JP2005256119A - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
- Publication number
- JP2005256119A JP2005256119A JP2004071592A JP2004071592A JP2005256119A JP 2005256119 A JP2005256119 A JP 2005256119A JP 2004071592 A JP2004071592 A JP 2004071592A JP 2004071592 A JP2004071592 A JP 2004071592A JP 2005256119 A JP2005256119 A JP 2005256119A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- target
- thin film
- forming apparatus
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 title abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 303
- 239000010409 thin film Substances 0.000 claims abstract description 218
- 239000010408 film Substances 0.000 claims abstract description 157
- 238000005530 etching Methods 0.000 claims abstract description 97
- 239000000463 material Substances 0.000 claims abstract description 32
- 238000004544 sputter deposition Methods 0.000 claims abstract description 30
- 239000013077 target material Substances 0.000 claims description 99
- 239000007789 gas Substances 0.000 claims description 85
- 238000006243 chemical reaction Methods 0.000 claims description 76
- 238000010884 ion-beam technique Methods 0.000 claims description 75
- 150000002500 ions Chemical class 0.000 claims description 71
- 239000002245 particle Substances 0.000 claims description 47
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 24
- 230000015572 biosynthetic process Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- 229910052715 tantalum Inorganic materials 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical group [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 230000005674 electromagnetic induction Effects 0.000 claims description 4
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
- 238000009616 inductively coupled plasma Methods 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims description 2
- 238000000151 deposition Methods 0.000 abstract description 12
- 229910052751 metal Inorganic materials 0.000 description 42
- 239000002184 metal Substances 0.000 description 42
- 230000003287 optical effect Effects 0.000 description 36
- 229910052760 oxygen Inorganic materials 0.000 description 23
- 239000001301 oxygen Substances 0.000 description 19
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 16
- 229910001882 dioxygen Inorganic materials 0.000 description 16
- 239000007769 metal material Substances 0.000 description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 10
- 230000003647 oxidation Effects 0.000 description 10
- 238000007254 oxidation reaction Methods 0.000 description 10
- 238000002834 transmittance Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- -1 atom ions Chemical class 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 239000012788 optical film Substances 0.000 description 5
- 230000000087 stabilizing effect Effects 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000992 sputter etching Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000000869 ion-assisted deposition Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000009790 rate-determining step (RDS) Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Optical Filters (AREA)
- Polarising Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004071592A JP2005256119A (ja) | 2004-03-12 | 2004-03-12 | 成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004071592A JP2005256119A (ja) | 2004-03-12 | 2004-03-12 | 成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005256119A true JP2005256119A (ja) | 2005-09-22 |
| JP2005256119A5 JP2005256119A5 (enExample) | 2007-04-19 |
Family
ID=35082143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004071592A Pending JP2005256119A (ja) | 2004-03-12 | 2004-03-12 | 成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005256119A (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008076844A (ja) * | 2006-09-22 | 2008-04-03 | Canon Electronics Inc | 光学フィルタ |
| JP2009513983A (ja) * | 2005-10-31 | 2009-04-02 | アボット ダイアベティス ケア インコーポレイテッド | 分析物センサおよびその作成方法 |
| JP2009091603A (ja) * | 2007-10-04 | 2009-04-30 | Ulvac Japan Ltd | 光学薄膜の成膜装置及びその制御方法 |
| JP2013539498A (ja) * | 2010-01-29 | 2013-10-24 | ハウザー テクノ−コーティング ベー．フェー． | Ｈｉｐｉｍｓ電源を備えるコーティング装置 |
| US8665520B2 (en) | 2006-08-30 | 2014-03-04 | Canon Denshi Kabushiki Kaisha | Neutral density optical filter and image pickup apparatus |
| CN112981331A (zh) * | 2019-12-02 | 2021-06-18 | 佳能特机株式会社 | 成膜方法和成膜装置 |
-
2004
- 2004-03-12 JP JP2004071592A patent/JP2005256119A/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009513983A (ja) * | 2005-10-31 | 2009-04-02 | アボット ダイアベティス ケア インコーポレイテッド | 分析物センサおよびその作成方法 |
| US8795477B2 (en) | 2005-10-31 | 2014-08-05 | Abbott Diabetes Care Inc. | Methods of making, and, analyte sensor |
| US9290839B2 (en) | 2005-10-31 | 2016-03-22 | Abbott Diabetes Care Inc. | Method of making, and, analyte sensor |
| US8665520B2 (en) | 2006-08-30 | 2014-03-04 | Canon Denshi Kabushiki Kaisha | Neutral density optical filter and image pickup apparatus |
| JP2008076844A (ja) * | 2006-09-22 | 2008-04-03 | Canon Electronics Inc | 光学フィルタ |
| JP2009091603A (ja) * | 2007-10-04 | 2009-04-30 | Ulvac Japan Ltd | 光学薄膜の成膜装置及びその制御方法 |
| JP2013539498A (ja) * | 2010-01-29 | 2013-10-24 | ハウザー テクノ−コーティング ベー．フェー． | Ｈｉｐｉｍｓ電源を備えるコーティング装置 |
| CN112981331A (zh) * | 2019-12-02 | 2021-06-18 | 佳能特机株式会社 | 成膜方法和成膜装置 |
| CN112981331B (zh) * | 2019-12-02 | 2024-03-08 | 佳能特机株式会社 | 成膜方法和成膜装置 |
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