JP2006109472A - 周縁に質量負荷を施した圧電薄膜共振器 - Google Patents
周縁に質量負荷を施した圧電薄膜共振器 Download PDFInfo
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
Abstract
【解決手段】共振器構造(FBAR)は、圧電材料を挟んだ2つの電極を備える。該2つの導電性電極の交差部分は、音響共振器の活性領域を画定する。該活性領域は、2つの同心領域(周縁すなわちフレーム領域と、中心領域と)に分割される。環帯が、該2つの導電性電極のうちの一方に付加され、これにより、Qの観点から、電気的性能を改善する。
【選択図】図3
Description
Claims (16)
- 周波数帯域内においてエネルギーを捕獲するための装置であって、
第1の電極と、
前記第1の電極の上方近傍に位置する第2の電極であって、前記第1及び第2の電極のオーバーラップが活性領域を画定している、第2の電極と、
前記第1及び第2の電極間に介在する圧電シートと、
前記第1及び第2の電極のうちの一方の表面上に位置づけられた環帯と、を備え、
前記環帯内の領域は、第1の音響インピーダンスを有し、該環帯は、第2の音響インピーダンスを有し、該環帯の外側の領域は、第3の音響インピーダンスを有しており、
前記第2の音響インピーダンスは、前記第1及び第3の音響インピーダンスより大きい、
装置。 - 前記環帯は、前記第2の電極の外縁に沿って位置している、
請求項1に記載の装置。 - 前記環帯は、前記第1の電極内に位置しており、前記第2の電極の外縁に直接的に対向している、
請求項1に記載の装置。 - 前記環帯は、前記第1及び第2の電極のうちの一方に組み込まれる、
請求項1に記載の装置。 - 前記第1及び第2の電極の前記一方は、第1の特定の比重を有しており、
前記環帯は、前記第1の特定の比重より大きい第2の特定の比重を有している、
請求項1に記載の装置。 - 前記第1及び第2の電極の前記一方は、第1の特定の比重を有しており、
前記環帯は、前記第1の特定の比重より小さい第2の特定の比重を有している、
請求項1に記載の装置。 - 前記環帯は、誘電体材料を有している、
請求項6に記載の装置。 - 前記環帯は、金属性材料を有している、
請求項6に記載の装置。 - 表面内に空洞を有する基板を更に備えており、
前記第1の電極は、前記空洞上に跨っている、
請求項1に記載の装置。 - 前記環帯は、前記第2の電極の外縁に沿って位置している、
請求項9に記載の装置。 - 前記環帯は、前記第1の電極内に位置し、前記第2の電極の外縁に直接的に対向している、
請求項9に記載の装置。 - 前記環帯は、前記第1及び第2の電極のうちの一方に組み込まれる、
請求項9に記載の装置。 - 前記第1及び第2の電極のうちの前記一方は、第1の特定の比重を有しており、
前記環帯は、前記第1の特定の比重より大きい第2の特定の比重を有している、
請求項9に記載の装置。 - 前記第1及び第2の電極のうちの前記一方は、第1の特定の比重を有しており、
前記環帯は、前記第1の特定の比重より小さい第2の特定の比重を有している、
請求項9に記載の装置。 - 前記環帯は、誘電体材料を有する、
請求項14記載の装置。 - 前記環帯は、金属性材料を有する、
請求項14記載の装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61525504P | 2004-10-01 | 2004-10-01 | |
US60/615,255 | 2004-10-01 | ||
US10/990,201 | 2004-11-15 | ||
US10/990,201 US7280007B2 (en) | 2004-11-15 | 2004-11-15 | Thin film bulk acoustic resonator with a mass loaded perimeter |
Publications (2)
Publication Number | Publication Date |
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JP2006109472A true JP2006109472A (ja) | 2006-04-20 |
JP5005903B2 JP5005903B2 (ja) | 2012-08-22 |
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JP2005286738A Active JP5005903B2 (ja) | 2004-10-01 | 2005-09-30 | 周縁に質量負荷を施した圧電薄膜共振器 |
Country Status (5)
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JP (1) | JP5005903B2 (ja) |
KR (1) | KR20060053994A (ja) |
CN (1) | CN1801614B (ja) |
GB (1) | GB2418791A (ja) |
TW (1) | TWI365603B (ja) |
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Also Published As
Publication number | Publication date |
---|---|
TW200620820A (en) | 2006-06-16 |
CN1801614B (zh) | 2010-06-16 |
KR20060053994A (ko) | 2006-05-22 |
GB0520078D0 (en) | 2005-11-09 |
GB2418791A (en) | 2006-04-05 |
TWI365603B (en) | 2012-06-01 |
CN1801614A (zh) | 2006-07-12 |
JP5005903B2 (ja) | 2012-08-22 |
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