JPS54132187A - Crystal oscillator - Google Patents

Crystal oscillator

Info

Publication number
JPS54132187A
JPS54132187A JP4052778A JP4052778A JPS54132187A JP S54132187 A JPS54132187 A JP S54132187A JP 4052778 A JP4052778 A JP 4052778A JP 4052778 A JP4052778 A JP 4052778A JP S54132187 A JPS54132187 A JP S54132187A
Authority
JP
Japan
Prior art keywords
film
crystal oscillator
fluctuation
dispersion
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4052778A
Other languages
Japanese (ja)
Inventor
Tsuneo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP4052778A priority Critical patent/JPS54132187A/en
Publication of JPS54132187A publication Critical patent/JPS54132187A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Abstract

PURPOSE:To reduce the fluctuation and dispersion of the frequency as well as to prevent the deterioration of the bonding performance by securing the 3-layer structure for the crystal oscillator and then providing the film to the 2nd layer to prevent diffusion of the 1st and 3rd layers. CONSTITUTION:Metal thin film 6 of Cr, the Cr-Ni alloy and the like featuring a high adhesion property to the crystal is formed on both surfaces of cyrstal oscillator substance such as the AT-cut crystal oscillator or the like, and high-fusion point metal thin film 7 of Ti, Ta, W, Mo, etc. is formed on film 6 to block diffusion of the chrome. Furthermore, film 8 of gold, etc. excellent in the anti-corrosion performance is formed on film 7, with lead wire 9 bonded. As a result, no change is cuased to the film structure in the course of manufacture of the crystal oscillator, thus reducing the fluctuation and dispersion of the frequency. At the same time, the bonding performance is not impaired since no oxide exists on the electrode surface.
JP4052778A 1978-04-06 1978-04-06 Crystal oscillator Pending JPS54132187A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4052778A JPS54132187A (en) 1978-04-06 1978-04-06 Crystal oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4052778A JPS54132187A (en) 1978-04-06 1978-04-06 Crystal oscillator

Publications (1)

Publication Number Publication Date
JPS54132187A true JPS54132187A (en) 1979-10-13

Family

ID=12582946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4052778A Pending JPS54132187A (en) 1978-04-06 1978-04-06 Crystal oscillator

Country Status (1)

Country Link
JP (1) JPS54132187A (en)

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4339683A (en) * 1980-02-04 1982-07-13 The United States Of America As Represented By The Secretary Of The Navy Electrical connection
US4468582A (en) * 1982-04-20 1984-08-28 Fujitsu Limited Piezoelectric resonator chip and trimming method for adjusting the frequency thereof
JPS63316912A (en) * 1987-06-19 1988-12-26 Nippon Dempa Kogyo Co Ltd Piezoelectric vibrator
US5233261A (en) * 1991-12-23 1993-08-03 Leybold Inficon Inc. Buffered quartz crystal
US5325012A (en) * 1989-09-19 1994-06-28 Hitachi, Ltd Bonded type piezoelectric apparatus, method for manufacturing the same and bonded type piezoelectric element
JPH0722894A (en) * 1993-06-30 1995-01-24 Rohm Co Ltd Ceramic oscillation element and piezoelectric oscillator using the same
US5818151A (en) * 1995-02-14 1998-10-06 Murata Manufacturing Co., Ltd. Electrode for electronic component
EP0897216A2 (en) * 1997-08-11 1999-02-17 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Piezoelectric resonator, its manufacturing method and its use as a sensor for measuring the concentration of a constituent in a fluid and/or defining the physical properties of the fluid
US6196059B1 (en) * 1997-08-11 2001-03-06 Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Piezoelectric resonator, process for the fabrication thereof including its use as a sensor element for the determination of the concentration of a substance contained in a liquid and/or for the determination of the physical properties of the liquid
US6218763B1 (en) * 1998-08-25 2001-04-17 Murata Manufacturing Co., Ltd. Surface acoustic wave resonator, filter, duplexer and communication apparatus
JP2003046365A (en) * 2001-08-01 2003-02-14 Sumitomo Metal Mining Co Ltd Two-layer electrode film for crystal vibrator
US6541898B2 (en) * 2000-11-02 2003-04-01 Fujitsu Limited Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method
JP2005136801A (en) * 2003-10-31 2005-05-26 Kyocera Kinseki Corp Electrode structure for piezoelectric vibrator
JP2005348082A (en) * 2004-06-03 2005-12-15 Nippon Dempa Kogyo Co Ltd Quartz resonator
EP1635458A1 (en) * 2003-06-17 2006-03-15 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP2006101244A (en) * 2004-09-29 2006-04-13 Kyocera Kinseki Corp Piezoelectric vibrator, and manufacturing method therefor
JP2010183539A (en) * 2009-02-09 2010-08-19 Seiko Instruments Inc Piezoelectric vibration piece, piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, and electronic equipment and radio wave clock
JP2010219992A (en) * 2009-03-18 2010-09-30 Seiko Epson Corp Vibrating reed and vibrator
JP2011250390A (en) * 2010-04-27 2011-12-08 Nippon Dempa Kogyo Co Ltd Piezoelectric device
CN103825572A (en) * 2012-11-19 2014-05-28 日本电波工业株式会社 Piezoelectric device

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4339683A (en) * 1980-02-04 1982-07-13 The United States Of America As Represented By The Secretary Of The Navy Electrical connection
US4468582A (en) * 1982-04-20 1984-08-28 Fujitsu Limited Piezoelectric resonator chip and trimming method for adjusting the frequency thereof
JPS63316912A (en) * 1987-06-19 1988-12-26 Nippon Dempa Kogyo Co Ltd Piezoelectric vibrator
US5325012A (en) * 1989-09-19 1994-06-28 Hitachi, Ltd Bonded type piezoelectric apparatus, method for manufacturing the same and bonded type piezoelectric element
US5233261A (en) * 1991-12-23 1993-08-03 Leybold Inficon Inc. Buffered quartz crystal
JPH0722894A (en) * 1993-06-30 1995-01-24 Rohm Co Ltd Ceramic oscillation element and piezoelectric oscillator using the same
US5818151A (en) * 1995-02-14 1998-10-06 Murata Manufacturing Co., Ltd. Electrode for electronic component
EP0897216A3 (en) * 1997-08-11 2004-03-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Piezoelectric resonator, its manufacturing method and its use as a sensor for measuring the concentration of a constituent in a fluid and/or defining the physical properties of the fluid
US6196059B1 (en) * 1997-08-11 2001-03-06 Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Piezoelectric resonator, process for the fabrication thereof including its use as a sensor element for the determination of the concentration of a substance contained in a liquid and/or for the determination of the physical properties of the liquid
EP0897216A2 (en) * 1997-08-11 1999-02-17 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Piezoelectric resonator, its manufacturing method and its use as a sensor for measuring the concentration of a constituent in a fluid and/or defining the physical properties of the fluid
US6218763B1 (en) * 1998-08-25 2001-04-17 Murata Manufacturing Co., Ltd. Surface acoustic wave resonator, filter, duplexer and communication apparatus
US6541898B2 (en) * 2000-11-02 2003-04-01 Fujitsu Limited Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method
US6744183B2 (en) 2000-11-02 2004-06-01 Fujitsu Limited Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method
JP2003046365A (en) * 2001-08-01 2003-02-14 Sumitomo Metal Mining Co Ltd Two-layer electrode film for crystal vibrator
EP1635458A1 (en) * 2003-06-17 2006-03-15 Murata Manufacturing Co., Ltd. Surface acoustic wave device
EP1635458A4 (en) * 2003-06-17 2008-04-30 Murata Manufacturing Co Surface acoustic wave device
JP2005136801A (en) * 2003-10-31 2005-05-26 Kyocera Kinseki Corp Electrode structure for piezoelectric vibrator
JP2005348082A (en) * 2004-06-03 2005-12-15 Nippon Dempa Kogyo Co Ltd Quartz resonator
JP2006101244A (en) * 2004-09-29 2006-04-13 Kyocera Kinseki Corp Piezoelectric vibrator, and manufacturing method therefor
JP2010183539A (en) * 2009-02-09 2010-08-19 Seiko Instruments Inc Piezoelectric vibration piece, piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, and electronic equipment and radio wave clock
JP2010219992A (en) * 2009-03-18 2010-09-30 Seiko Epson Corp Vibrating reed and vibrator
JP2011250390A (en) * 2010-04-27 2011-12-08 Nippon Dempa Kogyo Co Ltd Piezoelectric device
CN103825572A (en) * 2012-11-19 2014-05-28 日本电波工业株式会社 Piezoelectric device
JP2014103505A (en) * 2012-11-19 2014-06-05 Nippon Dempa Kogyo Co Ltd Piezoelectric device

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