JP2005311030A5 - - Google Patents
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- Publication number
- JP2005311030A5 JP2005311030A5 JP2004125330A JP2004125330A JP2005311030A5 JP 2005311030 A5 JP2005311030 A5 JP 2005311030A5 JP 2004125330 A JP2004125330 A JP 2004125330A JP 2004125330 A JP2004125330 A JP 2004125330A JP 2005311030 A5 JP2005311030 A5 JP 2005311030A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing apparatus
- processing
- transfer
- development
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012545 processing Methods 0.000 claims description 100
- 239000000758 substrate Substances 0.000 claims description 80
- 238000012546 transfer Methods 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 25
- 238000011161 development Methods 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004125330A JP2005311030A (ja) | 2004-04-21 | 2004-04-21 | 基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004125330A JP2005311030A (ja) | 2004-04-21 | 2004-04-21 | 基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005311030A JP2005311030A (ja) | 2005-11-04 |
| JP2005311030A5 true JP2005311030A5 (enExample) | 2007-07-26 |
Family
ID=35439451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004125330A Pending JP2005311030A (ja) | 2004-04-21 | 2004-04-21 | 基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005311030A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4954162B2 (ja) * | 2008-08-29 | 2012-06-13 | 東京エレクトロン株式会社 | 処理システム |
-
2004
- 2004-04-21 JP JP2004125330A patent/JP2005311030A/ja active Pending
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