JP2005526951A5 - - Google Patents

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Publication number
JP2005526951A5
JP2005526951A5 JP2003525229A JP2003525229A JP2005526951A5 JP 2005526951 A5 JP2005526951 A5 JP 2005526951A5 JP 2003525229 A JP2003525229 A JP 2003525229A JP 2003525229 A JP2003525229 A JP 2003525229A JP 2005526951 A5 JP2005526951 A5 JP 2005526951A5
Authority
JP
Japan
Prior art keywords
scale
signal
disposed
encoder
sensor head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003525229A
Other languages
English (en)
Japanese (ja)
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JP2005526951A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2002/025446 external-priority patent/WO2003021194A2/en
Publication of JP2005526951A publication Critical patent/JP2005526951A/ja
Publication of JP2005526951A5 publication Critical patent/JP2005526951A5/ja
Pending legal-status Critical Current

Links

JP2003525229A 2001-08-30 2002-08-12 基準点タルボットエンコーダ Pending JP2005526951A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31616001P 2001-08-30 2001-08-30
PCT/US2002/025446 WO2003021194A2 (en) 2001-08-30 2002-08-12 Reference point talbot encoder

Publications (2)

Publication Number Publication Date
JP2005526951A JP2005526951A (ja) 2005-09-08
JP2005526951A5 true JP2005526951A5 (cg-RX-API-DMAC10.html) 2006-01-05

Family

ID=23227766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003525229A Pending JP2005526951A (ja) 2001-08-30 2002-08-12 基準点タルボットエンコーダ

Country Status (6)

Country Link
EP (1) EP1421343A2 (cg-RX-API-DMAC10.html)
JP (1) JP2005526951A (cg-RX-API-DMAC10.html)
CN (1) CN1293367C (cg-RX-API-DMAC10.html)
AU (1) AU2002329728A1 (cg-RX-API-DMAC10.html)
CA (1) CA2458954A1 (cg-RX-API-DMAC10.html)
WO (1) WO2003021194A2 (cg-RX-API-DMAC10.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10353808B4 (de) * 2003-11-14 2015-09-03 Dr. Johannes Heidenhain Gmbh Messteilung für eine Positionsmesseinrichtung und Positionsmesseinrichtung
EP1771860B1 (en) * 2004-07-21 2009-09-30 Koninklijke Philips Electronics N.V. Information carrier, system and apparatus for reading such an information carrier
DE102005006247A1 (de) * 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7385178B2 (en) * 2005-10-26 2008-06-10 Avago Technologies Ecbu Ip Pte Ltd Reflective encoders with various emitter-detector configurations
WO2007091113A1 (en) * 2006-02-06 2007-08-16 Nokia Corporation Method and device for position sensing in an imaging system
DE102007035345A1 (de) * 2006-11-20 2008-05-21 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
EP2187430B1 (en) * 2007-07-24 2018-10-03 Nikon Corporation Position measuring system, exposure apparatus, position measuring method, exposure method, and device manufacturing method
JP5391115B2 (ja) * 2010-03-18 2014-01-15 株式会社ミツトヨ 光電式エンコーダ
CN106104216B (zh) * 2013-10-01 2018-11-02 瑞尼斯豪公司 编码器设备
JP6272129B2 (ja) * 2014-05-02 2018-01-31 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
WO2017042570A1 (en) * 2015-09-09 2017-03-16 Renishaw Plc Encoder apparatus
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
EP3825659B1 (en) 2019-11-19 2023-11-08 CSEM Centre Suisse D'electronique Et De Microtechnique SA Position encoder
CN114440945B (zh) * 2022-02-28 2023-06-16 中北大学 一种基于双层圆孔点阵二维光栅的可调谐光学角度编码器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2246431B (en) * 1988-01-22 1992-05-13 Mitutoyo Corp Optical encoder
US5260568A (en) * 1990-07-18 1993-11-09 Okuma Corporation Absolute position detector with diffraction grating windows and spot position detection
EP0639259B1 (en) * 1992-05-05 1999-07-28 MicroE, Inc. Apparatus for detecting relative movement
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
JPH0727543A (ja) * 1993-07-12 1995-01-27 Canon Inc 光学式変位センサー
JP3407477B2 (ja) * 1995-06-08 2003-05-19 松下電器産業株式会社 位相格子とその作製方法並びに光学式エンコーダ
CN1151361C (zh) * 1996-05-20 2004-05-26 松下电器产业株式会社 光学编码器及位置检测方法
US5991249A (en) * 1997-07-29 1999-11-23 Hoetron, Inc. Optical track sensing device

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