JP2005279376A5 - - Google Patents
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- Publication number
- JP2005279376A5 JP2005279376A5 JP2004094759A JP2004094759A JP2005279376A5 JP 2005279376 A5 JP2005279376 A5 JP 2005279376A5 JP 2004094759 A JP2004094759 A JP 2004094759A JP 2004094759 A JP2004094759 A JP 2004094759A JP 2005279376 A5 JP2005279376 A5 JP 2005279376A5
- Authority
- JP
- Japan
- Prior art keywords
- forming
- atmospheric pressure
- coating film
- pressure plasma
- film according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 15
- 238000000576 coating method Methods 0.000 claims 15
- 238000000034 method Methods 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 11
- 238000009832 plasma treatment Methods 0.000 claims 7
- 239000007788 liquid Substances 0.000 claims 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- 239000003570 air Substances 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004094759A JP2005279376A (ja) | 2004-03-29 | 2004-03-29 | 塗膜形成方法、および液晶表示装置用カラーフィルタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004094759A JP2005279376A (ja) | 2004-03-29 | 2004-03-29 | 塗膜形成方法、および液晶表示装置用カラーフィルタの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005279376A JP2005279376A (ja) | 2005-10-13 |
| JP2005279376A5 true JP2005279376A5 (enExample) | 2007-05-24 |
Family
ID=35178335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004094759A Pending JP2005279376A (ja) | 2004-03-29 | 2004-03-29 | 塗膜形成方法、および液晶表示装置用カラーフィルタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005279376A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008303232A (ja) * | 2007-06-05 | 2008-12-18 | Mitsubishi Plastics Inc | ポリエステルフィルム |
| JP2016049396A (ja) * | 2014-09-02 | 2016-04-11 | 株式会社オーク製作所 | 脱臭装置 |
| JP6655418B2 (ja) * | 2016-02-17 | 2020-02-26 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
| JP2019070766A (ja) * | 2017-10-11 | 2019-05-09 | シャープ株式会社 | 液晶パネルの製造方法 |
-
2004
- 2004-03-29 JP JP2004094759A patent/JP2005279376A/ja active Pending
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