TW201233511A - Coaxial harmonic drive vacuum robot - Google Patents

Abstract

A robotic transport apparatus including a drive system including at least one harmonic motor assembly, at least one drive shaft coupled to the at least one harmonic motor assembly, at least one robotic arm mounted to the at least one drive shaft, where the robotic arm is located inside a sealed environment, and at least one atmospheric isolation seal seated on an output surface of the drive system and forming an atmospheric barrier disposed so that the at least one drive shaft extends through the atmospheric barrier into the sealed environment and the at least one harmonic motor assembly is located outside the sealed environment.

Description

201233511 VI. Description of the Invention: [Technical Field] The present invention relates to a driver for a robot (i.e., an automatic manipulator). More specifically, it relates to a sealed and unsealed driver for a robot. [Prior Art] Iron jet seals used on conventional robot actuators typically require a modular bearing assembly to maintain a proper gap between the two sealing surfaces. The retention of such gaps typically requires mechanical coupling of the drive motor to the seal modules. In addition to the seal assembly, it is often necessary to have suitable bearings to stabilize the output shaft of the motor to maintain proper clearance between the two seal surfaces. It is advantageous to use the output bearing of the motor actuator as a sealed bearing (supp〇rt bearing), which is also advantageous for a non-sealed robotic drive (for example, driving a robot without a sealed heterogeneous seal). . [Features and Embodiments] The features and other features of the present invention described above will be described in detail with reference to the drawings. Although the description of the substrate processing apparatus of the present invention will be described with reference to the accompanying drawings, the drawing material of the embodiment of the present invention can be implemented in the same manner as in many transformation forms, and any large ^^ 2 features (eIemelltSH# Available H or type of components Figure 1 is not a substrate processing device 1 - the base, the processing equipment. As shown, the processing equipment is not ready, can also be equipped with any required equipment | The lamp substrate has a processing step or has the following figure: The representative 100 having the features of the present invention has a general batch type, for example, it can be adapted to the linear or Descartes 201233511 (or right angle equipment ( Cartesian arrangement)) Further, the substrate processing apparatus may be of any type, such as a sorter, a stacker, a metrology tool, etc. The substrate s processed on the apparatus 100 may be Any suitable substrate such as a liquid crystal display panel, a solar panel, a semiconductor wafer (e.g., a 200 mm diameter, 300 mm, 450 mm wafer) or other substrate of suitable diameter, and other shapes, sizes, and thicknesses suitable for processing by the apparatus 100. The substrate, such as an empty substrate' or an article having the same characteristics as the substrate, such as a particular size or quality. The device 100 described above can generally have a front portion 105 to form a small environment and an area 110 that can be isolated or sealed by an adjacent atmosphere. This region 110 is isolated from the outside to maintain a controlled sealing atmosphere, i.e., this region 110 has the function of a vacuum chamber. The sealed atmosphere region 110 can hold an inert gas such as nitrogen or any other sealed and/or controlled gas. The front portion 105 may be provided with one or more substrate supports ΐ ΐ 5 and a front end robot 120. The front portion 105 may also be provided with other portions or segments, such as the aligner 162 or a buffer disposed therein. The above-mentioned area 11 can be provided with one or more processing devices i25 and a vacuum robot (r〇b〇t_) 13〇. The processing device 125 can be any type of device, such as material deposition, etching, A device for roasting, polishing, ion implantation, etc. Each position of the processing device 125 can be used for the position of a desired reference frame (for example, a robot reference frame). In addition, the '- or multiple processing devices 125 can process the substrate S in a desired orientation (direction), for example, using an aligner (not shown) on the substrate. 17〇 alignment setting. The above sealing area no may also be provided with - or a plurality of intermediate chambers, also known as load compartment doors 201233511 (i0:dlocks): the apparatus 100 shown in FIG. 1 is provided with two loading gates i35, 140. These gates n serve as an interface that allows the substrate s to pass through the substrate processing apparatus between the front portion 105 and the sealing region 110 without damaging the integrity of any environmentally sealed atmosphere that may be present in the sealing region U? Containing a control for controlling the operation of the device, the controller may be a cluster as described in U.S. Patent Application Serial No. 11/178,615, filed on Jul. 05, 2005. A portion of the control structure is incorporated herein by reference. The controller 170 is provided with a processor 173 and a memory 178. In addition to the above, the memory 178 may contain a program for measuring and correcting the eccentricity of the flying target substrate and the alignment error. The memory 178 may further include temperature and/or pressure of the processing device, processing parameters of other parts or equipment of the device area 105, 11〇, time information of the processed substrate s, and metric information of the substrate, and algorithms, etc. The program supplies the device and the substrate of the ephemeris data to determine the eccentricity of the flying-off substrate. The front end robot 120 is also referred to as an ATM (pneumatic) robot hand, and may have a driving portion 150 and one or more arms 155, at least one of which is mounted on the driving portion 150, and at least one arm 155 is mounted on the shaft (wrist) 160, and the shaft 160 is coupled to one or more end effectors 165' for supporting one or more substrates S. The end effector 165 described above can be rotatably coupled to the shaft 160. The front end manipulator 120 can move the substrate', for example, to the support raft 125, the load gate 115, and the load gate 140 at any location within the region 105. The front end robot 120 can also align the substrate S back and forth with respect to 162. The drive unit 150 can receive commands from the control benefit 170 to cause the front end robot 120 to perform radial, circumferential, horizontal, composite, and other various movements. The vacuum robot 130 can be installed in the central chamber 175 of the sealing area 110, and the controller 170 can open and close the openings 180, 185 and coordinate the operation of the vacuum robot π〇 to make the 201233511 substrate in the processing device 125, the loading gate n 135 and the loading gate. n 14 (four) move. The vacuum manipulator 130 may include a drive unit (described in detail later) and one or more end effectors 195. The above-described ATM robot and vacuum manipulator 13 can be any type of transfer device, including but not limited to a sliding arm type robot, a scara type robot, an articulated arm type robot, a dolly type or a double symmetric type conveying device. Figure 2 is a plan view of another substrate processing apparatus (4) provided with the features of the present invention. The substrate processing split 1G has a linear or Cartesian (ie, right angle) configuration, and the f-plate S can be moved between transport robots via the elongated transfer chamber. The substrate (or workpiece) processing device ί usually has a processing region 13 and an interface region 12. The zones 12, 13 are interconnected i, and the JL member is moved therebetween. The processing zone 13 can be prepared by a processing device or a processing chamber similar to that described with reference to FIG. The processing device can be coupled to the transport chamber 16 for movement of the workpiece between the desired processing devices in accordance with the processing protocol (p(10).(3)丨). The transport chamber 16 is provided with a transport robot 1 that can move the workpiece indoors and move to the processing device 125. The place 125 and the transport chamber 16 can be automatically isolated from the outside atmosphere to maintain control. The device is substantially adapted to be provided with an interface for handling the workpiece between the interface region 12 of the workpiece (substrate) processing device 1G and the processing region 13 as is described in connection with FIG. An example of a suitable interface area is disclosed in U.S. Patent Application No. 5 (Application Date 7/Review). This information is incorporated into this case for reference. Since the interface area has a weighted configuration, the externally loaded read can be unloaded or the processed workpiece can be loaded and unloaded. The transport chamber may be constructed of transport chamber components that are joined end to end to form a linear elongated transport chamber. The length of this chamber is changed by the number of connected components. The transport chamber assembly has (10) off, "the desired transport chamber is arranged by the other adjacent transport m device interface area 12 along the linear elongated transport chamber. 201233511 y y position to perform workpiece consumption and unloading at the position τ. The lengthwise direction of the processing device can be arranged in the longitudinal direction of the transport chamber. The 1 chamber assembly can have a valve to isolate the desired transport unit. The device 20 is disposed through the transport chamber. The plurality of transporting devices can be provided with a fixed interface and mounted on the assembly, and can support and follow the line between the transport chamber and the transport chamber and the processing device. a movable end effector that is disposed in different transport chambers to cooperatively form at least a portion of the transport arrangement of the linear arrangement, the processing device, the processing region, the interface region, and the device The operation of any other portion can be controlled by the controller 400. The controller 400 is substantially identical to the controller 17 described above. The transport chamber and the transport device therein can be configured to form a plurality of workpiece transport lanes within the transport chamber. In transit The chamber can be polarized or dedicated to advance and retreat the workpiece. The transport chamber can also have a plurality of intermediate loading gates to maintain different zones of the transport chamber for different atmospheres for I to move between different atmospheres of the transport chamber. The transport chamber may be provided with an entry and exit location for the workpiece to be inserted or removed from the desired location of the transport chamber. For example, the access point may be located at the opposite end of the interface area 12 or other desired location of the transport chamber. The entry and exit of the loading chamber can be communicated with the (4) entrance and exit of the transport chamber and the fast transport path of the interface of the workpiece processing device. The fast transport lane can be isolated or separated by the transport chamber 16. This fast transport The track can be connected to one or more of the face area 12 to facilitate the transfer of the workpiece between the interface area and the transport path. The workpiece is placed in the front of the processing device 1G and returned to the interface area via the transport path after processing. I2' does not injure the transport chamber and does not reduce the efficiency of the treatment. The above transport chamber can be provided with a plurality of intermediate access points, so that several of them are connected to the fast transport lane to facilitate the movement of the workpiece therebetween. (Read), the insertion or removal of the workpiece at the desired stage of the 201233511 process, which is disclosed in U.S. Patent Application Serial No. 11/442,511, the entire disclosure of which is hereby incorporated by reference. The contents are incorporated herein by reference. The interface area 12 of the processing device is directly connected to the transport chamber (as shown in Figure 1) without any intermediate chamber (also known as a load gate). Another case is in the interface area 12 and transport. An intermediate chamber is disposed between the chambers. The interface area shown in Fig. 1 is provided with a workpiece conveyor 15 for taking out the workpiece from the casing 115 connected to the loading port (LP) and feeding it to the transport chamber 16. The conveyor 15 is provided. In the interface compartment 14, the conveyor 15 can be substantially identical to the conveyor 150 described above. Further, the interface area can also be provided with a workpiece A, such as an alignment, a buffer, a metering, and any other The place where the workpiece S is required to operate. Although some features of the disclosed embodiments of the present invention will be described herein in conjunction with a vacuum robot or conveyor such as conveyor 8〇 shown in FIG. 3, it should be understood that the illustrated embodiments are applicable to any suitable conveyor or Other processing devices (eg, aligners, etc.) are used in any environment, such as, but not limited to, an atmospheric environment, a controlled atmosphere, and/or a vacuum environment. In one embodiment, the conveyor 800 can be provided with multiple independent movable end effectors for independently transferring multiple workpieces. The conveyor illustrated in Figure 3 is a multi-joint link arm that has appropriate degrees of freedom, for example, for rotation, extension/retraction, and/or lifting (e.g., Z-axis motion). In addition, it should be noted that the carrier provided with the features of the embodiments of the present invention may have any suitable configuration, and is not limited to a sliding arm robot, a "Wa-leg" robot arm, and a selective compliant articulated robot arm (SCARA arm). , articulated arm robot or double-symmetric conveyor. The robotic arm that can be used to drive the device in the embodiments of the present invention is available from the following U.S. Patents: 4,666,366; 4,730,976; 4,909,701; 5,431,529; 5,577,879; 201233511 5,720,590; 5,899,658; 5,180,276; 5,647,724 and U.S. Patent Application 11/148,871 (Application Date 6/ 9/2005); 12/117, 415 (Applicant 曰 5/8/2008); 11/697, 390 (Applicant 曰 4/6/2007) and 11/179, 762 (Application 曰 7/11/2005), the disclosure of these cases The content is incorporated into this case for reference. 3-5, the conveyor may include at least one arm device 8A having an upper arm 81A, a forearm 82A, and at least one end effector 830. It will be appreciated that some of the features disclosed in the embodiments are directed to the arm assembly 800, but other suitable arms as described above may also be provided for driving by the drive device described herein. The end effector 83 is rotatably coupled to the forearm 820, and the front arm 82 is rotatably coupled to the upper arm 810. The upper arm 810 is also rotatably coupled to, for example, a driving area (ddVesecti〇n) 840 of the transport device. For example, the drive region 84A can include a coaxial drive device, wherein the drive shaft includes any suitable number of coaxial drive shafts (the coaxial drive device shown in FIG. 5 has two coaxial shafts, but can also have more More or less shafts). The above-mentioned driving area 840 can be sealed and installed on an environmental installation disk 595 to make the inside of the transportation room and other substrate processing environment, etc., in which the sealed control environment SE operated by the robot 800 can be with the atmosphere or the outside. The environmental ATM and the housing 840H of the drive zone are internally isolated. Thus, the inside of the drive housing 84〇H will be in an atmospheric state as follows. The drive zone 840 described above may constitute a harmonic drive zone. For example, the drive zone 840 can include any suitable number of harmonic drive motors and can be of any suitable shape and size to align with the non-harmonic drive zone with virtually no modification to the processing apparatus incorporating the boating zone. . The drive section 84A shown in Fig. 5 includes two harmonic drive motors 208, 209, one of which is for driving the outer shaft 2U and the other for driving the inner rod 212. It should be noted that the above-described drive zone 84 〇 201233511 is another feature comprising any suitable number of harmonic drive motors corresponding to a suitable number of drive rods, for example, within a coaxial drive. The above-described harmonic drive motors 208, 209 may have a south 2: wheel-out bearing such that a component of a ferrofluidic seal (hereinafter collectively referred to as an iron jet seal 500) is used to drive the motor 2〇8, 2〇9 in the robot The desired rotation τ and the extension r of the robot are at least partially stabilized and the gap is aligned and supported. The above described iron jet seal 5 can be formed with several components which will be substantially concentrically coaxially sealed by the following. In this embodiment, the drive zone 840 includes a mounting body 840, wherein the two drive motors 2〇8, 2〇9 (for example, a linear series or a common rotating shaft) are placed one below the other. In configuration, the other two motors can be attached to each other, offset or connected to the shafts of their shaft means via suitable linkages. The above <18&" and U.S. Patents 6,845,25(); 5,899,658; 5,813'823; and 5, The 72G, 59G towel revealer is the same. The disclosures of these patents are hereby incorporated by reference in its entirety for each of the the the the the the the the the the the the the the the the the the the 〇9 (the motor is two or more coaxial drive shafts as shown in Fig. 6) has a drive shaft 212 that passes through the through hole to the drive end of the housing 840H. The above-described ferrofluidic seals 500 can Each of the drive shafts of the coaxial drive is sealed, as will be explained below. It should be noted that the innermost drive shaft 712 can also have a hollow configuration (for example, a hollow formed longitudinally along the center of the drive shaft). ) to wear through the line or other appropriate things The coaxial drive shaft device is connected to the drive portion mounted on the transport device for the surrounding atmosphere of the drive mechanism f (ann) 8 (9) to be isolated from the inside of the drive portion 840 (the drive portion can be operated in an atmospheric atmosphere), The driving portion may include an insulating connecting wire 59G to rotate the mechanical arm without damaging the iron wire, etc. The applicable connecting wire is not disclosed in U.S. Patent No. 6,265,8,3, which is incorporated herein by reference. Referring now to Figures 3 and 5, the two motors 2〇8, 2〇9 drive at least two degrees of freedom (i.e., swivel, commonly referred to as the τ action arm 800 to move and move toward the X_Y plane, which is commonly referred to as The R action, as shown in the figure, may also include a Z-axis motor 210 along the z-axis rotation portion 840 for causing the drive portion to be arrowed. The drive direction is moved to position the robot arm 8 thereon (Κ) And the end effector plate transport surface or the substrate holding portion is raised and lowered. As can be seen from the above, the robot arm drive system can be used, for example, in its housing 840H and the environmental flange 595. Any suitable flexible connector is provided between them. This flexibility The connector may be a bellows 670, but any other suitable connector may be used. Although the coaxial shaft is shown as a coaxial shaft having two drive shafts 211, 212, More than two other suitable shafts are available. Again, the drive shaft can have any suitable configuration. In this embodiment, the common drive shaft outer side shaft 211 is coupled to the upper arm 810 and the inner shaft 212 is coupled to Forearm 820. Again, in this embodiment, end effector 830 can operate in a "slaved" manner, but as shown in Figure 6, a drive shaft is added to the drive to operate end effector 830. The drive shaft can be configured to have a common arm interface for mounting differently configured arms to a harmonic drive system. 0 As described above, the two motors 208 '209 are stacked in a concentric manner. They are arranged in line with each other. The motors may be any suitable type of alternating current (AC) or direct current (DC) motor, such as a servo motor, stepper motor, alternating current induction motor, direct current brushless motor, direct current coreless motor, or other suitable motor. In this embodiment, the 'motor 201233511 208 may include a stator 208S fixedly mounted in the housing 840H and a rotor rotatably mounted in the housing 840H by any suitable means, such as by bearings 208B or the like. The 208Re can be arbitrarily mounted on the rotor 208R by a cam or a wave generator 208W to rotate with the rotor 2〇8. The wave generator described above may include a ball suction 208WB mounted in the outer circumference of the substantially elliptical cam. The inner race of the bearing is fixed to the cam and the outer race is elastically deformed via the ball bearing 208WB. A first spline member 208F can be affixed to the housing 840H in any suitable manner within the housing 84A. The first plug sheet may have a rigid portion 2〇8FR and a flexible portion 208FF to form a substantially twisted rigid structure. The above-mentioned slats 2 〇 8f may have a partial flexural deformation when subjected to a cam, but still provide the desired overall rigidity and in the range of the R and T actions of the arm (for example, the axis z direction shown in FIG. 3). The centerline position of the fixed shaft assembly is indeed maintained, thus maintaining the desired clearance in the ferrofhiidic seals. The above-mentioned tampon slats 2 〇 8f can be attached to the casing via the substantially rigid portion 208FR. The second plug piece 2〇8c can be mounted on each of the coaxial shafts. In the embodiment, the second plug sheet 208C is coupled to the outer shaft 211 by any suitable means to rotate the outer shaft 211 and the second plug sheet 208C. The second plug piece 2〇8C may have substantially the same shape as the rigid seat. The first plug sheet 2〇8F may have tooth-transmission teeth formed on the outer peripheral surface of the flexible portion 2〇8FF of the i-th plug sheet 208F. The second plug piece 2〇8c may have teeth formed on the inner peripheral surface thereof. When the rotor 2〇8R rotates, the wave generator partially deflects the flexible portion 2〇8FF of the first plug sheet 208F so that the gear teeth of the j-stitch sheet 208F mesh with the second plug sheet 2〇. 8C gear teeth. However, due to the elliptical cam of the wave generator, only the teeth of the second sipe 12 201233511 piece 208F aligned with the main axis of the wave generator are engaged with the teeth of the second slat 2 〇 8C. The teeth of the first plug sheet 208F of the main shaft of the wave generator are almost completely detached (disengaged) by the gear teeth of the second plug sheet 2〇8C', but there may be a small number of second plug sheets 2〇8C or The toothing of the first plug sheet 208F causes the second plug sheet 2〇8 (: the rotation of the drive shaft 211 is caused by the rotation force of the jth slit sheet 2〇8F or the first plug sheet to the second plug sheet). The torsional rigidity and/or speed reduction of the second tampon provided by the cymbal and the drive can be used to improve the torque characteristics of the links of the robot arm mounted on the drive unit. The drive shaft 211 can be any suitable The method is supported in the direction of the arrow 21〇a, that is, for example, by the harmonic drive motor 208 in the direction indicated by the arrow 210A. In addition, the drive shaft 211 can also be supported by a combination of a drive motor and a suitable bearing by any suitable bearing. In the direction indicated by arrow 210A, the drive motors 209 and 208 are substantially identical in shape and operation, that is, The 209 may also include a stator 209S, a rotor 209R, a wave generator 209W, a first plug piece 2〇9F, and a second plug piece 209C, which are respectively coupled to the stator 208S of the motor 208, the rotor 208S, the wave generator 208W, The first plug piece 208F and the second plug piece 208C are the same. The inner drive shaft 212 can be firmly connected to the second plug piece 2〇9C in any manner to integrally rotate the two. The shaft 212 is driven in the same manner as described above. The drive shaft 212 can be supported by the drive motor 209 in the direction indicated by the arrow 210A or supported by the appropriate bearing in the direction indicated by the arrow 210A. In addition, the drive shaft 212 can also be supported by the combination of the motor 209 and a suitable bearing in the direction indicated by the arrow 210A. It can be seen from the embodiment that the inner and outer drive shafts 211, 212 are concentric with each other and utilize iron. The jet seal 500 maintains the shaft and the housing from the control environment SE. The interaction between the gears of the first and second seals 13 of the harmonic drive motors 208, 209, 201233511, 208F, 208C, 209F, 209C is maintained to control the shaft. 211, 212 and housing Maintaining an iron jet seal 5〇〇 (eg, driving motors 208, 209 such that each drive shaft is substantially concentrically disposed to at least one portion of the housing) causes one or more iron jets to be sealed at a plurality of axes For example, as described above, the second sealing sheets 208C, 209 of the motors 208, 209 may be a rigid ring, and the first sealing sheets 208F, 209F are 2 The respective deformation of the sealing sheets 208C, 209C (causing the meshing of the teeth) maintains the shafts 211, 212 respectively connected to one of the second sealing sheets 208C, 209C substantially concentric with each other and substantially concentric with at least a portion of the housing 840H. Furthermore, the bearings can be disposed, for example, between the drive shaft and the drive shaft or other suitable location within the drive for maintaining substantially concentricity between the drive shafts by means of a harmonic drive motor. The harmonic drive motors 208, 209 as described above may utilize a substantially coaxial iron jet seal 500 (or other suitable seal) in the drive 840 to isolate a sealed control environment in which a robotic hand, such as a robot 800 (this) The robot can be mounted on the drive shaft of the drive unit 840 and operated from the atmospheric pressure environment in the drive housing 840H and other peripheral environments. The drive unit can be configured to greatly reduce the runnout of the drive shaft for tight control. The gap of the seal 500 is installed. Referring again to Fig. 5, for example, a first iron jet seal 500A may be disposed between one of the second sealing sheets 208C and one of the casings 840H. In one embodiment, the motor 208 can include a sealing surface 208CS' for at least partially retaining the first iron jet seal 500A. The second iron jet seal 500B can be disposed between the outer drive shaft 211 and the inner drive shaft 212, so that an air barrier can be formed between the two shafts to seal the control environment and drive on the output side of the sealed isolation drive 840. Atmospheric environment within device 840. In this case, the output portions of the drive motors 208, 209 are sealed from the input portion by the seals 500A, 500B of 8 14 201233511. Conversely, as described above, the jet seal is attached (at least in part) to the output portion 208CS, or a portion (e.g., outside of the inner shaft 212) is attached to the output of the drive motor. Although only the two seals 500A, 500B of the drive unit 840 are described above, more or less of the seals may be disposed at appropriate locations within the housing 840H for isolation from the atmosphere to form a sealed control environment. . The seals 500A, 500B can be disposed in the interface of the housing 840H, where the sealed controlled environment interacts with the atmosphere so that the particulates generated by the drive 840 within the housing 840H cannot escape into the sealed control environment. At the same time, any corrosive substances in the sealed control environment cannot enter the housing 84〇h, so components used in the driving device 840 when used in a vacuum environment, such as the housing 840H, do not need to be vacuum resistant, because the seal 500 can provide an atmosphere barrier . It should be noted that the configuration of the drive unit 840 seals 500A, 500B is merely an embodiment, and any other suitable configurations and configurations are available. One or more suitable absolute or incremental encoders or any other suitable position tracking device may be provided at any suitable location within the housing for tracking the rotation of the various motors 208, 209, and properly positioning the robot arm, For example, the robot is positioned 8 inches. One or more code conversion devices 208EC, 209EC may also be provided in the housing 840H to convert signals from the encoders 208E, 209E for use by any suitable controller, such as controller 170. The housing 840H described above may have one or more wire passages 650 for power connection to the encoders 208E, 2〇9E and/or the stators 208S, 209S or any other suitable electronic component. The configuration of the various components described above is only one example, and any other configuration and/or configuration is available. Figure 6 shows another harmonic drive system that can be incorporated in an embodiment of the present invention. The drive unit 840 includes three axes, also known as a three-axis 15 201233511-type triaxial shaft assembly. There are three harmonic drive motors 708, 709, 710' each of which drives a corresponding one of the inner shaft 712, the intermediate shaft 713, and the outer shaft 711. In this embodiment, the coaxial drive shaft outer side shaft 711 can be suitably connected to the upper arm 810 of the robot 800, the inner shaft 712 is coupled to the end effector 830 and the intermediate shaft 713 is coupled to the front arm 820, thus each arm link (arm) Links) can be rotated independently. The motors 708, 709, 710 include stators 708S, 709S, 710S, a rotor 708R, 709R '710R, a wave generator 708W, 709W, 710W, a first sealing sheet 708F, 709F, 710F and a second sealing sheet. 708C, 709C, 710C, and the above-mentioned respective members are substantially identical to the following components of the reference motors 208, 209, namely, stators 208S, 209S, rotors 208R, 209R, wave generators 208W, 209W, first sealing sheets 208F 209F and second sealing sheet 2080 209F. The inner shaft 712 can be hollow, in the same manner as described above for the mating shaft 212, as a sealed channel power supply line or any suitable item that can be threaded into one or more of the links, for example, the robotic arm 800. Of the three motors described above, motor 708 drives outer shaft 711, motor 709 drives inner shaft 712 and motor 710 drives intermediate shaft 713 in substantially the same manner as described above in connection with FIG. As noted above, the concentricity of the shafts and/or the housing 840H' can be maintained by the harmonic drive motors 708, 709, 710. As described above, the interaction between the first and second plugs 708F/708C, 709F/709C, 710F/710C can control the gap between the shaft and a portion of the housing to maintain the iron jet seal 500 (eg, motor 708, 709, 710 can have their drive shafts substantially concentrically positioned to allow one or more iron jet seals 500 to be positioned between the shaft and one or more of the shafts and the housing. Also, as described above, suitable bearings may be provided at any suitable location between the drive shafts or housing 840H to facilitate between one or more axles and/or housings 8 16 201233511 or multiple axles ( Concentricity is maintained along with the motors 708, 709, 71〇). Although the number of vacuum robots and driving devices has been described above, the characteristics of the vacuum robot and the driving device have been applied to the atmospheric pressure (atmospheric) robot. Furthermore, if the inside of the housing of the second actuator does not require an atmospheric environment, the iron jet seal can be replaced by other suitable seals or the like. In this embodiment, the iron jet seal 5 is disposed between the sealing sheet 708 and one of the housings in the same manner as described above. The seal 500A can be disposed between the outer shaft 711 and the intermediate shaft 713, and the other seal 5〇〇C can be disposed between the intermediate shaft 713 and the inner shaft 712 in substantially the same manner as the seal 500Β. Thus, the output portions of the respective motors (harmonic actuators) 7〇8, 709, 710 can be sealed from the input portion. At least a portion of the housing can be disposed in substantially the same manner as described above, such as the maser 708. , 7089Ε, 71 commits an appropriate position tracker such as encoder transforms 708EC, 709EC, 7l〇EC (these can be substantially identical to encoders 2〇8E, 2〇9F and the converter). The configuration of the encoder changers described above is merely an example, and they may be respectively assigned to any suitable position to track the position of each of the corresponding drive motors 708, 709, 710. Another substrate is sent to the device 1700. The transport device can be used in the atmospheric ring arm device 171 〇 and the drive portion 172 , to make an organic Q rotation feature that can be appropriately sized to accommodate any robot that has the length shown in Fig. 8 .

(Substantially the same as the reference _ ^ in the mounting flange W 1840. The above-mentioned housing 184 〇 5) drive device 3 lower port support plate _ Β to support at least a part of the 17 201233511 moving device. The z-axis actuator 1823 can be at least partially assembled to the lower = support plate 1840B' to extend the roller screw 1821 toward the flange 181 而 to support its non-drive end by any suitable support bearing 1820. The z-axis drive 1823 described above can t rotate any suitable drive motor 18 2 3 该 of the ball screw 1821. For example, 5' the drive motor 1823 can be any suitable type of alternating current (AC) motor or direct current (DC) motor, such as servo motor, stepper motor, ac induction motor, Dc brushless=da, DC coreless motor or 彳Regardless of other suitable motors, the z-axis driver 1823 may also include any suitable brake 1823B to stop the ball shaft 1821 from rotating and thereby stop the axial movement of the arm 17丨〇 (the arm 171 is coupled to the driver) 1800, after the explanation). In addition, the z-axis driver 1823 can also include any suitable S-tracker, such as any suitable encoder for transmitting the appropriate nickname to the controller 170 (shown in Figure 1) to track the arm 13ι. 2_axis position. It should be noted that although a ball screw Z-axis driver is illustrated herein and shown in FIGS. 8A-8C, the Z-axis driver may include a fluid-driven slider, a solenoid, a magnetically driven slider. Or any suitable linear drive or any suitable type of drive. The drive unit shown in Figs. 8A to 8C includes a spindle assembly 1800S movably mounted in the casing 1840 to allow at least one portion of the shaft to freely move along the X-axis through the flange. The spindle 18A includes a harmonic drive 1800 which is substantially identical to the harmonic actuator 84A described above in connection with FIG. Additionally, the plurality of drive units 18A can be substantially similar to the harmonic drive 840' when more than one drive shaft is assembled. The above-described harmonic drive device can be fixedly mounted in the spindle support tube 1830A in any suitable manner. This support tube can be fixedly attached to the z-axis carriage 183〇B by any suitable means. Although the shaft is in the picture 8 18 201233511

The branch, tube 1830A and Z-axis bracket 1830A are shown as separate units, but may be formed in a single piece configuration. The Z-axis bracket 1830A can include a protrusion 1822P having a ball nut 1822 for connecting the shaft 18 s to the z-axis driver 1823 so that the shaft 18 s responds to the z-axis drive. The ball screw 1821 rotates and moves along the z_ axis by °. The Z-axis bracket 1830 can also include any suitable protrusions 1860A, 1860B disposed along the perimeter of the Z-axis bracket 1830B. In this embodiment, the protrusions are substantially 180. isolation. However, in other embodiments, the protrusions may have any angular relationship with each other and with the protrusions 1822P. In the above-mentioned protrusions 186A, 186〇b, one or more guiding members 1865A, 1865B may be respectively arranged to cooperate with, for example, the guiding rails 1850A, 185B. The guide shaft 1800S moves in the housing 1840 in a Z-axis. The guide rails 1850A, 1850B can have any suitable configuration and can be mounted within the housing 184〇 in any suitable manner. In other embodiments, the guide can be guided by any suitable guide. Any suitable slip ring 1815 or other suitable wire feedthrough may be provided within the spindle 1800S to facilitate insertion of the wire or other suitable cable, tube, etc., without substantially obstructing the infinite Q rotation of the robotic arm 1710. The shaft 1800S enters the machine arm 1710. As shown in Figures 9A, 9B, and 10, the robotic arm 1900 can include an upper arm portion 1901 having a base portion 060, a lower housing 1900L, and an upper housing 1900U. The arm 1900 can also include a travel frame 1919T and an end effector bOS. The base portion 1960 is adapted to rotate the base portion I960 as the drive shaft 211 is rotated outside the driver 1800 to rotate the outer drive shaft 211. Again, the base 1960 can be coupled to the drive shaft 211 by any suitable means, such as a mechanical lock. The moving frame 19 201233511 1910T can be mounted to the base 196 任何 in any manner to fix the moving frame 191 〇τ to the base 1960. For example, the moving frame 1910 can include one or more rails 1910, 191 OB', each of which is connected to the end by an appropriate end thereof

Board 1900E 1900E2. One or more guides 1930A, 930B, 1930C, 1930D are slidably coupled to the respective rails 1910A, 1910B. Each rail and/or end plate 1900E1, 1900E2 may include a mounting bracket or other suitable fitting for attaching the moving frame 1910 to the base 1960 without hindering the guide from sliding along its rail. The upper and lower housings 1900U, 1900L may be mounted on one or more of the end plates 1900 1900 Ε 2 or a plurality of bases I960 for use with the end plates, the guide rails 191 〇 α, 1910 Β 'guides 1930 Α 1930D and the arm The telescopic drive assembly (described later) is housed (wrapped). The upper and lower housings 1900U, 1900L may be configured to form a slit 1999 between the upper and lower housings to facilitate the end effector 19〇5 and the guide member when mounted on the robot arm 1900. The connection between 1930Α~1930D. For example, one or more of the connectors 1905C can extend through the slits 1999 and connect the end effectors 1905 to the guides 1930A to 1930D (described in detail later), so that the guides moving along the guides 1910A, 1910B will The end effector 1905 expands and contracts along the radial axis R (refer to FIG. 7A). Referring again to Figure 10, the guides 1930A through 1930D can be driven in any manner by the internal drive shaft 212 of the drive 1800. For example, when the driving wheel 192〇c is mounted on the internal driving shaft 212' to rotate the internal driving shaft 212, the driving wheel may also be located in the opposite direction of the guiding rails 1910A, 1910B as one or more of the guiding rails 1910A, 1910B are rotated. Guide wheels 1920A, 1920B. Although the guide wheels 1920A, 1920B' are only displayed on the guide 1910B in Fig. 10, the guide wheels may be disposed on the guide rail 1910A. A suitable transmission member 2010 such as the example 8 20 201233511 line can be wound around the circumferential surface of the driving wheel 1920C and the respective guide wheels 1920A, 1920B. In the transmission member _ member 19 (Jc), the bottle (in this embodiment, the guide members 193 〇Α, 193 〇Β and the connecting wheel 1920 轮 wheel 192 〇 C are rotated to bow the transmission member 2010 in the guide The linear shift (4) is used as the sealing method. It can be installed in the above-mentioned slit 1999. Any suitable Γ1:: The child runs out of the gap and enters the robot arm. The chamber F can be equipped with a vacuum tube or other exhaust shield. Rings or movements or spurs generated by runners and conveyors other than those in the robotic arm: ϋ9°5, any suitable end-action machine, such as a side clamp end effector with a main 棬 5 J匕 or The bottom clamps the end action machine. At the end, the machine 1905 has a feature that the bottom portion is thin and the clamping portion is G. The bottom material is connected to one or more of the Wei component members (the embodiment is a connecting member) Located at the base 1965, each of the lateral sides 19. The flail member 1905C can be coupled to the guide members 193, 19 to stabilize the base (4) by the traVelframe 191 〇 T. The end effector 19夹具5 fixture 4 190SG is used in this embodiment as a side end to tighten the end effect machine, but as described above' The clamp portion 19G5G can have any suitable configuration for supporting and squeezing the substrate s. That is, the clamp can be detachably mounted on the base 丨9〇5B or integrated with the base. Right to control the active clamping function or When operating the substrate sensor on the end of the machine and wishing to be electrically, pneumatically, vacuumed, optically or otherwise connected, the wires, pipelines, cables, etc. can be threaded through the Spindle assembly. The sexual channel 1950 is connected to the end effector, and the flexible channel 丨95〇 can be bent or changed. The 201233511 shape allows the end effector to perform the telescopic action in the mechanical arm 1900 without assembling the flexible channel. The arm 1900 has a "single stage", a stretched form (e.g., a base member and a single sliding member)' but the robot arm 19 can be "multistage" as shown in Figure 9C. Forms. For example, the robot arm may include an upper arm member 1901', and the arm member is slidably mounted with one or more intermediate arms 19 in the same manner as described above for the end angle machine 19〇5. 〇 3. The end effector 1905 is slidably mounted on the most end of the intermediate arm 1903, for example, the above-described method of installing the end effector on the upper arm 1901. The above-mentioned machine arm can be equipped with any appropriate The transmission device 'is used to extend the upper arm portion 1901 by both the end effector and any number of intermediate arms to cause a secondary extension of the end effector 19〇5. In addition, the 'transport device 1700 can be provided with a plurality of arm members or substrate supports. A device, such as an arm member/substrate holder, can be stacked up and down to be driven by a drive shaft that drives the device (for telescopic movement). Further, the arm member/substrate holder described above may be formed to extend in the same or opposite directions. Another embodiment of the transport apparatus of the present invention will now be described with reference to Figs. 11A to 11C. The transport device 2100 is substantially identical to the transport device 17A described above unless otherwise noted. For example, the arm 2710 is substantially identical to the arm 171 , and includes a base member (not shown) 'the lower housing 290〇L, the upper housing 29〇〇u, the moving frame 291〇τ, and the end effector 2905 . As described above, the bottom member is coupled to the outer drive shaft 211 (Figs. 12A to 12C) of the drive unit 272, and the base member also rotates as the outer drive shaft rotates. The base member may be coupled to the drive shaft 21 by a mechanical locking device or the like. The moving frame 2910 (including the end plates 29A1, 29〇〇Ε2) may be substantially fixed to the moving frame 1910 by any suitable means. Base structure 8 22 201233511 pieces. The end effector 2905 includes a bottom portion 29〇5B and a clamp portion 29〇5G which are substantially the same as the bottom portion 19〇5B and the clamp portion 19〇5G of the end effector 1905. The end effector 2905 is coupled to the guide of the moving frame by the connecting members 29〇5C so that the end effector can be expanded and contracted along the radial axis R. Further, the slit may include a seal for preventing the particles generated by the runner of the robot arm 2: 71 and the conveyor or the like from being discharged from the slit to the atmosphere controlled by the operation of the robot arm 2710. In this embodiment, the 'transport device can be configured to control the sealed environment SE and the internal atmospheric environment of the drive device 2720 (eg, drive) in a controlled atmosphere (C〇ntr〇1 atmosphere). The environment in which the device is located) is isolated. Drive unit 1720 can also include a suitable seal to seal the atmosphere between the control and the interior of drive unit 172. For example, the driving device 2720 can be the same as the driving device n2 described above, that is, the driving device 2720 includes a casing 2840, a bottom portion 2840Β, *7 > a driver 2823, a ball screw 2821, a ball nut 2522, and a ball screw. The 拄 拄 28 2820 and the shaft support tube 2830 Ζ and the Ζ-axis carrier 283 (m 夂 的 spindle assembly 2800S. This support tube 2830A month class

There is a gap between the +, Λ &amp; caution and flange 2810 (this flange can be the same as the upper flange). The gap G M axis device 2800S moves along the Z-axis. Closing the gap G may be provided by any suitable flexible sealing material 2610 to provide a sealed connection to, for example, the flange _ while the other end seal is fixed 3 = one of the holding tube 2 and the shaft carrier 283 。. Appropriate seal 2_ (can be the same as the above seal 500Α, 500Β, „, only the same), can also be matched with δ and between the drive shafts 211, 212 and the body ς, „ occupation axis Between the 211 and the motor housing 804 (Fig. 5), between the driver and the housing "OH", n aL ± λ a _ ^ < and the outer shaft 211 and the inner shaft 212 form a gas wall to drive The control environment SE on the outside of the device is sealed off from the inner atmospheric ring 23 201233511. The power supply line, tube, cable, etc. are connected to the end effector through the inner drive shaft 212 to prevent damage to the wires and tubes. An insulating connecting wire 59 允许 that allows the mechanical arm to rotate under a cable or the like (as described above with reference to Fig. 4). Figures 13A to 13C show a conveying device according to another embodiment of the present invention. The conveying device includes a driving portion 530. D and an arm portion 5300A. The arm portion includes a longitudinally extending base 5310 and one or more substrate support members 532A, 5322. The substrate supports at least a portion of the telescopic direction of the length of the base 12130. Move (refer to Figures 14Α and 14Β). The above drive unit 53〇〇D package A coaxial drive device is included, and the coaxial drive device includes a coaxial drive shaft assembly 5371. Each drive shaft of the assembly 5371 is coupled to the base 5310 and the substrate support members 5320, 5322, respectively, by any suitable means. As shown in Figures 13B and 15, the drive portion 53 includes a housing 537 which is substantially identical to the housing 2840 illustrated in Figure 12C above. In the housing 537, it can be shown as described above. In substantially the same manner, at least a portion of the coaxial shaft device is provided. The shaft sleeve assembly includes a shaft support f 5530A and a Z-axis loader 5530B. The Z_ axle loader can drive the machine according to the above z_axis. The same manner as described in 2823 is connected to any suitable z-axis drive machine. The z-axis drive machine can move the spindle device to the housing 537G', for example, to cause the arm device 5 to fan a along the axis of the coaxial drive shaft device &1. (Refer to Fig. 15) moving in a substantially parallel direction. There is a gap G between the shaft support I Γ 30A and the flange 281 以 for the shaft device to have no Z-axis spear. The above-mentioned 5 mile gap G can be borrowed by any suitable one. Flexible plate such as hose 2610 (four) 'even if one end of the sealing piece is dense The flange 281 is 〇 〇 另一 另一 例如 例如 例如 例如 例如 例如 例如 例如 遍 遍 遍 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 351 351 351 351 351 351 351 351 351 351 351 351 351 351 351 Used to accommodate one or several motors, corresponding to the corresponding drive shaft of the eight-axis assembly 5371. In this embodiment = the shaft drive pure assembly includes three drive shaft training, 55i2, 551 J including three Above 吱 drive the drive shaft of this ± π. The first or upper drive motor is used for the outer drive shaft 5511 of a μ drive shaft assembly and includes a stator 556 〇Μ shaft support 556011. The stator 556 is fixed in the stator=5530Α in any suitable manner, and the rotor 556〇11 is mounted on the driving pump 5511, so that the driving shaft 55η is moved/rotated. The drive shaft 5511 is rotated about the rotating shaft 5599 with the rotor and the rotor. Any suitable sealing member 55 can be placed between the stator 5560M environment, such as static 55 = off-load (such as vacuum, etc.) to seal the lock... support for the shaft; isolation. ==551〇With the environment of the shaft support tube 553°Α or the inner ring of the support 5530Α and the arm device 5300Α operation or the middle Ci!: the operation of the sea arm device is 'after this point' Again. The second and second ''moving motor'' is used to drive the intermediate drive shaft 5513 stator 5561M and one rotor 5561R of the coaxial drive shaft assembly. The stator 55_ is fixed in the shaft support tube 55 in a proper manner, and the rotor 5561 is mounted on the drive shaft 55U. When the stator causes the rotor 5 to move/rotate, the drive shaft is added along with the rotor. Rotate to cause the drive shaft 55 to stand and rotate. Between the scorpion 55 and (4) 55 s, any sealing member 5561S, such as a static environmental separator (such as a vacuum), may be provided to seal the stator 5561M in the shaft support tube 5530A, so that the stator 5561 and the shaft support = The environmental separation or isolation 4 in the tube 5530A is operated when the inside of the above-mentioned shaft support tube 553〇a is in communication with the environment in which the arm unit 5300A operates. The apparatus is operated 25 201233511 (4) (4). The third and lower side drive motors are the outer side drive shafts 5512 and include a moving/shaft drive shaft 5562ϊΙ. The stator 5562M is imitation 彳^ and a rotor (10) eight, and the _子5562 is fixed in the appropriate way to the shaft support tube hair rotor 5 prison movement/rotation drive shaft 5511, so that the stator leads to loss, the far drive shaft 5512 That is, with the rotation: the drive shaft 5512 rotates around the wheel 5599. Any suitable 62Μ and rotor separation (such as vacuum) may be placed between the - 5562R to seal the stator. For example, the static environment is separated by w ^ !ΙΓί ΐί :====: - 62s, and another It is to be noted that the shaft support tube, such as the i0A, may have a one-piece construction or may be constructed of a stackable separable housing assembly or module (eg, an early-housing assembly or a motor module), wherein the housing assembly is engageable with each other A shaft support tube having any suitable number of motors is formed. The drive motor shaft can be supported in the shaft support tube 5530A in any suitable manner so that the rotors 556R, 556iR, 562R respectively connected to the corresponding drive shafts 5511, 5513 are positioned to be mutually compatible with the respective stators 556m, 556im, 5562m. effect. The above drive shaft can be supported by the shaft support tube 553〇Α by a suitable bearing. For example, the outer drive shaft 5511 can be supported (i.e., concentric and axially supported) by one of the shaft support tube 553 top configurations or a plurality of suitable bearings 5550. The intermediate drive shaft 5513 can then be supported (i.e., concentric and axially supported) toward one of the shaft support tubes 553, eight central configurations, or a plurality of suitable bearings 5550. The inner drive shaft 5512 can be supported by one of the bottom configurations of the spindle support tube 5530A or a plurality of suitable bearings 5550C (i.e., concentric and axial support). The bearing arrangement position in the above-mentioned shaft support tube 553〇a is just an example, and it can be disposed at any other suitable position of the shaft support tube. The bearing can also be arranged to operate in a vacuum environment. The static environment (such as vacuum) spacers 5560S, 5561S, 5562S can be used to seal between the coaxial shaft device 5371 and the shaft support tube 5530 and the drive shaft 5511. The dynamic environment seal between 5512 and 5513 and when the drive unit 53〇〇1) is not sealed by the dynamic environment, allows the transport device 5300 to be in a higher than vacuum level environment and more than a conveyor that uses a dynamic environment seal. Good leak prevention. The arrangement of three different static environmental barriers has been described above, but a single spacer may be provided in the shaft support tube to seal the stator from the environment of the shaft support tube. Drive portion 8300D also includes any suitable detector for tracking the rotation of drive shafts 5511, 5512, 5513. In one embodiment, any suitable encoder 5540Α, 5540Β can be provided at least in portions of the shaft support tube 553〇Α for detecting rotation of the respective drive shafts 5511, 5512, 5513. 13A to 14B and Figs. 16 to 19 will now be described. The arm device 53A can be directly driven by the driving portion 5300D. For example, the outer drive shaft 53u can be coupled to the base plate 5310 in any suitable manner, such that when the drive shaft 5311 is rotated, the base plate also changes the angular position of the arm device 5300 as it rotates (ie, the θ-axis rotation &gt; the arm device 53〇〇α and The drive portion 5300D can be arranged to provide an infinite rotation in any suitable manner. Further, the second or upper drive pulley 5610 and the second or lower drive pulley 5611 can be at least partially disposed within the base plate 5310 and with the drive shaft device 5371. The intermediate shaft 5513 can be coupled to the lower drive pulley 5611 by any suitable means such that the lower drive pulley 5611 rotates as the intermediate drive shaft 5513 27 201233511 rotates. The lower drive pulley 5611 includes a hole for the inner drive shaft 5512 to pass through. The lower side driving wheel 5611 is connected to the upper driving wheel 5610 so that the rotation of the lower driving wheel 5611 is not hindered by the inner driving shaft 5512 or the upper driving pulley 561. The arm device 5300A is described above for the coaxial driving portion 5300D. However, it should be understood that the arm device 5300A can also be used for the harmonic drive unit and the coaxial drive unit in the same manner as described above with reference to FIGS. 4 to 6 and 8A to 8C. The arm device described with reference to Figures 3, 7A, 7B and 9A to 11C can be used for the coaxial drive portion 5300D by suitable connection between the drive shaft and the arm device. The guide wheel 5720 can be disposed at the first end of the base plate 5310. At 5721, the second end of the first end can be provided with guide wheels 5722 and 5723, and the arrangement is substantially the same as that described above with reference to Fig. 1 . Further, the guide wheels 5720 and 5723 can be disposed at the lower part. The drive wheel 5611 is in the same plane so that any suitable drive belt 5920 can be placed around the guide wheels to extend and retract the substrate support 5320 along the telescopic axis R. For example, the guide wheels 5720, 5723 can be configured. The portion of the belt 5920 extending between the guide wheels is substantially parallel to the telescopic shaft R. Further, the guide wheels 5721, 5722 can be disposed in the same plane as the upper drive wheel 5610 so as to be able to surround the guide wheels Any suitable drive belt 5921 is provided to extend and retract the substrate support 5322 along the telescopic axis R. For example, the guide wheels 5721, 5722 can be configured such that the portion of the drive belt 5921 extending between the guide wheels is substantially parallel to the telescopic shaft r is parallel. In operation, the mother-substrate support 5320, 5322 can be independent The expansion and contraction thus causes the one or more support members 5320 and 5322 to simultaneously mount and unload the substrate by the rotation and contraction of the respective drive shafts 5512 and 5513, and the drive shaft 5511 of the base plate 531 is held in a stationary (fixed) state. The 5300A can be rotated at the same speed in the same direction with the shaft 5599 pivoted, for example, by rotating the drive shafts 5511, 5512, 5513. 8 28 201233511 As described above, the base plate 5310 of the arm device 5300A is longitudinally extended to form a tubular structure (Arranged) There are at least a part of the drive wheels 5610, 56H, the guide wheels 5720~5723 and the drive belts 5920, 5921. As described above, the base plate 5510 of the arm unit 5300A extends longitudinally and can form a tubular configuration and encloses at least a portion of the drive wheels 5610, 5611, the wheels 5720 to 5723, and the actuators 5920, 5921. The base plate 5310 can include a cover (not shown) or other body covering the tubular body to prevent particulate matter generated by the drive wheel and the actuator from entering the environment of the arm device 5300A from the base plate 5310. The base plate may include one or more rails or rails 5701T, 5702T, 5703T extending along its longitudinal direction and suitably configured to guide the radial movement of the substrate holders 532, 5322. The track described above may be formed in a single piece configuration with the base plate 5310 and may be secured to the base plate 5310 by any suitable means. The substrate holders 5320, 5322 can be stacked in any suitable manner. For example, the lower substrate holder 5322 can comprise a substrate 5322B of any suitable shape and size and one or more substrate holders 5323 or holders extending from the substrate 5322B. The one or more substrate holders 5323 described above may have any suitable configuration of the support substrate S2 and may be attached to the end of the base plate 5322B such that its ends are cantilevered by the base plate 5322B. The above-mentioned base plate 5323 can also be configured to actively hold the substrate. The lower substrate holder 5322 can include one or more guiding members 57〇3R, 57〇4R and an elongated member 5322E. The above-mentioned guiding members 57〇3R, 57〇4 can be integrated with the base plate 5322B, and can be fixed to the substrate by any suitable means. The guiding members are coupled to the rails 5703T, 57〇4T such that the guiding members 57〇3r, 57〇4r are slidable along the rails to assist the substrate holder in assisting radial movement. Further, the guide member and the rail may be configured such that the substrate holder 5322 is stably held on the base plate 29, 201233511, 5310 so that the base plate 5322B does not tilt and/or rotate. The rail guiding member can be made using the friction between the two and the smallest suitable material for the particles. The elongated member 5322E can protrude from the base plate 5322B and connect the substrate holder 5322 to the conveyor 5912 by the connecting member 5911. The substrate holder 5 3 2 2 is caused to expand and contract (elongate and retract) along the telescopic axis R. The substrate holder 5320 is combined with any suitable shape and size. The substrate support Hi upper substrate support is substantially the same and can be connected to the base 5320B in the same manner as described above. In order to stack the substrate holders 532(), 5322, the base 53 of ^ = 5320 can be thinly formed to extend or cover the substrate holder. =^ 5322 at least partially passes through the aperture formed by the base 53. For example, ί plate holder 5320 base plate 5320R spoon it, A, &&amp; 5323 * Please: upper member 53 fiber, substrate support = ΐ (10) add-on 5 avoid the first side to fix the first spacer 5320A1 The opposite direction, add m strong men when the 5320A2. The second side of the second spacer 1 is fixed to the second spacer 1 and the second end of the lower member 53 of the base 53 is fixed to the second end of the base 53. The guide member 5 is attached to the second end of the base member 53: the same as for R and 5704RA. . The description is substantially 5:1T (=the same as the above-mentioned lower substrate holder 5322 1 the lower member 53 of the second end of the fiber can be installed with the A1 armature member 5322e substantially the same shoulder blade phase U of the elongated member 5320E, for the substrate holder The rotation ϋ(4) member 59ig is connected to the transmission 11 pair to cause the substrate holder 5320 to expand and contract along the telescopic shaft R by the rotation of the _ wheel 5611. The second lower member 8 30 201233511 5320B2 is fixed to the second spacer 5320A2 and faces the base plate 531. The second end of the second lower member is provided with a guiding member 5702R (substantially identical to the guiding members 5703R, 5704R) for connection to the corresponding bar 5702T of the base plate 531. The upper member is illustrated by the figure. The 5320E, the spacer member 532 〇 卜 532 〇 A2 and the lower members 5320B1, 5320B2 form an aperture for at least a portion of the substrate holder 5322 to pass unimpeded. Although the plurality of substrates of the arm device 5300A are mentioned above The holders extend in the same direction, but can also extend in opposite directions. Referring now to Figure 20, the base plate 5310 can also include a plurality of sealing sheets 5380 that cooperate with the substrate holders 5320, 5322'. 5383, forming a labyrinth seals to prevent the rails (tracks) and the particles generated by the guiding members from entering the environment of the arm device operation. The substrate holders and substrate holders can be combined with the substrate holder 5320 described above, 5322 and the base plate 5310 are substantially identical. In this embodiment, the rails 5701T to 5704T are provided on both sides of the base plate 5310· and are not provided on the top (top) surface of the base plate as described above in conjunction with FIGS. 16 and 17. The substrate holder 5322 includes a connecting member 5392, 5393 extending from the substrate holder 5322' and surrounding (wrapping) the base plate 531, and the connecting members 5392, 5393. The connecting members each extend outward from the base portion 5322B of the base plate 5322. The first portion 5393D; a second portion 5393H extending from the end of the first portion to the base portion 5322B (the second portion 5393H extending from the i-th portion is substantially parallel to the base portion 5322B and facing the base plate 531〇, stretched) and a third portion 5393U extending from the second portion S393H toward the base plate 5322B. Therefore, the third portion 53〇9u, the second portion 5393h, and the i-th portion 5393D are collectively formed to form a pocket or a recess. 5393R Each of the third portions is provided with guiding members 57〇3R, 57〇4R for slidable by the guiding members 31 201233511 5703R, 5704R and the corresponding rails 57〇3T, 5704T. The connection substrate holder is withdrawn from the base plate 5310. As shown in the figure, at least one of the connecting members 5392 and the continent includes an extension portion 5322Ε connected to the connecting member 5911, so as to connect the carrier 5921 to the substrate holder 5322, the sealing sheet, 5382 can be mounted on the surface of the base plate 5310. 531 〇τ and has a roughly &quot;υ&quot; shape of the shape, and from the base plate 5310, extends around the rails 57〇3, 57〇4, guide members $, 5, and 3. The trowel 5393U enters a corresponding (specific) recess 5393r to form a vapor seal together with the connecting members 5392 5393. The shapes of the above-described connecting members 5392, 5393 and the sealing sheets 5381 5382 are only examples, and any other suitable shapes are available. The substrate holder 5320' includes a substrate holder 532, extending and overwrapping the substrate 5310, and the connecting members 539(), 539 on both sides are substantially identical to those described above for the substrate holder 5322. The connecting members 539〇, 539丨 each include a third portion 539〇D extending outward from the lower members 532〇B1, 532〇B2 of the base plate 5320·; from one end of the first portion to each lower member 5320B The second portion 5290H of the opposite extension of 5320B2 and the third portion 5390U extending from the second portion to the corresponding lower member 5320B 5320B2, thereby

The second part and the first part form a pocket or recess 539〇r〇 the guiding members 57OIR, 5702R are fixed to the corresponding part of the third part 5390U through the guiding members 5701R, 5702R and the corresponding rails 5710T, 57021 The interface slidably connects the substrate holder 5320' to the base plate 5310'. At least one of the above-described connecting members 5390, 5391 includes a stretch portion 5320E' which is coupled to the connecting member 5910 for connecting the carrier 5920 to the substrate holder 5320'. The sealing sheets 5380, 5383 can be mounted, for example, on the corresponding surfaces 5310T1, 53 10T2 of the base plate 5310' and have a substantially L' shape, while guiding members 5701R, 5702R and 3 from the base 5310' surrounding the rails 5701T, 5702T 201233511 The portion 5390U extends into each of the corresponding recesses 5390R to form a vapor seal with the corresponding connecting members 5390, 5391. The connecting members 5390, 5391 and the sealing sheets 5380, 5383 described above are merely examples, and any other suitable connecting member and sealing member may be used. As shown in Fig. 21, on the base plate 5310, additional sealing members 5383 to 5386 may be provided to form labyrinth seals. For example, the sealing members 5385, 5386 can extend from the base plate 5310' and have a &quot;L&quot; shape configuration extending below and around each of the rails 5703T, 5704T and having guiding members 5703R, 5704R and connecting members 5392, 5393 At least a portion of the sealing members 5385, 5386 extend along the direction parallel to and parallel to each of the first portions 5393D. Similarly, the sealing members 5384, 5387 can extend from the base plate 5310' and have a &quot;L&quot; shape configuration extending below and around each of the rails 57〇1T, 5702Τ, and having guiding members 57〇ir, 5702R and At least a portion of the connecting members 5390, 5391 extend the free ends of the sealing members 5384, 5387 in a direction parallel to and parallel to each of the first portions 539OD. The configuration of the rear sealing members 5384 to 5387 is only an example, and any other suitable sealing member may be used to form a vapor seal with the corresponding connecting members 5390 to 5393. Although the above description is directed to the substrate holders 5320, 5322, the sealing members 5380 to 5383, it should be understood that the substrate holder may include other extensions or protrusions having substantially the same shape as described with reference to FIG. 20 and these extensions or protrusions The sealing members disposed on the base plate 531〇 cooperate to form a proper seal around the rails 5701Τ to 5704Τ and the guide members 5701R to 5704R. According to a first aspect of the above disclosed embodiment, the present invention provides a robot arm having a driving device. The drive unit includes at least one harmonic motor having at least one drive shaft coupled thereto and at least one machine 33 201233511 arm mounted on the drive shaft, the robot arm being positioned within the sealed environment. The drive device is provided with at least one iron jet seal forming an atmosphere barrier, whereby the at least one drive shaft enters the sealed environment through the atmosphere barrier, and the at least one harmonic motor is positioned outside the sealed environment. According to a first feature of the embodiment of the invention, at least a portion of the harmonic motor is configured as a sealing surface for the at least one iron jet seal. According to a first feature of the embodiment, at least one of the output portions of the at least one harmonic motor is sealed from the input portion of the harmonic motor. According to still another feature of the embodiment, the at least one harmonic motor includes a second harmonic motor and a second hunting motor. The motors are linearly arranged and have a common rotary axis and include first and second common drive shafts. At least one drive shaft. According to still another feature of the embodiment, the second and second harmonic motors are configured to maintain concentricity of the first and second drive shafts to provide a sealing surface for the at least one iron jet seal. gap. According to still another feature of the embodiment, the third drive shaft including the one of the first and second drive shafts is connected to the third spectrum and the motor. The above-described feature towel 'the at least one-pronged-power supply line passes through the feedthrough of the coaxial drive shaft. According to a first feature of the embodiment, the robot arm includes a sliding end device. According to a first feature of the embodiment, the drive shaft device includes a z-axis drive motor. According to a second feature of the embodiment of the disclosure, there is provided a robot conveyor equipped with a driving device, the casing comprising a casing exposed to a sealed environment and at least one 2012 201211 coaxial motor. The coaxial motor includes at least two drive shafts, each drive shaft including a stator and a rotor and at least one static isolation barrier, and at least one robot arm is mounted on the at least two drive shafts, the robot The arm is positioned within the sealed environment and the at least one static barrier wall is used to isolate the stator from the sealed environment within the housing such that the stator is positioned outside of the sealed environment. According to a second feature of the above embodiment, the at least one robot arm includes a sliding end effector. Further, in accordance with a second feature of the above embodiment, the at least one robot arm includes at least two end effectors and a base plate disposed one on another, wherein each of the end effectors is slidably mounted to the base plate. According to the second feature described above, the robot conveyor further includes a Z-axis drive motor. It is to be understood that the embodiments disclosed in the specification may be applied individually or in a suitable combination, and the description is made for a representative embodiment, and those skilled in the art can make the invention without departing from the scope of the invention and the claims. Many variations and modifications are possible within the scope of embodiments of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a portion of a substrate processing apparatus having a feature of the present invention; FIG. 2 is another schematic view of a portion of a substrate processing apparatus having a feature of the present invention; Figure 3 is a schematic view of the driving device shown in Figure 3; Figure 5 is a schematic view of an example of the driving device of the present invention; Figure 6 is a schematic view of another example of the driving device of the present invention; Figure 7A And 7B are schematic views of the substrate transporter of the present invention; FIGS. 8A to 8C are schematic views of the driving device of the present invention; FIGS. 9A and 9B are partial schematic views of the substrate transporter shown in FIGS. 7A and 7B; FIG. 10 is a partial schematic view of the substrate transporter shown in FIGS. 7A and 7B; FIGS. 11A to 11C are schematic views of the substrate transporter of the present invention; FIGS. 12A to 12C are schematic views of the driving device of the present invention; 13A to 13C are schematic views of the conveyor of the present invention; Figs. 14A and 14B are schematic views of the conveyor shown in Figs. 13 to 13C, showing the state at the telescopic position; Fig. 15 is a diagram of the embodiment of the present invention. Figure 16 is a partial schematic view of the conveyor shown in Figures 13A to 13C; Figure 17 is a partial schematic view of the conveyor shown in Figures 13A to 13C; Figure 18 is a schematic view of the conveyor shown in Figures 13A to 13C Figure 19 is a partial schematic view of the conveyor shown in Figures 13A to 13C; Figure 20 is a partial schematic view of the conveyor shown in Figures 13A to 13C; and Figure 21 is a partial schematic view of the conveyor shown in Figures 13A to 13C. [Main component symbol description] 10 substrate processing apparatus 12 interface area 36 201233511 13 processing area 15 workpiece conveyor 16 transport chamber 20 transport device 110 area 115 cassette 125 processing unit 165, • 830 end effector 178 memory 208 ' » 209 Drive motor 208F first plug 208C second plug 210A arrow 210 Z-axis motor 211 drive shaft 212 drive inner rod 500 iron jet seal 800 arm device 810 upper arm 820 front arm 840 drive region 840H housing 37

Claims (1)

201233511 VII. Patent application scope: 1. A robot conveyor comprising: a driving device comprising at least one harmonic motor; at least one driving shaft connected to the at least one harmonic motor; at least one mounted on the at least one driving shaft a robot arm positioned in a sealed environment; at least one atmosphere disposed on an output surface of the driving device to form an atmosphere barrier, sealed from the seal, wherein the at least one drive shaft enters the atmosphere through the atmosphere barrier Within the territory of Mizi. The at least __ spectrum and motor are located outside of the sealed environment. 2. The robot conveyor of claim 1, wherein the at least one of the spectrum and the motor portion constitutes a seating surface of the at least one atmospheric isolation seal 〇 &amp; iron jet sealing item 1 robotic transport The machine, wherein the large isolation seal is a type of transmission, wherein the at least - (four) and the motor "" are isolated from the input of the motor. Including 5th and the machine' wherein the at least -_ and the motor - co-sound and the first: ‘=, reaching a linear configuration and having at least one driving unit with the same drive shaft. 8 38 201233511 达传 L The robot conveyor of claim 5, wherein the first and second additions and the martial arts are configured to maintain the first! And the phoenix horse sets the seal of at least one iron jet seal = one - one supply 7. The robot conveyor of claim 5, and the fourth movement _ heart = progress includes - the first and the first axis 3 harmonic motor. a drive shaft and a robot carrier connected to the third drive 8*, such as claim 1, the robotic feed-feeding power supply line passes through a total of less than a drive shaft package sliding robot, wherein the robot arm contains - where The drive machine comprises a robot conveyor of z_axis two request item 1, u. a robot conveyor comprising: a driving device, a combination of a plurality of drive shafts; and a coaxial motor provided with at least two drive shafts Arm' which should be a sliding transport arm. The D-arm is used to directly drive the device to 39 201233511 12, as claimed in the item u. The transport arm includes a skid, wherein the at least one sliding month-end end effector. The arm includes a mutual (four) machine </ </ RTI> wherein the at least one robot is slidably disposed on the = machine and the base plate, respectively, wherein each of the terminals 14 is as requested. Also, there is a Ζ·shaft drive motor. a conveyor, wherein the robot conveyor comprises a housing that is exposed to a sealed environment, and has: a static wall, wherein: a static partition wall, wherein the base is fixed; and the knot shaft has a braid And the rotor and at least the at least one static partition wall are configured to be disposed in the housing while being isolated, such that the stator is positioned to expose the stator and the environment of the (4) to the sealed H4 Externally, the interior of the housing remains 16. The robotic coaxial harmonic drive of claim u. Wherein the driving device is a type 17. The machine wheel portion of claim 16 forms an arrangement surface 1 of the atmospheric isolation seal, wherein the common deceleration and driving spectrum and the input portion of the driving device are such that the heart surface = this The at least one operation of the atmospheric isolation seal to seal the environment of the movable transport arm 40 201233511 18. A substrate processing apparatus, a frame; a substrate transporter coupled to the frame, and the substrate transporter includes a a coaxial drive device comprising at least two drive shafts; and a transport arm coupled to one of the drive devices, the transport arm including a base plate and at least one substrate holder slidably mounted to the base plate, wherein the transport arm And the connection of the drive device is substantially directly connected to enable the transport arm to perform rotation and extension. 19. The substrate processing apparatus of claim 18, wherein the driving device is a coaxial driving device. 20. The substrate processing apparatus of claim 19, wherein the coaxial drive is a harmonic drive. 21. The substrate processing apparatus of claim 20, wherein an output portion of the coaxial drive device forms a configuration surface of an atmospheric isolation seal, and the input portion of the harmonic drive device is sealed by the atmospheric isolation seal to be transported The environment in which the arm is operated is isolated. 22. The substrate processing apparatus of claim 18, wherein the driving device comprises a plurality of coaxial drive shafts, wherein one of the shafts is directly connected to the base plate to rotate the base plate with the rotary shaft as a drive shaft, and the other shafts are directly connected to the respective shafts. The substrate holder 'slides the substrate holders independently. The substrate processing apparatus of claim 18, wherein the at least one substrate holder comprises a holder slidably coupled to the base, and the holder forms at least a portion of a vapor seal. 24. The substrate processing apparatus of claim 23, further comprising: a covering assembly coupled to the base, the covering assembly for coupling with the holder to form at least a portion of the vapor seal. 25. The substrate processing apparatus of claim 23, wherein the at least one substrate holder is comprised of at least two substrate holders disposed in a stacked manner. Eight, schema · 8 42