JP2006188313A5 - - Google Patents

Claims (8)

A stage for floating the substrate;
A transfer means provided so as to be movable along the stage, and having a suction portion that sucks and holds the substrate from the back side of the end portion of the substrate;
An adsorption assisting unit that supports the adsorption of the substrate against the adsorption unit by pressing the substrate against the adsorption unit at a position facing the adsorption unit ;
The board | substrate conveyance apparatus characterized by the above-mentioned. The said conveyance means waits in the board | substrate carrying-in part in which the said board | substrate on the said stage is carried in, The said adsorption | suction auxiliary | assistance part is arrange | positioned in this substrate carrying-in part in the position facing the said adsorption part. 2. The substrate transfer apparatus according to 1. A pair of the transporting means are provided to face both sides of the substrate across the stage, and each of the transporting means is provided with a plurality of the suction parts and a plurality of the suction auxiliary parts to face the suction parts. The substrate transfer apparatus according to claim 1. The transporting means is provided along one side of the stage, and the transporting means is provided with a plurality of the suction portions and a plurality of the suction assisting portions facing the suction portions. 2. The substrate transfer apparatus according to 1. The substrate conveyance according to claim 1, wherein the suction unit includes a sensor that detects a suction error, and the suction auxiliary unit is driven when the sensor outputs a suction error. apparatus. The suction unit includes a sensor for detecting a suction error, and the suction auxiliary unit is driven after stopping the conveying unit when the sensor outputs a suction error. The board | substrate conveyance apparatus in any one of. The suction unit includes a sensor for detecting a suction error, detects a suction error of the suction unit while the transport unit is moving, and stops the transport unit when the sensor outputs a suction error. The substrate transfer apparatus according to claim 1, wherein the suction assisting unit is driven without any problem. The conveying means arranges a plurality of the adsorption portions almost over the entire length at the side edge of the substrate, arranges the plurality of adsorption auxiliary portions opposed to the respective adsorption portions, 5. The substrate according to claim 1, further comprising a pressure sensor for detecting a suction error, wherein each pressure sensor drives the suction auxiliary unit corresponding to the suction unit that has detected the suction error. Conveying device.