JP2005265658A - 複数種のテスタに対応可能なプローブ装置 - Google Patents

複数種のテスタに対応可能なプローブ装置 Download PDF

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Publication number
JP2005265658A
JP2005265658A JP2004079510A JP2004079510A JP2005265658A JP 2005265658 A JP2005265658 A JP 2005265658A JP 2004079510 A JP2004079510 A JP 2004079510A JP 2004079510 A JP2004079510 A JP 2004079510A JP 2005265658 A JP2005265658 A JP 2005265658A
Authority
JP
Japan
Prior art keywords
probe
ring
card holder
card
probe device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004079510A
Other languages
English (en)
Japanese (ja)
Inventor
Masayuki Noguchi
政幸 野口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2004079510A priority Critical patent/JP2005265658A/ja
Priority to TW094106464A priority patent/TW200533923A/zh
Priority to PCT/JP2005/004698 priority patent/WO2005091006A1/ja
Priority to KR1020067019266A priority patent/KR100845349B1/ko
Priority to EP05726695.9A priority patent/EP1736787A4/en
Priority to CNB2005800016070A priority patent/CN100545666C/zh
Publication of JP2005265658A publication Critical patent/JP2005265658A/ja
Priority to US11/522,984 priority patent/US7323893B2/en
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2004079510A 2004-03-19 2004-03-19 複数種のテスタに対応可能なプローブ装置 Pending JP2005265658A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2004079510A JP2005265658A (ja) 2004-03-19 2004-03-19 複数種のテスタに対応可能なプローブ装置
TW094106464A TW200533923A (en) 2004-03-19 2005-03-03 Probe device capable of being used for plural kinds of testers
PCT/JP2005/004698 WO2005091006A1 (ja) 2004-03-19 2005-03-16 複数種のテスタに対応可能なプローブ装置
KR1020067019266A KR100845349B1 (ko) 2004-03-19 2005-03-16 복수종의 테스터에 대응 가능한 프로브 장치
EP05726695.9A EP1736787A4 (en) 2004-03-19 2005-03-16 Probe device capable of being used for plural kinds of testers
CNB2005800016070A CN100545666C (zh) 2004-03-19 2005-03-16 能够对应多种测试器的探针装置
US11/522,984 US7323893B2 (en) 2004-03-19 2006-09-19 Probe device capable of being used for plural kinds of testers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004079510A JP2005265658A (ja) 2004-03-19 2004-03-19 複数種のテスタに対応可能なプローブ装置

Publications (1)

Publication Number Publication Date
JP2005265658A true JP2005265658A (ja) 2005-09-29

Family

ID=34993841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004079510A Pending JP2005265658A (ja) 2004-03-19 2004-03-19 複数種のテスタに対応可能なプローブ装置

Country Status (7)

Country Link
US (1) US7323893B2 (enExample)
EP (1) EP1736787A4 (enExample)
JP (1) JP2005265658A (enExample)
KR (1) KR100845349B1 (enExample)
CN (1) CN100545666C (enExample)
TW (1) TW200533923A (enExample)
WO (1) WO2005091006A1 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008131047A (ja) * 2006-11-17 2008-06-05 Suss Microtec Test Systems Gmbh 標本支持台と標本支持台の使用の下で検査物質を検査する方法
JP2009200390A (ja) * 2008-02-25 2009-09-03 Kyodo:Kk プローブカード移載装置
WO2011013231A1 (ja) * 2009-07-30 2011-02-03 株式会社アドバンテスト プローブカード保持装置及びプローバ
JP2016524139A (ja) * 2013-05-14 2016-08-12 フォームファクター， インコーポレイテッド 交換可能プローブヘッドの自動取り付け及び取り外し
TWI583963B (zh) * 2016-04-18 2017-05-21 旺矽科技股份有限公司 探針卡
KR20200036744A (ko) * 2018-09-28 2020-04-07 가부시키가이샤 니혼 마이크로닉스 프로브 카드 지지장치

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6408500B1 (en) * 2000-09-15 2002-06-25 James Orsillo Method of retrofitting a probe station
US7471078B2 (en) * 2006-12-29 2008-12-30 Formfactor, Inc. Stiffener assembly for use with testing devices
KR101101535B1 (ko) * 2008-03-14 2012-01-02 송원호 프로브블록
WO2010035335A1 (ja) * 2008-09-26 2010-04-01 株式会社アドバンテスト テスト部ユニットおよびテストヘッド
CN101738575B (zh) * 2008-11-11 2013-08-21 京元电子股份有限公司 可换用不同探针卡的ic测试机台
JP2011064659A (ja) * 2009-09-21 2011-03-31 Tokyo Electron Ltd プローブカードのクランプ機構及び検査装置
JP2011089891A (ja) * 2009-10-22 2011-05-06 Micronics Japan Co Ltd 電気的接続装置及びこれを用いる試験装置
TWI415204B (zh) * 2010-04-28 2013-11-11 Wen Chyimr Chen 測試板
KR101101559B1 (ko) * 2010-10-06 2012-01-02 송원호 프로브블록의 실리콘전극기판 제조방법
JP5788767B2 (ja) * 2011-11-07 2015-10-07 株式会社日本マイクロニクス プローブブロックとそれを備えるプローブカード並びにプローブ装置
CN103207290A (zh) * 2012-01-12 2013-07-17 瑞统企业股份有限公司 改良的电路板的测试治具结构
JP2013246153A (ja) * 2012-05-29 2013-12-09 Micronics Japan Co Ltd プローブカード
KR101754175B1 (ko) * 2014-12-27 2017-07-05 싱크-테크 시스템 코포레이션 업그레이드 기능을 구비한 테스트 기기
KR102566685B1 (ko) * 2016-07-18 2023-08-14 삼성전자주식회사 프로브 카드용 클램핑 장치 및 이를 포함하는 프로브 카드
TWI620937B (zh) * 2017-04-17 2018-04-11 中華精測科技股份有限公司 微米細針吸取裝置及其使用方法
US11379004B2 (en) * 2018-08-08 2022-07-05 Hewlett-Packard Development Company, L.P. Adjustment control mechanisms of pogo pins
KR102689406B1 (ko) * 2018-11-16 2024-07-29 주식회사 기가레인 프로브카드용 공간변환부
TWM580255U (zh) 2019-01-25 2019-07-01 和碩聯合科技股份有限公司 旋鈕裝置
CN116774012B (zh) * 2023-08-15 2023-10-20 深圳市微特精密科技股份有限公司 一种ict测试夹具及测试装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299243A (ja) * 1987-05-29 1988-12-06 Tokyo Electron Ltd プロ−ブカ−ドアダプタ
JP2000150596A (ja) * 1998-11-10 2000-05-30 Tokyo Seimitsu Co Ltd プローバ
JP2000349128A (ja) * 1999-06-04 2000-12-15 Tokyo Seimitsu Co Ltd プローバ装置のプローバ側とテスタ側との接続方法及びその構造
JP2003344482A (ja) * 2002-05-29 2003-12-03 Tokyo Electron Ltd プローブカード搬送装置及びアダプタ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719817B2 (ja) * 1987-05-01 1995-03-06 東京エレクトロン株式会社 プロ−ブカ−ド自動交換方法
JPH0543244Y2 (enExample) 1987-09-30 1993-10-29
US5068601A (en) * 1991-02-11 1991-11-26 Credence Systems Corporation Dual function cam-ring system for DUT board parallel electrical inter-connection and prober/handler docking
TW273635B (enExample) * 1994-09-01 1996-04-01 Aesop
US6118290A (en) * 1997-06-07 2000-09-12 Tokyo Electron Limited Prober and method for cleaning probes provided therein
US6114869A (en) * 1998-05-21 2000-09-05 Cerprobe Corporation Method and apparatus for interfacing between automatic wafer probe machines, automatic testers, and probe cards
US6166553A (en) * 1998-06-29 2000-12-26 Xandex, Inc. Prober-tester electrical interface for semiconductor test
US6340895B1 (en) * 1999-07-14 2002-01-22 Aehr Test Systems, Inc. Wafer-level burn-in and test cartridge
US6408500B1 (en) * 2000-09-15 2002-06-25 James Orsillo Method of retrofitting a probe station

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299243A (ja) * 1987-05-29 1988-12-06 Tokyo Electron Ltd プロ−ブカ−ドアダプタ
JP2000150596A (ja) * 1998-11-10 2000-05-30 Tokyo Seimitsu Co Ltd プローバ
JP2000349128A (ja) * 1999-06-04 2000-12-15 Tokyo Seimitsu Co Ltd プローバ装置のプローバ側とテスタ側との接続方法及びその構造
JP2003344482A (ja) * 2002-05-29 2003-12-03 Tokyo Electron Ltd プローブカード搬送装置及びアダプタ

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008131047A (ja) * 2006-11-17 2008-06-05 Suss Microtec Test Systems Gmbh 標本支持台と標本支持台の使用の下で検査物質を検査する方法
JP2009200390A (ja) * 2008-02-25 2009-09-03 Kyodo:Kk プローブカード移載装置
WO2011013231A1 (ja) * 2009-07-30 2011-02-03 株式会社アドバンテスト プローブカード保持装置及びプローバ
JPWO2011013231A1 (ja) * 2009-07-30 2013-01-07 株式会社アドバンテスト プローブカード保持装置及びプローバ
JP2016524139A (ja) * 2013-05-14 2016-08-12 フォームファクター， インコーポレイテッド 交換可能プローブヘッドの自動取り付け及び取り外し
TWI583963B (zh) * 2016-04-18 2017-05-21 旺矽科技股份有限公司 探針卡
KR20200036744A (ko) * 2018-09-28 2020-04-07 가부시키가이샤 니혼 마이크로닉스 프로브 카드 지지장치
KR102129849B1 (ko) 2018-09-28 2020-08-05 가부시키가이샤 니혼 마이크로닉스 프로브 카드 지지장치

Also Published As

Publication number Publication date
US20070007979A1 (en) 2007-01-11
WO2005091006A1 (ja) 2005-09-29
EP1736787A1 (en) 2006-12-27
US7323893B2 (en) 2008-01-29
KR100845349B1 (ko) 2008-07-09
CN100545666C (zh) 2009-09-30
KR20060130660A (ko) 2006-12-19
TW200533923A (en) 2005-10-16
EP1736787A4 (en) 2014-04-02
CN1906496A (zh) 2007-01-31
TWI354794B (enExample) 2011-12-21

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