KR100738592B1 - 진공에서 평판들을 핸들링하기 위한 장치 - Google Patents

진공에서 평판들을 핸들링하기 위한 장치 Download PDF

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Publication number
KR100738592B1
KR100738592B1 KR1020047009278A KR20047009278A KR100738592B1 KR 100738592 B1 KR100738592 B1 KR 100738592B1 KR 1020047009278 A KR1020047009278 A KR 1020047009278A KR 20047009278 A KR20047009278 A KR 20047009278A KR 100738592 B1 KR100738592 B1 KR 100738592B1
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KR
South Korea
Prior art keywords
vacuum chamber
linear motion
end device
drive system
linear
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KR1020047009278A
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English (en)
Korean (ko)
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KR20040099259A (ko
Inventor
풀데니스피.
Original Assignee
브룩스 오토메이션 인코퍼레이티드
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Publication of KR20040099259A publication Critical patent/KR20040099259A/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020047009278A 2002-03-22 2003-02-21 진공에서 평판들을 핸들링하기 위한 장치 Expired - Lifetime KR100738592B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/104,846 2002-03-22
US10/104,846 US6779962B2 (en) 2002-03-22 2002-03-22 Device for handling flat panels in a vacuum
PCT/US2003/005191 WO2003084043A2 (en) 2002-03-22 2003-02-21 Device for handling flat panels in a vacuum

Publications (2)

Publication Number Publication Date
KR20040099259A KR20040099259A (ko) 2004-11-26
KR100738592B1 true KR100738592B1 (ko) 2007-07-11

Family

ID=28040712

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047009278A Expired - Lifetime KR100738592B1 (ko) 2002-03-22 2003-02-21 진공에서 평판들을 핸들링하기 위한 장치

Country Status (8)

Country Link
US (1) US6779962B2 (enExample)
EP (1) EP1513962A4 (enExample)
JP (1) JP2005521268A (enExample)
KR (1) KR100738592B1 (enExample)
CN (1) CN100346943C (enExample)
AU (1) AU2003219828A1 (enExample)
TW (1) TWI251288B (enExample)
WO (1) WO2003084043A2 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
EP1684951B1 (en) 2003-11-10 2014-05-07 Brooks Automation, Inc. System for handling workpieces in a vacuum-based semiconductor handling system
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US9099506B2 (en) * 2005-03-30 2015-08-04 Brooks Automation, Inc. Transfer chamber between workstations
US20060251499A1 (en) * 2005-05-09 2006-11-09 Lunday Andrew P Linear substrate delivery system with intermediate carousel
US20070048451A1 (en) * 2005-08-26 2007-03-01 Applied Materials, Inc. Substrate movement and process chamber scheduling
US7432184B2 (en) * 2005-08-26 2008-10-07 Applied Materials, Inc. Integrated PVD system using designated PVD chambers
NL1036794A1 (nl) * 2008-04-25 2009-10-27 Asml Netherlands Bv Robot for in-vacuum use.
KR20090130559A (ko) * 2008-06-16 2009-12-24 삼성모바일디스플레이주식회사 이송 장치 및 이를 구비하는 유기물 증착 장치
CN103237634B (zh) * 2010-10-08 2016-12-14 布鲁克斯自动化公司 同轴驱动的真空机器人
RU2481057C1 (ru) * 2011-12-20 2013-05-10 Юрий Иванович Русанов Устройство горизонтального возвратно-поступательного разворота аппаратов диагностики после подъема многофункциональной диагностико-хирургической робототехнической системы для операционного стола с возможностью информационно-компьютерного управления им. ю.и. русанова
US10363665B2 (en) 2012-07-10 2019-07-30 Persimmon Technologies Corporation Linear robot arm with multiple end effectors
US9293317B2 (en) * 2012-09-12 2016-03-22 Lam Research Corporation Method and system related to semiconductor processing equipment
US10134621B2 (en) 2013-12-17 2018-11-20 Brooks Automation, Inc. Substrate transport apparatus
DK3278041T3 (da) * 2015-03-30 2022-07-25 Azenta Inc Automatiseret kryogent opbevaringssystem
GB201900478D0 (en) 2019-01-14 2019-02-27 Rolls Royce Plc Turbomachine
JP6677366B1 (ja) * 2019-03-12 2020-04-08 日本精工株式会社 ワークチェンジャ、ワーク搬送装置、加工装置、及び、リング軸受の製造方法、機械の製造方法、車両の製造方法
US12046499B2 (en) 2020-02-05 2024-07-23 Brooks Automation Us, Llc Substrate processing apparatus
CN113043253B (zh) * 2021-02-08 2022-05-17 珞石（北京）科技有限公司 单驱动直线运动机器人
CN114014018B (zh) * 2021-11-16 2023-05-26 仪晟科学仪器(嘉兴)有限公司 一种超高真空样品传递装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07115120A (ja) * 1993-10-18 1995-05-02 Hitachi Ltd 基板搬送装置およびその方法
KR20190000980A (ko) * 2017-06-26 2019-01-04 이동원 퍼스널 헬스케어 시스템

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US4820109A (en) 1986-04-11 1989-04-11 Ampex Corporation Bidirectional transfer mechanism
US4787813A (en) * 1987-08-26 1988-11-29 Watkins-Johnson Company Industrial robot for use in clean room environment
US5102373A (en) * 1989-12-01 1992-04-07 Martinsound Technologies, Inc. Automated fader system
US5135349A (en) * 1990-05-17 1992-08-04 Cybeq Systems, Inc. Robotic handling system
DE4302794A1 (de) 1993-02-02 1994-08-04 Leybold Ag Vorrichtung zum Ein- und/oder Ausschleusen einer Maske in die bzw. aus der Kammer einer Vakuum-Beschichtungsanlage
US5794487A (en) * 1995-07-10 1998-08-18 Smart Machines Drive system for a robotic arm
JPH09267289A (ja) * 1996-03-29 1997-10-14 Mitsubishi Electric Corp 産業用ロボット
US6318951B1 (en) 1999-07-09 2001-11-20 Semitool, Inc. Robots for microelectronic workpiece handling
TW589391B (en) 1997-07-08 2004-06-01 Unaxis Trading Ag Process for vacuum treating workpieces, and corresponding process equipment
US6585478B1 (en) * 2000-11-07 2003-07-01 Asm America, Inc. Semiconductor handling robot with improved paddle-type end effector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07115120A (ja) * 1993-10-18 1995-05-02 Hitachi Ltd 基板搬送装置およびその方法
KR20190000980A (ko) * 2017-06-26 2019-01-04 이동원 퍼스널 헬스케어 시스템

Also Published As

Publication number Publication date
AU2003219828A8 (en) 2003-10-13
KR20040099259A (ko) 2004-11-26
WO2003084043A3 (en) 2004-12-29
JP2005521268A (ja) 2005-07-14
WO2003084043A2 (en) 2003-10-09
EP1513962A2 (en) 2005-03-16
AU2003219828A1 (en) 2003-10-13
CN1643177A (zh) 2005-07-20
TW200305968A (en) 2003-11-01
CN100346943C (zh) 2007-11-07
EP1513962A4 (en) 2008-05-14
TWI251288B (en) 2006-03-11
US20030180126A1 (en) 2003-09-25
US6779962B2 (en) 2004-08-24

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