JP2005526915A5 - - Google Patents

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Publication number
JP2005526915A5
JP2005526915A5 JP2004507566A JP2004507566A JP2005526915A5 JP 2005526915 A5 JP2005526915 A5 JP 2005526915A5 JP 2004507566 A JP2004507566 A JP 2004507566A JP 2004507566 A JP2004507566 A JP 2004507566A JP 2005526915 A5 JP2005526915 A5 JP 2005526915A5
Authority
JP
Japan
Prior art keywords
pump
processing station
rotating
rotating device
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004507566A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005526915A (ja
JP4386832B2 (ja
Filing date
Publication date
Priority claimed from DE10224395A external-priority patent/DE10224395A1/de
Priority claimed from DE2002153512 external-priority patent/DE10253512A1/de
Priority claimed from DE2002153513 external-priority patent/DE10253513B4/de
Application filed filed Critical
Priority claimed from PCT/EP2003/005499 external-priority patent/WO2003100129A1/de
Publication of JP2005526915A publication Critical patent/JP2005526915A/ja
Publication of JP2005526915A5 publication Critical patent/JP2005526915A5/ja
Application granted granted Critical
Publication of JP4386832B2 publication Critical patent/JP4386832B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2004507566A 2002-05-24 2003-05-26 Ｃｖｄコーティング用の回転装置 Expired - Lifetime JP4386832B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
DE10223288 2002-05-24
DE10224395A DE10224395A1 (de) 2002-05-24 2002-06-01 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10225607A DE10225607A1 (de) 2002-05-24 2002-06-07 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10225985A DE10225985A1 (de) 2002-05-24 2002-06-11 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE2002153512 DE10253512A1 (de) 2002-11-16 2002-11-16 Rundläufermaschine für CVD-Beschichtungen
DE2002153513 DE10253513B4 (de) 2002-11-16 2002-11-16 Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
PCT/EP2003/005499 WO2003100129A1 (de) 2002-05-24 2003-05-26 Rundläufermaschine für cvd-beschichtungen

Publications (3)

Publication Number Publication Date
JP2005526915A JP2005526915A (ja) 2005-09-08
JP2005526915A5 true JP2005526915A5 (https=) 2006-01-05
JP4386832B2 JP4386832B2 (ja) 2009-12-16

Family

ID=29587928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004507566A Expired - Lifetime JP4386832B2 (ja) 2002-05-24 2003-05-26 Ｃｖｄコーティング用の回転装置

Country Status (6)

Country Link
US (1) US20050229850A1 (https=)
EP (1) EP1507895B1 (https=)
JP (1) JP4386832B2 (https=)
CN (1) CN100434566C (https=)
AU (1) AU2003242577A1 (https=)
WO (1) WO2003100129A1 (https=)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004017241B4 (de) 2004-04-05 2012-09-27 Schott Ag Verbundmaterial und Verfahren zu seiner Herstellung
SI21840A (sl) * 2004-08-31 2006-02-28 Jozef Bonifarti Montazna linija - karusel
GB0713821D0 (en) * 2007-07-17 2007-08-29 P2I Ltd A plasma deposition apparatus
CN101688302A (zh) * 2008-05-30 2010-03-31 东洋制罐株式会社 蒸镀装置
MX350703B (es) 2009-05-13 2017-09-14 Sio2 Medical Products Inc Metodo de gasificacion para inspeccionar una superficie revestida.
WO2013170052A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
EP2776603B1 (en) 2011-11-11 2019-03-06 SiO2 Medical Products, Inc. PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
JP6382830B2 (ja) 2012-11-30 2018-08-29 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 医療シリンジ、カートリッジ等上でのｐｅｃｖｄ堆積の均一性制御
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
EP2971228B1 (en) 2013-03-11 2023-06-21 Si02 Medical Products, Inc. Coated packaging
US20160017490A1 (en) 2013-03-15 2016-01-21 Sio2 Medical Products, Inc. Coating method
WO2015148471A1 (en) 2014-03-28 2015-10-01 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
EP3337915B1 (en) 2015-08-18 2021-11-03 SiO2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
CN110002766B (zh) * 2019-04-24 2023-06-23 苏州伯宇光电科技有限公司 玻璃电致变色膜化学浴镀膜装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB547249A (en) * 1940-02-14 1942-08-20 British Thomson Houston Co Ltd Improvements in apparatus for depositing reflecting metallic coatings on base members or bodies
US2730987A (en) * 1954-03-25 1956-01-17 James L Entwistle Company Apparatus for automatically vacuum coating of interior of glass tubes with metal
EP1019944A1 (en) * 1997-09-30 2000-07-19 Tetra Laval Holdings & Finance S.A. Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
FR2791598B1 (fr) * 1999-03-30 2001-06-22 Sidel Sa Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne et distributeur pour une telle machine
JP4298049B2 (ja) * 1999-04-02 2009-07-15 キヤノン株式会社 誘電体窓を用いたマイクロ波プラズマ処理装置
DE19916478A1 (de) * 1999-04-13 2000-10-19 Ruediger Haaga Gmbh Verfahren zum Evakuieren eines Plasmasterilisations-Reaktors

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