TWI251288B - Device for handling flat panels in a vacuum - Google Patents
Device for handling flat panels in a vacuum Download PDFInfo
- Publication number
- TWI251288B TWI251288B TW092106114A TW92106114A TWI251288B TW I251288 B TWI251288 B TW I251288B TW 092106114 A TW092106114 A TW 092106114A TW 92106114 A TW92106114 A TW 92106114A TW I251288 B TWI251288 B TW I251288B
- Authority
- TW
- Taiwan
- Prior art keywords
- vacuum
- linear motion
- linear
- substrate
- end effector
- Prior art date
Links
- 230000033001 locomotion Effects 0.000 claims abstract description 56
- 239000012636 effector Substances 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 230000032258 transport Effects 0.000 claims description 21
- 230000000694 effects Effects 0.000 claims description 7
- 239000000356 contaminant Substances 0.000 claims description 3
- 239000003708 ampul Substances 0.000 claims 2
- 238000002955 isolation Methods 0.000 claims 2
- 230000013011 mating Effects 0.000 claims 2
- 230000007246 mechanism Effects 0.000 description 6
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 3
- 230000002457 bidirectional effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/04—Arms extensible rotatable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/104,846 US6779962B2 (en) | 2002-03-22 | 2002-03-22 | Device for handling flat panels in a vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200305968A TW200305968A (en) | 2003-11-01 |
| TWI251288B true TWI251288B (en) | 2006-03-11 |
Family
ID=28040712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092106114A TWI251288B (en) | 2002-03-22 | 2003-03-20 | Device for handling flat panels in a vacuum |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6779962B2 (enExample) |
| EP (1) | EP1513962A4 (enExample) |
| JP (1) | JP2005521268A (enExample) |
| KR (1) | KR100738592B1 (enExample) |
| CN (1) | CN100346943C (enExample) |
| AU (1) | AU2003219828A1 (enExample) |
| TW (1) | TWI251288B (enExample) |
| WO (1) | WO2003084043A2 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070269297A1 (en) | 2003-11-10 | 2007-11-22 | Meulen Peter V D | Semiconductor wafer handling and transport |
| EP1684951B1 (en) | 2003-11-10 | 2014-05-07 | Brooks Automation, Inc. | System for handling workpieces in a vacuum-based semiconductor handling system |
| US7458763B2 (en) | 2003-11-10 | 2008-12-02 | Blueshift Technologies, Inc. | Mid-entry load lock for semiconductor handling system |
| US10086511B2 (en) | 2003-11-10 | 2018-10-02 | Brooks Automation, Inc. | Semiconductor manufacturing systems |
| US9099506B2 (en) * | 2005-03-30 | 2015-08-04 | Brooks Automation, Inc. | Transfer chamber between workstations |
| US20060251499A1 (en) * | 2005-05-09 | 2006-11-09 | Lunday Andrew P | Linear substrate delivery system with intermediate carousel |
| US20070048451A1 (en) * | 2005-08-26 | 2007-03-01 | Applied Materials, Inc. | Substrate movement and process chamber scheduling |
| US7432184B2 (en) * | 2005-08-26 | 2008-10-07 | Applied Materials, Inc. | Integrated PVD system using designated PVD chambers |
| NL1036794A1 (nl) * | 2008-04-25 | 2009-10-27 | Asml Netherlands Bv | Robot for in-vacuum use. |
| KR20090130559A (ko) * | 2008-06-16 | 2009-12-24 | 삼성모바일디스플레이주식회사 | 이송 장치 및 이를 구비하는 유기물 증착 장치 |
| CN103237634B (zh) * | 2010-10-08 | 2016-12-14 | 布鲁克斯自动化公司 | 同轴驱动的真空机器人 |
| RU2481057C1 (ru) * | 2011-12-20 | 2013-05-10 | Юрий Иванович Русанов | Устройство горизонтального возвратно-поступательного разворота аппаратов диагностики после подъема многофункциональной диагностико-хирургической робототехнической системы для операционного стола с возможностью информационно-компьютерного управления им. ю.и. русанова |
| US10363665B2 (en) | 2012-07-10 | 2019-07-30 | Persimmon Technologies Corporation | Linear robot arm with multiple end effectors |
| US9293317B2 (en) * | 2012-09-12 | 2016-03-22 | Lam Research Corporation | Method and system related to semiconductor processing equipment |
| US10134621B2 (en) | 2013-12-17 | 2018-11-20 | Brooks Automation, Inc. | Substrate transport apparatus |
| DK3278041T3 (da) * | 2015-03-30 | 2022-07-25 | Azenta Inc | Automatiseret kryogent opbevaringssystem |
| GB201900478D0 (en) | 2019-01-14 | 2019-02-27 | Rolls Royce Plc | Turbomachine |
| JP6677366B1 (ja) * | 2019-03-12 | 2020-04-08 | 日本精工株式会社 | ワークチェンジャ、ワーク搬送装置、加工装置、及び、リング軸受の製造方法、機械の製造方法、車両の製造方法 |
| US12046499B2 (en) | 2020-02-05 | 2024-07-23 | Brooks Automation Us, Llc | Substrate processing apparatus |
| CN113043253B (zh) * | 2021-02-08 | 2022-05-17 | 珞石（北京）科技有限公司 | 单驱动直线运动机器人 |
| CN114014018B (zh) * | 2021-11-16 | 2023-05-26 | 仪晟科学仪器(嘉兴)有限公司 | 一种超高真空样品传递装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4820109A (en) | 1986-04-11 | 1989-04-11 | Ampex Corporation | Bidirectional transfer mechanism |
| US4787813A (en) * | 1987-08-26 | 1988-11-29 | Watkins-Johnson Company | Industrial robot for use in clean room environment |
| US5102373A (en) * | 1989-12-01 | 1992-04-07 | Martinsound Technologies, Inc. | Automated fader system |
| US5135349A (en) * | 1990-05-17 | 1992-08-04 | Cybeq Systems, Inc. | Robotic handling system |
| DE4302794A1 (de) | 1993-02-02 | 1994-08-04 | Leybold Ag | Vorrichtung zum Ein- und/oder Ausschleusen einer Maske in die bzw. aus der Kammer einer Vakuum-Beschichtungsanlage |
| JPH07115120A (ja) * | 1993-10-18 | 1995-05-02 | Hitachi Ltd | 基板搬送装置およびその方法 |
| US5794487A (en) * | 1995-07-10 | 1998-08-18 | Smart Machines | Drive system for a robotic arm |
| JPH09267289A (ja) * | 1996-03-29 | 1997-10-14 | Mitsubishi Electric Corp | 産業用ロボット |
| US6318951B1 (en) | 1999-07-09 | 2001-11-20 | Semitool, Inc. | Robots for microelectronic workpiece handling |
| TW589391B (en) | 1997-07-08 | 2004-06-01 | Unaxis Trading Ag | Process for vacuum treating workpieces, and corresponding process equipment |
| US6585478B1 (en) * | 2000-11-07 | 2003-07-01 | Asm America, Inc. | Semiconductor handling robot with improved paddle-type end effector |
| KR20190000980A (ko) * | 2017-06-26 | 2019-01-04 | 이동원 | 퍼스널 헬스케어 시스템 |
-
2002
- 2002-03-22 US US10/104,846 patent/US6779962B2/en not_active Expired - Lifetime
-
2003
- 2003-02-21 JP JP2003581335A patent/JP2005521268A/ja active Pending
- 2003-02-21 EP EP03716105A patent/EP1513962A4/en not_active Withdrawn
- 2003-02-21 KR KR1020047009278A patent/KR100738592B1/ko not_active Expired - Lifetime
- 2003-02-21 AU AU2003219828A patent/AU2003219828A1/en not_active Abandoned
- 2003-02-21 CN CNB038066831A patent/CN100346943C/zh not_active Expired - Lifetime
- 2003-02-21 WO PCT/US2003/005191 patent/WO2003084043A2/en not_active Ceased
- 2003-03-20 TW TW092106114A patent/TWI251288B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| AU2003219828A8 (en) | 2003-10-13 |
| KR20040099259A (ko) | 2004-11-26 |
| WO2003084043A3 (en) | 2004-12-29 |
| JP2005521268A (ja) | 2005-07-14 |
| WO2003084043A2 (en) | 2003-10-09 |
| EP1513962A2 (en) | 2005-03-16 |
| AU2003219828A1 (en) | 2003-10-13 |
| CN1643177A (zh) | 2005-07-20 |
| TW200305968A (en) | 2003-11-01 |
| CN100346943C (zh) | 2007-11-07 |
| EP1513962A4 (en) | 2008-05-14 |
| US20030180126A1 (en) | 2003-09-25 |
| KR100738592B1 (ko) | 2007-07-11 |
| US6779962B2 (en) | 2004-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |