JP2005501320A5 - - Google Patents
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- JP2005501320A5 JP2005501320A5 JP2003522902A JP2003522902A JP2005501320A5 JP 2005501320 A5 JP2005501320 A5 JP 2005501320A5 JP 2003522902 A JP2003522902 A JP 2003522902A JP 2003522902 A JP2003522902 A JP 2003522902A JP 2005501320 A5 JP2005501320 A5 JP 2005501320A5
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- 238000005259 measurement Methods 0.000 claims description 85
- 238000000034 method Methods 0.000 claims description 85
- 230000009471 action Effects 0.000 claims description 46
- 230000006870 function Effects 0.000 claims description 40
- 238000003801 milling Methods 0.000 claims description 28
- 230000033001 locomotion Effects 0.000 claims description 23
- 238000003384 imaging method Methods 0.000 claims description 19
- 239000002245 particle Substances 0.000 claims description 18
- 238000003909 pattern recognition Methods 0.000 claims description 18
- 239000002131 composite material Substances 0.000 claims description 14
- 230000001419 dependent effect Effects 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 238000007792 addition Methods 0.000 claims description 2
- 230000004807 localization Effects 0.000 claims description 2
- 238000005459 micromachining Methods 0.000 claims description 2
- 230000003252 repetitive effect Effects 0.000 claims 1
- 230000006399 behavior Effects 0.000 description 38
- 239000000523 sample Substances 0.000 description 37
- YLJREFDVOIBQDA-UHFFFAOYSA-N tacrine Chemical compound C1=CC=C2C(N)=C(CCCC3)C3=NC2=C1 YLJREFDVOIBQDA-UHFFFAOYSA-N 0.000 description 29
- 229960001685 tacrine Drugs 0.000 description 29
- 239000010409 thin film Substances 0.000 description 24
- 238000010884 ion-beam technique Methods 0.000 description 23
- 235000012431 wafers Nutrition 0.000 description 20
- 230000000007 visual effect Effects 0.000 description 17
- 230000008569 process Effects 0.000 description 14
- 238000012937 correction Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 12
- 239000000047 product Substances 0.000 description 12
- 230000008859 change Effects 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000013461 design Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000011960 computer-aided design Methods 0.000 description 6
- 238000005070 sampling Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 238000007405 data analysis Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 230000003044 adaptive effect Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000003708 edge detection Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000013479 data entry Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31468701P | 2001-08-23 | 2001-08-23 | |
| US60/314,687 | 2001-08-23 | ||
| PCT/US2002/026865 WO2003019523A1 (en) | 2001-08-23 | 2002-08-23 | Graphical automated machine control and metrology |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011091629A Division JP5784953B2 (ja) | 2001-08-23 | 2011-04-18 | 画像上または撮像されたオブジェクト上で動作を実行する方法、画像またはオブジェクト上で反復的な動作を実行する方法、幾何学的情報と非幾何学的情報をグラフィック図形に関連付けるステップを含む動作を制御する方法、計測プランを含む方法およびコンピュータ可読媒体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005501320A JP2005501320A (ja) | 2005-01-13 |
| JP2005501320A5 true JP2005501320A5 (enExample) | 2008-12-25 |
| JP4751017B2 JP4751017B2 (ja) | 2011-08-17 |
Family
ID=23221005
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003522902A Expired - Lifetime JP4751017B2 (ja) | 2001-08-23 | 2002-08-23 | システムを制御する方法およびこの方法のステップを実行するための命令を含むコンピュータ可読媒体 |
| JP2011091629A Expired - Lifetime JP5784953B2 (ja) | 2001-08-23 | 2011-04-18 | 画像上または撮像されたオブジェクト上で動作を実行する方法、画像またはオブジェクト上で反復的な動作を実行する方法、幾何学的情報と非幾何学的情報をグラフィック図形に関連付けるステップを含む動作を制御する方法、計測プランを含む方法およびコンピュータ可読媒体 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011091629A Expired - Lifetime JP5784953B2 (ja) | 2001-08-23 | 2011-04-18 | 画像上または撮像されたオブジェクト上で動作を実行する方法、画像またはオブジェクト上で反復的な動作を実行する方法、幾何学的情報と非幾何学的情報をグラフィック図形に関連付けるステップを含む動作を制御する方法、計測プランを含む方法およびコンピュータ可読媒体 |
Country Status (4)
| Country | Link |
|---|---|
| US (4) | US6889113B2 (enExample) |
| EP (1) | EP1425729B1 (enExample) |
| JP (2) | JP4751017B2 (enExample) |
| WO (1) | WO2003019523A1 (enExample) |
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2002
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- 2002-08-23 EP EP02757340.1A patent/EP1425729B1/en not_active Expired - Lifetime
- 2002-08-23 JP JP2003522902A patent/JP4751017B2/ja not_active Expired - Lifetime
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2005
- 2005-04-27 US US11/115,751 patent/US7308334B2/en not_active Expired - Lifetime
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2007
- 2007-10-31 US US11/932,640 patent/US7664566B2/en not_active Expired - Lifetime
-
2010
- 2010-02-01 US US12/697,840 patent/US8095231B2/en not_active Expired - Fee Related
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2011
- 2011-04-18 JP JP2011091629A patent/JP5784953B2/ja not_active Expired - Lifetime
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