JP2006196888A - 基板搬送装置 - Google Patents
基板搬送装置 Download PDFInfo
- Publication number
- JP2006196888A JP2006196888A JP2005369302A JP2005369302A JP2006196888A JP 2006196888 A JP2006196888 A JP 2006196888A JP 2005369302 A JP2005369302 A JP 2005369302A JP 2005369302 A JP2005369302 A JP 2005369302A JP 2006196888 A JP2006196888 A JP 2006196888A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- housing
- support member
- substrate transfer
- transfer apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Abstract
【解決手段】 基板搬送装置は、上表面2、下表面4、複数の柱体からなる側壁6、基板22を進入させる後部開口14、基板22を送り出すための前部開口12、側壁6と連結する複数の支持部材8、およびアクスル装置18、を備えるハウジング10を含む。該装置は、駆動ユニット16と回転軸28をさらに含み、これらが回転力を生じてアクスル装置18に伝達すると、アクスル装置18が回転力をさらに支持部材8に伝達し、これによって基板22のハウジング10への搬入出が可能となる。
【選択図】 図4
Description
また、本発明は、複数の基板22を同時にハウジングに搬入出させることも可能である。
5 自動化ユニット
2 上表面
4 下表面
6 側壁
8 支持部材
10 ハウジング
12 前部開口
14 後部開口
16 駆動ユニット
18 アクスル装置
20 孔
22 基板
24 軸受
26 前方押動軸
28 回転軸
30 側板
Claims (10)
- 前部開口および後部開口を備えたハウジングと、
前記ハウジング内に設置された複数の支持部材と、
前記複数の支持部材の少なくとも一端に連結された複数のアクスル装置と、
回転力を生じ、該回転力を前記アクスル装置に伝えてこれを回転させる少なくとも1つの駆動ユニットと、
を含む基板搬送装置。 - 前記アクスル装置が、前記支持部材の摩擦を低減させるための一組の軸受および側板を含む請求項1記載の基板搬送装置。
- 前記アクスル装置と接続する同時動作装置をさらに含む請求項1記載の基板搬送装置。
- 前記ハウジングが対向する2つの側壁をさらに含む請求項1記載の基板搬送装置。
- 前記支持部材が、前記ハウジングの前記側壁の間にて固定されて水平に延びる請求項4記載の基板搬送装置。
- 前記側壁が複数の柱体を含む請求項5記載の基板搬送装置。
- 前記支持部材が、前記ハウジングの対向する前記柱体の間にて水平に延びる請求項6記載の基板搬送装置。
- 前記支持部材が鋼線からなる請求項1記載の基板搬送装置。
- 前記支持部材が金属ワイヤを含む請求項1記載の基板搬送装置。
- 前記支持部材の各端の少なくとも1つに前記アクスル装置が設置される請求項1記載の基板搬送装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/030,954 US20060182556A1 (en) | 2005-01-10 | 2005-01-10 | Substrate transportation device (wire) |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006196888A true JP2006196888A (ja) | 2006-07-27 |
Family
ID=36688409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005369302A Pending JP2006196888A (ja) | 2005-01-10 | 2005-12-22 | 基板搬送装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060182556A1 (ja) |
JP (1) | JP2006196888A (ja) |
CN (1) | CN100351153C (ja) |
TW (1) | TW200624358A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107187714A (zh) * | 2017-05-31 | 2017-09-22 | 芜湖莫森泰克汽车科技股份有限公司 | 一种汽车天窗总成防撞周转器具 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100978261B1 (ko) * | 2005-12-29 | 2010-08-26 | 엘지디스플레이 주식회사 | 액정표시소자의 카세트 |
US7149598B1 (en) * | 2006-03-28 | 2006-12-12 | L&K Engineering Co., Ltd. | Process-oriented modulized plant for TFT-LCD fabrication |
CN102275707B (zh) * | 2010-06-10 | 2014-12-03 | 北京京东方光电科技有限公司 | 面板盛放架和面板运输系统 |
CN102583050B (zh) * | 2012-02-07 | 2014-05-21 | 深圳市华星光电技术有限公司 | 液晶面板基材的运输控制设备及其控制方法 |
US9079714B2 (en) * | 2012-07-31 | 2015-07-14 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Glass substrate cassette and pick-and-place system for glass substrate |
CN103448048B (zh) * | 2013-09-09 | 2015-11-25 | 深圳市华星光电技术有限公司 | 基板存放架 |
CN203819774U (zh) * | 2014-05-06 | 2014-09-10 | 北京京东方显示技术有限公司 | 一种线缓冲器 |
CN106824957A (zh) * | 2015-12-07 | 2017-06-13 | 镇江荣德新能源科技有限公司 | 清洗用线网厚片装载装置 |
WO2020185020A1 (ko) * | 2019-03-12 | 2020-09-17 | 에스케이씨 주식회사 | 유리를 포함하는 기판의 적재 카세트 및 이를 적용한 기판의 적재방법 |
US11967542B2 (en) | 2019-03-12 | 2024-04-23 | Absolics Inc. | Packaging substrate, and semiconductor device comprising same |
CN111907893A (zh) * | 2020-08-10 | 2020-11-10 | 武汉华星光电半导体显示技术有限公司 | 预弯折显示模组包装盒 |
CN117104886B (zh) * | 2023-09-04 | 2024-04-19 | 深圳市博视科技有限公司 | 一种用于电子设备生产的板材上下料装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1044379A (en) * | 1974-12-28 | 1978-12-12 | Sony Corporation | Wafer transfer device |
US4023691A (en) * | 1975-09-15 | 1977-05-17 | United States Fused Quartz Company, Inc. | Method of transferring semi-conductor discs by a hinged transfer carrier |
US4406050A (en) * | 1982-03-17 | 1983-09-27 | The United States Of America As Represented By The Secretary Of The Navy | Method for fabricating lead halide sensitized infrared photodiodes |
JP3249623B2 (ja) * | 1993-02-23 | 2002-01-21 | 淀川化成株式会社 | 基板用カセット |
CH687986A5 (de) * | 1993-05-03 | 1997-04-15 | Balzers Hochvakuum | Plasmabehandlungsanlage und Verfahren zu deren Betrieb. |
KR970005994B1 (ko) * | 1994-02-18 | 1997-04-22 | 현대전자산업 주식회사 | 디스크 수납보조 장치 |
US5927469A (en) * | 1996-06-17 | 1999-07-27 | Dunifon; Thomas A. | Method and apparatus for aligning sheets of material moving along a path of travel |
US6213708B1 (en) * | 1997-03-12 | 2001-04-10 | Advanced Micro Devices, Inc. | System for sorting multiple semiconductor wafers |
JP3208562B2 (ja) * | 1997-07-15 | 2001-09-17 | 東京エレクトロン株式会社 | 位置決め装置及び位置決め方法 |
US6034000A (en) * | 1997-07-28 | 2000-03-07 | Applied Materials, Inc. | Multiple loadlock system |
JPH1179387A (ja) * | 1997-09-17 | 1999-03-23 | Futaba Corp | 基板収納用ホルダー |
US6450755B1 (en) * | 1998-07-10 | 2002-09-17 | Equipe Technologies | Dual arm substrate handling robot with a batch loader |
US6092981A (en) * | 1999-03-11 | 2000-07-25 | Applied Materials, Inc. | Modular substrate cassette |
KR100603100B1 (ko) * | 1999-05-06 | 2006-07-20 | 동경 엘렉트론 주식회사 | 유리 기판의 반송 시스템 |
US6690993B2 (en) * | 2000-10-12 | 2004-02-10 | R. Foulke Development Company, Llc | Reticle storage system |
US6916147B2 (en) * | 2002-10-25 | 2005-07-12 | Applied Materials, Inc. | Substrate storage cassette with substrate alignment feature |
TW566797U (en) * | 2003-01-17 | 2003-12-11 | Ampoc Far East Co Ltd | Hard circuit board transferring device |
US7033126B2 (en) * | 2003-04-02 | 2006-04-25 | Asm International N.V. | Method and apparatus for loading a batch of wafers into a wafer boat |
-
2005
- 2005-01-10 US US11/030,954 patent/US20060182556A1/en not_active Abandoned
- 2005-09-05 TW TW094130408A patent/TW200624358A/zh unknown
- 2005-09-15 CN CNB2005101039052A patent/CN100351153C/zh not_active Expired - Fee Related
- 2005-12-22 JP JP2005369302A patent/JP2006196888A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107187714A (zh) * | 2017-05-31 | 2017-09-22 | 芜湖莫森泰克汽车科技股份有限公司 | 一种汽车天窗总成防撞周转器具 |
Also Published As
Publication number | Publication date |
---|---|
TW200624358A (en) | 2006-07-16 |
CN100351153C (zh) | 2007-11-28 |
CN1754789A (zh) | 2006-04-05 |
US20060182556A1 (en) | 2006-08-17 |
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