JP4880232B2 - 位置情報を取得するためのシステムおよび方法 - Google Patents

位置情報を取得するためのシステムおよび方法 Download PDF

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Publication number
JP4880232B2
JP4880232B2 JP2005044034A JP2005044034A JP4880232B2 JP 4880232 B2 JP4880232 B2 JP 4880232B2 JP 2005044034 A JP2005044034 A JP 2005044034A JP 2005044034 A JP2005044034 A JP 2005044034A JP 4880232 B2 JP4880232 B2 JP 4880232B2
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Japan
Prior art keywords
beams
axis
interferometer
reflecting surfaces
stage
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Expired - Lifetime
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JP2005044034A
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Japanese (ja)
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JP2005233966A5 (enExample
JP2005233966A (ja
Inventor
ウィリアム・クレイ・シュルフター
ルイ・エフ・ミューラー
ダグラス・ピー・ウールヴァートン
ジェフリー・エー・ヤング
アラン・ビー・レイ
デイヴィッド・シー・チュー
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Agilent Technologies Inc
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Agilent Technologies Inc
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Publication of JP2005233966A5 publication Critical patent/JP2005233966A5/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2005044034A 2004-02-20 2005-02-21 位置情報を取得するためのシステムおよび方法 Expired - Lifetime JP4880232B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/783,199 US7130056B2 (en) 2004-02-20 2004-02-20 System and method of using a side-mounted interferometer to acquire position information
US10/783199 2004-02-20

Publications (3)

Publication Number Publication Date
JP2005233966A JP2005233966A (ja) 2005-09-02
JP2005233966A5 JP2005233966A5 (enExample) 2008-03-21
JP4880232B2 true JP4880232B2 (ja) 2012-02-22

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JP2005044034A Expired - Lifetime JP4880232B2 (ja) 2004-02-20 2005-02-21 位置情報を取得するためのシステムおよび方法

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US (1) US7130056B2 (enExample)
JP (1) JP4880232B2 (enExample)
CN (1) CN1306241C (enExample)
DE (1) DE102004059400A1 (enExample)
NL (1) NL1028349C2 (enExample)

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US7355719B2 (en) * 2005-08-16 2008-04-08 Agilent Technologies, Inc. Interferometer for measuring perpendicular translations
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JP2010122183A (ja) * 2008-11-21 2010-06-03 Sanyo Electric Co Ltd 物体検出装置および情報取得装置
CN102109769B (zh) * 2009-12-29 2012-10-03 上海微电子装备有限公司 工件台干涉仪和掩模台干涉仪的联调装置及联调方法
DE102013224381A1 (de) * 2012-12-20 2014-06-26 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN103499280B (zh) * 2013-10-11 2015-04-22 哈尔滨工业大学 回位补偿式三光轴线位移激光干涉仪校准方法与装置
CN103528508B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式双光轴角位移激光干涉仪校准方法与装置
CN103528500B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 基于四标准光轴的线位移激光干涉仪校准方法与装置
CN103499277B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 基于四标准光轴的角位移激光干涉仪校准方法与装置
CN103528507B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 回位补偿式四光轴角位移激光干涉仪校准方法与装置
CN103528525B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 三光轴补偿及气浴式线位移激光干涉仪校准方法与装置
CN103528501B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 基于四标准光轴气浴的线位移激光干涉仪校准方法与装置
CN103499278B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式四光轴线位移激光干涉仪校准方法与装置
CN103499284B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 双光轴回位及气浴式线位移激光干涉仪校准方法与装置
CN103499290B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 双光轴回位及气浴式角位移激光干涉仪校准方法与装置
CN103528499B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式双光轴线位移激光干涉仪校准方法与装置
CN103499289B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式四光轴角位移激光干涉仪校准方法与装置
CN103499285B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 双光轴补偿及气浴式线位移激光干涉仪校准方法与装置
CN103528504B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 回位补偿式四光轴线位移激光干涉仪校准方法与装置
CN103499288B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 基于三标准光轴气浴的线位移激光干涉仪校准方法与装置
CN103528509B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 基于双标准光轴气浴的角位移激光干涉仪校准方法与装置
CN103528502B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 回位补偿式双光轴角位移激光干涉仪校准方法与装置
CN103528506B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 四光轴回位及气浴式角位移激光干涉仪校准方法与装置
CN103499287B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 基于双标准光轴气浴的线位移激光干涉仪校准方法与装置
CN103528505B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 四光轴补偿及气浴式线位移激光干涉仪校准方法与装置
CN103528510B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 四光轴补偿及气浴式角位移激光干涉仪校准方法与装置
CN103528526B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 形貌补偿式三光轴线位移激光干涉仪校准方法与装置
CN103499286B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 回位补偿式双光轴线位移激光干涉仪校准方法与装置
CN103499292B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 基于双标准光轴的角位移激光干涉仪校准方法与装置
CN103499281B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 四光轴回位及气浴式线位移激光干涉仪校准方法与装置
CN103528503B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 双光轴补偿及气浴式角位移激光干涉仪校准方法与装置
CN103499291B (zh) * 2013-10-11 2015-02-11 哈尔滨工业大学 基于四标准光轴气浴的角位移激光干涉仪校准方法与装置
CN103499282B (zh) * 2013-10-11 2015-03-11 哈尔滨工业大学 三光轴回位及气浴式线位移激光干涉仪校准方法与装置
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US10126411B2 (en) 2015-03-13 2018-11-13 Continental Advanced Lidar Solutions Us, Llc. Beam steering LADAR sensor
CN106886143B (zh) * 2017-04-28 2019-08-09 电子科技大学 基于相位全息相关性的全息扫描空间距离提取方法
IL273651B2 (en) * 2017-10-04 2024-06-01 Asml Netherlands Bv Interferometric positioning device
US10697893B2 (en) * 2018-03-09 2020-06-30 The Boeing Company Specular variable angle absolute reflectance method and reflectometer
CN113490886A (zh) 2019-02-28 2021-10-08 Asml荷兰有限公司 平台系统和光刻装置
US11327013B2 (en) 2020-05-15 2022-05-10 The Boeing Company Specular variable angle absolute reflectance method and reflectometer

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Publication number Publication date
CN1306241C (zh) 2007-03-21
CN1657865A (zh) 2005-08-24
JP2005233966A (ja) 2005-09-02
NL1028349A1 (nl) 2005-08-23
US7130056B2 (en) 2006-10-31
US20050185193A1 (en) 2005-08-25
NL1028349C2 (nl) 2006-11-27
DE102004059400A1 (de) 2005-09-15

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