JP2006233283A5 - - Google Patents

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Publication number
JP2006233283A5
JP2006233283A5 JP2005050064A JP2005050064A JP2006233283A5 JP 2006233283 A5 JP2006233283 A5 JP 2006233283A5 JP 2005050064 A JP2005050064 A JP 2005050064A JP 2005050064 A JP2005050064 A JP 2005050064A JP 2006233283 A5 JP2006233283 A5 JP 2006233283A5
Authority
JP
Japan
Prior art keywords
wafer
wafer stage
diameter
stage
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005050064A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006233283A (ja
JP4336320B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2005050064A external-priority patent/JP4336320B2/ja
Priority to JP2005050064A priority Critical patent/JP4336320B2/ja
Priority to US11/307,284 priority patent/US20060281314A1/en
Priority to TW095104424A priority patent/TWI316744B/zh
Priority to KR1020060013967A priority patent/KR101089766B1/ko
Priority to EP06290313A priority patent/EP1696470A3/en
Priority to CN2006100514176A priority patent/CN1825556B/zh
Publication of JP2006233283A publication Critical patent/JP2006233283A/ja
Publication of JP2006233283A5 publication Critical patent/JP2006233283A5/ja
Publication of JP4336320B2 publication Critical patent/JP4336320B2/ja
Application granted granted Critical
Priority to US13/169,831 priority patent/US8986522B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2005050064A 2005-02-25 2005-02-25 ウエハホルダ Expired - Lifetime JP4336320B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2005050064A JP4336320B2 (ja) 2005-02-25 2005-02-25 ウエハホルダ
US11/307,284 US20060281314A1 (en) 2005-02-25 2006-01-30 Wafer Holder And Method Of Holding A Wafer
TW095104424A TWI316744B (en) 2005-02-25 2006-02-09 Wafer holder
KR1020060013967A KR101089766B1 (ko) 2005-02-25 2006-02-14 웨이퍼 홀더
EP06290313A EP1696470A3 (en) 2005-02-25 2006-02-24 Wafer holder and method of holding a wafer
CN2006100514176A CN1825556B (zh) 2005-02-25 2006-02-24 晶片支架
US13/169,831 US8986522B2 (en) 2005-02-25 2011-06-27 Angled sputtering physical vapor deposition apparatus with wafer holder and wafer holder for an angled sputtering physical vapor deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005050064A JP4336320B2 (ja) 2005-02-25 2005-02-25 ウエハホルダ

Publications (3)

Publication Number Publication Date
JP2006233283A JP2006233283A (ja) 2006-09-07
JP2006233283A5 true JP2006233283A5 (enExample) 2008-09-11
JP4336320B2 JP4336320B2 (ja) 2009-09-30

Family

ID=36190762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005050064A Expired - Lifetime JP4336320B2 (ja) 2005-02-25 2005-02-25 ウエハホルダ

Country Status (6)

Country Link
US (2) US20060281314A1 (enExample)
EP (1) EP1696470A3 (enExample)
JP (1) JP4336320B2 (enExample)
KR (1) KR101089766B1 (enExample)
CN (1) CN1825556B (enExample)
TW (1) TWI316744B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101141488B1 (ko) * 2003-03-21 2012-05-03 도쿄엘렉트론가부시키가이샤 처리중의 기판이면(裏面) 증착 감소방법 및 장치
JP4705816B2 (ja) 2005-07-27 2011-06-22 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP2009260041A (ja) * 2008-04-17 2009-11-05 Fuji Electric Device Technology Co Ltd 半導体装置の製造方法および成膜装置
WO2009157341A1 (ja) 2008-06-25 2009-12-30 キヤノンアネルバ株式会社 スパッタリング装置及びその制御用プログラムを記録した記録媒体
JP6088780B2 (ja) * 2012-10-02 2017-03-01 株式会社アルバック プラズマ処理方法及びプラズマ処理装置
US20140179108A1 (en) * 2012-12-21 2014-06-26 Applied Materials, Inc. Wafer Edge Protection and Efficiency Using Inert Gas and Ring
CN105185732A (zh) * 2015-08-24 2015-12-23 沈阳拓荆科技有限公司 一种可改变晶圆表面薄膜形貌的陶瓷环
WO2020257095A1 (en) * 2019-06-18 2020-12-24 Lam Research Corporation Reduced diameter carrier ring hardware for substrate processing systems
JP7398988B2 (ja) 2020-03-13 2023-12-15 東京エレクトロン株式会社 スパッタ装置
KR102847491B1 (ko) * 2023-02-06 2025-08-20 주식회사 트리버스시스템 전자 소멸 방지 쉴드를 구비한 반도체 프로세스 챔버

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756810A (en) * 1986-12-04 1988-07-12 Machine Technology, Inc. Deposition and planarizing methods and apparatus
JP2737961B2 (ja) 1988-11-29 1998-04-08 日本電気株式会社 スパッタ成膜装置
TW277139B (enExample) * 1993-09-16 1996-06-01 Hitachi Seisakusyo Kk
US6544379B2 (en) * 1993-09-16 2003-04-08 Hitachi, Ltd. Method of holding substrate and substrate holding system
KR100264445B1 (ko) * 1993-10-04 2000-11-01 히가시 데쓰로 플라즈마처리장치
TW254030B (en) * 1994-03-18 1995-08-11 Anelva Corp Mechanic escape mechanism for substrate
JPH10116964A (ja) * 1996-10-09 1998-05-06 Oki Electric Ind Co Ltd 半導体装置とその製造方法およびスパッタリング装置
US6146504A (en) * 1998-05-21 2000-11-14 Applied Materials, Inc. Substrate support and lift apparatus and method
US6159299A (en) * 1999-02-09 2000-12-12 Applied Materials, Inc. Wafer pedestal with a purge ring
US6344105B1 (en) * 1999-06-30 2002-02-05 Lam Research Corporation Techniques for improving etch rate uniformity
JP4559595B2 (ja) * 2000-07-17 2010-10-06 東京エレクトロン株式会社 被処理体の載置装置及びプラズマ処理装置
JP4673478B2 (ja) 2000-10-05 2011-04-20 キヤノンアネルバ株式会社 バイアススパッタリング装置及びバイアススパッタリング方法
JP4583591B2 (ja) * 2000-12-15 2010-11-17 東京エレクトロン株式会社 処理方法及び処理装置
JP4509369B2 (ja) * 2000-12-26 2010-07-21 キヤノンアネルバ株式会社 プラズマ支援スパッタ成膜装置
US6620736B2 (en) * 2001-07-24 2003-09-16 Tokyo Electron Limited Electrostatic control of deposition of, and etching by, ionized materials in semiconductor processing
US6776849B2 (en) * 2002-03-15 2004-08-17 Asm America, Inc. Wafer holder with peripheral lift ring
TWI228786B (en) * 2002-04-16 2005-03-01 Anelva Corp Electrostatic chucking stage and substrate processing apparatus
CN101996843B (zh) * 2003-01-07 2013-05-01 东京毅力科创株式会社 等离子体处理装置及聚焦环
US20040261946A1 (en) * 2003-04-24 2004-12-30 Tokyo Electron Limited Plasma processing apparatus, focus ring, and susceptor

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