JP2005348082A - 水晶振動子 - Google Patents
水晶振動子 Download PDFInfo
- Publication number
- JP2005348082A JP2005348082A JP2004165232A JP2004165232A JP2005348082A JP 2005348082 A JP2005348082 A JP 2005348082A JP 2004165232 A JP2004165232 A JP 2004165232A JP 2004165232 A JP2004165232 A JP 2004165232A JP 2005348082 A JP2005348082 A JP 2005348082A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- layer
- eutectic alloy
- surface layer
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 title abstract 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 6
- 239000002344 surface layer Substances 0.000 claims abstract description 40
- 239000010410 layer Substances 0.000 claims abstract description 36
- 239000006023 eutectic alloy Substances 0.000 claims abstract description 34
- 239000002184 metal Substances 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 239000013078 crystal Substances 0.000 claims description 46
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 17
- 229910001120 nichrome Inorganic materials 0.000 claims description 17
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 5
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 239000010931 gold Substances 0.000 description 36
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000003628 erosive effect Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02094—Means for compensation or elimination of undesirable effects of adherence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
【構成】水晶片と、前記水晶片の両主面に形成される第1下地層を有して第1表面層をAuとした主面電極と、前記主面電極上にまたがって前記水晶片の側面に形成される第2下地層及びAuからなる第2表面層を有する端面電極と、前記端面電極と少なくともAuを含む共晶合金によって接合して前記水晶片を水平方向に保持する平板状の金属サポータと、前記金属サポータの立設した金属ベースとを備えてなる水晶振動子であって、前記端面電極における前記第2下地層と前記第2表面層との間に中間層11を設け、前記中間層11は前記第2表面層よりも前記主面電極上で突出するとともに、前記中間層11は前記下地層と第2表面層及び前記共晶合金との付着力を高める金属でとした構成とする。
【選択図】図1
Description
Claims (2)
- 水晶片と、前記水晶片の両主面に形成される第1下地層を有して第1表面層をAuとした主面電極と、前記主面電極上にまたがって前記水晶片の側面に形成される第2下地層及びAuからなる第2表面層を有する端面電極と、前記端面電極と少なくともAuを含む共晶合金によって接合して前記水晶片を水平方向に保持する平板状の金属サポータと、前記金属サポータの立設した金属ベースとを備えてなる水晶振動子であって、前記端面電極における前記第2下地層と前記第2表面層との間に中間層を設け、前記中間層は前記第2表面層よりも前記主面電極上で突出するとともに、前記中間層は前記下地層と第2表面層及び前記共晶合金との付着力を高める金属であることを特徴とする水晶振動子。
- 前記下地層はCr又はNiCrとし、前記中間層はPt又はTiである請求項1の水晶振動子。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004165232A JP4451219B2 (ja) | 2004-06-03 | 2004-06-03 | 水晶振動子 |
US11/142,100 US7061164B2 (en) | 2004-06-03 | 2005-06-01 | Crystal oscillator |
EP05253422A EP1603232B1 (en) | 2004-06-03 | 2005-06-03 | Crystal oscillator |
CNB2005100752019A CN100521525C (zh) | 2004-06-03 | 2005-06-03 | 晶体振荡器 |
DE602005012754T DE602005012754D1 (de) | 2004-06-03 | 2005-06-03 | Kristalloszillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004165232A JP4451219B2 (ja) | 2004-06-03 | 2004-06-03 | 水晶振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005348082A true JP2005348082A (ja) | 2005-12-15 |
JP4451219B2 JP4451219B2 (ja) | 2010-04-14 |
Family
ID=34941564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004165232A Expired - Fee Related JP4451219B2 (ja) | 2004-06-03 | 2004-06-03 | 水晶振動子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7061164B2 (ja) |
EP (1) | EP1603232B1 (ja) |
JP (1) | JP4451219B2 (ja) |
CN (1) | CN100521525C (ja) |
DE (1) | DE602005012754D1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007184859A (ja) * | 2006-01-10 | 2007-07-19 | Epson Toyocom Corp | 気密封止構造および圧電デバイスとその製造方法 |
US7939768B2 (en) | 2008-04-02 | 2011-05-10 | Nihon Dempa Kogyo Co., Ltd. | Crystal unit |
US20160344368A1 (en) * | 2015-05-22 | 2016-11-24 | Georgia Tech Research Corporation | Micro-hemispherical resonators and methods of making the same |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3866258B2 (ja) * | 2004-08-24 | 2007-01-10 | 太平洋セメント株式会社 | 圧電デバイスおよびこれを備える圧電スイッチ |
JP2009164673A (ja) | 2007-12-28 | 2009-07-23 | Nippon Dempa Kogyo Co Ltd | 水晶振動子用の金属ベース及びこれを用いた水晶振動子 |
CN102545821A (zh) * | 2010-12-28 | 2012-07-04 | 陕西华星电子集团有限公司 | 抗高过载石英晶体元件 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54132187A (en) * | 1978-04-06 | 1979-10-13 | Seiko Instr & Electronics Ltd | Crystal oscillator |
JPH09153763A (ja) * | 1995-11-30 | 1997-06-10 | Kinseki Ltd | 水晶振動子とその製造方法 |
JPH11205898A (ja) * | 1998-01-16 | 1999-07-30 | Mitsubishi Electric Corp | 誘電体薄膜素子用電極およびその製造方法とそれを用いた超音波振動子 |
JP2002026683A (ja) * | 2000-07-05 | 2002-01-25 | Nippon Dempa Kogyo Co Ltd | 水晶振動子 |
JP2003332876A (ja) * | 2002-05-14 | 2003-11-21 | Nippon Dempa Kogyo Co Ltd | 水晶振動子及びその保持構造 |
JP2004200835A (ja) * | 2002-12-17 | 2004-07-15 | Nippon Dempa Kogyo Co Ltd | 水晶振動子及びその保持構造 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5478693A (en) * | 1977-12-05 | 1979-06-22 | Matsushima Kogyo Co Ltd | Crystal vibrator |
JP4022055B2 (ja) * | 2001-11-19 | 2007-12-12 | 日本電波工業株式会社 | 耐熱水晶振動子 |
-
2004
- 2004-06-03 JP JP2004165232A patent/JP4451219B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-01 US US11/142,100 patent/US7061164B2/en not_active Expired - Fee Related
- 2005-06-03 CN CNB2005100752019A patent/CN100521525C/zh not_active Expired - Fee Related
- 2005-06-03 EP EP05253422A patent/EP1603232B1/en not_active Expired - Fee Related
- 2005-06-03 DE DE602005012754T patent/DE602005012754D1/de active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54132187A (en) * | 1978-04-06 | 1979-10-13 | Seiko Instr & Electronics Ltd | Crystal oscillator |
JPH09153763A (ja) * | 1995-11-30 | 1997-06-10 | Kinseki Ltd | 水晶振動子とその製造方法 |
JPH11205898A (ja) * | 1998-01-16 | 1999-07-30 | Mitsubishi Electric Corp | 誘電体薄膜素子用電極およびその製造方法とそれを用いた超音波振動子 |
JP2002026683A (ja) * | 2000-07-05 | 2002-01-25 | Nippon Dempa Kogyo Co Ltd | 水晶振動子 |
JP2003332876A (ja) * | 2002-05-14 | 2003-11-21 | Nippon Dempa Kogyo Co Ltd | 水晶振動子及びその保持構造 |
JP2004200835A (ja) * | 2002-12-17 | 2004-07-15 | Nippon Dempa Kogyo Co Ltd | 水晶振動子及びその保持構造 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007184859A (ja) * | 2006-01-10 | 2007-07-19 | Epson Toyocom Corp | 気密封止構造および圧電デバイスとその製造方法 |
JP4665768B2 (ja) * | 2006-01-10 | 2011-04-06 | エプソントヨコム株式会社 | 気密封止構造および圧電デバイスとその製造方法 |
US7939768B2 (en) | 2008-04-02 | 2011-05-10 | Nihon Dempa Kogyo Co., Ltd. | Crystal unit |
US20160344368A1 (en) * | 2015-05-22 | 2016-11-24 | Georgia Tech Research Corporation | Micro-hemispherical resonators and methods of making the same |
US10393525B2 (en) * | 2015-05-22 | 2019-08-27 | Georgia Tech Research Corporation | Micro-hemispherical resonators and methods of making the same |
Also Published As
Publication number | Publication date |
---|---|
EP1603232A3 (en) | 2007-02-28 |
US20050269912A1 (en) | 2005-12-08 |
EP1603232A2 (en) | 2005-12-07 |
CN1705223A (zh) | 2005-12-07 |
US7061164B2 (en) | 2006-06-13 |
EP1603232B1 (en) | 2009-02-18 |
JP4451219B2 (ja) | 2010-04-14 |
DE602005012754D1 (de) | 2009-04-02 |
CN100521525C (zh) | 2009-07-29 |
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