JP2005521268A5 - - Google Patents

Download PDF

Info

Publication number
JP2005521268A5
JP2005521268A5 JP2003581335A JP2003581335A JP2005521268A5 JP 2005521268 A5 JP2005521268 A5 JP 2005521268A5 JP 2003581335 A JP2003581335 A JP 2003581335A JP 2003581335 A JP2003581335 A JP 2003581335A JP 2005521268 A5 JP2005521268 A5 JP 2005521268A5
Authority
JP
Japan
Prior art keywords
vacuum chamber
linear motion
assembly
substrate
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003581335A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005521268A (ja
Filing date
Publication date
Priority claimed from US10/104,846 external-priority patent/US6779962B2/en
Application filed filed Critical
Publication of JP2005521268A publication Critical patent/JP2005521268A/ja
Publication of JP2005521268A5 publication Critical patent/JP2005521268A5/ja
Pending legal-status Critical Current

Links

JP2003581335A 2002-03-22 2003-02-21 真空中の平面パネル取扱い装置 Pending JP2005521268A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/104,846 US6779962B2 (en) 2002-03-22 2002-03-22 Device for handling flat panels in a vacuum
PCT/US2003/005191 WO2003084043A2 (en) 2002-03-22 2003-02-21 Device for handling flat panels in a vacuum

Publications (2)

Publication Number Publication Date
JP2005521268A JP2005521268A (ja) 2005-07-14
JP2005521268A5 true JP2005521268A5 (enExample) 2008-08-14

Family

ID=28040712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003581335A Pending JP2005521268A (ja) 2002-03-22 2003-02-21 真空中の平面パネル取扱い装置

Country Status (8)

Country Link
US (1) US6779962B2 (enExample)
EP (1) EP1513962A4 (enExample)
JP (1) JP2005521268A (enExample)
KR (1) KR100738592B1 (enExample)
CN (1) CN100346943C (enExample)
AU (1) AU2003219828A1 (enExample)
TW (1) TWI251288B (enExample)
WO (1) WO2003084043A2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
EP1684951B1 (en) 2003-11-10 2014-05-07 Brooks Automation, Inc. System for handling workpieces in a vacuum-based semiconductor handling system
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US9099506B2 (en) * 2005-03-30 2015-08-04 Brooks Automation, Inc. Transfer chamber between workstations
US20060251499A1 (en) * 2005-05-09 2006-11-09 Lunday Andrew P Linear substrate delivery system with intermediate carousel
US20070048451A1 (en) * 2005-08-26 2007-03-01 Applied Materials, Inc. Substrate movement and process chamber scheduling
US7432184B2 (en) * 2005-08-26 2008-10-07 Applied Materials, Inc. Integrated PVD system using designated PVD chambers
NL1036794A1 (nl) * 2008-04-25 2009-10-27 Asml Netherlands Bv Robot for in-vacuum use.
KR20090130559A (ko) * 2008-06-16 2009-12-24 삼성모바일디스플레이주식회사 이송 장치 및 이를 구비하는 유기물 증착 장치
CN103237634B (zh) * 2010-10-08 2016-12-14 布鲁克斯自动化公司 同轴驱动的真空机器人
RU2481057C1 (ru) * 2011-12-20 2013-05-10 Юрий Иванович Русанов Устройство горизонтального возвратно-поступательного разворота аппаратов диагностики после подъема многофункциональной диагностико-хирургической робототехнической системы для операционного стола с возможностью информационно-компьютерного управления им. ю.и. русанова
US10363665B2 (en) 2012-07-10 2019-07-30 Persimmon Technologies Corporation Linear robot arm with multiple end effectors
US9293317B2 (en) * 2012-09-12 2016-03-22 Lam Research Corporation Method and system related to semiconductor processing equipment
US10134621B2 (en) 2013-12-17 2018-11-20 Brooks Automation, Inc. Substrate transport apparatus
DK3278041T3 (da) * 2015-03-30 2022-07-25 Azenta Inc Automatiseret kryogent opbevaringssystem
GB201900478D0 (en) 2019-01-14 2019-02-27 Rolls Royce Plc Turbomachine
JP6677366B1 (ja) * 2019-03-12 2020-04-08 日本精工株式会社 ワークチェンジャ、ワーク搬送装置、加工装置、及び、リング軸受の製造方法、機械の製造方法、車両の製造方法
US12046499B2 (en) 2020-02-05 2024-07-23 Brooks Automation Us, Llc Substrate processing apparatus
CN113043253B (zh) * 2021-02-08 2022-05-17 珞石（北京）科技有限公司 单驱动直线运动机器人
CN114014018B (zh) * 2021-11-16 2023-05-26 仪晟科学仪器(嘉兴)有限公司 一种超高真空样品传递装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820109A (en) 1986-04-11 1989-04-11 Ampex Corporation Bidirectional transfer mechanism
US4787813A (en) * 1987-08-26 1988-11-29 Watkins-Johnson Company Industrial robot for use in clean room environment
US5102373A (en) * 1989-12-01 1992-04-07 Martinsound Technologies, Inc. Automated fader system
US5135349A (en) * 1990-05-17 1992-08-04 Cybeq Systems, Inc. Robotic handling system
DE4302794A1 (de) 1993-02-02 1994-08-04 Leybold Ag Vorrichtung zum Ein- und/oder Ausschleusen einer Maske in die bzw. aus der Kammer einer Vakuum-Beschichtungsanlage
JPH07115120A (ja) * 1993-10-18 1995-05-02 Hitachi Ltd 基板搬送装置およびその方法
US5794487A (en) * 1995-07-10 1998-08-18 Smart Machines Drive system for a robotic arm
JPH09267289A (ja) * 1996-03-29 1997-10-14 Mitsubishi Electric Corp 産業用ロボット
US6318951B1 (en) 1999-07-09 2001-11-20 Semitool, Inc. Robots for microelectronic workpiece handling
TW589391B (en) 1997-07-08 2004-06-01 Unaxis Trading Ag Process for vacuum treating workpieces, and corresponding process equipment
US6585478B1 (en) * 2000-11-07 2003-07-01 Asm America, Inc. Semiconductor handling robot with improved paddle-type end effector
KR20190000980A (ko) * 2017-06-26 2019-01-04 이동원 퍼스널 헬스케어 시스템

Similar Documents

Publication Publication Date Title
JP2005521268A5 (enExample)
US8267636B2 (en) Substrate transport apparatus
KR100204161B1 (ko) 자기 결합된 2축 로봇
US6779962B2 (en) Device for handling flat panels in a vacuum
KR101071606B1 (ko) 반송 장치
EP0838835A3 (en) Holder driving unit
KR20230048603A (ko) 산업용 로봇 및 제조 시스템
TW201233511A (en) Coaxial harmonic drive vacuum robot
JP4711216B2 (ja) 搬送装置
KR20230048598A (ko) 산업용 로봇
JPH0623687A (ja) ロボット
US6705816B2 (en) Wafer transport mechanism
JP2005236218A (ja) 半導体ウエハの搬送ロボット、及びそれを備えた処理装置
KR101382144B1 (ko) 진공케이블 덕트가 구비된 진공챔버용 로봇의 주행장치
JPS6392205A (ja) 真空装置用磁気浮上搬送装置
JPH04264748A (ja) ウエハ移送ロボット　
JPH0516998B2 (enExample)
JPH04264749A (ja) ウエハ移送ロボット
WO2008140727A1 (en) Substrate transport apparatus
JPH0297268A (ja) 磁気浮上式搬送アーム
JPS63202204A (ja) 磁気浮上型搬送装置
JP2000117671A (ja) 搬送装置
JPH05228881A (ja) ロボット
JP2006296018A (ja) 磁気による非接触駆動装置及びこれに用いるマグネット輪
JPH01110424A (ja) 磁気浮上型搬送装置