JP2006156716A - 半導体装置およびその製造方法 - Google Patents

半導体装置およびその製造方法 Download PDF

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Publication number
JP2006156716A
JP2006156716A JP2004345349A JP2004345349A JP2006156716A JP 2006156716 A JP2006156716 A JP 2006156716A JP 2004345349 A JP2004345349 A JP 2004345349A JP 2004345349 A JP2004345349 A JP 2004345349A JP 2006156716 A JP2006156716 A JP 2006156716A
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JP
Japan
Prior art keywords
film
wiring layer
layer
barrier metal
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004345349A
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English (en)
Japanese (ja)
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JP2006156716A5 (enExample
Inventor
Kazuhito Ichinose
一仁 一之瀬
Akishige Yuya
明栄 油谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Technology Corp
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Renesas Technology Corp
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Filing date
Publication date
Application filed by Renesas Technology Corp filed Critical Renesas Technology Corp
Priority to JP2004345349A priority Critical patent/JP2006156716A/ja
Priority to US11/269,799 priority patent/US20060113676A1/en
Publication of JP2006156716A publication Critical patent/JP2006156716A/ja
Publication of JP2006156716A5 publication Critical patent/JP2006156716A5/ja
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204—Conductive materials
    • H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
    • H01L23/53214—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being aluminium
    • H01L23/53223—Additional layers associated with aluminium layers, e.g. adhesion, barrier, cladding layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5226—Via connections in a multilevel interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2004345349A 2004-11-30 2004-11-30 半導体装置およびその製造方法 Withdrawn JP2006156716A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004345349A JP2006156716A (ja) 2004-11-30 2004-11-30 半導体装置およびその製造方法
US11/269,799 US20060113676A1 (en) 2004-11-30 2005-11-09 Semiconductor device and method of manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004345349A JP2006156716A (ja) 2004-11-30 2004-11-30 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JP2006156716A true JP2006156716A (ja) 2006-06-15
JP2006156716A5 JP2006156716A5 (enExample) 2007-12-27

Family

ID=36566617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004345349A Withdrawn JP2006156716A (ja) 2004-11-30 2004-11-30 半導体装置およびその製造方法

Country Status (2)

Country Link
US (1) US20060113676A1 (enExample)
JP (1) JP2006156716A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008016803A (ja) * 2006-06-30 2008-01-24 Hynix Semiconductor Inc 半導体素子のビットライン形成方法
WO2011034092A1 (ja) * 2009-09-18 2011-03-24 株式会社アルバック バリアメタル膜の形成方法
JP2013115429A (ja) * 2011-11-30 2013-06-10 Taiwan Semiconductor Manufacturing Co Ltd イメージセンサチップおよびその製造方法
JP2017045871A (ja) * 2015-08-27 2017-03-02 ルネサスエレクトロニクス株式会社 半導体装置の製造方法およびドライエッチングの終点検出方法
US11881516B2 (en) 2018-12-27 2024-01-23 Mitsubishi Electric Corporation Semiconductor element comprising a MIM capacitor and a via hole, a bottom of the via hole being placed between a rear surface of a source electrode and a rear surface of a barrier metal layer
JP2024527979A (ja) * 2021-07-26 2024-07-26 アプライド マテリアルズ インコーポレイテッド タングステン（ｗ）間隙充填のための強化された応力調整および界面接着

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6081034A (en) * 1992-06-12 2000-06-27 Micron Technology, Inc. Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer
US6285082B1 (en) * 1995-01-03 2001-09-04 International Business Machines Corporation Soft metal conductor
US5702981A (en) * 1995-09-29 1997-12-30 Maniar; Papu D. Method for forming a via in a semiconductor device
JP3220034B2 (ja) * 1996-12-26 2001-10-22 株式会社東芝 半導体装置及びその製造方法
US6872429B1 (en) * 1997-06-30 2005-03-29 Applied Materials, Inc. Deposition of tungsten nitride using plasma pretreatment in a chemical vapor deposition chamber
US5969425A (en) * 1997-09-05 1999-10-19 Advanced Micro Devices, Inc. Borderless vias with CVD barrier layer
US6136682A (en) * 1997-10-20 2000-10-24 Motorola Inc. Method for forming a conductive structure having a composite or amorphous barrier layer
US6156647A (en) * 1997-10-27 2000-12-05 Applied Materials, Inc. Barrier layer structure which prevents migration of silicon into an adjacent metallic layer and the method of fabrication of the barrier layer
KR100278657B1 (ko) * 1998-06-24 2001-02-01 윤종용 반도체장치의금속배선구조및그제조방법
JP2000106397A (ja) * 1998-07-31 2000-04-11 Sony Corp 半導体装置における配線構造及びその形成方法
US6146996A (en) * 1998-09-01 2000-11-14 Philips Electronics North America Corp. Semiconductor device with conductive via and method of making same
US6150268A (en) * 1998-11-04 2000-11-21 Advanced Micro Devices, Inc. Barrier materials for metal interconnect
US6277726B1 (en) * 1998-12-09 2001-08-21 National Semiconductor Corporation Method for decreasing contact resistance of an electrode positioned inside a misaligned via for multilevel interconnects
US6720261B1 (en) * 1999-06-02 2004-04-13 Agere Systems Inc. Method and system for eliminating extrusions in semiconductor vias
US6727169B1 (en) * 1999-10-15 2004-04-27 Asm International, N.V. Method of making conformal lining layers for damascene metallization
US6383821B1 (en) * 1999-10-29 2002-05-07 Conexant Systems, Inc. Semiconductor device and process
US7067920B2 (en) * 2002-01-22 2006-06-27 Elpida Memory, Inc. Semiconductor device and method of fabricating the same
US6803309B2 (en) * 2002-07-03 2004-10-12 Taiwan Semiconductor Manufacturing Co., Ltd Method for depositing an adhesion/barrier layer to improve adhesion and contact resistance
DE10255835A1 (de) * 2002-11-29 2004-06-17 Infineon Technologies Ag Niederohmige WNx-Barriere
US6960529B1 (en) * 2003-02-24 2005-11-01 Ami Semiconductor, Inc. Methods for sidewall protection of metal interconnect for unlanded vias using physical vapor deposition
KR100555514B1 (ko) * 2003-08-22 2006-03-03 삼성전자주식회사 저 저항 텅스텐 배선을 갖는 반도체 메모리 소자 및 그제조방법
US6958291B2 (en) * 2003-09-04 2005-10-25 Taiwan Semiconductor Manufacturing Co., Ltd. Interconnect with composite barrier layers and method for fabricating the same

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008016803A (ja) * 2006-06-30 2008-01-24 Hynix Semiconductor Inc 半導体素子のビットライン形成方法
WO2011034092A1 (ja) * 2009-09-18 2011-03-24 株式会社アルバック バリアメタル膜の形成方法
JPWO2011034092A1 (ja) * 2009-09-18 2013-02-14 株式会社アルバック バリアメタル膜の形成方法
JP2013115429A (ja) * 2011-11-30 2013-06-10 Taiwan Semiconductor Manufacturing Co Ltd イメージセンサチップおよびその製造方法
US9224773B2 (en) 2011-11-30 2015-12-29 Taiwan Semiconductor Manufacturing Company, Ltd. Metal shielding layer in backside illumination image sensor chips and methods for forming the same
US9620555B2 (en) 2011-11-30 2017-04-11 Taiwan Semiconductor Manufacturing Company, Ltd. Metal shielding layer in backside illumination image sensor chips and methods for forming the same
US10276621B2 (en) 2011-11-30 2019-04-30 Taiwan Semiconductor Manufacturing Company, Ltd. Metal shielding layer in backside illumination image sensor chips and methods for forming the same
US11018176B2 (en) 2011-11-30 2021-05-25 Taiwan Semiconductor Manufacturing Company, Ltd. Metal shielding layer in backside illumination image sensor chips and methods for forming the same
JP2017045871A (ja) * 2015-08-27 2017-03-02 ルネサスエレクトロニクス株式会社 半導体装置の製造方法およびドライエッチングの終点検出方法
US11881516B2 (en) 2018-12-27 2024-01-23 Mitsubishi Electric Corporation Semiconductor element comprising a MIM capacitor and a via hole, a bottom of the via hole being placed between a rear surface of a source electrode and a rear surface of a barrier metal layer
JP2024527979A (ja) * 2021-07-26 2024-07-26 アプライド マテリアルズ インコーポレイテッド タングステン（ｗ）間隙充填のための強化された応力調整および界面接着

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