JP5524378B1 - 高温用超音波センサ - Google Patents
高温用超音波センサ Download PDFInfo
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- JP5524378B1 JP5524378B1 JP2013052874A JP2013052874A JP5524378B1 JP 5524378 B1 JP5524378 B1 JP 5524378B1 JP 2013052874 A JP2013052874 A JP 2013052874A JP 2013052874 A JP2013052874 A JP 2013052874A JP 5524378 B1 JP5524378 B1 JP 5524378B1
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 58
- 239000000463 material Substances 0.000 claims abstract description 57
- 229910052709 silver Inorganic materials 0.000 claims abstract description 48
- 239000004332 silver Substances 0.000 claims abstract description 47
- 239000010936 titanium Substances 0.000 claims abstract description 39
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 38
- 239000013078 crystal Substances 0.000 claims abstract description 32
- 239000011521 glass Substances 0.000 claims abstract description 27
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 46
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 238000010304 firing Methods 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 17
- 238000005259 measurement Methods 0.000 description 16
- 239000010410 layer Substances 0.000 description 15
- 238000011144 upstream manufacturing Methods 0.000 description 10
- 238000013016 damping Methods 0.000 description 9
- 239000012530 fluid Substances 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 238000005304 joining Methods 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910001018 Cast iron Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 239000011195 cermet Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 235000019353 potassium silicate Nutrition 0.000 description 3
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910018566 Al—Si—Mg Inorganic materials 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/662—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- Measuring Volume Flow (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
【解決手段】圧電振動子1は、LNの結晶のY軸に直交する面をX軸を中心にして36°±2°回転して得られる面(Y軸36°カット面)を出力面とする。超音波センサは、さらに、チタンからなる遅延材3と、出力面に遅延材3の一方の面を接合させる接合層2と、を備える。接合層2は、銀とフリットガラスとからなり、フリットガラスの線膨張率を5×10-6 K-1から15×10-6 K-1の範囲とする。
【選択図】 図2
Description
(L/v)>(N/f)
の関係を満たさなければならない。
2 接合層
3 チタン遅延材
4 カプラント
20 超音波センサ
21 配管
22 スプールピース部
23 スプールピース
Claims (9)
- ニオブ酸リチウムからなり、ニオブ酸リチウムの結晶のY軸に直交する面をX軸を中心にして36°±2°回転して得られる面を出力面とする圧電振動子と、
チタンからなる遅延材と、
前記出力面に前記遅延材の一方の面を接合させる接合層と、
を備え、
前記接合層は、銀とフリットガラスとからなり、
前記フリットガラスの線膨張率が5×10-6 K-1から15×10-6 K-1の範囲にある、超音波センサ。 - 前記遅延材の他方の面に、銀を含むカプラント層を有する、請求項1に記載の超音波センサ。
- 前記カプラント層は、銀とフリットガラスとからなり、
前記フリットガラスの線膨張率が5×10-6 K-1から15×10-6 K-1の範囲にある
、請求項2に記載の超音波センサ。 - 前記接合層における前記銀と前記フリットガラスとの質量比が79:2.3から82:2.5の範囲にある、請求項1乃至3のいずれか1項に記載の超音波センサ。
- 前記遅延材は、不可避不純物を含む純チタンからなる、請求項1乃至4のいずれか1項に記載の超音波センサ。
- 前記遅延材の長さをL、前記遅延材における音速をv、前記超音波センサの使用周波数をf、前記超音波センサを駆動するバースト波における波の数をNとして、
(L/v)>(N/f)
の関係を満たす、請求項1乃至5のいずれか1項に記載の超音波センサ。 - ニオブ酸リチウムを圧電振動子として有する超音波センサの製造方法であって、
ニオブ酸リチウムの結晶におけるY軸に直交する面をX軸を中心にして36°±2°回転して得られる面を出力面として、少なくとも前記出力面に銀ペーストを塗布して焼成することにより圧電振動子を形成する段階と、
チタンからなる遅延材の相互に対向する一方の面と他方の面とに銀ペーストを塗布する段階と、
前記遅延材の前記一方の面と焼成後の前記圧電振動子の前記出力面とを当接させ、その後、少なくとも所定の温度以上では不活性ガス雰囲気下となるようにして焼成を行う段階と、
を有し、
前記出力面と前記一方の面に塗布される銀ペーストは、銀とフリットガラスとを含み、 前記フリットガラスの線膨張率が5×10-6 K-1から15×10-6 K-1の範囲にある、製造方法。 - 前記他方の面に塗布される銀ペーストの組成を前記一方の面に塗布される銀ペーストと同一のものとする、請求項7に記載の製造方法。
- 前記銀ペーストは有機バインダーを含むとともに、前記銀ペーストにおける前記銀と前記フリットガラスとの質量比が79:2.3から82:2.5の範囲にある、請求項7または8に記載の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013052874A JP5524378B1 (ja) | 2013-03-15 | 2013-03-15 | 高温用超音波センサ |
KR1020130031672A KR101287060B1 (ko) | 2013-03-15 | 2013-03-25 | 고온용 초음파 센서 및 그 제조방법 |
IN7854DEN2014 IN2014DN07854A (ja) | 2013-03-15 | 2014-03-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013052874A JP5524378B1 (ja) | 2013-03-15 | 2013-03-15 | 高温用超音波センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5524378B1 true JP5524378B1 (ja) | 2014-06-18 |
JP2014178231A JP2014178231A (ja) | 2014-09-25 |
Family
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Family Applications (1)
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JP2013052874A Active JP5524378B1 (ja) | 2013-03-15 | 2013-03-15 | 高温用超音波センサ |
Country Status (3)
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JP (1) | JP5524378B1 (ja) |
KR (1) | KR101287060B1 (ja) |
IN (1) | IN2014DN07854A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102304458B1 (ko) | 2019-09-02 | 2021-09-24 | 한국파나메트릭스 주식회사 | 압전 단결정 소자를 이용한 초음파 센서 및 그 제조 방법 |
JP2023072292A (ja) * | 2021-11-12 | 2023-05-24 | 日清紡ホールディングス株式会社 | 波形整形装置および気体濃度測定装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005201838A (ja) * | 2004-01-19 | 2005-07-28 | Kaijo Corp | 高温流体測定用超音波センサ |
JP2009005383A (ja) * | 2008-08-04 | 2009-01-08 | Panasonic Corp | 超音波送受波器 |
JP2010249788A (ja) * | 2009-04-13 | 2010-11-04 | Kazumasa Onishi | 気体用超音波流量計 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1154531A (ja) * | 1997-07-31 | 1999-02-26 | Nec Kansai Ltd | セラミックパッケージ型圧電素子およびその製造方法 |
US7808156B2 (en) | 2006-03-02 | 2010-10-05 | Visualsonics Inc. | Ultrasonic matching layer and transducer |
KR20110079096A (ko) | 2009-12-31 | 2011-07-07 | 삼성전기주식회사 | 초음파 변환기 |
-
2013
- 2013-03-15 JP JP2013052874A patent/JP5524378B1/ja active Active
- 2013-03-25 KR KR1020130031672A patent/KR101287060B1/ko active IP Right Grant
-
2014
- 2014-03-25 IN IN7854DEN2014 patent/IN2014DN07854A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005201838A (ja) * | 2004-01-19 | 2005-07-28 | Kaijo Corp | 高温流体測定用超音波センサ |
JP2009005383A (ja) * | 2008-08-04 | 2009-01-08 | Panasonic Corp | 超音波送受波器 |
JP2010249788A (ja) * | 2009-04-13 | 2010-11-04 | Kazumasa Onishi | 気体用超音波流量計 |
Also Published As
Publication number | Publication date |
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JP2014178231A (ja) | 2014-09-25 |
KR101287060B1 (ko) | 2013-07-17 |
IN2014DN07854A (ja) | 2015-04-24 |
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