JP2005308691A - 超音波探触子及び超音波検査装置 - Google Patents
超音波探触子及び超音波検査装置 Download PDFInfo
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- JP2005308691A JP2005308691A JP2004129821A JP2004129821A JP2005308691A JP 2005308691 A JP2005308691 A JP 2005308691A JP 2004129821 A JP2004129821 A JP 2004129821A JP 2004129821 A JP2004129821 A JP 2004129821A JP 2005308691 A JP2005308691 A JP 2005308691A
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- 239000000523 sample Substances 0.000 title claims abstract description 80
- 238000007689 inspection Methods 0.000 title claims description 38
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- 239000002184 metal Substances 0.000 claims abstract description 48
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 35
- 239000000956 alloy Substances 0.000 claims abstract description 35
- 238000002844 melting Methods 0.000 claims abstract description 11
- 230000008018 melting Effects 0.000 claims abstract description 11
- 229910000611 Zinc aluminium Inorganic materials 0.000 claims abstract description 4
- HXFVOUUOTHJFPX-UHFFFAOYSA-N alumane;zinc Chemical compound [AlH3].[Zn] HXFVOUUOTHJFPX-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910000679 solder Inorganic materials 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 17
- 239000000853 adhesive Substances 0.000 claims description 13
- 230000001070 adhesive effect Effects 0.000 claims description 13
- 230000005496 eutectics Effects 0.000 claims description 7
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 4
- 230000001902 propagating effect Effects 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 2
- 239000010962 carbon steel Substances 0.000 claims description 2
- 238000005304 joining Methods 0.000 abstract description 14
- 238000005476 soldering Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 description 47
- 229910007570 Zn-Al Inorganic materials 0.000 description 14
- 230000007547 defect Effects 0.000 description 11
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
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- 238000012545 processing Methods 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000005219 brazing Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 3
- 238000010587 phase diagram Methods 0.000 description 3
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- 239000000126 substance Substances 0.000 description 3
- 229910001930 tungsten oxide Inorganic materials 0.000 description 3
- 238000005336 cracking Methods 0.000 description 2
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- 238000012360 testing method Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
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- 229910018459 Al—Ge Inorganic materials 0.000 description 1
- 229910015367 Au—Sb Inorganic materials 0.000 description 1
- 229910015365 Au—Si Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- KAPYVWKEUSXLKC-UHFFFAOYSA-N [Sb].[Au] Chemical compound [Sb].[Au] KAPYVWKEUSXLKC-UHFFFAOYSA-N 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 238000011156 evaluation Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- -1 zinc-aluminum-germanium Chemical compound 0.000 description 1
Images
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
【解決手段】 圧電素子1と前面板となる金属板2を備えた超音波探触子において、圧電素子1と金属板2の接合に、融点が350℃以上のはんだ合金、例えば亜鉛−アルミニウム合金3を用い、これにより接合時の温度を抑え、熱歪みの影響を最小限にし、歩留まりを向上させたもの。
【選択図】 図2
Description
2、2A:金属板(前面板となるもの)
3:Zn―Al合金
4a、4b:電極
5:リード線
6a、6b:ハンダ付け部
7:封止部
8:ケーブル
9:金属ケース
10a、10b:ハンダ付け部
12:超音波検査装置
13:被検査体
14、15:斜角超音波探触子
16:欠陥(根本部分)
17:欠陥(先端部分)
18、19:反射波
20:クリーピング波
21:接触媒質
28:超音波伝達部(超音波シューとして機能する部材)
Claims (6)
- 圧電振動子の超音波送受信面に金属板を備えた超音波探触子において、
前記圧電振動子と前記金属板が、融点が300℃以上450℃以下のはんだ合金で接合されていることを特徴とする超音波探触子。 - 請求項1に記載の超音波探触子において、
前記はんだ合金が、共晶の亜鉛−アルミニウム系合金であることを特徴とする超音波探触子。 - 請求項1に記載の超音波探触子において、
前記圧電振動子が、ニオブ酸リチウムとニオブ酸鉛の何れかで構成されていることを特徴とする超音波探触子。 - 請求項1に記載の超音波探触子において、
前記金属板が、ステンレス材、チタン材、炭素鋼材の何れかの金属材であることを特徴とする超音波探触子。 - 請求項1〜請求項4に記載の何れかの超音波探触子において、
前記圧電振動子の電極に対するリード線の接続に、融点が300℃以上450℃以下のはんだ合金による接合と有機系導電性接着剤による接合及び無機系導電性接着剤による接合の何れが用いられていることを特徴とする超音波探触子。 - 被検査体中を伝播するクリーピング波を検出して超音波探触子と超音波伝播の健全性を確認するようにした超音波検査装置において、
前記超音波探触子の圧電振動子と金属板が、融点が300℃以上450℃以下のはんだ合金で接合されていることを特徴とする超音波検査装置
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JP2004129821A JP4388409B2 (ja) | 2004-04-26 | 2004-04-26 | 超音波検査装置 |
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JP2005308691A true JP2005308691A (ja) | 2005-11-04 |
JP4388409B2 JP4388409B2 (ja) | 2009-12-24 |
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008047971A (ja) * | 2006-08-10 | 2008-02-28 | Hitachi Ltd | アレイ型超音波探触子及び探傷装置 |
JP2008218783A (ja) * | 2007-03-06 | 2008-09-18 | Ritsumeikan | 圧電素子構造、モニタリング装置、及び、圧電素子構造の製造方法 |
WO2009050881A1 (ja) * | 2007-10-15 | 2009-04-23 | Panasonic Corporation | 超音波探触子 |
JP2010066064A (ja) * | 2008-09-09 | 2010-03-25 | Nitto Denko Corp | 空間電荷分布測定装置、及びその装置を用いた空間電荷分布測定方法、並びにその方法を用いて測定された高温用絶縁材料 |
JP2010271274A (ja) * | 2009-05-25 | 2010-12-02 | Mitsubishi Electric Corp | ガス絶縁機器の金属異物検出装置および金属異物検出装置の自己診断方法 |
EP2525218A1 (en) * | 2011-05-19 | 2012-11-21 | Hitachi-GE Nuclear Energy, Ltd. | Heat-resistant ultrasonic sensor and installation method thereof |
JP2013197541A (ja) * | 2012-03-22 | 2013-09-30 | Mitsubishi Heavy Ind Ltd | 超音波厚みセンサの製造方法 |
JP2014082655A (ja) * | 2012-10-17 | 2014-05-08 | Nippon Ceramic Co Ltd | 超音波送受信器 |
JP2015010950A (ja) * | 2013-06-28 | 2015-01-19 | 東日本旅客鉄道株式会社 | レール探傷装置及びレール探傷方法 |
JP2015142172A (ja) * | 2014-01-27 | 2015-08-03 | オリンパス株式会社 | 積層型超音波振動デバイス、積層型超音波振動デバイスの製造方法および超音波医療装置 |
JP2016161537A (ja) * | 2015-03-05 | 2016-09-05 | 三菱日立パワーシステムズ株式会社 | 薄膜超音波センサの設置方法及び超音波探傷装置 |
JP2017044601A (ja) * | 2015-08-27 | 2017-03-02 | 三菱重工業株式会社 | 超音波センサ及びその製造方法 |
GB2544108A (en) * | 2015-11-06 | 2017-05-10 | 3-Sci Ltd | Ultrasonic thickness gauge |
WO2019150952A1 (ja) * | 2018-02-01 | 2019-08-08 | 株式会社神戸製鋼所 | 欠陥検知方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5963603B2 (ja) | 2012-08-03 | 2016-08-03 | オリンパス株式会社 | 超音波振動デバイス、超音波振動デバイスの製造方法および超音波医療装置 |
-
2004
- 2004-04-26 JP JP2004129821A patent/JP4388409B2/ja not_active Expired - Lifetime
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008047971A (ja) * | 2006-08-10 | 2008-02-28 | Hitachi Ltd | アレイ型超音波探触子及び探傷装置 |
JP2008218783A (ja) * | 2007-03-06 | 2008-09-18 | Ritsumeikan | 圧電素子構造、モニタリング装置、及び、圧電素子構造の製造方法 |
JP5415274B2 (ja) * | 2007-10-15 | 2014-02-12 | パナソニック株式会社 | 超音波探触子 |
WO2009050881A1 (ja) * | 2007-10-15 | 2009-04-23 | Panasonic Corporation | 超音波探触子 |
US8834377B2 (en) | 2007-10-15 | 2014-09-16 | Konica Minolta, Inc. | Ultrasonic probe |
JP2010066064A (ja) * | 2008-09-09 | 2010-03-25 | Nitto Denko Corp | 空間電荷分布測定装置、及びその装置を用いた空間電荷分布測定方法、並びにその方法を用いて測定された高温用絶縁材料 |
JP2010271274A (ja) * | 2009-05-25 | 2010-12-02 | Mitsubishi Electric Corp | ガス絶縁機器の金属異物検出装置および金属異物検出装置の自己診断方法 |
EP2525218A1 (en) * | 2011-05-19 | 2012-11-21 | Hitachi-GE Nuclear Energy, Ltd. | Heat-resistant ultrasonic sensor and installation method thereof |
JP2012244369A (ja) * | 2011-05-19 | 2012-12-10 | Hitachi-Ge Nuclear Energy Ltd | 耐熱超音波センサ及びその設置方法 |
US9304113B2 (en) | 2011-05-19 | 2016-04-05 | Hitachi-Ge Nuclear Energy, Ltd. | Heat-resistant ultrasonic sensor and installation method thereof |
JP2013197541A (ja) * | 2012-03-22 | 2013-09-30 | Mitsubishi Heavy Ind Ltd | 超音波厚みセンサの製造方法 |
JP2014082655A (ja) * | 2012-10-17 | 2014-05-08 | Nippon Ceramic Co Ltd | 超音波送受信器 |
JP2015010950A (ja) * | 2013-06-28 | 2015-01-19 | 東日本旅客鉄道株式会社 | レール探傷装置及びレール探傷方法 |
JP2015142172A (ja) * | 2014-01-27 | 2015-08-03 | オリンパス株式会社 | 積層型超音波振動デバイス、積層型超音波振動デバイスの製造方法および超音波医療装置 |
JP2016161537A (ja) * | 2015-03-05 | 2016-09-05 | 三菱日立パワーシステムズ株式会社 | 薄膜超音波センサの設置方法及び超音波探傷装置 |
JP2017044601A (ja) * | 2015-08-27 | 2017-03-02 | 三菱重工業株式会社 | 超音波センサ及びその製造方法 |
GB2544108A (en) * | 2015-11-06 | 2017-05-10 | 3-Sci Ltd | Ultrasonic thickness gauge |
WO2017077287A1 (en) * | 2015-11-06 | 2017-05-11 | 3-Sci Ltd | Ultrasonic thickness gauge to be used in a high temperature environment and process for attaching it |
GB2544108B (en) * | 2015-11-06 | 2020-04-29 | 3 Sci Ltd | Ultrasonic thickness gauge |
WO2019150952A1 (ja) * | 2018-02-01 | 2019-08-08 | 株式会社神戸製鋼所 | 欠陥検知方法 |
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