JP2006188313A5 - - Google Patents

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Publication number
JP2006188313A5
JP2006188313A5 JP2005000174A JP2005000174A JP2006188313A5 JP 2006188313 A5 JP2006188313 A5 JP 2006188313A5 JP 2005000174 A JP2005000174 A JP 2005000174A JP 2005000174 A JP2005000174 A JP 2005000174A JP 2006188313 A5 JP2006188313 A5 JP 2006188313A5
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JP
Japan
Prior art keywords
suction
substrate
unit
adsorption
error
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005000174A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006188313A (ja
JP4704756B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005000174A priority Critical patent/JP4704756B2/ja
Priority claimed from JP2005000174A external-priority patent/JP4704756B2/ja
Publication of JP2006188313A publication Critical patent/JP2006188313A/ja
Publication of JP2006188313A5 publication Critical patent/JP2006188313A5/ja
Application granted granted Critical
Publication of JP4704756B2 publication Critical patent/JP4704756B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2005000174A 2005-01-04 2005-01-04 基板搬送装置 Expired - Fee Related JP4704756B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005000174A JP4704756B2 (ja) 2005-01-04 2005-01-04 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005000174A JP4704756B2 (ja) 2005-01-04 2005-01-04 基板搬送装置

Publications (3)

Publication Number Publication Date
JP2006188313A JP2006188313A (ja) 2006-07-20
JP2006188313A5 true JP2006188313A5 (pt) 2008-02-14
JP4704756B2 JP4704756B2 (ja) 2011-06-22

Family

ID=36795865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005000174A Expired - Fee Related JP4704756B2 (ja) 2005-01-04 2005-01-04 基板搬送装置

Country Status (1)

Country Link
JP (1) JP4704756B2 (pt)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200821247A (en) * 2006-09-22 2008-05-16 Olympus Corp Substrate inspecting apparatus
JP5125290B2 (ja) * 2007-07-27 2013-01-23 株式会社Ｉｈｉ 浮上搬送装置及び処理搬送システム
JP2011199218A (ja) * 2010-03-24 2011-10-06 Dainippon Screen Mfg Co Ltd 基板搬送装置およびそれを用いた基板検査システム
JP2012096920A (ja) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp ガラス基板欠陥検査装置及びガラス基板欠陥検査方法並びにガラス基板欠陥検査システム
JP6804155B2 (ja) * 2017-03-13 2020-12-23 東レエンジニアリング株式会社 基板浮上搬送装置
KR20210109998A (ko) * 2020-02-28 2021-09-07 캐논 톡키 가부시키가이샤 흡착장치, 성막장치, 흡착방법, 성막방법 및 전자 디바이스의 제조방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4201564B2 (ja) * 2001-12-03 2008-12-24 日東電工株式会社 半導体ウエハ搬送方法およびこれを用いた半導体ウエハ搬送装置
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device

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