JP2005322873A5 - - Google Patents
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- Publication number
- JP2005322873A5 JP2005322873A5 JP2004273645A JP2004273645A JP2005322873A5 JP 2005322873 A5 JP2005322873 A5 JP 2005322873A5 JP 2004273645 A JP2004273645 A JP 2004273645A JP 2004273645 A JP2004273645 A JP 2004273645A JP 2005322873 A5 JP2005322873 A5 JP 2005322873A5
- Authority
- JP
- Japan
- Prior art keywords
- roller
- stage
- priming
- processing
- coating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004273645A JP4386430B2 (ja) | 2004-04-07 | 2004-09-21 | 塗布膜形成装置 |
TW094110774A TWI260686B (en) | 2004-04-07 | 2005-04-04 | Coating film forming apparatus |
KR1020050028560A KR101069494B1 (ko) | 2004-04-07 | 2005-04-06 | 도포막형성장치 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004113023 | 2004-04-07 | ||
JP2004273645A JP4386430B2 (ja) | 2004-04-07 | 2004-09-21 | 塗布膜形成装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005322873A JP2005322873A (ja) | 2005-11-17 |
JP2005322873A5 true JP2005322873A5 (fr) | 2006-10-05 |
JP4386430B2 JP4386430B2 (ja) | 2009-12-16 |
Family
ID=35469892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004273645A Active JP4386430B2 (ja) | 2004-04-07 | 2004-09-21 | 塗布膜形成装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4386430B2 (fr) |
KR (1) | KR101069494B1 (fr) |
TW (1) | TWI260686B (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100803147B1 (ko) * | 2007-04-04 | 2008-02-14 | 세메스 주식회사 | 도포장치 및 이를 이용한 처리액의 도포 방법 |
KR100840528B1 (ko) | 2007-04-13 | 2008-06-23 | 주식회사 케이씨텍 | 슬릿 코터용 예비토출장치 |
KR200456618Y1 (ko) * | 2007-05-07 | 2011-11-09 | 주식회사 케이씨텍 | 슬릿 코터용 예비토출장치 |
KR100969347B1 (ko) | 2009-09-07 | 2010-07-09 | 한국기계연구원 | 멀티 코터 및 이를 이용한 코팅 방법과 롤 프린팅 방법 |
WO2013015157A1 (fr) * | 2011-07-27 | 2013-01-31 | 住友重機械工業株式会社 | Dispositif et procédé de production de substrat |
JP5912403B2 (ja) * | 2011-10-21 | 2016-04-27 | 東京エレクトロン株式会社 | 塗布処理装置 |
KR101744512B1 (ko) * | 2016-02-04 | 2017-06-20 | 황중국 | 양면 코팅장치 |
CN117184835A (zh) * | 2022-05-31 | 2023-12-08 | 上海德沪涂膜设备有限公司 | 涂布设备 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11169769A (ja) * | 1997-12-08 | 1999-06-29 | Toray Ind Inc | 塗布装置及び塗布方法並びにカラーフィルタの製造装置及び製造方法 |
JP2001070858A (ja) * | 1999-07-07 | 2001-03-21 | Canon Inc | 塗料の塗工装置および塗工方法 |
-
2004
- 2004-09-21 JP JP2004273645A patent/JP4386430B2/ja active Active
-
2005
- 2005-04-04 TW TW094110774A patent/TWI260686B/zh not_active IP Right Cessation
- 2005-04-06 KR KR1020050028560A patent/KR101069494B1/ko active IP Right Grant
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