JP4386832B2 - Cvdコーティング用の回転装置 - Google Patents
Cvdコーティング用の回転装置 Download PDFInfo
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- JP4386832B2 JP4386832B2 JP2004507566A JP2004507566A JP4386832B2 JP 4386832 B2 JP4386832 B2 JP 4386832B2 JP 2004507566 A JP2004507566 A JP 2004507566A JP 2004507566 A JP2004507566 A JP 2004507566A JP 4386832 B2 JP4386832 B2 JP 4386832B2
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
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- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/4205—Handling means, e.g. transfer, loading or discharging means
- B29C49/42069—Means explicitly adapted for transporting blown article
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D23/00—Details of bottles or jars not otherwise provided for
- B65D23/02—Linings or internal coatings
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
- C03C17/004—Coating the inside
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- C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
- C08J9/0004—Use of compounding ingredients, the chemical constitution of which is unknown, broadly defined, or irrelevant
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C2791/00—Shaping characteristics in general
- B29C2791/001—Shaping in several steps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/4205—Handling means, e.g. transfer, loading or discharging means
- B29C49/42073—Grippers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/4205—Handling means, e.g. transfer, loading or discharging means
- B29C49/42073—Grippers
- B29C49/42075—Grippers with pivoting clamps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/4205—Handling means, e.g. transfer, loading or discharging means
- B29C49/42093—Transporting apparatus, e.g. slides, wheels or conveyors
- B29C49/42095—Rotating wheels or stars
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/4205—Handling means, e.g. transfer, loading or discharging means
- B29C49/42093—Transporting apparatus, e.g. slides, wheels or conveyors
- B29C49/42105—Transporting apparatus, e.g. slides, wheels or conveyors for discontinuous or batch transport
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/4205—Handling means, e.g. transfer, loading or discharging means
- B29C49/42113—Means for manipulating the objects' position or orientation
- B29C49/42115—Inversion, e.g. turning preform upside down
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/42384—Safety, e.g. operator safety
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/64—Heating or cooling preforms, parisons or blown articles
- B29C49/68—Ovens specially adapted for heating preforms or parisons
- B29C49/6835—Ovens specially adapted for heating preforms or parisons using reflectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
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Description
円形コンベアまたはプラズマホイール、
円形コンベアによって搬送される処理ステーションまたはプラズマステーション、および
動作媒体用の少なくとも1つの第1ポンプ装置または供給装置を備える。
第1ポンプ装置は、円形コンベアによって搬送される。
少なくとも1つの加工物を回転中の円形コンベア上の処理ステーションに導入すること、
処理ステーションを少なくとも1つの第1ポンプ装置に接続すること、
処理ステーションを排気すること、および
加工物をコーティングすること、
を提供し、第1ポンプ装置は、円形コンベアと共に搬送される。
(1) 1/Seff=1/S+1/L’
但し、Lは供給管路のコンダクタンスまたは流れコンダクタンス(flow conductance)を表す。
(2) L=qpV/(p0−p2)
ここで、p0は管路の上流側の圧力を表し、p2は管路のポンプ側端部の圧力を表す。qpVは、真空管路を通るp・V流量を表す。例として、層流(laminar flow)の場合、これは次式から得られる(たとえば、"Handbuck Vakuumtechnik"([Vacuum technology handbook]、第6版、Vieweg-Verlag 1997年を参照)。
(3) qpV=π/128η・d/1・p0/
但し、ηはガスの動的粘度を表す。変数dおよびlは、管路の直径および長さを表す。真空管路のコンダクタンスがそれらの長さ、および特にそれらの直径に大きく依存することが、方程式3からわかるであろう。さらに、方程式(2)を方程式(3)と組み合わせることから、圧力差の低下に伴って、コンダクタンスが減少することもわかるであろう。したがって、圧力が低下するのに伴って、発生する圧力差も小さくなる。そのため、管路の断面積、または長さに対する直径の係数d/lは、高い圧力でのコンダクタンスにとって低い圧力範囲の場合より重要性が低い。したがって、円形コンベア上に第1ポンプ装置を取り付ける本発明に従った配置では、このポンプ装置から処理ステーションまでの真空管路を特に短くすることが結果的に可能であり、したがって、排気を相当に加速することができる。したがって、本発明の1つの実施形態によれば、たとえば、第1ポンプ装置および分配装置間の真空管路の直径dをその長さlで割った商d/lが1/15以上、好ましくは1/10以上であることができる。
3 円形コンベア
4 回転軸
51、52・・・,5N 処理ステーション
71〜74 第1共転ポンプ装置
721、722、741、742 ルートポンプ
91〜96 第2固定ポンプ装置
11 回転供給部
13 環状分配器
15 制御弁
17 キャリヤフレーム
19〜23 真空管路
25 キャリヤプレート
26 軸受け
30 圧力計測管
40〜47 角度範囲
Claims (34)
- 加工物を処理する回転装置(1)であって、
円形コンベア(3)、
該円形コンベア(3)によって搬送される複数の処理ステーション(51、52・・・5N)および
前記処理ステーションと接続することができる少なくとも1つの第1ポンプ装置(71〜74)を備え、
該第1ポンプ装置(71〜74)は、前記円形コンベア(3)によって搬送され、
前記複数の処理ステーションは、環状分配器(13)及び制御弁(15)を含む分配装置(13、15)を介して前記ポンプ装置(71〜74)に選択的に接続される、回転装置。 - 前記回転装置はCVDコーティング装置である請求項1に記載の回転装置。
- 前記第1ポンプ装置(71〜74)は、少なくとも1つのルーツポンプを有する、請求項1または2に記載の回転装置。
- 前記第1ポンプ装置および分配装置(13、15)間の真空管路の直径dをその長さlで割った商が1/15以上、好ましくは1/10以上である、請求項1〜3のいずれか1項に記載の回転装置。
- 前記処理ステーションと接続することができ、かつ固定位置に配置された少なくとも1つの第2ポンプ装置(91〜96)を備える、請求項1〜4のいずれか1項に記載の回転装置。
- 前記第1および第2ポンプ装置(71〜74、91〜96)は、異なった圧力範囲に適応させられている、請求項5に記載の回転装置。
- 前記第2ポンプ装置(91〜96)は、予備ステージとして前記第1ポンプ装置(71〜74)に接続される、請求項5または6に記載の回転装置。
- 前記第2ポンプ装置(91〜96)は、少なくとも1つのスライドベーン回転ポンプを有する、請求項5〜7のいずれか1項に記載の回転装置。
- 前記第2ポンプは、回転供給部(11)によって前記円形コンベア(3)に接続される、請求項5〜8のいずれか1項に記載の回転装置。
- 静止および/または回転動作において、前記回転供給部の漏れ率は10−1mbarl/秒以下、好ましくは10−2〜10−4mbarl/秒の範囲に入る、請求項5〜9のいずれか1項に記載の回転装置。
- 前記第2固定ポンプ装置(91〜96)は、前記処理ステーション(51、52・・・5N)を前記ポンプ装置(91〜96)に接続する少なくとも1つの分配装置(13、15)に接続される、請求項5〜9のいずれか1項に記載の回転装置。
- 前記円形コンベア(3)が回転するとき、前記処理ステーション(51、52・・・5N)に連続的に接続される少なくとも2つの固定的な第2ポンプ装置(91、92)を備える、請求項5〜11のいずれか1項に記載の回転装置。
- 前記円形コンベアが回転するとき、前記処理ステーション(51、52・・・5N)に連続的に接続される少なくとも2つの第1ポンプ装置(71〜74)を備える、請求項1〜12のいずれか1項に記載の回転装置。
- 処理ガスを排出する第1ポンプ装置(74)を備える、請求項1〜13のいずれか1項に記載の回転装置。
- 前記第1ポンプ装置(72、74)は、直列に接続された少なくとも2つのポンプステージ(721、722、741、742)を有する、請求項1〜14のいずれか1項に記載の回転装置。
- 少なくとも2つの第1ポンプ装置を備える、請求項1〜15のいずれか1項に記載の回転装置。
- 該分配装置は、排気段階の期間中に前記第1ポンプ装置の1つを少なくとも1つの処理ステーションに接続する、請求項16に記載の回転装置。
- 処理ガスを前記処理ステーション(51、52・・・5N)内へ供給する機構を備える、請求項1〜17のいずれか1項に記載の回転装置。
- 電磁エネルギを供給する機構を備える、請求項1〜18のいずれか1項に記載の回転装置。
- 回転装置(1)内で加工物のCVDコーティングを行う方法であって、
少なくとも1つの加工物を回転中の円形コンベア(3)上の処理ステーション(51、52・・・5N)に導入すること、
前記処理ステーション(51、52・・・5N)を少なくとも1つの第1ポンプ装置(71〜74)に接続すること、
前記処理ステーション(51、52・・・5N)を排気すること、および
前記加工物をコーティングすること、
を含み、前記第1ポンプ装置(71〜74)は、前記円形コンベア(3)と共に搬送され、
前記円形コンベア(3)上には複数の処理ステーションが設けられており、前記複数の処理ステーションは、環状分配器(13)及び制御弁(15)を含む分配装置(13、15)を介して前記ポンプ装置(71〜74)に選択的に接続される、方法。 - 前記加工物は、処理ガスおよび電磁エネルギが前記処理ステーション(51、52・・・5N)内へ供給される結果としてコーティングされる、請求項20に記載の方法。
- 通気、および前記加工物の取り出しを行うステップを含む、請求項20または21に記載の方法。
- 前記処理ステーション(51、52・・・5N)は、少なくとも1つの固定的な第2ポンプ装置(91、92)に接続される、請求項20〜22のいずれか1項に記載の方法。
- 前記ポンプ装置(71〜74、91〜96)は、前記処理ステーション(51、52・・・5N)に連続的に接続される、請求項23に記載の方法。
- 前記第2ポンプ装置(93〜96)は、前記第1ポンプ装置(71〜74)の予備ステージとして機能する、請求項23または24に記載の方法。
- 処理ガスは、前記コーティング作業中に第1ポンプ装置(74)によって吸い出される、請求項20〜25のいずれか1項に記載の方法。
- 排気中において少なくとも断続的に2つ以上の第1ポンプ装置(71、72、73)が直列に接続される、請求項20〜26のいずれか1項に記載の方法。
- 制御弁(15)の切り換えの結果として、前記処理ステーション(51、52・・・5N)は、前記第2ポンプ装置(91、92)に接続される、請求項20〜27のいずれか1項に記載の方法。
- 前記排気は、少なくとも2ステップで実行される、請求項20〜28のいずれか1項に記載の方法。
- 前記ステップ間で、前記第1ポンプ装置及び第2ポンプ装置(71、72、73、91、92)の一方のポンプ装置間の切り換えを行うことを含む、請求項29に記載の方法。
- 4つまたは5つの排気ステップを含む、請求項30に記載の方法。
- 処理ステーション内の圧力は、第1ステップで≦200mbarまで、次の第2ステップで≦80mbarまで、次の第3ステップで≦1.5mbarまで、次の第4ステップで≦0.1mbarまで、また、5ステップでの排気の場合、次の第5ステップで≦0.01mbarまで、段階的に減圧される、請求項31に記載の方法。
- 排気中、ポンプ装置(71〜74、91〜96)はそれぞれ、1つの処理ステーション(51、52・・・5N)だけに接続される、請求項20〜32のいずれか1項に記載の方法。
- 前記加工物は、中空体の形をしており、前記加工物は、前記加工物の内部領域内でのプラズマの着火によってコーティングされる、請求項20〜33のいずれか1項に記載の方法。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
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DE10223288 | 2002-05-24 | ||
DE10224395A DE10224395A1 (de) | 2002-05-24 | 2002-06-01 | Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken |
DE10225607A DE10225607A1 (de) | 2002-05-24 | 2002-06-07 | Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken |
DE10225985A DE10225985A1 (de) | 2002-05-24 | 2002-06-11 | Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken |
DE2002153512 DE10253512A1 (de) | 2002-11-16 | 2002-11-16 | Rundläufermaschine für CVD-Beschichtungen |
DE2002153513 DE10253513B4 (de) | 2002-11-16 | 2002-11-16 | Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung |
PCT/EP2003/005499 WO2003100129A1 (de) | 2002-05-24 | 2003-05-26 | Rundläufermaschine für cvd-beschichtungen |
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JP2005526915A JP2005526915A (ja) | 2005-09-08 |
JP2005526915A5 JP2005526915A5 (ja) | 2006-01-05 |
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US (1) | US20050229850A1 (ja) |
EP (1) | EP1507895B1 (ja) |
JP (1) | JP4386832B2 (ja) |
CN (1) | CN100434566C (ja) |
AU (1) | AU2003242577A1 (ja) |
WO (1) | WO2003100129A1 (ja) |
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DE102004017241B4 (de) | 2004-04-05 | 2012-09-27 | Schott Ag | Verbundmaterial und Verfahren zu seiner Herstellung |
SI21840A (sl) * | 2004-08-31 | 2006-02-28 | Jozef Bonifarti | Montazna linija - karusel |
GB0713821D0 (en) * | 2007-07-17 | 2007-08-29 | P2I Ltd | A plasma deposition apparatus |
CN101688302A (zh) * | 2008-05-30 | 2010-03-31 | 东洋制罐株式会社 | 蒸镀装置 |
US7985188B2 (en) | 2009-05-13 | 2011-07-26 | Cv Holdings Llc | Vessel, coating, inspection and processing apparatus |
DK2251453T3 (da) | 2009-05-13 | 2014-07-07 | Sio2 Medical Products Inc | Beholderholder |
US9545360B2 (en) | 2009-05-13 | 2017-01-17 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
CN103930595A (zh) | 2011-11-11 | 2014-07-16 | Sio2医药产品公司 | 用于药物包装的钝化、pH保护性或润滑性涂层、涂布方法以及设备 |
CA2890066C (en) | 2012-11-01 | 2021-11-09 | Sio2 Medical Products, Inc. | Coating inspection method |
EP2920567B1 (en) | 2012-11-16 | 2020-08-19 | SiO2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
JP6382830B2 (ja) | 2012-11-30 | 2018-08-29 | エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド | 医療シリンジ、カートリッジ等上でのpecvd堆積の均一性制御 |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
US9662450B2 (en) | 2013-03-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
CN110074968B (zh) | 2013-03-11 | 2021-12-21 | Sio2医药产品公司 | 涂布包装材料 |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
US9863042B2 (en) | 2013-03-15 | 2018-01-09 | Sio2 Medical Products, Inc. | PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases |
EP3122917B1 (en) | 2014-03-28 | 2020-05-06 | SiO2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
JP2018523538A (ja) | 2015-08-18 | 2018-08-23 | エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド | 低酸素透過速度を有する薬剤包装及び他の包装 |
CN110002766B (zh) * | 2019-04-24 | 2023-06-23 | 苏州伯宇光电科技有限公司 | 玻璃电致变色膜化学浴镀膜装置 |
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GB547249A (en) * | 1940-02-14 | 1942-08-20 | British Thomson Houston Co Ltd | Improvements in apparatus for depositing reflecting metallic coatings on base members or bodies |
US2730987A (en) * | 1954-03-25 | 1956-01-17 | James L Entwistle Company | Apparatus for automatically vacuum coating of interior of glass tubes with metal |
US6565791B1 (en) * | 1997-09-30 | 2003-05-20 | Tetra Laval Holdings & Finance S.A. | Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process |
FR2791598B1 (fr) * | 1999-03-30 | 2001-06-22 | Sidel Sa | Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne et distributeur pour une telle machine |
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DE19916478A1 (de) * | 1999-04-13 | 2000-10-19 | Ruediger Haaga Gmbh | Verfahren zum Evakuieren eines Plasmasterilisations-Reaktors |
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EP1507895B1 (de) | 2010-07-21 |
WO2003100129A1 (de) | 2003-12-04 |
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CN100434566C (zh) | 2008-11-19 |
US20050229850A1 (en) | 2005-10-20 |
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JP2005526915A (ja) | 2005-09-08 |
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