US7275292B2
(en)
|
2003-03-07 |
2007-10-02 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Method for fabricating an acoustical resonator on a substrate
|
US7388454B2
(en)
|
2004-10-01 |
2008-06-17 |
Avago Technologies Wireless Ip Pte Ltd |
Acoustic resonator performance enhancement using alternating frame structure
|
US8981876B2
(en)
*
|
2004-11-15 |
2015-03-17 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Piezoelectric resonator structures and electrical filters having frame elements
|
US7202560B2
(en)
|
2004-12-15 |
2007-04-10 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Wafer bonding of micro-electro mechanical systems to active circuitry
|
US7791434B2
(en)
|
2004-12-22 |
2010-09-07 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
|
US7369013B2
(en)
*
|
2005-04-06 |
2008-05-06 |
Avago Technologies Wireless Ip Pte Ltd |
Acoustic resonator performance enhancement using filled recessed region
|
US7868522B2
(en)
|
2005-09-09 |
2011-01-11 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Adjusted frequency temperature coefficient resonator
|
US7737807B2
(en)
|
2005-10-18 |
2010-06-15 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
|
US7675390B2
(en)
|
2005-10-18 |
2010-03-09 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
|
US7463499B2
(en)
|
2005-10-31 |
2008-12-09 |
Avago Technologies General Ip (Singapore) Pte Ltd. |
AC-DC power converter
|
US7746677B2
(en)
|
2006-03-09 |
2010-06-29 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
AC-DC converter circuit and power supply
|
US7479685B2
(en)
|
2006-03-10 |
2009-01-20 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Electronic device on substrate with cavity and mitigated parasitic leakage path
|
JP2008182543A
(ja)
*
|
2007-01-25 |
2008-08-07 |
Ube Ind Ltd |
薄膜圧電共振器とそれを用いた薄膜圧電フィルタ
|
JP5080858B2
(ja)
*
|
2007-05-17 |
2012-11-21 |
太陽誘電株式会社 |
圧電薄膜共振器およびフィルタ
|
WO2009011022A1
(ja)
|
2007-07-13 |
2009-01-22 |
Fujitsu Limited |
圧電薄膜共振素子及びこれを用いた回路部品
|
WO2009028027A1
(ja)
|
2007-08-24 |
2009-03-05 |
Fujitsu Limited |
圧電薄膜共振子、それを用いたフィルタ、そのフィルタを用いたデュプレクサおよびそのフィルタまたはそのデュプレクサを用いた通信機
|
US7791435B2
(en)
|
2007-09-28 |
2010-09-07 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Single stack coupled resonators having differential output
|
JP5563739B2
(ja)
|
2008-02-20 |
2014-07-30 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置
|
WO2009133511A1
(en)
*
|
2008-04-29 |
2009-11-05 |
Nxp B.V. |
Bulk acoustic wave resonator
|
US7732977B2
(en)
|
2008-04-30 |
2010-06-08 |
Avago Technologies Wireless Ip (Singapore) |
Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
|
US7855618B2
(en)
|
2008-04-30 |
2010-12-21 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Bulk acoustic resonator electrical impedance transformers
|
CN102301590B
(zh)
|
2009-02-20 |
2014-07-02 |
宇部兴产株式会社 |
薄膜压电谐振器以及使用它的薄膜压电滤波器
|
US8902023B2
(en)
|
2009-06-24 |
2014-12-02 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Acoustic resonator structure having an electrode with a cantilevered portion
|
US8248185B2
(en)
|
2009-06-24 |
2012-08-21 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic resonator structure comprising a bridge
|
US8193877B2
(en)
|
2009-11-30 |
2012-06-05 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Duplexer with negative phase shifting circuit
|
US9243316B2
(en)
|
2010-01-22 |
2016-01-26 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Method of fabricating piezoelectric material with selected c-axis orientation
|
US8796904B2
(en)
|
2011-10-31 |
2014-08-05 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
|
JP2011160232A
(ja)
*
|
2010-02-01 |
2011-08-18 |
Ube Industries Ltd |
薄膜圧電共振器およびそれを用いた薄膜圧電フィルタ
|
US8962443B2
(en)
|
2011-01-31 |
2015-02-24 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Semiconductor device having an airbridge and method of fabricating the same
|
US9136818B2
(en)
|
2011-02-28 |
2015-09-15 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Stacked acoustic resonator comprising a bridge
|
US9425764B2
(en)
|
2012-10-25 |
2016-08-23 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Accoustic resonator having composite electrodes with integrated lateral features
|
US9203374B2
(en)
|
2011-02-28 |
2015-12-01 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Film bulk acoustic resonator comprising a bridge
|
US9148117B2
(en)
|
2011-02-28 |
2015-09-29 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Coupled resonator filter comprising a bridge and frame elements
|
US9083302B2
(en)
|
2011-02-28 |
2015-07-14 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
|
US9048812B2
(en)
|
2011-02-28 |
2015-06-02 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
|
US9154112B2
(en)
|
2011-02-28 |
2015-10-06 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Coupled resonator filter comprising a bridge
|
US8575820B2
(en)
|
2011-03-29 |
2013-11-05 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Stacked bulk acoustic resonator
|
US9444426B2
(en)
|
2012-10-25 |
2016-09-13 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Accoustic resonator having integrated lateral feature and temperature compensation feature
|
JP2012244616A
(ja)
|
2011-05-24 |
2012-12-10 |
Taiyo Yuden Co Ltd |
圧電薄膜共振子、フィルタおよびモジュール
|
US8350445B1
(en)
|
2011-06-16 |
2013-01-08 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Bulk acoustic resonator comprising non-piezoelectric layer and bridge
|
US8922302B2
(en)
|
2011-08-24 |
2014-12-30 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Acoustic resonator formed on a pedestal
|
JP5918522B2
(ja)
|
2011-12-12 |
2016-05-18 |
太陽誘電株式会社 |
フィルタおよびデュプレクサ
|
WO2013175985A1
(ja)
|
2012-05-22 |
2013-11-28 |
株式会社村田製作所 |
バルク波共振子
|
JP6085147B2
(ja)
|
2012-11-15 |
2017-02-22 |
太陽誘電株式会社 |
弾性波デバイスおよびその製造方法
|
JP6336712B2
(ja)
|
2013-01-28 |
2018-06-06 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびデュプレクサ
|
CN103296993A
(zh)
*
|
2013-04-11 |
2013-09-11 |
天津大学 |
谐振器及其制造方法
|
JP5591977B2
(ja)
*
|
2013-04-30 |
2014-09-17 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置
|
JP6185292B2
(ja)
|
2013-06-10 |
2017-08-23 |
太陽誘電株式会社 |
弾性波デバイス
|
JP6333540B2
(ja)
|
2013-11-11 |
2018-05-30 |
太陽誘電株式会社 |
圧電薄膜共振子、フィルタ、及び分波器
|
JP6325798B2
(ja)
|
2013-11-11 |
2018-05-16 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびデュプレクサ
|
JP6325799B2
(ja)
|
2013-11-11 |
2018-05-16 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびデュプレクサ
|
JP6371518B2
(ja)
|
2013-12-17 |
2018-08-08 |
太陽誘電株式会社 |
圧電薄膜共振器およびその製造方法、フィルタ並びにデュプレクサ
|
US9401691B2
(en)
*
|
2014-04-30 |
2016-07-26 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Acoustic resonator device with air-ring and temperature compensating layer
|
JP6594619B2
(ja)
|
2014-11-14 |
2019-10-23 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびデュプレクサ
|
JP6441761B2
(ja)
|
2015-07-29 |
2018-12-19 |
太陽誘電株式会社 |
圧電薄膜共振器及びフィルタ
|
JP6423782B2
(ja)
|
2015-12-09 |
2018-11-14 |
太陽誘電株式会社 |
圧電薄膜共振器およびフィルタ
|
JP6368298B2
(ja)
|
2015-12-14 |
2018-08-01 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびデュプレクサ
|
JP6510987B2
(ja)
|
2016-01-14 |
2019-05-08 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびデュプレクサ
|
JP6469601B2
(ja)
|
2016-02-05 |
2019-02-13 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびデュプレクサ
|
JP6556099B2
(ja)
|
2016-06-16 |
2019-08-07 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびマルチプレクサ
|
CN108023563B
(zh)
*
|
2016-11-01 |
2021-03-26 |
稳懋半导体股份有限公司 |
具质量调整结构的体声波共振器及其应用于体声波滤波器
|
US11228299B2
(en)
|
2017-02-02 |
2022-01-18 |
Taiyo Yuden Co., Ltd. |
Piezoelectric thin film resonator with insertion film, filter, and multiplexer
|
DE102017105432B3
(de)
*
|
2017-03-14 |
2018-08-23 |
Friedrich-Alexander-Universtität Erlangen-Nürnberg |
Resonator und Verfahren zum Bereitstellen eines Resonators
|
JP6903471B2
(ja)
|
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2021-07-14 |
太陽誘電株式会社 |
圧電薄膜共振器、フィルタおよびマルチプレクサ
|
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(ja)
|
2017-07-03 |
2021-05-12 |
太陽誘電株式会社 |
圧電薄膜共振器およびその製造方法、フィルタ並びにマルチプレクサ
|
DE102018101442B4
(de)
*
|
2018-01-23 |
2019-09-12 |
RF360 Europe GmbH |
BAW-Resonator mit erhöhtem Gütefaktor
|
JP2020053966A
(ja)
|
2018-09-24 |
2020-04-02 |
スカイワークス グローバル プライベート リミテッド |
バルク弾性波デバイスにおける多層隆起フレーム
|
CN109546985A
(zh)
*
|
2018-11-02 |
2019-03-29 |
天津大学 |
体声波谐振器及其制造方法
|
CN111193481A
(zh)
*
|
2018-11-14 |
2020-05-22 |
天津大学 |
体声波谐振器、滤波器和电子设备
|
CN111342800A
(zh)
*
|
2018-12-19 |
2020-06-26 |
天津大学 |
带离散结构的体声波谐振器、滤波器和电子设备
|
CN113131896B
(zh)
*
|
2019-12-31 |
2024-04-30 |
中芯集成电路(宁波)有限公司 |
一种薄膜压电声波谐振器及其制造方法及滤波器
|
CN113659957B
(zh)
*
|
2020-04-29 |
2024-04-12 |
华为技术有限公司 |
声波谐振器及无线通信设备
|
CN111934643B
(zh)
*
|
2020-07-13 |
2021-06-01 |
诺思(天津)微系统有限责任公司 |
压电层双侧设置质量负载的体声波谐振器、滤波器及电子设备
|
DE102021209875A1
(de)
|
2020-09-18 |
2022-03-24 |
Skyworks Global Pte. Ltd. |
Akustische volumenwellenvorrichtung mit erhöhter rahmenstruktur
|