AU2001237607A1 - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
AU2001237607A1
AU2001237607A1 AU2001237607A AU3760701A AU2001237607A1 AU 2001237607 A1 AU2001237607 A1 AU 2001237607A1 AU 2001237607 A AU2001237607 A AU 2001237607A AU 3760701 A AU3760701 A AU 3760701A AU 2001237607 A1 AU2001237607 A1 AU 2001237607A1
Authority
AU
Australia
Prior art keywords
electron microscope
scanning electron
scanning
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001237607A
Inventor
Francis Baker
John Craven
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge University Technical Services Ltd CUTS
Original Assignee
Cambridge University Technical Services Ltd CUTS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge University Technical Services Ltd CUTS filed Critical Cambridge University Technical Services Ltd CUTS
Publication of AU2001237607A1 publication Critical patent/AU2001237607A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AU2001237607A 2000-03-09 2001-03-08 Scanning electron microscope Abandoned AU2001237607A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0005717 2000-03-09
GBGB0005717.4A GB0005717D0 (en) 2000-03-09 2000-03-09 Scanning electron microscope
PCT/GB2001/001022 WO2001067483A1 (en) 2000-03-09 2001-03-08 Scanning electron microscope

Publications (1)

Publication Number Publication Date
AU2001237607A1 true AU2001237607A1 (en) 2001-09-17

Family

ID=9887302

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001237607A Abandoned AU2001237607A1 (en) 2000-03-09 2001-03-08 Scanning electron microscope

Country Status (5)

Country Link
US (1) US6833546B2 (en)
EP (1) EP1290714A1 (en)
AU (1) AU2001237607A1 (en)
GB (1) GB0005717D0 (en)
WO (1) WO2001067483A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10224292A1 (en) * 2002-05-31 2003-12-11 Philips Intellectual Property X-ray tube
JP4636897B2 (en) * 2005-02-18 2011-02-23 株式会社日立ハイテクサイエンスシステムズ Scanning electron microscope
EP2446459B1 (en) * 2009-06-24 2015-04-01 Carl Zeiss Microscopy, LLC Charged particle detectors
US20180178227A1 (en) 2015-05-28 2018-06-28 Georgia Tech Research Corporation Systems and methods of electron beam induced processing

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897545A (en) * 1987-05-21 1990-01-30 Electroscan Corporation Electron detector for use in a gaseous environment
US5396067A (en) * 1992-06-11 1995-03-07 Nikon Corporation Scan type electron microscope
JPH06168695A (en) * 1992-11-30 1994-06-14 Nikon Corp Charged particle microscope
JP3431228B2 (en) * 1993-09-21 2003-07-28 株式会社東芝 Charged particle detection device and charged particle irradiation device
JP3291880B2 (en) * 1993-12-28 2002-06-17 株式会社日立製作所 Scanning electron microscope
US5945672A (en) * 1998-01-29 1999-08-31 Fei Company Gaseous backscattered electron detector for an environmental scanning electron microscope

Also Published As

Publication number Publication date
US20030141450A1 (en) 2003-07-31
WO2001067483A1 (en) 2001-09-13
EP1290714A1 (en) 2003-03-12
US6833546B2 (en) 2004-12-21
GB0005717D0 (en) 2000-05-03

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