JP2005311030A - 基板処理装置 - Google Patents

基板処理装置 Download PDF

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Publication number
JP2005311030A
JP2005311030A JP2004125330A JP2004125330A JP2005311030A JP 2005311030 A JP2005311030 A JP 2005311030A JP 2004125330 A JP2004125330 A JP 2004125330A JP 2004125330 A JP2004125330 A JP 2004125330A JP 2005311030 A JP2005311030 A JP 2005311030A
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JP
Japan
Prior art keywords
substrate
processing apparatus
processing
transfer
loader
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Pending
Application number
JP2004125330A
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English (en)
Japanese (ja)
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JP2005311030A5 (enExample
Inventor
Eijiro Sakamoto
本 英 二 郎 坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
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Hirata Corp
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Priority to JP2004125330A priority Critical patent/JP2005311030A/ja
Publication of JP2005311030A publication Critical patent/JP2005311030A/ja
Publication of JP2005311030A5 publication Critical patent/JP2005311030A5/ja
Pending legal-status Critical Current

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2004125330A 2004-04-21 2004-04-21 基板処理装置 Pending JP2005311030A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004125330A JP2005311030A (ja) 2004-04-21 2004-04-21 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004125330A JP2005311030A (ja) 2004-04-21 2004-04-21 基板処理装置

Publications (2)

Publication Number Publication Date
JP2005311030A true JP2005311030A (ja) 2005-11-04
JP2005311030A5 JP2005311030A5 (enExample) 2007-07-26

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ID=35439451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004125330A Pending JP2005311030A (ja) 2004-04-21 2004-04-21 基板処理装置

Country Status (1)

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JP (1) JP2005311030A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010056375A (ja) * 2008-08-29 2010-03-11 Tokyo Electron Ltd 処理システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010056375A (ja) * 2008-08-29 2010-03-11 Tokyo Electron Ltd 処理システム

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