (ja) | 2006-10-05 |
JP4369891B2 true JP4369891B2 (ja) | 2009-11-25 |
Family
ID=37201403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005087731A Active JP4369891B2 (ja) | 2005-03-25 | 2005-03-25 | フッ素循環方式による七フッ化ヨウ素の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4369891B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4693823B2 (ja) | 2007-06-18 | 2011-06-01 | セントラル硝子株式会社 | 七フッ化ヨウ素の製造法 |
JP2010116282A (ja) * | 2008-11-12 | 2010-05-27 | Central Glass Co Ltd | 四フッ化ゲルマニウムの製造方法 |
JP6201496B2 (ja) * | 2013-08-02 | 2017-09-27 | セントラル硝子株式会社 | If7由来フッ化ヨウ素化合物の回収方法及び回収装置 |
JP6252214B2 (ja) * | 2014-02-06 | 2017-12-27 | セントラル硝子株式会社 | 七フッ化ヨウ素の製造方法 |
JP6372340B2 (ja) * | 2014-12-17 | 2018-08-15 | セントラル硝子株式会社 | 七フッ化ヨウ素の製造方法 |
JP6467955B2 (ja) * | 2015-01-30 | 2019-02-13 | セントラル硝子株式会社 | 五フッ化ヨウ素の製造方法 |
JP7185148B2 (ja) | 2018-03-29 | 2022-12-07 | セントラル硝子株式会社 | 基板処理用ガス、保管容器および基板処理方法 |
WO2024048486A1 (ja) * | 2022-08-29 | 2024-03-07 | 株式会社レゾナック | 七フッ化ヨウ素の製造方法 |
-
2005
- 2005-03-25 JP JP2005087731A patent/JP4369891B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2006265057A (ja) | 2006-10-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4369891B2 (ja) | フッ素循環方式による七フッ化ヨウ素の製造方法 | |
WO2023026721A1 (ja) | 重水素回収方法及び重水素回収設備 | |
JP2015030638A (ja) | If7由来フッ化ヨウ素化合物の回収方法及び回収装置 | |
JP3785418B1 (ja) | フッ酸生成装置及びフッ酸生成方法 | |
JP5544895B2 (ja) | フッ素ガス生成装置 | |
US7572428B2 (en) | Process for producing fluorine gas | |
WO2013145955A1 (ja) | フッ素ガスの製造方法とその装置 | |
US6179902B1 (en) | Apparatus for recovering, refining, and storing hydrogen gas | |
US6790428B2 (en) | Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride | |
JP2007176770A (ja) | 高純度フッ素ガスの製造方法および高純度フッ素ガス製造装置 | |
JP2007182359A (ja) | アンモニアの回収方法 | |
CN113905979B (zh) | 五氟化溴的制造方法 | |
JP2010194495A (ja) | オゾン混合物の排出方法および排出装置 | |
WO1998027005A1 (en) | Device and method for the storage, transportation and production of active fluorine | |
CA2204899A1 (en) | Catalytic process and apparatus for chlorine dioxide generation | |
JP5425483B2 (ja) | オゾンを安全に取扱うためのプロセス制御方法 | |
JP4828038B2 (ja) | 高濃度ホスフィンガスの製造方法 | |
JP4951760B2 (ja) | 水熱酸化分解処理装置および肥料の製造方法 | |
RU2275705C2 (ru) | Способ переработки фторидов тяжелых металлов | |
JP4507934B2 (ja) | ハロゲン化合物の処理装置 | |
WO2004064125A1 (en) | Gas feed line structure | |
JP5402604B2 (ja) | フッ素ガス生成装置 | |
JP2008155070A (ja) | ハロゲン化合物の分解処理方法及び装置 | |
CN116902922A (zh) | 一种制备工业级五氟化氯的装置及制备方法 | |
JP2004114001A (ja) | 水熱酸化反応装置および水熱酸化方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060830 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20070618 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090813 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090828 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4369891 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120904 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130904 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |