JP2006093552A - 銅配線の形成方法 - Google Patents
銅配線の形成方法 Download PDFInfo
- Publication number
- JP2006093552A JP2006093552A JP2004279365A JP2004279365A JP2006093552A JP 2006093552 A JP2006093552 A JP 2006093552A JP 2004279365 A JP2004279365 A JP 2004279365A JP 2004279365 A JP2004279365 A JP 2004279365A JP 2006093552 A JP2006093552 A JP 2006093552A
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- Prior art keywords
- copper
- forming
- containing film
- gas
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 148
- 238000000034 method Methods 0.000 title claims abstract description 45
- 239000010949 copper Substances 0.000 claims abstract description 155
- 229910052802 copper Inorganic materials 0.000 claims abstract description 147
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 39
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000010936 titanium Substances 0.000 claims abstract description 32
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 26
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 23
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims description 149
- 239000007789 gas Substances 0.000 claims description 115
- 230000015572 biosynthetic process Effects 0.000 claims description 80
- 239000002994 raw material Substances 0.000 claims description 76
- 238000006243 chemical reaction Methods 0.000 claims description 50
- 238000000151 deposition Methods 0.000 claims description 45
- 230000008021 deposition Effects 0.000 claims description 45
- 150000004699 copper complex Chemical class 0.000 claims description 27
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 25
- 125000004432 carbon atom Chemical group C* 0.000 claims description 22
- 125000000217 alkyl group Chemical group 0.000 claims description 20
- 150000002429 hydrazines Chemical class 0.000 claims description 12
- 239000003446 ligand Substances 0.000 claims description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 150000001408 amides Chemical class 0.000 claims description 9
- 125000001153 fluoro group Chemical group F* 0.000 claims description 7
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 5
- 125000002947 alkylene group Chemical group 0.000 claims description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 4
- XKLVLDXNZDIDKQ-UHFFFAOYSA-N butylhydrazine Chemical group CCCCNN XKLVLDXNZDIDKQ-UHFFFAOYSA-N 0.000 claims description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- 125000004209 (C1-C8) alkyl group Chemical class 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 125000004429 atom Chemical group 0.000 claims 2
- 150000003857 carboxamides Chemical class 0.000 claims 1
- 239000007769 metal material Substances 0.000 abstract description 3
- PXSHDOMYSLTUTJ-UHFFFAOYSA-N [Ti]N Chemical compound [Ti]N PXSHDOMYSLTUTJ-UHFFFAOYSA-N 0.000 abstract 2
- AGQGECKKEOAFPT-UHFFFAOYSA-N [V]N Chemical compound [V]N AGQGECKKEOAFPT-UHFFFAOYSA-N 0.000 abstract 2
- 125000000250 methylamino group Chemical group [H]N(*)C([H])([H])[H] 0.000 abstract 2
- 230000004888 barrier function Effects 0.000 description 56
- 229910004298 SiO 2 Inorganic materials 0.000 description 18
- 238000011049 filling Methods 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 9
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 8
- 230000006911 nucleation Effects 0.000 description 8
- 238000010899 nucleation Methods 0.000 description 8
- 238000000137 annealing Methods 0.000 description 7
- 239000012159 carrier gas Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 239000006200 vaporizer Substances 0.000 description 7
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 239000011800 void material Substances 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 5
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 229910002091 carbon monoxide Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 229910000856 hastalloy Inorganic materials 0.000 description 4
- 229910001026 inconel Inorganic materials 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 150000003254 radicals Chemical class 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 150000001450 anions Chemical class 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- -1 ethyl acetate Chemical compound 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- SKKMWRVAJNPLFY-UHFFFAOYSA-N azanylidynevanadium Chemical compound [V]#N SKKMWRVAJNPLFY-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 2
- 150000001879 copper Chemical class 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical compound [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 2
- IIEWJVIFRVWJOD-UHFFFAOYSA-N ethylcyclohexane Chemical compound CCC1CCCCC1 IIEWJVIFRVWJOD-UHFFFAOYSA-N 0.000 description 2
- 238000005429 filling process Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- 238000001308 synthesis method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910017083 AlN Inorganic materials 0.000 description 1
- PSSWJIUFYFQZEJ-UHFFFAOYSA-N C1(C=CC=C1)[V+]C1C=CC=C1 Chemical compound C1(C=CC=C1)[V+]C1C=CC=C1 PSSWJIUFYFQZEJ-UHFFFAOYSA-N 0.000 description 1
- 244000132059 Carica parviflora Species 0.000 description 1
- 235000014653 Carica parviflora Nutrition 0.000 description 1
- JJLJMEJHUUYSSY-UHFFFAOYSA-L Copper hydroxide Chemical compound [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 description 1
- 239000005750 Copper hydroxide Substances 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 1
- 101100023111 Schizosaccharomyces pombe (strain 972 / ATCC 24843) mfc1 gene Proteins 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910020177 SiOF Inorganic materials 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- 241000691013 Theiler's disease-associated virus Species 0.000 description 1
- 101100107923 Vitis labrusca AMAT gene Proteins 0.000 description 1
- SHEGNBCAYSUQEV-UHFFFAOYSA-N [Cu+].CC(C)=C(C)[SiH3] Chemical compound [Cu+].CC(C)=C(C)[SiH3] SHEGNBCAYSUQEV-UHFFFAOYSA-N 0.000 description 1
- 125000005595 acetylacetonate group Chemical group 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910001956 copper hydroxide Inorganic materials 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- VCIKJQZFNVXWPF-ATMONBRVSA-L copper;(z)-2,2,6,6-tetramethyl-5-oxohept-3-en-3-olate Chemical compound [Cu+2].CC(C)(C)C(\[O-])=C\C(=O)C(C)(C)C.CC(C)(C)C(\[O-])=C\C(=O)C(C)(C)C VCIKJQZFNVXWPF-ATMONBRVSA-L 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 150000003681 vanadium Chemical class 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
- C07C49/92—Ketonic chelates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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Abstract
【解決手段】ホールや溝が形成された基板表面上に、金属原料としてテトラキスジエチルアミノバナジウム、テトラキスジメチルアミノバナジウム、テトラキスエチルメチルアミノバナジウム、テトラキスジエチルアミノチタン、テトラキスジメチルアミノチタン、テトラキスエチルメチルアミノチタンを、還元性ガスとしてターシャリーブチルヒドラジン、NH3、H2、SiH4、Si2H6を用いて、CVD法によりバナジウムまたはチタン含有膜からなる下地層を形成し、この上に、CVD法により銅含有膜を形成し、ホールや溝を埋め込み、配線を形成する。
【選択図】図5
Description
8.0×10-1cc/min・cm2(3.6×10-5mol/min・cm2) ≧ 供給量 ≧ 3.6×10-3cc/min・cm2(1.6×10-7mol/min・cm2)
を満たす量であることが好ましい。下限値未満でも上限値を超えても良好な埋め込み特性は得られない。
工程1:
図1に示すCVD装置を用いてバナジウム含有膜を形成した。膜を形成する基板Sとして、ケイ素酸化物膜の形成された8インチウェハー(SiO2/Si)を用いた。
VN成膜条件1:
TDEAV供給量:84mg/min
TDEAV用キャリアN2:400sccm
TBH流量:80sccm(NH3流量:13sccm、H2流量:1680sccm)
キャリアN2:1500sccm
成膜圧力:340Pa
成膜時間:5min
成膜温度:350℃
膜厚:20nm
TDEAV供給量:84mg/min
TDEAV用キャリアN2:400sccm
キャリアN2:1580sccm
成膜圧力:340Pa
成膜時間:5min
成膜温度:350℃
膜厚:25nm
VN成膜条件3:
TDMAV供給量:84mg/min
TDMAV用キャリアN2:400sccm
TBH流量:80sccm(NH3流量:13sccm、H2流量:1680sccm)
キャリアN2:1580sccm
成膜圧力:340Pa
成膜時間:5min
成膜温度:300℃
膜厚:25nm
成膜圧力:340Pa
成膜時間:5min
TDMAV供給量:84mg/min
TDMAV用キャリアN2:400sccm
成膜温度:300℃
キャリアN2:1580sccm
膜厚:25nm
基板:SiO2/Si
成膜圧力:3×10−2Pa
電力:15kW
ガス供給比:Ar:N2=6:15
成膜温度:160℃
膜厚:20nm
本工程では、上記工程1で得られたバリア層の上に銅含有膜を形成する工程について説明する。
使用基板:
(1)工程1のVN成膜条件1に従って、還元性ガスとしてTBHを80sccm流しバリア層を形成した基板
(2)工程1のVN成膜条件1に従って、還元性ガスとしてNH3を13sccm流してバリア層を形成した基板
(3)工程1のVN成膜条件1に従って、還元性ガスとしてH2を1680sccm流してバリア層を形成した基板
(4)工程1のVN成膜条件2に従って、還元性ガスなしでバリア層を形成した基板
(5)工程1のVN成膜条件3に従って、還元性ガスとしてTBHを80sccm流してバリア層を形成した基板
(6)工程1のVN成膜条件3に従って、還元性ガスとしてNH3を13sccm流してバリア層を形成した基板
(7)工程1のVN成膜条件3に従って、還元性ガスとしてH2を1680sccm流してバリア層を形成した基板
(8)工程1のVN成膜条件4に従って、還元性ガスなしでバリア層を形成した基板
(9)バリア層なしのSiO2/Si基板
(10)工程1のTaN成膜条件に従って、バリア層を形成した基板
成膜時間:1min
SOPD供給量:78mg/min(3.15cc/min)
SOPD用キャリアN2:400sccm
成膜温度:200〜350℃
H2:2500sccm
使用基板:
(1)工程1のVN成膜条件2に従って、還元性ガスなしでバリア層を形成した基板
(2)工程1のVN成膜条件4に従って、還元性ガスなしでバリア層を形成した基板
(3)バリア層なしのSiO2/Si基板
(4)工程1のTaN成膜条件に従って、バリア層を形成した基板
成膜時間:15〜45min
SOPD供給量:78mg/min(3.15cc/min)
SOPD用キャリアN2:400sccm
成膜温度:200〜350℃
H2:2500sccm
使用基板:
(1)工程1のVN成膜条件1に従って、還元性ガスとしてTBHを80sccm流しバリア層を形成した基板
(2)工程1のVN成膜条件1に従って、還元性ガスとしてNH3を13sccm流しバリア層を形成した基板
(3)工程1のVN成膜条件1に従って、還元性ガスとしてH2を1680sccm流し(N2ガスは流さない)バリア層を形成した基板
(4)工程1のVN成膜条件3に従って、還元性ガスとしてTBHを80sccm流してバリア層を形成した基板
(5)工程1のVN成膜条件3に従って、還元性ガスとしてNH3を13sccm流しバリア層を形成した基板
(6)工程1のVN成膜条件3に従って、還元性ガスとしてH2を1680sccm流し(N2ガスは流さない)バリア層を形成した基板
(7)工程1のTaN成膜条件に従って、バリア層を形成した基板
(8)バリア層なしのSiO2/Si基板
成膜時間:15〜45min
SOPD供給量:78mg/min(3.15cc/min)
SOPD用キャリアN2:400sccm
成膜温度:200〜350℃
H2:2500sccm
上記プロセスを経て加熱された基板に対して、以下の基板作製条件1および2に従ってバナジウム含有膜を形成した。
基板:SiO2/Si
TDEAV供給量:84mg/min
TDEAV用キャリアN2:400sccm
TBH流量:80sccm
キャリアN2:1500sccm
成膜圧力:340Pa
成膜時間:10〜20min
成膜温度:350℃
膜厚:50〜100nm
上記工程1の後、連続してTDEAV原料、TDEAV用キャリアおよびTBHの供給を停止させて、キャリアN2のみを1500sccm流し、反応室内を1分間パージし、以下の基板作製条件2で基板表面の改質を行って、基板を作製した。
基板:バナジウム含有膜/SiO2/Si(基板作成条件1で作製した基板)
TDEAV供給量:84mg/min
TDEAV用キャリアN2:400sccm
キャリアN2:1580sccm
成膜圧力:340Pa
成膜時間:1〜5min
成膜温度:350℃
膜厚:5〜25nm
使用基板:実施例2の工程1および2(基板作製条件1および2)で作製した各基板
SOPD供給量:78mg/min(3.15cc/min)
基板表面積で割ったSOPD供給量:0.24mg/min・cm2(1.0×10-2cc/min・cm2)
SOPD用キャリアN2:400sccm
H2:2500sccm
H2分圧:1497Pa
H2/SOPD比:793
H2分圧×H2/SOPD比:1,187,000
成膜圧力:1780Pa
成膜時間:15〜45min
成膜温度:150〜350℃
使用基板:実施例2の工程1および2で作製した各基板
SOPD供給量:57mg/min(2.3cc/min)
基板表面積で割ったSOPD供給量:0.17mg/min・cm2(7.3×10−3cc/min・cm2)
SOPD用キャリアN2:200sccm
H2:1800sccm
H2分圧:1563Pa
H2/SOPD比:785
H2分圧×H2/SOPD比:1,220,000
成膜圧力:1780Pa
成膜時間:15〜60min
成膜温度:150〜350℃
使用基板:実施例2の工程1および2で作製した各基板
SOPD供給量:28mg/min(1.15cc/min)
基板表面積で割ったSOPD供給量:0.089mg/min・cm2(3.6×10−3cc/min・cm2)
SOPD用キャリアN2:200sccm
H2:1800sccm
H2分圧:1570Pa
H2/SOPD比:1570
H2分圧×H2/SOPD比:2,460,000
成膜温度:150〜350℃
成膜圧力:1780Pa
成膜時間:15〜90min
◎:ホールを全て満たした。
×:埋め込みができなかった。
括弧内は埋め込みが達成できたアスペクト比(AR)を示す。
(比較例1)
◎:ホールを全て満たした。
×:埋め込みができなかった。
括弧内は埋め込みが達成できたアスペクト比(AR)を示す。
201 原料容器 202 原料
203 気化装置 3 反応装置
301 反応室 302 シャワープレート
303 基板設置台 304 仕切りバルブ
4 排出装置 401 排出バルブ
402 圧力コントロールバルブ 403 原料トラップ
404 真空ポンプ
Claims (15)
- ホールや溝が形成された成膜対象物上に、4価のアミド系バナジウム有機金属原料ガスまたは4価の有機アミド系チタン有機金属原料ガスと還元性ガスとを用いて、CVD法によりバナジウムまたはチタン含有膜からなる下地層を形成し、この上に、CVD法により銅含有膜を形成し、該ホールや溝を埋め込むことを特徴とする銅配線の形成方法。
- 前記4価のアミド系バナジウム有機金属原料が、テトラキスジエチルアミノバナジウム、テトラキスジメチルアミノバナジウムまたはテトラキスエチルメチルアミノバナジウムであり、また、前記4価のアミド系チタン有機金属原料がテトラキスジエチルアミノチタン、テトラキスジメチルアミノチタンまたはテトラキスエチルメチルアミノチタンであることを特徴とする請求項1記載の銅配線の形成方法。
- 前記還元性ガスが、乖離してH*ラジカルや、H+イオンを放出することができるガスであることを特徴とする請求項1または2記載の銅配線の形成方法。
- 前記還元性ガスが、ヒドラジン誘導体、NH3、H2、SiH4およびSi2H6から選ばれたガスであることを特徴とする請求項3記載の銅配線の形成方法。
- 前記ヒドラジン誘導体が、ヒドラジンの水素原子の1つまたは2つをメチル基、エチル基、直鎖または分枝のブチル基で置換したものである請求項4記載の銅配線の形成方法。
- 前記ヒドラジン誘導体が、ターシャリーブチルヒドラジンであることを特徴とする請求項4記載の銅配線の形成方法。
- 前記4価のアミド系バナジウムまたはチタン有機金属原料ガスと還元性ガスとの反応を、成膜速度が基板温度に依存する温度領域で行い、バナジウム含有膜またはチタン含有膜を形成することを特徴とする請求項1〜6のいずれかに記載の銅配線の形成方法。
- 前記銅含有膜を、次の一般式(I)'で表されるβ−ジケトネート基(式中、Zは、H原子または炭素原子数1〜4のアルキル基を、Xは、次の一般式(I−I)で表される基(式中、Raは、炭素原子数1〜5の直鎖または分枝のアルキレン基を、Rb、Rc、Rdは、夫々独立して炭素原子数1〜5の直鎖または分枝のアルキル基を表す)を、Yは、該一般式(I−I)で表される基(式中、Raは、炭素原子数1〜5の直鎖または分枝のアルキレン基を、Rb、Rc、Rdは、夫々独立して炭素原子数1〜5の直鎖または分枝のアルキル基を表す)か、または炭素数1〜8の直鎖または分枝のアルキル基を表す)を配位子とする次の一般式(I)(式中、X、Y、Zは上記定義の通りである):
- 請求項1記載の銅含有膜の形成用原料の供給量、請求項8〜11記載の一般式(I)、(I−a)、(I−b)、(I−c)で表される銅錯体の供給量が、成膜対象物の成膜面の単位面積あたり、以下の式:
8.0×10-1cc/min・cm2(3.6×10-5mol/min・cm2) ≧ 供給量 ≧ 3.6×10-3cc/min・cm2(1.6×10-7mol/min・cm2)
を満足する量であることを特徴とする請求項1〜11のいずれかに記載の銅配線の形成方法。 - 請求項1記載の銅含有膜の形成用原料、請求項8〜11記載の一般式(I)、(I−a)、(I−b)、(I−c)で表される銅錯体を用いて、CVD法により銅含有膜を形成する際の成膜温度が、150℃〜350℃であることを特徴とする請求項1〜12のいずれかに記載の銅配線の形成方法。
- 前記銅含有膜を形成する際に、還元性ガスとして水素原子含有ガスを用いることを特徴とする請求項1〜13のいずれかに記載の銅配線の形成方法。
- 前記水素原子含有ガスがH2ガスであることを特徴とする請求項14記載の銅配線の形成方法
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PCT/JP2005/016712 WO2006035591A1 (ja) | 2004-09-27 | 2005-09-12 | 銅配線の形成方法 |
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US11/663,807 US8034403B2 (en) | 2004-09-27 | 2005-09-12 | Method for forming copper distributing wires |
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US6916398B2 (en) * | 2001-10-26 | 2005-07-12 | Applied Materials, Inc. | Gas delivery apparatus and method for atomic layer deposition |
KR101184529B1 (ko) * | 2004-11-08 | 2012-09-20 | 텔 에피온 인크 | 캡핑 구조의 형성 방법, 구리 인터커넥트, 레벨간 유전체층, 및 하드마스크층 |
KR101649714B1 (ko) * | 2008-03-21 | 2016-08-30 | 프레지던트 앤드 펠로우즈 오브 하바드 칼리지 | 상호접속부를 위한 자기정렬 배리어 층 |
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US7741216B2 (en) * | 2008-01-02 | 2010-06-22 | Hynix Semiconductor Inc. | Metal line of semiconductor device and method for forming the same |
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Also Published As
Publication number | Publication date |
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KR100934887B1 (ko) | 2010-01-06 |
US8034403B2 (en) | 2011-10-11 |
CN101032007A (zh) | 2007-09-05 |
DE112005002353B8 (de) | 2012-12-20 |
TWI371787B (ja) | 2012-09-01 |
WO2006035591A1 (ja) | 2006-04-06 |
DE112005002353T5 (de) | 2007-09-06 |
CN100479114C (zh) | 2009-04-15 |
TW200620433A (en) | 2006-06-16 |
DE112005002353B4 (de) | 2012-06-14 |
JP4783561B2 (ja) | 2011-09-28 |
KR20080100394A (ko) | 2008-11-17 |
US20100291290A1 (en) | 2010-11-18 |
KR100934888B1 (ko) | 2010-01-06 |
KR20070056126A (ko) | 2007-05-31 |
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