JP2005233966A5 - - Google Patents

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Publication number
JP2005233966A5
JP2005233966A5 JP2005044034A JP2005044034A JP2005233966A5 JP 2005233966 A5 JP2005233966 A5 JP 2005233966A5 JP 2005044034 A JP2005044034 A JP 2005044034A JP 2005044034 A JP2005044034 A JP 2005044034A JP 2005233966 A5 JP2005233966 A5 JP 2005233966A5
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JP
Japan
Prior art keywords
movable device
beams
beam path
axis
path segment
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JP2005044034A
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English (en)
Japanese (ja)
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JP2005233966A (ja
JP4880232B2 (ja
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Priority claimed from US10/783,199 external-priority patent/US7130056B2/en
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Publication of JP2005233966A publication Critical patent/JP2005233966A/ja
Publication of JP2005233966A5 publication Critical patent/JP2005233966A5/ja
Application granted granted Critical
Publication of JP4880232B2 publication Critical patent/JP4880232B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2005044034A 2004-02-20 2005-02-21 位置情報を取得するためのシステムおよび方法 Expired - Lifetime JP4880232B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/783,199 US7130056B2 (en) 2004-02-20 2004-02-20 System and method of using a side-mounted interferometer to acquire position information
US10/783199 2004-02-20

Publications (3)

Publication Number Publication Date
JP2005233966A JP2005233966A (ja) 2005-09-02
JP2005233966A5 true JP2005233966A5 (enExample) 2008-03-21
JP4880232B2 JP4880232B2 (ja) 2012-02-22

Family

ID=34861174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005044034A Expired - Lifetime JP4880232B2 (ja) 2004-02-20 2005-02-21 位置情報を取得するためのシステムおよび方法

Country Status (5)

Country Link
US (1) US7130056B2 (enExample)
JP (1) JP4880232B2 (enExample)
CN (1) CN1306241C (enExample)
DE (1) DE102004059400A1 (enExample)
NL (1) NL1028349C2 (enExample)

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CN103499278B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式四光轴线位移激光干涉仪校准方法与装置
CN103499284B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 双光轴回位及气浴式线位移激光干涉仪校准方法与装置
CN103499290B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 双光轴回位及气浴式角位移激光干涉仪校准方法与装置
CN103528499B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式双光轴线位移激光干涉仪校准方法与装置
CN103499289B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式四光轴角位移激光干涉仪校准方法与装置
CN103499285B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 双光轴补偿及气浴式线位移激光干涉仪校准方法与装置
CN103528504B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 回位补偿式四光轴线位移激光干涉仪校准方法与装置
CN103499288B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 基于三标准光轴气浴的线位移激光干涉仪校准方法与装置
CN103528509B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 基于双标准光轴气浴的角位移激光干涉仪校准方法与装置
CN103528502B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 回位补偿式双光轴角位移激光干涉仪校准方法与装置
CN103528506B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 四光轴回位及气浴式角位移激光干涉仪校准方法与装置
CN103499287B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 基于双标准光轴气浴的线位移激光干涉仪校准方法与装置
CN103528505B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 四光轴补偿及气浴式线位移激光干涉仪校准方法与装置
CN103528510B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 四光轴补偿及气浴式角位移激光干涉仪校准方法与装置
CN103528526B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式三光轴线位移激光干涉仪校准方法与装置
CN103499286B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 回位补偿式双光轴线位移激光干涉仪校准方法与装置
CN103499292B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 基于双标准光轴的角位移激光干涉仪校准方法与装置
CN103499281B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 四光轴回位及气浴式线位移激光干涉仪校准方法与装置
CN103528503B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 双光轴补偿及气浴式角位移激光干涉仪校准方法与装置
CN103499291B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 基于四标准光轴气浴的角位移激光干涉仪校准方法与装置
CN103499282B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 三光轴回位及气浴式线位移激光干涉仪校准方法与装置
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