AU2003228091A1 - Low-pressure chamber for scanning electron microscopy in a wet environment - Google Patents

Low-pressure chamber for scanning electron microscopy in a wet environment

Info

Publication number
AU2003228091A1
AU2003228091A1 AU2003228091A AU2003228091A AU2003228091A1 AU 2003228091 A1 AU2003228091 A1 AU 2003228091A1 AU 2003228091 A AU2003228091 A AU 2003228091A AU 2003228091 A AU2003228091 A AU 2003228091A AU 2003228091 A1 AU2003228091 A1 AU 2003228091A1
Authority
AU
Australia
Prior art keywords
low
pressure chamber
scanning electron
electron microscopy
wet environment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003228091A
Other languages
English (en)
Other versions
AU2003228091A8 (en
Inventor
Elisha Moses
Stephan Thiberge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yeda Research and Development Co Ltd
Original Assignee
Yeda Research and Development Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yeda Research and Development Co Ltd filed Critical Yeda Research and Development Co Ltd
Publication of AU2003228091A1 publication Critical patent/AU2003228091A1/en
Publication of AU2003228091A8 publication Critical patent/AU2003228091A8/xx
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AU2003228091A 2002-06-05 2003-06-01 Low-pressure chamber for scanning electron microscopy in a wet environment Abandoned AU2003228091A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL15005602A IL150056A0 (en) 2002-06-05 2002-06-05 Low-pressure chamber for scanning electron microscopy in a wet environment
IL150056 2002-06-05
PCT/IL2003/000455 WO2003104847A2 (en) 2002-06-05 2003-06-01 Low-pressure chamber for scanning electron microscopy in a wet environment

Publications (2)

Publication Number Publication Date
AU2003228091A1 true AU2003228091A1 (en) 2003-12-22
AU2003228091A8 AU2003228091A8 (en) 2003-12-22

Family

ID=28053348

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003228091A Abandoned AU2003228091A1 (en) 2002-06-05 2003-06-01 Low-pressure chamber for scanning electron microscopy in a wet environment

Country Status (6)

Country Link
US (1) US7304313B2 (https=)
EP (1) EP1509941A4 (https=)
JP (1) JP2005529340A (https=)
AU (1) AU2003228091A1 (https=)
IL (1) IL150056A0 (https=)
WO (1) WO2003104847A2 (https=)

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JP4808100B2 (ja) * 2006-07-28 2011-11-02 花王株式会社 細菌の共凝集能の評価方法
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JP5226378B2 (ja) 2008-04-28 2013-07-03 株式会社日立ハイテクノロジーズ 透過型電子顕微鏡、及び試料観察方法
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US8698098B2 (en) 2010-07-30 2014-04-15 E.A. Fischione Instruments, Inc. In situ holder assembly
US8178851B2 (en) 2010-07-30 2012-05-15 E.A. Fischione Instruments, Inc. In situ holder assembly
WO2012018827A2 (en) * 2010-08-02 2012-02-09 Protochips, Inc. Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
US9437393B2 (en) 2012-11-16 2016-09-06 Protochips, Inc. Method for forming an electrical connection to an sample support in an electron microscope holder
JP6364167B2 (ja) * 2013-09-30 2018-07-25 株式会社日立ハイテクノロジーズ 環境制御型荷電粒子観察システム
GB2537579A (en) * 2014-11-07 2016-10-26 Linkam Scient Instr Ltd Microscopic sample preparation
WO2017006408A1 (ja) * 2015-07-06 2017-01-12 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
CN209591971U (zh) * 2018-03-22 2019-11-05 邑流微测股份有限公司 显微镜

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Also Published As

Publication number Publication date
US20050279938A1 (en) 2005-12-22
EP1509941A2 (en) 2005-03-02
WO2003104847A2 (en) 2003-12-18
IL150056A0 (en) 2002-12-01
JP2005529340A (ja) 2005-09-29
US7304313B2 (en) 2007-12-04
WO2003104847A3 (en) 2004-04-15
AU2003228091A8 (en) 2003-12-22
EP1509941A4 (en) 2007-12-12

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase