JP2006073609A5 - - Google Patents

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Publication number
JP2006073609A5
JP2006073609A5 JP2004252310A JP2004252310A JP2006073609A5 JP 2006073609 A5 JP2006073609 A5 JP 2006073609A5 JP 2004252310 A JP2004252310 A JP 2004252310A JP 2004252310 A JP2004252310 A JP 2004252310A JP 2006073609 A5 JP2006073609 A5 JP 2006073609A5
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JP
Japan
Prior art keywords
solid
concentration peak
impurity concentration
impurity
state imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004252310A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006073609A (ja
JP4612818B2 (ja
Filing date
Publication date
Priority claimed from JP2004252310A external-priority patent/JP4612818B2/ja
Priority to JP2004252310A priority Critical patent/JP4612818B2/ja
Application filed filed Critical
Priority to US11/003,444 priority patent/US7323731B2/en
Priority to DE602004018603T priority patent/DE602004018603D1/de
Priority to EP04029230A priority patent/EP1542286B1/en
Priority to AT04029230T priority patent/ATE418792T1/de
Priority to CN2008101662973A priority patent/CN101369594B/zh
Priority to KR1020040104338A priority patent/KR100615542B1/ko
Priority to CNB2004101007057A priority patent/CN100438049C/zh
Publication of JP2006073609A publication Critical patent/JP2006073609A/ja
Publication of JP2006073609A5 publication Critical patent/JP2006073609A5/ja
Priority to US11/941,675 priority patent/US7473948B2/en
Priority to US12/326,138 priority patent/US7679116B2/en
Priority to US12/642,094 priority patent/US7928486B2/en
Publication of JP4612818B2 publication Critical patent/JP4612818B2/ja
Application granted granted Critical
Priority to US13/049,101 priority patent/US20110163407A1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004252310A 2003-12-12 2004-08-31 固体撮像素子、固体撮像装置及び撮像システム Expired - Fee Related JP4612818B2 (ja)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP2004252310A JP4612818B2 (ja) 2004-08-31 2004-08-31 固体撮像素子、固体撮像装置及び撮像システム
US11/003,444 US7323731B2 (en) 2003-12-12 2004-12-06 Photoelectric conversion device, method of manufacturing photoelectric conversion device, and image pickup system
DE602004018603T DE602004018603D1 (de) 2003-12-12 2004-12-09 Photoelektrische Umwandlungsvorrichtung und Bildaufnahmesystem
EP04029230A EP1542286B1 (en) 2003-12-12 2004-12-09 Photoelectric conversion device and image pickup system
AT04029230T ATE418792T1 (de) 2003-12-12 2004-12-09 Photoelektrische umwandlungsvorrichtung und bildaufnahmesystem
CN2008101662973A CN101369594B (zh) 2003-12-12 2004-12-10 光电变换装置及其制造方法和摄像系统
KR1020040104338A KR100615542B1 (ko) 2003-12-12 2004-12-10 광전변환장치와 그 제조방법, 및 촬상시스템
CNB2004101007057A CN100438049C (zh) 2003-12-12 2004-12-10 光电变换装置和摄像系统
US11/941,675 US7473948B2 (en) 2003-12-12 2007-11-16 Photoelectric conversion device, method of manufacturing photoelectric conversion device, and image pickup system
US12/326,138 US7679116B2 (en) 2003-12-12 2008-12-02 Photoelectric conversion device, method of manufacturing photoelectric conversion device, and image pickup system
US12/642,094 US7928486B2 (en) 2003-12-12 2009-12-18 Photoelectric conversion device, method of manufacturing photoelectric conversion device, and image pickup system
US13/049,101 US20110163407A1 (en) 2003-12-12 2011-03-16 Photoelectric conversion device, method of manufacturing photoelectric conversion device, and image pickup system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004252310A JP4612818B2 (ja) 2004-08-31 2004-08-31 固体撮像素子、固体撮像装置及び撮像システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010198933A Division JP5484271B2 (ja) 2010-09-06 2010-09-06 固体撮像素子、固体撮像装置及び撮像システム

Publications (3)

Publication Number Publication Date
JP2006073609A JP2006073609A (ja) 2006-03-16
JP2006073609A5 true JP2006073609A5 (enrdf_load_stackoverflow) 2007-10-11
JP4612818B2 JP4612818B2 (ja) 2011-01-12

Family

ID=36153946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004252310A Expired - Fee Related JP4612818B2 (ja) 2003-12-12 2004-08-31 固体撮像素子、固体撮像装置及び撮像システム

Country Status (1)

Country Link
JP (1) JP4612818B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273518A (ja) * 2006-03-30 2007-10-18 Matsushita Electric Ind Co Ltd 固体撮像装置及びそれを用いたカメラ
JP5538922B2 (ja) 2009-02-06 2014-07-02 キヤノン株式会社 固体撮像装置の製造方法
JP2010206181A (ja) * 2009-02-06 2010-09-16 Canon Inc 光電変換装置及び撮像システム
JP2010206178A (ja) 2009-02-06 2010-09-16 Canon Inc 光電変換装置、及び光電変換装置の製造方法
WO2013098952A1 (ja) * 2011-12-27 2013-07-04 キヤノン株式会社 撮像装置
JP6355311B2 (ja) * 2013-10-07 2018-07-11 キヤノン株式会社 固体撮像装置、その製造方法及び撮像システム
JP2019102494A (ja) * 2017-11-28 2019-06-24 キヤノン株式会社 光電変換装置およびその製造方法、機器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3457551B2 (ja) * 1998-11-09 2003-10-20 株式会社東芝 固体撮像装置
JP4270742B2 (ja) * 2000-11-30 2009-06-03 Ｎｅｃエレクトロニクス株式会社 固体撮像装置
JP2004152819A (ja) * 2002-10-29 2004-05-27 Toshiba Corp 固体撮像装置及びその製造方法

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