JP2005529340A - 湿った環境中の走査型電子顕微鏡のための低圧チャンバー - Google Patents

湿った環境中の走査型電子顕微鏡のための低圧チャンバー Download PDF

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Publication number
JP2005529340A
JP2005529340A JP2004511866A JP2004511866A JP2005529340A JP 2005529340 A JP2005529340 A JP 2005529340A JP 2004511866 A JP2004511866 A JP 2004511866A JP 2004511866 A JP2004511866 A JP 2004511866A JP 2005529340 A JP2005529340 A JP 2005529340A
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specimen
enclosure
assembly
pressure
volume
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Japanese (ja)
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JP2005529340A5 (https=
Inventor
モゼズ，エリシャ
シバージュ，シュテファン
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イェダ・リサーチ・アンド・ディヴェロプメント・カンパニー・リミテッド
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Publication of JP2005529340A publication Critical patent/JP2005529340A/ja
Publication of JP2005529340A5 publication Critical patent/JP2005529340A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2004511866A 2002-06-05 2003-06-01 湿った環境中の走査型電子顕微鏡のための低圧チャンバー Pending JP2005529340A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL15005602A IL150056A0 (en) 2002-06-05 2002-06-05 Low-pressure chamber for scanning electron microscopy in a wet environment
PCT/IL2003/000455 WO2003104847A2 (en) 2002-06-05 2003-06-01 Low-pressure chamber for scanning electron microscopy in a wet environment

Publications (2)

Publication Number Publication Date
JP2005529340A true JP2005529340A (ja) 2005-09-29
JP2005529340A5 JP2005529340A5 (https=) 2006-07-20

Family

ID=28053348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004511866A Pending JP2005529340A (ja) 2002-06-05 2003-06-01 湿った環境中の走査型電子顕微鏡のための低圧チャンバー

Country Status (6)

Country Link
US (1) US7304313B2 (https=)
EP (1) EP1509941A4 (https=)
JP (1) JP2005529340A (https=)
AU (1) AU2003228091A1 (https=)
IL (1) IL150056A0 (https=)
WO (1) WO2003104847A2 (https=)

Cited By (4)

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JP2007292702A (ja) * 2006-04-27 2007-11-08 Jeol Ltd 試料検査装置及び試料検査方法並びに試料検査システム
JP2008016249A (ja) * 2006-07-04 2008-01-24 Jeol Ltd 試料保持体、試料検査方法及び試料検査装置並びに試料検査システム
JP2008032531A (ja) * 2006-07-28 2008-02-14 Kao Corp 細菌の共凝集能の評価方法
WO2009133842A1 (ja) 2008-04-28 2009-11-05 株式会社日立ハイテクノロジーズ 透過型電子顕微鏡、及び試料観察方法

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WO2006021961A2 (en) * 2004-08-26 2006-03-02 Quantomix Ltd. Sample enclosure for inspection and methods of use thereof
TWI275118B (en) * 2005-12-09 2007-03-01 Li Bing Huan Sample box of electron microscope for observing a general sample/live cell
GR1005943B (el) * 2006-05-15 2008-06-19 Γ. Παπανικολαου & Σια Ε.Ε. Τρυβλιο μικροσκοπιου με στερεωμενη αντικειμενοφορο πλακα και με στεγανοποιητικο καλυμμα καθως και διαταξη για τη στερεωση βασης συστοιχιας σωληναριωνμικροβιολογικων εξετασεων.
EP1953793B1 (en) * 2007-01-31 2012-05-16 JEOL Ltd. Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder
US8059271B2 (en) 2009-02-04 2011-11-15 The United States Of America As Represented By The Secretary Of The Army Reusable sample holding device permitting ready loading of very small wet samples
US8698098B2 (en) 2010-07-30 2014-04-15 E.A. Fischione Instruments, Inc. In situ holder assembly
US8178851B2 (en) 2010-07-30 2012-05-15 E.A. Fischione Instruments, Inc. In situ holder assembly
WO2012018827A2 (en) * 2010-08-02 2012-02-09 Protochips, Inc. Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
US9437393B2 (en) 2012-11-16 2016-09-06 Protochips, Inc. Method for forming an electrical connection to an sample support in an electron microscope holder
JP6364167B2 (ja) * 2013-09-30 2018-07-25 株式会社日立ハイテクノロジーズ 環境制御型荷電粒子観察システム
GB2537579A (en) * 2014-11-07 2016-10-26 Linkam Scient Instr Ltd Microscopic sample preparation
WO2017006408A1 (ja) * 2015-07-06 2017-01-12 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
CN209591971U (zh) * 2018-03-22 2019-11-05 邑流微测股份有限公司 显微镜

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007292702A (ja) * 2006-04-27 2007-11-08 Jeol Ltd 試料検査装置及び試料検査方法並びに試料検査システム
JP2008016249A (ja) * 2006-07-04 2008-01-24 Jeol Ltd 試料保持体、試料検査方法及び試料検査装置並びに試料検査システム
JP2008032531A (ja) * 2006-07-28 2008-02-14 Kao Corp 細菌の共凝集能の評価方法
WO2009133842A1 (ja) 2008-04-28 2009-11-05 株式会社日立ハイテクノロジーズ 透過型電子顕微鏡、及び試料観察方法
US8785883B2 (en) 2008-04-28 2014-07-22 Hitachi High-Technologies Corporation Transmission electron microscope, and method of observing specimen
EP2801998A2 (en) 2008-04-28 2014-11-12 Hitachi High-Technologies Corporation Transmission electron microscope, and method of observing specimen
US9129772B2 (en) 2008-04-28 2015-09-08 Hitachi High-Technologies Corporation Transmission electron microscope, and method of observing specimen

Also Published As

Publication number Publication date
US20050279938A1 (en) 2005-12-22
EP1509941A2 (en) 2005-03-02
WO2003104847A2 (en) 2003-12-18
IL150056A0 (en) 2002-12-01
US7304313B2 (en) 2007-12-04
WO2003104847A3 (en) 2004-04-15
AU2003228091A1 (en) 2003-12-22
AU2003228091A8 (en) 2003-12-22
EP1509941A4 (en) 2007-12-12

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