JPS54132187A - Crystal oscillator - Google Patents
Crystal oscillatorInfo
- Publication number
- JPS54132187A JPS54132187A JP4052778A JP4052778A JPS54132187A JP S54132187 A JPS54132187 A JP S54132187A JP 4052778 A JP4052778 A JP 4052778A JP 4052778 A JP4052778 A JP 4052778A JP S54132187 A JPS54132187 A JP S54132187A
- Authority
- JP
- Japan
- Prior art keywords
- film
- crystal oscillator
- fluctuation
- dispersion
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title abstract 5
- 239000010408 film Substances 0.000 abstract 5
- 238000009792 diffusion process Methods 0.000 abstract 2
- 239000006185 dispersion Substances 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 229910000990 Ni alloy Inorganic materials 0.000 abstract 1
- 238000005260 corrosion Methods 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 230000001771 impaired effect Effects 0.000 abstract 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Abstract
PURPOSE:To reduce the fluctuation and dispersion of the frequency as well as to prevent the deterioration of the bonding performance by securing the 3-layer structure for the crystal oscillator and then providing the film to the 2nd layer to prevent diffusion of the 1st and 3rd layers. CONSTITUTION:Metal thin film 6 of Cr, the Cr-Ni alloy and the like featuring a high adhesion property to the crystal is formed on both surfaces of cyrstal oscillator substance such as the AT-cut crystal oscillator or the like, and high-fusion point metal thin film 7 of Ti, Ta, W, Mo, etc. is formed on film 6 to block diffusion of the chrome. Furthermore, film 8 of gold, etc. excellent in the anti-corrosion performance is formed on film 7, with lead wire 9 bonded. As a result, no change is cuased to the film structure in the course of manufacture of the crystal oscillator, thus reducing the fluctuation and dispersion of the frequency. At the same time, the bonding performance is not impaired since no oxide exists on the electrode surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4052778A JPS54132187A (en) | 1978-04-06 | 1978-04-06 | Crystal oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4052778A JPS54132187A (en) | 1978-04-06 | 1978-04-06 | Crystal oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54132187A true JPS54132187A (en) | 1979-10-13 |
Family
ID=12582946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4052778A Pending JPS54132187A (en) | 1978-04-06 | 1978-04-06 | Crystal oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54132187A (en) |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4339683A (en) * | 1980-02-04 | 1982-07-13 | The United States Of America As Represented By The Secretary Of The Navy | Electrical connection |
US4468582A (en) * | 1982-04-20 | 1984-08-28 | Fujitsu Limited | Piezoelectric resonator chip and trimming method for adjusting the frequency thereof |
JPS63316912A (en) * | 1987-06-19 | 1988-12-26 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
US5233261A (en) * | 1991-12-23 | 1993-08-03 | Leybold Inficon Inc. | Buffered quartz crystal |
US5325012A (en) * | 1989-09-19 | 1994-06-28 | Hitachi, Ltd | Bonded type piezoelectric apparatus, method for manufacturing the same and bonded type piezoelectric element |
JPH0722894A (en) * | 1993-06-30 | 1995-01-24 | Rohm Co Ltd | Ceramic oscillation element and piezoelectric oscillator using the same |
US5818151A (en) * | 1995-02-14 | 1998-10-06 | Murata Manufacturing Co., Ltd. | Electrode for electronic component |
EP0897216A2 (en) * | 1997-08-11 | 1999-02-17 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Piezoelectric resonator, its manufacturing method and its use as a sensor for measuring the concentration of a constituent in a fluid and/or defining the physical properties of the fluid |
US6196059B1 (en) * | 1997-08-11 | 2001-03-06 | Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Piezoelectric resonator, process for the fabrication thereof including its use as a sensor element for the determination of the concentration of a substance contained in a liquid and/or for the determination of the physical properties of the liquid |
US6218763B1 (en) * | 1998-08-25 | 2001-04-17 | Murata Manufacturing Co., Ltd. | Surface acoustic wave resonator, filter, duplexer and communication apparatus |
JP2003046365A (en) * | 2001-08-01 | 2003-02-14 | Sumitomo Metal Mining Co Ltd | Two-layer electrode film for crystal vibrator |
US6541898B2 (en) * | 2000-11-02 | 2003-04-01 | Fujitsu Limited | Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method |
JP2005136801A (en) * | 2003-10-31 | 2005-05-26 | Kyocera Kinseki Corp | Electrode structure for piezoelectric vibrator |
JP2005348082A (en) * | 2004-06-03 | 2005-12-15 | Nippon Dempa Kogyo Co Ltd | Quartz resonator |
EP1635458A1 (en) * | 2003-06-17 | 2006-03-15 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
JP2006101244A (en) * | 2004-09-29 | 2006-04-13 | Kyocera Kinseki Corp | Piezoelectric vibrator, and manufacturing method therefor |
JP2010183539A (en) * | 2009-02-09 | 2010-08-19 | Seiko Instruments Inc | Piezoelectric vibration piece, piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, and electronic equipment and radio wave clock |
JP2010219992A (en) * | 2009-03-18 | 2010-09-30 | Seiko Epson Corp | Vibrating reed and vibrator |
JP2011250390A (en) * | 2010-04-27 | 2011-12-08 | Nippon Dempa Kogyo Co Ltd | Piezoelectric device |
CN103825572A (en) * | 2012-11-19 | 2014-05-28 | 日本电波工业株式会社 | Piezoelectric device |
-
1978
- 1978-04-06 JP JP4052778A patent/JPS54132187A/en active Pending
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4339683A (en) * | 1980-02-04 | 1982-07-13 | The United States Of America As Represented By The Secretary Of The Navy | Electrical connection |
US4468582A (en) * | 1982-04-20 | 1984-08-28 | Fujitsu Limited | Piezoelectric resonator chip and trimming method for adjusting the frequency thereof |
JPS63316912A (en) * | 1987-06-19 | 1988-12-26 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
US5325012A (en) * | 1989-09-19 | 1994-06-28 | Hitachi, Ltd | Bonded type piezoelectric apparatus, method for manufacturing the same and bonded type piezoelectric element |
US5233261A (en) * | 1991-12-23 | 1993-08-03 | Leybold Inficon Inc. | Buffered quartz crystal |
JPH0722894A (en) * | 1993-06-30 | 1995-01-24 | Rohm Co Ltd | Ceramic oscillation element and piezoelectric oscillator using the same |
US5818151A (en) * | 1995-02-14 | 1998-10-06 | Murata Manufacturing Co., Ltd. | Electrode for electronic component |
EP0897216A3 (en) * | 1997-08-11 | 2004-03-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Piezoelectric resonator, its manufacturing method and its use as a sensor for measuring the concentration of a constituent in a fluid and/or defining the physical properties of the fluid |
US6196059B1 (en) * | 1997-08-11 | 2001-03-06 | Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Piezoelectric resonator, process for the fabrication thereof including its use as a sensor element for the determination of the concentration of a substance contained in a liquid and/or for the determination of the physical properties of the liquid |
EP0897216A2 (en) * | 1997-08-11 | 1999-02-17 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Piezoelectric resonator, its manufacturing method and its use as a sensor for measuring the concentration of a constituent in a fluid and/or defining the physical properties of the fluid |
US6218763B1 (en) * | 1998-08-25 | 2001-04-17 | Murata Manufacturing Co., Ltd. | Surface acoustic wave resonator, filter, duplexer and communication apparatus |
US6541898B2 (en) * | 2000-11-02 | 2003-04-01 | Fujitsu Limited | Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method |
US6744183B2 (en) | 2000-11-02 | 2004-06-01 | Fujitsu Limited | Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method |
JP2003046365A (en) * | 2001-08-01 | 2003-02-14 | Sumitomo Metal Mining Co Ltd | Two-layer electrode film for crystal vibrator |
EP1635458A1 (en) * | 2003-06-17 | 2006-03-15 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
EP1635458A4 (en) * | 2003-06-17 | 2008-04-30 | Murata Manufacturing Co | Surface acoustic wave device |
JP2005136801A (en) * | 2003-10-31 | 2005-05-26 | Kyocera Kinseki Corp | Electrode structure for piezoelectric vibrator |
JP2005348082A (en) * | 2004-06-03 | 2005-12-15 | Nippon Dempa Kogyo Co Ltd | Quartz resonator |
JP2006101244A (en) * | 2004-09-29 | 2006-04-13 | Kyocera Kinseki Corp | Piezoelectric vibrator, and manufacturing method therefor |
JP2010183539A (en) * | 2009-02-09 | 2010-08-19 | Seiko Instruments Inc | Piezoelectric vibration piece, piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, and electronic equipment and radio wave clock |
JP2010219992A (en) * | 2009-03-18 | 2010-09-30 | Seiko Epson Corp | Vibrating reed and vibrator |
JP2011250390A (en) * | 2010-04-27 | 2011-12-08 | Nippon Dempa Kogyo Co Ltd | Piezoelectric device |
CN103825572A (en) * | 2012-11-19 | 2014-05-28 | 日本电波工业株式会社 | Piezoelectric device |
JP2014103505A (en) * | 2012-11-19 | 2014-06-05 | Nippon Dempa Kogyo Co Ltd | Piezoelectric device |
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