JP2005268353A - 配線基板の製造方法 - Google Patents
配線基板の製造方法 Download PDFInfo
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- JP2005268353A JP2005268353A JP2004075561A JP2004075561A JP2005268353A JP 2005268353 A JP2005268353 A JP 2005268353A JP 2004075561 A JP2004075561 A JP 2004075561A JP 2004075561 A JP2004075561 A JP 2004075561A JP 2005268353 A JP2005268353 A JP 2005268353A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims description 30
- 229910000679 solder Inorganic materials 0.000 claims abstract description 70
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 239000000843 powder Substances 0.000 claims abstract description 32
- 238000007747 plating Methods 0.000 claims abstract description 26
- 239000012790 adhesive layer Substances 0.000 claims abstract description 11
- 230000000873 masking effect Effects 0.000 claims abstract description 4
- 239000004065 semiconductor Substances 0.000 claims description 62
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910020836 Sn-Ag Inorganic materials 0.000 claims description 5
- 229910020988 Sn—Ag Inorganic materials 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 238000010923 batch production Methods 0.000 abstract 1
- 239000011347 resin Substances 0.000 description 22
- 229920005989 resin Polymers 0.000 description 22
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
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- 230000004907 flux Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
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- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
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- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
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Abstract
【解決手段】 複数個取り用の基板30をワークとして、前記基板の表面に前記接続パッドおよびボンディングパッドとなるパッド16a、18aをパターン形成した後、前記接続パッドとなるパッド16aを遮蔽して、前記ボンディングパッドとなるパッド18aの表面にボンディング用のめっき36を施し、次いで、前記ボンディングパッドを形成した領域にマスク用のテープ42を粘着してボンディングパッド18を遮蔽した後、前記接続パッドとなるパッドの表面に粘着層50を被着させ、次いで、前記パッド16aの表面にはんだ粉52を付着させ、前記テープ42を剥離した後、リフローにより前記はんだ粉52を溶融してパッド16aにはんだ52aを被着させる。
【選択図】 図2
Description
図7は、基板14にフリップチップ接続用の接続パッド16とワイヤボンディング接続用のボンディングパッド18とが形成されている状態を示す。半導体素子10、12の搭載形態から、フリップチップ接続用の接続パッド16はボンディングパッド18の内側に位置することになる。
すなわち、接続パッド16ではパッドの表面にはんだが被着されるのに対して、ボンディングパッド18ではパッドの表面にボンディング用のめっき(たとえば、ニッケルめっきと金めっき)が施される。このため、従来は、基板14の表面に配線パターンと、接続パッド16およびボンディングパッド18となるパッドを形成した後、まず、ボンディングパッド18となるパッドにめっきを、次いで、接続パッド16となるパッドにはんだを被着するようにしている。
ところで、フリップチップ接続用の接続パッド16できわめて微細な間隔で形成するものにあっては、パッドにはんだを被着する際に、パッドの表面に粘着層を形成してはんだ粉をパッドに付着させ、はんだ粉を溶融させてパッドの表面にはんだを被着する方法がとられる。このような方法でパッドにはんだを被着させる場合には、ボンディングパッド18等の不要個所にはんだ粉が付着しないようにする必要があり、実際の量産工程では、ボンディングパッド18の表面を確実に被覆して、接続パッド16のみに確実にはんだを被着させることができる作業性の良い製造方法が求められる。
すなわち、 パッドの表面にはんだが被着されたフリップチップ接続用の接続パッドと、パッドの表面にめっきが施されたワイヤボンディング接続用のボンディングパッドとが設けられた配線基板の製造方法において、複数個取り用の基板をワークとして、前記基板の表面に前記接続パッドおよびボンディングパッドとなるパッドを形成した後、前記接続パッドとなるパッドを遮蔽して、前記ボンディングパッドとなるパッドの表面にボンディング用のめっきを施し、次いで、前記ボンディングパッドを形成した領域にマスク用のテープを粘着してボンディングパッドを遮蔽した後、前記接続パッドとなるパッドの表面に粘着層を被着させ、次いで、前記パッドの表面にはんだ粉を付着させ、前記テープを剥離した後、リフローにより前記はんだ粉を溶融してパッドにはんだを被着させることを特徴とする。
また、前記ワークの個々の半導体装置となる領域内で、外周側にワイヤボンディング接続用のボンディングパッドが配置され、ボンディングパッドが配置された内側にフリップチップ接続用の接続パッドとなるパッドが配置され、前記マスク用のテープとして、前記各領域で前記ボンディングパッドが配置された領域を遮蔽し、前記接続パッドとなるパッドが露出する開口孔が設けられたテープを使用することを特徴とする。
また、前記接続パッドとなるパッドにはんだ粉を付着させた後、ワークを加熱炉に収容して、はんだ粉をパッドに仮付けすることにより、パッドの表面に確実にはんだを被着することが可能となる。
また、前記ボンディングパッドとなるパッドに、ボンディング用にニッケルめっきと金めっきをこの順に施し、前記接続パッドとなるパッドに、Sn−Agからなるはんだ粉を付着させ、パッドの表面にSn−Agはんだを被着することを特徴とする。
図1、2は本発明に係る配線基板の製造工程を示す説明図である。図1(a)は、樹脂基板30の片面に銅箔32が被着された片面銅張り基板にレジストフィルムを被着し、レジストフィルムを露光および現像して、銅箔32の表面にレジストパターン34を形成した状態を示す。レジストパターン34は、所要の配線パターン、フリップチップ接続用の接続パッド16、およびワイヤボンディング用のボンディングパッド18のパターン部分を被覆するように形成されている。
図1(c)は、パッド18aの表面にめっき36を施して、ボンディングパッド18を形成した状態を示す。本実施形態では、めっき36として、ニッケルめっきと金めっきをこの順に施した。なお、パッド18aにめっきを施す際に、フリップチップ接続用のパッド16aにめっき液が付着しないよう、マスクで遮蔽してめっきした。このマスクとしては、たとえばめっきレジストを用いることができる。
本実施形態で使用したテープ42は基材が塩化ビニル系の樹脂からなり、粘着層がアクリル系の樹脂からなるものである。粘着層はボンディングパッド18に粘着剤が残ってもワイヤボンディングに支障のない材料によって形成されているが、テープ42とボンディングパッド18とを離間させるように粘着することでボンディングパッド18の表面に粘着剤を付着しにくくすることができる。
図5は、開口孔44を設けたマスク用のテープ42を樹脂基板30に粘着した状態を示す。開口孔44はボンディングパッド18の配置位置よりも一回り小さな矩形孔に形成されており、樹脂基板30に位置合わせしてマスク用のテープ42を粘着することにより、ワーク40の各々の区画で、ボンディングパッド18が遮蔽されフリップチップ接続用のパッド16aが露出する状態となる。
なお、マスク用のテープ42は、実際には樹脂フィルムからなるセパレータから剥離してワーク40に粘着して使用する。テープ42をソルダーレジスト38の表面に粘着することにより、ボンディングパッド18は外部からシールされた状態になる。
図2(d)は、リフロー工程ではんだ粉52を溶融させ、パッド16aの表面に溶融したはんだ52aを被着させた状態を示す。
図2(e)は、リフロー後、フラックス54を洗浄して、最終的に配線基板として得た状態を示す。この配線基板は、フリップチップ接続用の接続パッド16についてはパッド16aの表面にはんだ52aが被着され、ワイヤボンディング接続用のボンディングパッド18についてはパッド18aの表面に所要のめっき36が施されたものであり、これによってフリップチップ接続とワイヤボンディング接続によって半導体素子を搭載することが可能な配線基板として提供される。
なお、上述したはんだ粉を粘着層50を利用してパッド16aの表面に付着させ、リフローによってパッド16aの表面にはんだ52aを被着させる方法として、たとえば特開平7−7244号公報に記載されている方法を利用することができる。
とくに、テープ42を利用する場合は、テープ42と樹脂基板30とに位置決め用のマークや位置決め孔を設けることで高精度に位置合わせするといった操作が容易に可能となることから、所要の精度を満足して、作業性を向上させることが可能となり、半導体装置の量産に好適に利用することが可能となる。
上述したテープを使用する方法はこれらの問題がない点で優れており、実際の量産方法として好適に利用することができる方法として有効である。
14 基板
16 接続パッド
16a パッド
18 ボンディングパッド
18a パッド
20 バンプ
22 ボンディングワイヤ
30 樹脂基板
32 銅箔
34 レジストパターン
36 めっき
38 ソルダーレジスト
40 ワーク
42 テープ
44 開口孔
50 粘着層
52 はんだ粉
52a はんだ
54 フラックス
Claims (6)
- パッドの表面にはんだが被着されたフリップチップ接続用の接続パッドと、パッドの表面にめっきが施されたワイヤボンディング接続用のボンディングパッドとが設けられた配線基板の製造方法において、
複数個取り用の基板をワークとして、前記基板の表面に前記接続パッドおよびボンディングパッドとなるパッドを形成した後、
前記接続パッドとなるパッドを遮蔽して、前記ボンディングパッドとなるパッドの表面にボンディング用のめっきを施し、
次いで、前記ボンディングパッドを形成した領域にマスク用のテープを粘着してボンディングパッドを遮蔽した後、
前記接続パッドとなるパッドの表面に粘着層を被着させ、次いで、前記パッドの表面にはんだ粉を付着させ、
前記テープを剥離した後、リフローにより前記はんだ粉を溶融してパッドにはんだを被着させることを特徴とする配線基板の製造方法。 - 前記ワークが、短冊状に形成された基板に、個々の半導体装置となる領域が縦横に整列して形成されたものであり、
前記マスク用のテープとして、前記各々の半導体装置となる領域に合わせて開口孔がグリッド状に形成されたテープを使用することを特徴とする請求項1記載の配線基板の製造方法。 - 前記ワークの個々の半導体装置となる領域内で、外周側にワイヤボンディング接続用のボンディングパッドが配置され、ボンディングパッドが配置された内側にフリップチップ接続用の接続パッドとなるパッドが配置され、
前記マスク用のテープとして、前記各領域で前記ボンディングパッドが配置された領域を遮蔽し、前記接続パッドとなるパッドが露出する開口孔が設けられたテープを使用することを特徴とする請求項2記載の配線基板の製造方法。 - 前記接続パッドとなるパッドにはんだ粉を付着させた後、ワークを加熱炉に収容して、はんだ粉をパッドに仮付けすることを特徴とする請求項1記載の配線基板の製造方法。
- 前記ボンディングパッドとなるパッドに、ボンディング用にニッケルめっきと金めっきをこの順に施し、
前記接続パッドとなるパッドに、Sn−Agからなるはんだ粉を付着させ、パッドの表面にSn−Agはんだを被着することを特徴とする請求項1〜4のいずれか一項記載の配線基板の製造方法。 - 請求項1〜5のいずれか一項記載の配線基板の製造方法によって製造した配線基板に、2枚の半導体素子が積み重ねて搭載された半導体装置であって、
配線基板に対向する1段目の半導体素子がフリップチップ接続により、2段目の半導体素子がワイヤボンディング接続によって配線基板に接続されていることを特徴とする半導体装置。
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US11/079,741 US7160796B2 (en) | 2004-03-17 | 2005-03-14 | Method for manufacturing wiring board and semiconductor device |
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US7642130B2 (en) | 2006-06-20 | 2010-01-05 | Shinko Electric Industries Co., Ltd. | Manufacturing method of wiring substrate |
US8166648B2 (en) | 2008-03-03 | 2012-05-01 | Shinko Electric Industries Co., Ltd. | Method of manufacturing a wiring substrate |
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